Quartz boat curled edge automatic measuring device

Abstract

The utility model provides a quartz boat curled edge automatic measuring device, and relates to the quartz boat measuring device field, the quartz boat curled edge automatic measuring device comprises a device rack, a protection assembly and a clamping assembly, the top of the device rack is provided with a linear slide rail, the outer wall of the linear slide rail is provided with a slide block, the lower end of the slide block is connected with an electric push rod, and the electric push rod is connected with the protection assembly. Meanwhile, the lower end of the electric push rod is connected with a roughness measuring instrument, the protection assembly is arranged on the inner side of the device frame and fixed to the corner connecting position of the device frame and the linear sliding rail, the clamping assembly is arranged on the inner side of the device frame and located on the lower side of the roughness measuring instrument, and the clamping assembly comprises a sliding base; and meanwhile, the sliding base is slidably connected to a bottom plate of the device frame, a motor is installed on the upper side of the sliding base, and a rotating shaft is connected to the upper side of the motor through a belt. The quartz boat roughness measuring device solves the problems that an existing quartz boat roughness measuring device cannot achieve full-automatic measuring operation and lacks protection on a measuring instrument, so that the quartz boat roughness measuring device is inconvenient to use.

Description

Technical Field

[0001] The utility model relates to the technical field of quartz boat measuring devices, in particular to an automatic measuring device for curling of a quartz boat. Background Art

[0002] Since the semiconductor industry has very high requirements on the appearance and size of quartz products, this requires precise inspection of quartz products, especially the groove teeth of the quartz boat. Because it is in direct contact with the silicon wafer, customers have very high requirements on the roughness of the groove teeth, and the roughness of each groove tooth needs to be measured. After searching, the prior art (application number: CN202120698429.8) records "a roughness measurement and adjustment device for quartz boat products, including a working platform, a lifting device, a roughness meter placement platform and a roughness measuring instrument, the lifting device is arranged between the working platform and the roughness meter placement platform, and the roughness measuring instrument is fixed on the roughness meter placement platform. The utility model provides a roughness measurement and adjustment device for quartz boat products, which reduces the time for manual adjustment of the height of the roughness meter and improves the detection efficiency while meeting the premise of accurately measuring the roughness of the groove teeth."

[0003] Although the quartz boat type measuring device in the prior art has achieved easy height adjustment, there are still some shortcomings: when the roughness measuring instrument involved in the existing quartz boat roughness measuring device is in use, it is achieved by the sliding contact between the probe tactile sensor at the front end and the surface of the object, and the above-mentioned device does not have a relative movement between the probe and the quartz boat, and still requires manual operation, resulting in inconvenience in use. At the same time, there is no automatic adjustment function for the angle of the quartz boat. Secondly, the probe tactile sensor at the front end of the roughness measuring instrument is small and thin. When installing the quartz boat, it is easy to accidentally touch it and cause damage, and when not in use, it lacks a protective effect. Utility Model Content

[0004] In order to overcome the defects of the prior art, an automatic measuring device for curling of a quartz boat is provided to solve the problem that the existing quartz boat roughness measuring device cannot realize fully automatic measurement operation and lacks protection for the measuring instrument, resulting in inconvenience in use.

[0005] To achieve the above-mentioned purpose, a quartz boat curling automatic measuring device is provided, including: a device frame, a protective component and a clamping component, the top of the device frame is provided with a linear slide rail, and the outer wall of the linear slide rail is provided with a slider, and the lower end of the slider is connected to an electric push rod, and the lower end of the electric push rod is connected to a roughness measuring instrument, the protective component is provided on the inner side of the device frame, and the protective component is fixed at the corner connection between the device frame and the linear slide rail, the clamping component is provided on the inner side of the device frame and is located at the lower side of the roughness measuring instrument, and the clamping component includes a slide seat, and the slide seat is slidably connected to the bottom plate of the device frame, a motor is installed on the upper side of the slide seat, and the upper side of the motor is connected to a rotating shaft through a belt, and the inner end of the rotating shaft is connected to a clamping block.

[0006] Furthermore, the protection component includes an outer shell, and the outer shell is set to a U-shaped structure, and a slide plate is provided at the inner groove of the outer shell.

