Quartz boat for wafer heat treatment

Abstract

The utility model relates to a quartz boat for wafer heat treatment. The quartz boat comprises a supporting rod, a plurality of rows of wafer bearing grooves are formed in the peripheral surface of the supporting rod at intervals along the length direction of the supporting rod; the number of the mounting holes is in one-to-one correspondence with that of the supporting rods; the mounting hole is a regular polygon hole, the supporting rod is a regular polygon rod, and a row of wafer bearing grooves are formed in each side edge of the supporting rod in the length direction. The side plates and the supporting rods can be detached from each other, and the supporting rods are provided with a plurality of rows of wafer bearing grooves, so that after one row of wafer bearing grooves are used for a long time, and when the wafer bearing grooves need to be overhauled due to quality problems, the supporting rods can be directly rotated, and wafers can be borne through the other rows of wafer bearing grooves in the supporting rods; and the wafer bearing grooves with quality problems do not need to be replaced or overhauled, so that not only is the labor saved, but also the processing efficiency of the wafer is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer processing, in particular to a quartz boat for wafer heat treatment. Background Art

[0002] Wafers, as the core components of semiconductor manufacturing, have extremely high requirements for precision and environment in their production process. During the manufacturing process, wafers often need to be placed on a quartz boat and then sent into a heat treatment furnace for a series of heat treatments. This step is crucial to improving the performance of the wafer, but the problem that comes with it is that the quartz boat will gradually accumulate various impurities after repeated use;

[0003] This is because when the quartz boat is used as a carrier for the wafers and undergoes heat treatment, the wafers will release tiny particles or gases. These substances will gradually deposit on the quartz boat, forming a thin layer of impurities. These impurities will cause potential risks to subsequent wafer processing. In addition, when impurities adhere to the surface of the wafer, it may also affect its flatness, thereby causing unnecessary defects in the wafer and causing the performance of the wafer to deteriorate.

[0004] Therefore, it is necessary to clean or replace the quartz boat regularly. However, the current wafers are generally one-piece structures, and the grooves for accommodating the wafer bodies are very difficult to clean. However, direct replacement is costly. Therefore, it is necessary to improve the current quartz boat to increase its service life. Utility Model Content

[0005] The technical problem to be solved by the utility model is to provide a quartz boat for wafer heat treatment which has a long service life and a detachable wafer carrying rod.

[0006] The technical problem to be solved by the utility model is achieved through the following technical solution: a quartz boat for wafer heat treatment, comprising a pair of side plates and a plurality of support rods;

[0007] A pair of the side panels are arranged in parallel with each other, and a plurality of mounting holes for penetrating the support rods are provided at the same position of each side panel;

[0008] A plurality of rows of wafer bearing grooves are provided on the outer peripheral surface of the support rod at intervals along the length direction of the support rod;

[0009] The number of the mounting holes is arranged in one-to-one correspondence with the number of the support rods;

[0010] The mounting hole is a regular polygonal hole, the support rod is a regular polygonal rod, and a row of wafer bearing grooves is provided on each side of the support rod in the length direction.

[0011] Preferably, a group of lock holes are respectively opened at both ends of the support rod, and each group of lock holes is composed of two lock holes with the middle part penetrating and the axes perpendicular to each other. After the two ends of the support rod pass through the mounting holes of the side plates, the support rod can be limited between a pair of side plates by the pins placed in each group of lock holes.

[0012] Preferably, each of the side panels is provided with three mounting holes, wherein two mounting holes are symmetrically provided at two sides of the top of the side panel, and the other mounting hole is located in the middle of the side panel.

[0013] Preferably, three support rods are arranged in parallel.

[0014] Preferably, the support rod is a square rod.

[0015] Preferably, the mounting hole is a square hole.

[0016] Compared with the prior art, the beneficial technical effects of the utility model are:

[0017] (1) The side plate and the support rod are detachable from each other, and the support rod is provided with multiple rows of wafer bearing slots. When one row of wafer bearing slots has been used for a long time and needs to be repaired due to quality problems, the support rod can be directly rotated and the wafers can be carried by other rows of wafer bearing slots on the support rod without replacing or repairing the wafer bearing slots with quality problems. This not only saves labor but also improves wafer processing efficiency.

[0018] (2) Each edge of the support rod is provided with a wafer loading slot. Compared with the previous single-row wafer loading slot, the service life of the quartz boat is longer, which fundamentally reduces costs and increases efficiency;

[0019] (3) A plurality of locking holes are provided on both ends of the support rod. After the two ends of the support rod pass through the side plates, the two ends of the support rod can be limited on both sides of a pair of side plates by inserting the external pin body into the locking hole, thereby realizing the installation of the quartz boat. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is a schematic diagram of the main structure of the utility model when in use;

[0021] Figure 2 It is a schematic diagram of the explosion of the structure of the utility model;

[0022] Figure 3 It is a partial left-side structural schematic diagram of the utility model when in use;

[0023] Figure 4 It is a side structural schematic diagram of the support rod of the utility model.

[0024] In the figure: 1. Side panel; 2. Support rod; 3. Mounting hole; 4. Wafer bearing slot; 5. Locking hole; 6. Pin body; 7. Wafer. DETAILED DESCRIPTION

[0025] The specific technical solutions of the present invention are further described below with reference to the accompanying drawings, so as to facilitate further understanding of the present invention by those skilled in the art, and do not constitute any limitation to the rights thereof.

