Grinding device for processing special quartz ring for semiconductor etching process

Abstract

The utility model relates to the technical field of quartz ring processing, and discloses a polishing device for processing a quartz ring special for a semiconductor etching process, which comprises a concave frame, the right side of the inner cavity of the concave frame is fixedly provided with a rotating motor through a support plate, and the output end of the rotating motor is fixedly connected with a frame body; by arranging the concave frame, the rotating motor, the frame body, the positioning plate, the positive and negative threaded rod, the rectangular plate, the limiting plate and the driving assembly, quartz rings of different sizes can be supported and limited, meanwhile, the quartz rings can be conveniently rotated, the quartz rings can be polished by arranging the screw rod, the concave plate and the polishing brush, and meanwhile, the polishing efficiency is improved. According to the quartz ring polishing device, the polishing position of the quartz ring polishing device is adjusted, the rectangular plate can be limited by arranging the limiting assembly, and quartz rings of different sizes can be supported, limited and polished by arranging the structure, so that the limitation of polishing is avoided, and meanwhile, the use requirements of customers can be met.

Description

Technical Field

[0001] The utility model relates to the technical field of quartz ring processing, in particular to a grinding device for processing quartz rings specially used in semiconductor etching technology. Background Art

[0002] Semiconductor etching process is a technology used to make semiconductor devices. Its purpose is to cut semiconductor materials into specific shapes and sizes in order to make various complex integrated circuit components, such as transistors, memories, transistor levels, etc. The etching process is a relatively complex and important one in semiconductor processes. It is a main process of graphic processing associated with photolithography. Quartz rings are used for this. When processing quartz rings, a grinding device is needed to grind them.

[0003] However, most of the existing grinding devices do not have a limit adjustment function when in use, resulting in the ability to only grind quartz rings of fixed sizes. This method results in limitations in grinding and thus cannot meet the usage needs of customers.

[0004] Therefore, those skilled in the art provide a grinding device for processing quartz rings specially used in semiconductor etching process to solve the problems raised in the above background technology. Utility Model Content

[0005] In order to improve the problem of lack of limit adjustment function, the utility model provides a grinding device for quartz ring processing specially used in semiconductor etching process.

[0006] The utility model provides a grinding device for quartz ring processing specially used in semiconductor etching process, which adopts the following technical scheme:

[0007] A grinding device for processing quartz rings specially used in semiconductor etching process comprises a concave frame, a rotating motor is fixedly installed on the right side of the inner cavity of the concave frame through a supporting plate, the output end of the rotating motor is fixedly connected to a frame body, the upper and lower positions on the left and right sides of the inner cavity of the frame body are fixedly connected to positioning plates, a positive and negative threaded rod is arranged between the two positioning plates, the top and bottom of the positive and negative threaded rod respectively penetrate the positioning plate and are threadedly connected to a rectangular plate, one end of the rectangular plate penetrates the frame body and is fixedly connected to a limiting plate, a limiting assembly is arranged on the left side of the rectangular plate, a driving assembly is arranged at the center of the left side of the inner cavity of the frame body, a screw is threadedly connected to the top of the concave frame, the bottom of the screw penetrates the concave frame and is rotatably connected to the concave plate through a bearing, a grinding brush is evenly and fixedly connected to the inner surface of the concave plate,

[0008] By adopting the above technical solution, the staff moves the quartz ring to the outside of the upper and lower limit plates, and then the staff rotates the handle, so that the handle drives the shaft to rotate, the shaft drives the main bevel gear to rotate, and the main bevel gear drives the slave bevel gear to rotate, so that the slave bevel gear drives the positive and negative threaded rods to rotate on the inner surface threads of the upper and lower rectangular plates, so that the upper and lower rectangular plates drive the limit plates to move, so that the limit plates drive the anti-slip pad to fit tightly with the connection between the quartz ring, thereby supporting and limiting the quartz ring;

