Detection device convenient for taking and placing wafer

Abstract

The utility model discloses a detection device convenient for taking and placing a wafer, and relates to the technical field of wafer detection. The detection device convenient for taking and placing the wafer comprises a detection base, one side of the detection base is provided with a connecting plate, the top of the detection base is provided with an adjusting mechanism, and the top of the detection base is provided with a positioning mechanism. According to the detection device convenient for taking and placing the wafer, by arranging the positioning plates, when the center of the wafer needs to be positioned, a pull ring is firstly pulled towards one side, so that a rack I drives a gear II to rotate, the gear II drives a gear I to rotate, the gear I drives the rack II and the positioning plates to move, and when the four positioning plates move, the positioning plates are rotated to move; and the wafer at the top of the bearing disc is subjected to central positioning, so that the wafer is convenient to detect, and the device is convenient to carry out central positioning on the wafer.

Description

Technical Field

[0001] The utility model belongs to the technical field of wafer detection, and in particular relates to a detection device which is convenient for wafer taking and placing. Background Art

[0002] Wafer inspection is an important part of the semiconductor manufacturing process, and its main purpose is to ensure the quality, production consistency and reliability of wafers.

[0003] The prior art does not have a structure for centering and quickly placing and picking up the wafer when in use, which makes it difficult to align the center of the wafer with the detection head before detection when detecting the wafer. In addition, due to the thin thickness of the wafer, it is difficult to place the wafer directly on the detection table or to directly move the wafer up and down from the detection table. Based on the deficiencies of the prior art, the utility model designs a detection device that is convenient for wafer placement. Utility Model Content

[0004] In order to solve the above problems existing in the prior art, the utility model provides a detection device which is convenient for wafer placement and has the characteristics of center positioning and rapid wafer placement.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a detection device for facilitating wafer placement, comprising a detection base, a connecting plate is provided on one side of the detection base, an adjustment mechanism is provided on the top of the detection base, and a positioning mechanism is provided on the top of the detection base;

[0006] The positioning mechanism comprises a positioning plate and a second rack. The positioning plate is slidably connected to the top of the detection base, and one side of the positioning plate is fixedly connected to the second rack.

[0007] As an optimal technical solution of the detection device for facilitating wafer placement and picking up of the utility model, the positioning mechanism also includes a limit bar, gear one and gear two, the limit bar is fixedly connected to one side of rack two, the gear one is movably engaged with one side of rack two, and the upper surface of gear one is fixedly connected to gear two.

[0008] As a preferred technical solution of the detection device for facilitating wafer placement in the utility model, a display is provided on one side of the detection base, a detection platform is fixedly connected to the top of the detection base, and a carrying plate is provided on the top of the detection platform.

[0009] As an optimal technical solution of the detection device for facilitating wafer placement and picking up of the utility model, a slide groove is provided inside the connecting plate, a lifting plate is slidably connected inside the slide groove, a limiting plate is fixedly connected to the lower surface of the lifting plate, and a spring is movably clamped on the lower surface of the limiting plate.

[0010] As an optimal technical solution of a detection device that is convenient for wafer picking and placing according to the utility model, the adjustment mechanism includes a supporting block, a fixed plate, a rack 1, a pull ring, a protrusion and a spring 2. The supporting block is arranged on the top of the detection base, one side of the supporting block is fixedly connected to the fixed plate, the inside of the supporting block is slidably connected to the rack 1, one side of the rack 1 is fixedly connected to the pull ring, one side of the rack 1 is fixedly connected to the protrusion, and one side of the protrusion is movably connected to the spring 2.

[0011] As a preferred technical solution of the detection device for facilitating wafer placement and retrieval of the utility model, the positioning plate is slidably connected to one side of the carrier plate, and the second rack is slidably connected to the inside of the carrier block.

[0012] As a preferred technical solution of the detection device for facilitating wafer placement in the utility model, the gear one is meshed and driven on one side of the rack two, and the gear two is meshed and driven on one side of the rack one.

[0013] As a preferred technical solution of the detection device for facilitating wafer placement and retrieval of the utility model, the protrusion is slidably connected to the inside of the carrier block, and the second spring is movably clamped to the inside of the carrier block.