[0007] Furthermore, the slide plate is slidably plugged into the front shell wall of the shell, and a pulling strip is provided at the front end of the slide plate, and limiting blocks are provided at the upper and lower sides of the rear end of the slide plate.

[0008] Furthermore, the slide seat is configured as an L-shaped structure, and a cylinder is connected to the outer side of the slide seat, and the cylinder is fixed to the outer wall of the device frame.

[0009] Furthermore, the outer end of the rotating shaft is rotatably connected to the inner side wall of the slide seat, and pulleys are installed on the rotating shaft and the output shaft of the motor, and the belt is connected between the upper and lower pulleys.

[0010] Furthermore, a clamping groove is provided on the inner end surface of the clamping block, a buffer block is provided on the inner side of the clamping groove, and an arc-shaped groove is provided on the side of the buffer block facing the clamping groove.

[0011] Furthermore, a first guide groove is formed on the upper surface of the bottom plate of the device frame, and a second guide groove is formed on the front and rear groove walls of the first guide groove.

[0012] Furthermore, a first wheel frame is installed on the lower side of the slide seat, and a second wheel frame is installed on the front and rear sides of the first wheel frame, and a first guide wheel is installed on the inner side of the first wheel frame, and a second guide wheel is installed on the inner side of the second wheel frame, and the first guide wheel and the second guide wheel are respectively rollingly connected in the first guide groove and the second guide groove.

[0013] The beneficial effects of the utility model are:

[0014] 1. When in use, place the quartz boat product to be measured between the two clamping blocks, then start the cylinder to push the rotating shaft to drive the clamping blocks to move closer, and then place the end of the quartz boat in the clamping groove to achieve stable clamping, and then start the linear slide to drive the slider to drive the electric push rod and the roughness measuring instrument to move horizontally, and then start the electric push rod to drive the probe sensor of the roughness measuring instrument to descend and contact the curling edge of the quartz boat product, and then start the motor to drive the rotating shaft to rotate through the pulley and belt, and then drive the quartz boat to rotate through the clamping block to adjust the measurement angle, and the roughness measuring instrument does not require manual operation, thereby achieving the effect of automatic measurement;

[0015] 2. After installing the quartz boat product or measuring, move the roughness meter to any end of the linear slide through the linear slide and the slider. Before that, first manually pull out the slide through the pull bar to make the opening inside the shell open. Then, drive the linear slide to make the roughness meter enter the shell, and then push the slide into the shell, thereby achieving the anti-collision protection effect of the roughness meter. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a front view structural schematic diagram of an embodiment of the utility model.

[0017] Figure 2 It is a schematic diagram of the three-dimensional structure of the protection component of an embodiment of the utility model.

[0018] Figure 3 It is a schematic diagram of a partial cross-sectional structure of a clamping assembly according to an embodiment of the utility model.

[0019] Figure 4 For the utility model embodiment Figure 1 Schematic diagram of the structure at point A in the middle.

[0020] In the figure: 1. device frame; 11. first guide groove; 12. second guide groove; 2. protection component; 21. housing; 22. pulling strip; 23. slide plate; 24. limit block; 3. linear slide rail; 31. slider; 4. electric push rod; 41. roughness measuring instrument; 5. clamping component; 51. slide seat; 52. cylinder; 53. rotating shaft; 531. pulley; 54. clamping block; 541. clamping groove; 542. buffer block; 55. first wheel frame; 551. first guide wheel; 56. second wheel frame; 561. second guide wheel; 6. motor; 61. belt. DETAILED DESCRIPTION

[0021] Reference Figures 1 to 4As shown, the utility model provides a quartz boat curling automatic measuring device, including: a device frame 1, a protective component 2 and a clamping component 5, a linear slide 3 is provided on the top of the device frame 1, and a slider 31 is provided on the outer wall of the linear slide 3, and the lower end of the slider 31 is connected with an electric push rod 4, and the lower end of the electric push rod 4 is connected with a roughness measuring instrument 41, the protective component 2 is provided on the inner side of the device frame 1, and the protective component 2 is fixed at the corner connection between the device frame 1 and the linear slide 3, the clamping component 5 is provided on the inner side of the device frame 1, and is located at the lower side of the roughness measuring instrument 41, and the clamping component 5 includes a slide seat 51, and the slide seat 51 is slidably connected to the bottom plate of the device frame 1, a motor 6 is installed on the upper side of the slide seat 51, and the upper side of the motor 6 is connected to a rotating shaft 53 through a belt 61, and the inner end of the rotating shaft 53 is connected with a clamping block 54.