[0009] Then, the staff rotates the screw so that the screw drives the concave plate to rotate and move downward on the inner surface of the concave frame. At the same time, the concave plate drives the polishing brush to move downward, so that the quartz ring is located in the inner cavity of the concave plate. At the same time, the polishing brush contacts the quartz ring. Next, the staff starts the external controller of the rotating motor so that the output end of the rotating motor drives the frame to rotate, and the frame drives the rectangular plates on the upper and lower sides to rotate. At the same time, the rectangular plate drives the limit plate and the anti-slip pad to rotate, so that the limit plate and the anti-slip pad drive the quartz ring to rotate. While the quartz ring rotates, the polishing brush polishes it, thereby realizing the support and limit polishing of quartz rings of different sizes.

[0010] Optionally, a stud is fixedly connected to the left side of the rectangular plate, the left end of the stud passes through the frame and is threadedly connected to a limiting nut, a rubber gasket is fixedly connected to one side of the limiting nut, and the outer surface of the rubber gasket fits tightly with the connection with the frame.

[0011] By adopting the above technical solution, the arrangement of the stud, the limiting nut and the rubber washer can guide and limit the rectangular plate.

[0012] Optionally, the driving assembly includes a rotating shaft, one end of the rotating shaft is rotatably connected to the connection with the frame through a bearing, the right end of the rotating shaft is fixedly connected to a main bevel gear, a slave bevel gear is sleeved at the center of the outer surface of the forward and reverse threaded rod, the main bevel gear and the slave bevel gear are meshed, and the left end of the rotating shaft passes through the frame and is fixedly connected to a rotating handle.

[0013] By adopting the above technical solution, the arrangement of the rotating shaft, the main bevel gear, the slave bevel gear and the rotating handle can facilitate the rotation of the forward and reverse threaded rods.

[0014] Optionally, movable openings for use with studs are provided at upper and lower positions on the left side of the frame, and the studs are located in the inner cavity of the movable openings.

[0015] By adopting the above technical solution and setting the movable opening, the stud can be guided and limited.

[0016] Optionally, the connection between the forward and reverse threaded rods and the positioning plate is rotatably connected via a bearing, and an anti-slip pad is fixedly connected to one side of the limiting plate.

[0017] By adopting the above technical solution and setting the anti-slip pad, the friction between the limit plate and the quartz ring can be increased, the stability of the support limit can be improved, and at the same time, the connection between the quartz ring and the limit plate can be protected.

[0018] Optionally, a guide plate is fixedly connected to the top of the right side of the concave plate, a guide groove for use with the guide plate is opened on the right side of the inner cavity of the concave frame, and the outer surface of the guide plate is slidably connected to the inner surface of the guide groove.

[0019] By adopting the above technical solution and setting the guide plate and the guide groove, the concave plate can be guided and limited.

[0020] Optionally, a mounting plate is fixedly connected to the bottom of the right side of the concave frame, and mounting holes are provided at the front and rear positions of the top of the mounting plate.

[0021] By adopting the above technical solution and setting of the mounting plate and the mounting holes, the device can be easily installed.

[0022] Optionally, the top and the bottom of the frame are both provided with through openings for use with the rectangular plate, and the outer surface of the rectangular plate is slidably connected to the connection between the through openings.

[0023] By adopting the above technical solution and setting of the through opening, the rectangular plate can be easily moved.

[0024] In summary, the utility model has the following beneficial effects:

[0025] 1. The utility model can support and limit quartz rings of different sizes by providing a concave frame, a rotating motor, a frame body, a positioning plate, positive and negative threaded rods, a rectangular plate, a limit plate and a driving assembly, and at the same time, it is convenient to rotate the quartz ring. By providing a screw rod, a concave plate and a grinding brush, the quartz ring can be polished and its grinding position can be adjusted. By providing a limit assembly, the rectangular plate can be limited. By providing the above structure, quartz rings of different sizes can be supported, limited and polished, thereby avoiding limitations in grinding and meeting the usage needs of customers.