[0014] Compared with the prior art, the beneficial effects of the utility model are:

[0015] 1. When the utility model is in use, by setting the positioning plate, when it is necessary to center the wafer, first pull the pull ring to one side, so that rack one drives gear two to rotate, and gear two drives gear one to rotate, and gear one drives rack two and the positioning plate to move. When the four positioning plates move, the wafer on the top of the carrier plate is centrally positioned, which is convenient for wafer detection. The device is convenient for centering the wafer. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings:

[0017] Figure 1 This is a schematic diagram of the display structure of the utility model;

[0018] Figure 2 This is a schematic diagram of the detection base structure of the utility model;

[0019] Figure 3 This is a schematic diagram of the lifting plate structure of the utility model;

[0020] Figure 4 This is a schematic diagram of the positioning mechanism structure of the utility model;

[0021] Figure 5 It is a schematic diagram of the structure of the regulating mechanism of the utility model.

[0022] In the figure: 1. detection base; 101. display; 102. detection table; 103. bearing plate; 2. connecting plate; 201. slide groove; 202. lifting plate; 203. limit plate; 204. spring one; 3. adjustment mechanism; 301. bearing block; 302. fixing plate; 303. rack one; 304. pull ring; 305. bump; 306. spring two; 4. positioning mechanism; 401. positioning plate; 402. rack two; 403. limit strip; 404. gear one; 405. gear two. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] Example 1

[0025] See also Figure 1-5 , the utility model provides the following technical solutions: a detection device for facilitating wafer placement, comprising a detection base 1, a connecting plate 2 is provided on one side of the detection base 1, an adjustment mechanism 3 is provided on the top of the detection base 1, and a positioning mechanism 4 is provided on the top of the detection base 1;

[0026] A display 101 is disposed on one side of the detection base 1 , a detection platform 102 is fixedly connected to the top of the detection base 1 , and a carrying plate 103 is disposed on the top of the detection platform 102 .

[0027] A slide groove 201 is provided inside the connecting plate 2, and a lifting plate 202 is slidably connected inside the slide groove 201. The lower surface of the lifting plate 202 is fixedly connected to a limit plate 203, and a spring 204 is movably engaged with the lower surface of the limit plate 203.

[0028] What needs to be further explained is that: a carrying plate 103 is arranged on the top of the detection base 1, and the carrying plate 103 is arranged to facilitate the placement of wafers. A connecting plate 2 is arranged on one side of the detection base 1, and the connecting plate 2 is arranged to facilitate the lifting and lowering of the adjustment mechanism 3 and the positioning mechanism 4, and the positioning mechanism 4 is arranged to facilitate center positioning of the wafer placed on the top of the carrying plate 103. A rack 303 is arranged on one side of the positioning mechanism 4, and the rack 303 is arranged to facilitate the adjustment of the position of the positioning plate 401.

[0029] Example 2

[0030] See also Figure 3-5 , the utility model provides the following technical solutions:

[0031] The positioning mechanism 4 includes a positioning plate 401 and a second rack 402 . The positioning plate 401 is slidably connected to the top of the detection base 1 , and one side of the positioning plate 401 is fixedly connected to the second rack 402 .

[0032] The positioning mechanism 4 also includes a limit bar 403, a gear 1 404 and a gear 2 405. The limit bar 403 is fixedly connected to one side of the rack 2 402, the gear 1 404 is movably connected to one side of the rack 2 402, and the upper surface of the gear 1 404 is fixedly connected to the gear 2 405.

[0033] The adjustment mechanism 3 includes a supporting block 301, a fixed plate 302, a rack 1 303, a pull ring 304, a protrusion 305 and a spring 2 306. The supporting block 301 is arranged on the top of the detection base 1. One side of the supporting block 301 is fixedly connected to the fixed plate 302. The inside of the supporting block 301 is slidably connected to the rack 1 303. One side of the rack 1 303 is fixedly connected to the pull ring 304. One side of the rack 1 303 is fixedly connected to the protrusion 305. One side of the protrusion 305 is movably connected to the spring 2 306.

[0034] The positioning plate 401 is slidably connected to one side of the carrying plate 103 , and the second rack 402 is slidably connected to the inside of the carrying block 301 .

[0035] Gear 1 404 is meshed and driven on one side of rack 2 402 , and gear 2 405 is meshed and driven on one side of rack 1 303 .

[0036] The protrusion 305 is slidably connected to the inside of the bearing block 301 , and the second spring 306 is movably engaged with the inside of the bearing block 301 .