[0022] In this embodiment, the device frame 1, the protection component 2 and the clamping component 5 constitute the main structure of the quartz boat curling automatic measurement device involved in this application.

[0023] Specifically, the linear slide rail 3 and the slider 31 are configured as an electric slide rail structure in the prior art to achieve linear drive.

[0024] Specifically, the device frame 1 is configured as a U-shaped structure, and includes side panels on both sides and a bottom panel on the lower side.

[0025] Specifically, the clamping assembly 5 is provided with two groups, which are respectively close to the inner side of the side plate of the device frame 1, and the motor 6 is simultaneously started and operated at the same speed by the server control.

[0026] like Figure 2 As shown, the protective component 2 includes an outer shell 21, and the outer shell 21 is set to a U-shaped structure, and a slide plate 23 is provided at the inner groove of the outer shell 21, and the slide plate 23 is slidably inserted in the front shell wall of the outer shell 21, and a pulling strip 22 is provided at the front end of the slide plate 23, and limit blocks 24 are provided on the upper and lower sides of the rear end of the slide plate 23.

[0027] Specifically, the upper and lower heights of the housing 21 are greater than the overall vertical length of the housing 21 and the roughness meter 41 when the electric push rod 4 is stored, so that after the roughness meter 41 enters the housing 21, the probe sensor at its lower end is completely blocked, thereby forming effective anti-collision protection.

[0028] like Figure 1 and Figure 3As shown, the slide 51 is set to an L-shaped structure, and the outer side of the slide 51 is connected to the cylinder 52, and the cylinder 52 is fixed to the outer wall of the device frame 1, the outer end of the rotating shaft 53 is rotatably connected to the inner wall of the slide 51, and the rotating shaft 53 and the output shaft of the motor 6 are both equipped with pulleys 531, and the belt 61 is connected between the upper and lower pulleys 531, the inner end face of the clamping block 54 is provided with a clamping groove 541, and the inner side of the clamping groove 541 is provided with a buffer block 542, and the side of the buffer block 542 facing the clamping groove 541 is provided with an arc groove.

[0029] As a preferred embodiment, by setting the slide seat 51, the motor 6 on the lower side keeps moving synchronously when the cylinder 52 pushes the clamping block 54 to move, so that it is suitable for clamping and fixing quartz boats of different sizes; by using the clamping groove 541 and the buffer block 542, the end of the quartz boat is protected during the clamping process, and the cross-section of the clamping groove 541 is set to a trapezoidal structure, which is also suitable for quartz boats of different sizes.

[0030] like Figure 4 As shown, a first guide groove 11 is provided on the upper surface of the bottom plate of the device frame 1, and a second guide groove 12 is provided on the front and rear groove walls of the first guide groove 11, a first wheel frame 55 is installed on the lower side of the slide seat 51, and a second wheel frame 56 is installed on the front and rear sides of the first wheel frame 55, and a first guide wheel 551 is installed on the inner side of the first wheel frame 55, and a second guide wheel 561 is installed on the inner side of the second wheel frame 56, and at the same time, the first guide wheel 551 and the second guide wheel 561 are rollingly connected in the first guide groove 11 and the second guide groove 12 respectively.

[0031] As a preferred embodiment, by setting the first guide wheel 551 and the second guide wheel 561 to be rollingly connected to the bottom plate of the device frame 1, the moving friction of the slide 51 is reduced. At the same time, the first guide groove 11 and the second guide groove 12 are used to enhance the moving stability of the slide 51.