[0026] 2. The utility model can facilitate the rotation of the forward and reverse threaded rods by setting the rotating shaft, the main bevel gear, the slave bevel gear and the rotating handle. The setting of the moving opening can guide and limit the stud. The setting of the anti-slip pad can increase the friction between the limit plate and the quartz ring and improve the stability of the support limit. At the same time, the connection between the quartz ring and the limit plate is protected. The setting of the guide plate and the guide groove can guide and limit the concave plate. The setting of the mounting plate and the mounting hole can facilitate the installation of the device. The setting of the through opening can facilitate the movement of the rectangular plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is a schematic diagram of the structure of the utility model.

[0028] Figure 2 It is a cross-sectional view of the frame structure of the utility model.

[0029] Figure 3 This utility model Figure 2 Enlarged view of structure A.

[0030] Figure 4 It is a three-dimensional diagram of the connection structure of the rectangular plate and the limiting plate of the utility model.

[0031] Figure 5 It is a three-dimensional diagram of the connection structure of the limit nut and the rubber gasket of the utility model.

[0032] Description of reference numerals:

[0033] 1. Concave frame; 2. Rotating motor; 3. Frame; 4. Positioning plate; 5. Positive and negative threaded rods; 6. Rectangular plate; 7. Limiting plate; 8. Limiting assembly; 801. Stud; 802. Limiting nut; 803. Rubber gasket; 9. Driving assembly; 901. Rotating shaft; 902. Main bevel gear; 903. Slave bevel gear; 10. Screw; 11. Concave plate; 12. Grinding brush; 13. Guide plate; 14. Guide groove. DETAILED DESCRIPTION

[0034] The following is combined with Figure 1-5 This application is described in further detail.

[0035] Embodiment 1:

[0036] Please refer to Figure 1-5, a grinding device for quartz ring processing specially used in semiconductor etching process, comprising a concave frame 1, a rotating motor 2 is fixedly installed on the right side of the inner cavity of the concave frame 1 through a supporting plate, the output end of the rotating motor 2 is fixedly connected to a frame body 3, and the upper and lower positions on the left and right sides of the inner cavity of the frame body 3 are fixedly connected to positioning plates 4, and a positive and negative threaded rod 5 is arranged between the two positioning plates 4, the top and bottom of the positive and negative threaded rod 5 respectively penetrate the positioning plate 4 and are threadedly connected to a rectangular plate 6, one end of the rectangular plate 6 penetrates the frame body 3 and is fixedly connected to a limiting plate 7, a limiting assembly 8 is arranged on the left side of the rectangular plate 6, and a driving assembly 9 is arranged at the center of the left side of the inner cavity of the frame body 3, a screw rod 10 is threadedly connected to the top of the concave frame 1, the bottom of the screw 10 penetrates the concave frame 1 and is rotatably connected to a concave plate 11 through a bearing, and a grinding brush 12 is evenly fixedly connected to the inner surface of the concave plate 11, and the driving assembly 9 comprises a rotating shaft 901, one end of the rotating shaft 901 is threadedly connected to the concave plate 11 through a bearing, and a grinding brush 12 is evenly fixedly connected to the inner surface of the concave plate 11, and the driving assembly 9 comprises a rotating shaft 901, and ... The bearing is rotatably connected to the connection between the frame 3, the right end of the rotating shaft 901 is fixedly connected to the main bevel gear 902, and the center of the outer surface of the positive and negative threaded rod 5 is sleeved with a slave bevel gear 903, the main bevel gear 902 and the slave bevel gear 903 are meshed, the left end of the rotating shaft 901 passes through the frame 3 and is fixedly connected to the rotating handle, the connection between the positive and negative threaded rod 5 and the positioning plate 4 is rotatably connected through the bearing, one side of the limiting plate 7 is fixedly connected to the anti-slip pad, the top of the right side of the concave plate 11 is fixedly connected to the guide plate 13, the right side of the inner cavity of the concave frame 1 is provided with a guide groove 14 used in conjunction with the guide plate 13, the outer surface of the guide plate 13 is slidably connected to the inner surface of the guide groove 14, the bottom of the right side of the concave frame 1 is fixedly connected to the mounting plate, and mounting holes are provided at the front and rear positions of the top of the mounting plate, the top and bottom of the frame 3 are provided with through openings used in conjunction with the rectangular plate 6, and the outer surface of the rectangular plate 6 is slidably connected to the connection between the through openings.