[0037] What needs to be further explained is: pulling the pull ring 304 to one side causes the rack 1 303 to drive the gear 2 405 to rotate, and the gear 2 405 drives the gear 1 404 to rotate, and the gear 1 404 drives the rack 2 402 and the positioning plate 401 to move. When the four positioning plates 401 move, the wafer on the top of the carrier plate 103 is centrally positioned to facilitate the inspection of the wafer. After the inspection is completed, the wafer can be clamped and positioned again by the positioning plate 401, and the wafer can be driven away from the surface of the carrier plate 103 to facilitate the removal of the wafer after the inspection is completed.

[0038] Working principle: When a detection device that is convenient for wafer placement is used, first, a carrier plate 103 is arranged on the top of the detection base 1, and the carrier plate 103 is arranged to facilitate the placement of wafers. A connecting plate 2 is arranged on one side of the detection base 1, and the connecting plate 2 is arranged to facilitate the lifting and lowering of the adjustment mechanism 3 and the positioning mechanism 4. The positioning mechanism 4 is arranged to facilitate the center positioning of the wafer placed on the top of the carrier plate 103. A rack 303 is arranged on one side of the positioning mechanism 4, and the rack 303 is arranged to facilitate the adjustment of the position of the positioning plate 401.

[0039] When the wafer needs to be center positioned, first pull the pull ring 304 to one side so that rack 1 303 drives gear 2 405 to rotate, and gear 2 405 drives gear 1 404 to rotate, and gear 1 404 drives rack 2 402 and positioning plate 401 to move. When the four positioning plates 401 move, the wafer on the top of the carrier plate 103 is center positioned to facilitate wafer detection. The device facilitates center positioning of the wafer.

[0040] Finally, it should be noted that the above are only preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art can still modify the technical solutions described in the above embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A detection device for facilitating wafer placement, comprising a detection base (1), characterized in that: A connecting plate (2) is provided on one side of the detection base (1), an adjustment mechanism (3) is provided on the top of the detection base (1), and a positioning mechanism (4) is provided on the top of the detection base (1); A positioning mechanism (4), the positioning mechanism (4) comprising a positioning plate (401) and a second rack (402), the positioning plate (401) being slidably connected to the top of the detection base (1), and the second rack (402) being fixedly connected to one side of the positioning plate (401).

2. The detection device for facilitating wafer placement according to claim 1, characterized in that: The positioning mechanism (4) further comprises a limit bar (403), gear one (404) and gear two (405); the limit bar (403) is fixedly connected to one side of rack two (402); the gear one (404) is movably engaged with one side of rack two (402); and the upper surface of the gear one (404) is fixedly connected to gear two (405).

3. The detection device for facilitating wafer placement according to claim 1, characterized in that: A display (101) is provided on one side of the detection base (1), a detection platform (102) is fixedly connected to the top of the detection base (1), and a carrying plate (103) is provided on the top of the detection platform (102).

4. The detection device for facilitating wafer placement according to claim 1, characterized in that: A sliding groove (201) is provided inside the connecting plate (2), a lifting plate (202) is slidably connected inside the sliding groove (201), a limiting plate (203) is fixedly connected to the lower surface of the lifting plate (202), and a spring (204) is movably engaged to the lower surface of the limiting plate (203).

5. The detection device for facilitating wafer placement according to claim 1, characterized in that: The adjustment mechanism (3) comprises a bearing block (301), a fixing plate (302), a rack 1 (303), a pull ring (304), a convex block (305) and a spring 2 (306); the bearing block (301) is arranged on the top of the detection base (1); one side of the bearing block (301) is fixedly connected to the fixing plate (302); the inside of the bearing block (301) is slidably connected to the rack 1 (303); one side of the rack 1 (303) is fixedly connected to the pull ring (304); one side of the rack 1 (303) is fixedly connected to the convex block (305); and one side of the convex block (305) is movably connected to the spring 2 (306).

6. The detection device for facilitating wafer placement according to claim 1, characterized in that: The positioning plate (401) is slidably connected to one side of the bearing plate (103), and the second rack (402) is slidably connected to the inside of the bearing block (301).

7. The detection device for facilitating wafer placement according to claim 2, characterized in that: The gear one (404) is meshed and driven on one side of the rack two (402), and the gear two (405) is meshed and driven on one side of the rack one (303).

8. The detection device for facilitating wafer placement according to claim 5, characterized in that: The protrusion (305) is slidably connected to the inside of the bearing block (301), and the second spring (306) is movably clamped to the inside of the bearing block (301).

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