[0032] When in use, the quartz boat product to be measured is placed between two clamping blocks, and then the cylinder is started to push the rotating shaft to drive the clamping blocks to move closer, and then the end of the quartz boat is placed in the clamping groove for stable clamping, and then the linear slide drive slider is started to drive the electric push rod and the roughness measuring instrument to move horizontally, and then the electric push rod is started to drive the probe sensor of the roughness measuring instrument to descend and contact the curling edge of the quartz boat product, and then the motor is started to drive the rotating shaft to rotate through the pulley and belt, and then the quartz boat is driven to rotate through the clamping block to adjust the measuring angle, and the roughness measuring instrument does not require manual operation, thereby achieving the effect of automatic measurement.

[0033] The utility model discloses an automatic measuring device for curling of quartz boat, which can effectively solve the problems that the existing roughness measuring device of quartz boat cannot realize full-automatic measuring operation and lacks protection for measuring instrument, resulting in inconvenience in use. The utility model realizes full-automatic measuring operation effect of surface roughness of quartz boat on the basis of the technology of the existing automatic measuring device for curling of quartz boat, reduces the labor intensity of manual measurement, and has the effect of protecting measuring instrument.

Claims

1. A quartz boat curling automatic measuring device, comprising: A device frame (1), a protective component (2) and a clamping component (5), characterized in that: a linear slide rail (3) is provided on the top of the device frame (1), and a slider (31) is provided on the outer wall of the linear slide rail (3), and an electric push rod (4) is connected to the lower end of the slider (31), and a roughness measuring instrument (41) is connected to the lower end of the electric push rod (4), and the protective component (2) is provided on the inner side of the device frame (1), and the protective component (2) is fixed to the device frame (1) and the linear slide rail. (3), the clamping assembly (5) is arranged on the inner side of the device frame (1) and is located on the lower side of the roughness measuring instrument (41), and the clamping assembly (5) includes a slide seat (51), and the slide seat (51) is slidably connected to the bottom plate of the device frame (1), a motor (6) is installed on the upper side of the slide seat (51), and the upper side of the motor (6) is connected to a rotating shaft (53) through a belt (61), and the inner side end of the rotating shaft (53) is connected to a clamping block (54).

2. The quartz boat curling automatic measuring device according to claim 1, characterized in that: The protection component (2) comprises an outer shell (21), wherein the outer shell (21) is configured as a U-shaped structure, and a slide plate (23) is provided at a notch inside the outer shell (21).

3. The quartz boat curling automatic measuring device according to claim 2, characterized in that: The slide plate (23) is slidably inserted into the front wall of the outer shell (21), and a pulling strip (22) is provided at the front end of the slide plate (23), and limit blocks (24) are provided at the upper and lower sides of the rear end of the slide plate (23).

4. The quartz boat curling automatic measuring device according to claim 1, characterized in that: The slide seat (51) is configured as an L-shaped structure, and the outer side of the slide seat (51) is connected to a cylinder (52), and the cylinder (52) is fixed to the outer wall of the device frame (1).

5. The quartz boat curling automatic measuring device according to claim 1, characterized in that: The outer end of the rotating shaft (53) is rotatably connected to the inner side wall of the sliding seat (51), and pulleys (531) are installed on the rotating shaft (53) and the output shaft of the motor (6), and the belt (61) is connected between the upper and lower pulleys (531).

6. The quartz boat curling automatic measuring device according to claim 1, characterized in that: The inner end surface of the clamping block (54) is provided with a clamping groove (541), the inner side of the clamping groove (541) is provided with a buffer block (542), and the side of the buffer block (542) facing the clamping groove (541) is provided with an arc-shaped groove.

7. The automatic measuring device for curling of a quartz boat according to claim 1, characterized in that: A first guide groove (11) is provided on the upper surface of the bottom plate of the device frame (1), and a second guide groove (12) is provided on the front and rear groove walls of the first guide groove (11).

8. The quartz boat curling automatic measuring device according to claim 1, characterized in that: A first wheel frame (55) is installed on the lower side of the slide seat (51), and a second wheel frame (56) is installed on the front and rear sides of the first wheel frame (55), and a first guide wheel (551) is installed on the inner side of the first wheel frame (55), and a second guide wheel (561) is installed on the inner side of the second wheel frame (56), and the first guide wheel (551) and the second guide wheel (561) are respectively rollingly connected in the first guide groove (11) and the second guide groove (12).

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