[0037] In this embodiment: the utility model can support and limit quartz rings of different sizes by setting a concave frame 1, a rotating motor 2, a frame body 3, a positioning plate 4, positive and negative threaded rods 5, a rectangular plate 6, a limit plate 7 and a driving assembly 9, and at the same time, it is convenient to rotate the quartz ring. By setting a screw 10, a concave plate 11 and a polishing brush 12, the quartz ring can be polished, and at the same time, its polishing position can be adjusted. By setting the above structure, quartz rings of different sizes can be supported and limited and polished, thereby avoiding limitations in polishing and meeting the customer's usage needs.

[0038] Embodiment 2:

[0039] Reference Figure 2 , Figure 3 , Figure 4 and Figure 5A stud 801 is fixedly connected to the left side of the rectangular plate 6, the left end of the stud 801 passes through the frame 3 and is threadedly connected to a limiting nut 802, a rubber gasket 803 is fixedly connected to one side of the limiting nut 802, the outer surface of the rubber gasket 803 fits tightly with the connection of the frame 3, and the upper and lower positions on the left side of the frame 3 are provided with movable openings for use with the stud 801, and the stud 801 is located in the inner cavity of the movable opening.

[0040] In this embodiment: the utility model can guide and limit the rectangular plate 6 by providing the stud 801, the limiting nut 802 and the rubber gasket 803, so as to prevent the rectangular plate 6 from moving during rotation and affecting the stability of the quartz ring support and limit.

[0041] The implementation principle of the utility model is as follows: when it is necessary to grind quartz rings of different sizes, the staff moves the quartz ring to the outside of the upper and lower limit plates 7, and then the staff rotates the handle, so that the handle drives the shaft 901 to rotate, the shaft 901 drives the main bevel gear 902 to rotate, the main bevel gear 902 drives the slave bevel gear 903 to rotate, so that the slave bevel gear 903 drives the positive and negative threaded rods 5 to rotate on the inner surface of the upper and lower rectangular plates 6, so that the upper and lower rectangular plates 6 drive the limit plates 7 to move, so that the limit plates 7 drive the anti-slip pad to fit tightly with the connection between the quartz ring, so as to support and limit the quartz ring;

[0042] Next, the staff rotates the limiting nut 802 in sequence, so that the limiting nut 802 drives the rubber gasket 803 to fit tightly at the connection between the outer surface thread of the stud 801 and the frame 3, thereby limiting the rectangular plate 6 to prevent the rectangular plate 6 from moving when rotating, thereby affecting the stability of the quartz ring support limit;

[0043] Then, the staff rotates the screw 10, so that the screw 10 drives the concave plate 11 to rotate and move downward on the inner surface of the concave frame 1. At the same time, the concave plate 11 drives the polishing brush 12 to move downward, so that the quartz ring is located in the inner cavity of the concave plate 11. At the same time, the polishing brush 12 contacts the quartz ring. Then, the staff energizes the plug of the rotating motor 2 and starts the external controller of the rotating motor 2, so that the output end of the rotating motor 2 drives the frame 3 to rotate, and the frame 3 drives the rectangular plates 6 on the upper and lower sides to rotate. At the same time, the rectangular plate 6 drives the limit plate 7 and the anti-slip pad to rotate, so that the limit plate 7 and the anti-slip pad drive the quartz ring to rotate. While the quartz ring rotates, the polishing brush 12 polishes it, thereby realizing the support and limit polishing of quartz rings of different sizes. The device is simple to operate and easy to use for polishing, thereby avoiding limitations in polishing and meeting the customer's usage needs.