[0026] Example 1, reference Figure 1-4 A quartz boat for wafer heat treatment includes a pair of side plates 1 and a plurality of support rods 2. The side plates 1 are formed into a substantially square plate-shaped structure. The support rods 2 can be designed as square rods, and the number of the support rods 2 can be set to three, four, etc.;

[0027] A pair of the side panels 1 are arranged in parallel with each other, and a plurality of mounting holes 3 for penetrating the support rod 2 are opened at the same position of each side panel 1. When the support rod 2 is a square rod, the mounting holes 3 are square holes;

[0028] A plurality of rows of wafer carrying grooves 4 are provided on the outer peripheral surface of the support rod 2 at intervals along the length direction of the support rod 2;

[0029] The number of the mounting holes 3 is set in one-to-one correspondence with the number of the support rods 2. When we adopt the solution of three support rods 2, three mounting holes 3 are opened on each of the side panels 1, two of which are symmetrically opened on both sides of the top of the side panel 1, and the other mounting hole 3 is located in the middle of the side panel 1;

[0030] The mounting hole 3 is a regular polygonal hole, the support rod 2 is a regular polygonal rod, and a row of wafer bearing grooves 4 is provided on each side of the support rod 2 in the length direction;

[0031] In order to ensure that the support rod 2 is relatively stable after passing through the mounting holes 3 of a pair of side panels 1, a group of locking holes 5 are respectively opened at both ends of the support rod 2. The locking holes 5 can be circular through holes, and each group of locking holes 5 is composed of two locking holes 5 with the middle part penetrating and the axes perpendicular to each other. After the two ends of the support rod 2 pass through the mounting holes 3 of the side panels 1, the pins 6 placed in each group of locking holes 5 can limit the support rod 2 between the pair of side panels 1.

[0032] It should be noted that after the two ends of the support rod 2 pass through the side plate 1, by inserting the external pin body 6 into the lock hole 5, the two ends of the support rod 2 can be limited on both sides of a pair of side plates 1. On the one hand, the support rod 2 can be limited in the length direction, and on the other hand, the installation of the quartz boat is also realized.

[0033] When the quartz boat is used, we first pass the support rod 2 through the mounting holes 3 on the pair of side plates 1, and then insert the pin body 6 into the locking holes 5 at both ends of the support rod 2. At this time, the two ends of the support rod 2 cannot be separated from the mounting holes 3 of the support rod 2, and the installation of the quartz boat can be completed. When it is necessary to carry the wafer 7, we only need to place the wafer 7 in the wafer carrying groove 4 between the three support rods 2 to complete the carrying of the wafer 7. We then put the quartz boat carrying the wafer 7 into the wafer heat treatment furnace to complete the use of the quartz boat.

[0034] In addition, when the wafer carrying slots 4 have been used repeatedly and scaling that is difficult to clean appears on their outer walls, there is no need to replace the entire quartz boat. We only need to take out the pins 6 on both ends of the support rod 2 and rotate the support rod 2 90° so that the other row of wafer carrying slots 4 is facing upward. Then assemble the quartz boat, and the wafer carrying slots 4 that have not carried wafer 7 can be used to carry wafer 7. Because each support rod 2 has multiple rows of wafer carrying slots 4, when the support rod 2 is a square rod, because the square rod has four sides in the length direction, correspondingly, there are four rows of wafer carrying slots 4 thereon. This also means that the purpose of carrying wafer 7 with wafer carrying slots 4 that have not carried wafer 7 can be achieved by rotating it four times, which fundamentally saves the cost of inspecting and replacing the quartz boat, and achieves cost reduction and efficiency improvement to a certain extent.

Claims

1. A quartz boat for wafer heat treatment, characterized in that: It includes a pair of side panels and a number of support rods; A pair of the side panels are arranged in parallel with each other, and a plurality of mounting holes for penetrating the support rods are provided at the same position of each side panel; A plurality of rows of wafer carrying grooves are provided on the outer peripheral surface of the support rod at intervals along the length direction of the support rod; The number of the mounting holes is arranged in one-to-one correspondence with the number of the support rods; The mounting hole is a regular polygonal hole, the support rod is a regular polygonal rod, and a row of wafer bearing grooves is provided on each side of the support rod in the length direction.

2. A quartz boat for wafer heat treatment according to claim 1, characterized in that: A group of lock holes are respectively opened at both ends of the support rod, and each group of lock holes is composed of two lock holes with the middle part penetrating and the axes perpendicular to each other. After the two ends of the support rod pass through the mounting holes of the side plates, the support rod can be limited between a pair of side plates by the pins placed in each group of lock holes.

3. A quartz boat for wafer heat treatment according to claim 2, characterized in that: Each of the side panels is provided with three mounting holes, two of which are symmetrically arranged on both sides of the top of the side panel, and the other mounting hole is located in the middle of the side panel.

4. A quartz boat for wafer heat treatment according to claim 3, characterized in that: The support rods are arranged in parallel in number of three.

5. A quartz boat for wafer heat treatment according to any one of claims 1 to 4, characterized in that: The support rod is a square rod.

6. The quartz boat for wafer heat treatment according to claim 5, characterized in that: The mounting hole is a square hole.

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