[0044] The above are all preferred embodiments of the present utility model, and are not intended to limit the protection scope of the present utility model. Therefore, any equivalent changes made based on the structure, shape, and principle of the present utility model should be included in the protection scope of the present utility model.

Claims

1. A grinding device for processing quartz rings for semiconductor etching process, comprising a concave frame (1), characterized in that: A rotating motor (2) is fixedly installed on the right side of the inner cavity of the concave frame (1) through a support plate, the output end of the rotating motor (2) is fixedly connected to a frame body (3), and positioning plates (4) are fixedly connected to the upper and lower positions of the left and right sides of the inner cavity of the frame body (3), and a positive and negative threaded rod (5) is arranged between the two positioning plates (4), the top and bottom of the positive and negative threaded rod (5) respectively penetrate the positioning plate (4) and are threadedly connected to a rectangular plate (6), one end of the rectangular plate (6) penetrates the frame body (3) and is fixedly connected to a limiting plate (7), a limiting assembly (8) is arranged on the left side of the rectangular plate (6), and a driving assembly (9) is arranged at the center of the left side of the inner cavity of the frame body (3), the top of the concave frame (1) is threadedly connected to a screw rod (10), the bottom of the screw rod (10) penetrates the concave frame (1) and is rotatably connected to a concave plate (11) through a bearing, and a grinding brush (12) is evenly and fixedly connected to the inner surface of the concave plate (11).

2. The grinding device for quartz ring processing for semiconductor etching process according to claim 1, characterized in that: A stud (801) is fixedly connected to the left side of the rectangular plate (6); the left end of the stud (801) passes through the frame (3) and is threadedly connected to a limiting nut (802); a rubber gasket (803) is fixedly connected to one side of the limiting nut (802); the outer surface of the rubber gasket (803) is tightly fitted to the connection point of the frame (3).

3. The grinding device for quartz ring processing for semiconductor etching process according to claim 1, characterized in that: The driving assembly (9) comprises a rotating shaft (901), one end of the rotating shaft (901) is rotatably connected to a connection point of the frame (3) via a bearing, the right end of the rotating shaft (901) is fixedly connected to a main bevel gear (902), a slave bevel gear (903) is sleeved at the center of the outer surface of the forward and reverse threaded rod (5), the main bevel gear (902) and the slave bevel gear (903) are meshed, and the left end of the rotating shaft (901) passes through the frame (3) and is fixedly connected to a rotating handle.

4. The grinding device for processing quartz rings for semiconductor etching process according to claim 2, characterized in that: The upper and lower positions on the left side of the frame (3) are both provided with movable openings for use with the stud (801), and the stud (801) is located in the inner cavity of the movable opening.

5. The grinding device for quartz ring processing for semiconductor etching process according to claim 1, characterized in that: The connection between the forward and reverse threaded rod (5) and the positioning plate (4) is rotatably connected via a bearing, and an anti-slip pad is fixedly connected to one side of the limiting plate (7).

6. The grinding device for quartz ring processing for semiconductor etching process according to claim 1, characterized in that: A guide plate (13) is fixedly connected to the top of the right side of the concave plate (11), a guide groove (14) for use with the guide plate (13) is provided on the right side of the inner cavity of the concave frame (1), and the outer surface of the guide plate (13) is slidably connected to the inner surface of the guide groove (14).

7. The grinding device for quartz ring processing for semiconductor etching process according to claim 1, characterized in that: A mounting plate is fixedly connected to the bottom of the right side of the concave frame (1), and mounting holes are provided at the front and rear positions of the top of the mounting plate.

8. The grinding device for quartz ring processing for semiconductor etching process according to claim 1, characterized in that: The top and bottom of the frame (3) are both provided with through openings for use with the rectangular plate (6), and the outer surface of the rectangular plate (6) is slidably connected to the connection between the through openings.

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