Gas treatment device

Abstract

The utility model provides a gas treatment device which is characterized in that an air inlet and an air outlet are formed in the two sides of a shell, the air inlet is communicated with an air supply assembly, a water washing assembly is arranged on the inner side of the shell, and a first containing space and a second containing space are formed in the inner side of the shell by the water washing assembly; the washing assembly comprises a first washing unit and a second washing unit, and a first height of a second air inlet of the first washing unit is larger than a second height of a second air inlet of the second washing unit. The flow field uniformity of the fluid flowing through the gas treatment device is increased, so that the pollutant removal efficiency is improved.

Description

Technical Field

[0001] The present application relates to a gas treatment device, and more particularly to a device that utilizes a water washing assembly arranged in a stepped manner downward from an air inlet to an air outlet to increase the uniformity of the flow field and thereby improve the pollutant removal efficiency. Background Art

[0002] Airborne Molecular Contaminants (AMCs) have always been an important issue in the semiconductor manufacturing process because they may adversely affect the process, leading to product quality problems or process failure. The composition of AMCs is quite diverse, including various organic and inorganic substances, such as organic solvents, volatile organic compounds, gaseous metals, oxides, ammonia and suspended particles.

[0003] In order to effectively control and remove suspended molecular pollutants, semiconductor manufacturing plants usually use air washing devices (Air Washer) in clean room air conditioning boxes to remove acidic and alkaline gaseous molecular pollutants. The air washing device uses wet scrubbing spray to treat the external airflow, or sets a wet template after the airflow passes to enhance the removal efficiency. The filling material of the washing tower is used as a medium to remove pollutants such as SO2, NH3 and suspended particles with high concentrations in the external air; the working principle of the air washing device is to dissolve the pollutants in the gas phase and transfer them to the liquid phase through contact absorption between the gas phase and the liquid phase to achieve the purpose of separation.

[0004] However, due to the problem of uneven gas flow or flow field, the existing air washing device cannot effectively remove pollutants (such as volatile organic compounds). In order to maintain a clean room factory with high cleanliness, a large number of chemical filters must be installed in the clean room system. However, the service life of these chemical filters is often very short and needs to be replaced frequently, which leads to a very high cost. Since volatile organic compounds have a high vapor pressure, once adsorbed by the chemical filter, they are easy to evaporate and dissipate again, resulting in secondary pollution.

[0005] Therefore, it is necessary to develop an air washing device that can effectively filter pollutants, especially an air washing device with higher removal efficiency, which can reduce the use of chemical filters in subsequent devices, prevent the generation of secondary pollution, and thus reduce maintenance costs.

[0006] In view of the above problems of the prior art, the present application provides a gas treatment device, which uses stepped water washing units to stabilize the fluid flowing through the device, increase the uniformity of the flow field inside the device, and improve the pollutant removal efficiency of the device. Utility Model Content

[0007] The technical problem to be solved by the present application is to provide a gas treatment device, in which the water washing units of the water washing assembly are arranged in a stepped manner according to the flow direction of the fluid. The stepped structure stabilizes the fluid flowing through, increases the uniformity of the flow field inside the device, and thereby improves the pollutant removal efficiency of the device.

[0008] In order to achieve the above-mentioned purposes and effects, the present application provides a gas treatment device, which includes an air supply component, a shell and a water washing component, wherein an air inlet and an air outlet are respectively arranged at two ends of the shell, the air inlet is connected to one end of the air supply component, the water washing component is arranged on an inner side of the shell, a first accommodation space is arranged between the water washing component and the air inlet, a second accommodation space is arranged between the water washing component and the air outlet, the water washing component includes a first water washing unit and a second water washing unit, the first water washing unit includes a first body, a first filter element and a first nozzle, and a first air inlet is arranged below the first body A first air outlet is arranged on an upper part of the first body, the first air inlet is connected to the first accommodating space, the first air outlet is connected to the second accommodating space, the first filter is arranged on an inner side of the first body, the first nozzle is arranged on an upper part of the first filter, the second water washing unit comprises a second body, a second filter and a second nozzle, a second air inlet is arranged on a lower part of the second body, a second air outlet is arranged on an upper part of the second body, the second air inlet is connected to the first accommodating space, the second air outlet is connected to the second accommodating space, a first height of the first air inlet is greater than a second height of the second air inlet, the second filter is arranged on an upper part of the second body, The filter element is arranged on an inner side of the second body, and the second nozzle is arranged on an upper side of the second filter element, wherein the air inlet, the first water washing unit, the second water washing unit and the air outlet are arranged in sequence, a first fluid enters from the air supply component, after the first fluid flows through the air supply component, the first fluid enters the first accommodating space from the air inlet, after the first fluid enters the first accommodating space, part of the first fluid enters the first water washing unit from the first air inlet, and another part of the first fluid enters the second water washing unit from the second air inlet, the first water washing unit and the second water washing unit filter the first fluid to form a second fluid, the second The fluid enters the second accommodating space from the first air outlet and the second air outlet. After the second fluid enters the second accommodating space, it flows out from the air outlet. The first nozzle and the second nozzle spray a third fluid to the first filter element and the second filter element. The third fluid mixes with the first fluid on an inner side of the first water washing unit and the second water washing unit to form the second fluid. After the third fluid passes through the first filter element and the second filter element, the third fluid flows out of the first water washing unit and the second water washing unit. This device is used to increase the uniformity of the flow field of the fluid flowing through the inner side, providing a gas treatment device that can improve the efficiency of pollutant removal.

[0009] In one embodiment of the present application, the air supply component includes a plurality of fans, the fans are disposed adjacent to each other, and the fans transport the first fluid.

[0010] In one embodiment of the present application, the first water washing unit includes a first body, a first filter element and a first nozzle, the first filter element is arranged on an inner side of the first body, and the first nozzle is arranged above the first filter element. The second water washing unit includes a second body, a second filter element and a second nozzle, the second filter element is arranged on an inner side of the second body, and the second nozzle is arranged above the second filter element.

[0011] In one embodiment of the present application, a first pump is further included, one end of which is connected to a water source, and the other end of the first pump is connected to the first nozzle and the second nozzle.

[0012] In one embodiment of the present application, a water tank is further included. The water tank is disposed at a lower inner side of the first accommodating space corresponding to the water washing component.

[0013] In one embodiment of the present application, a second pump is further included, one end of which is connected to the water tank, and the other end of the second pump is connected to a drainage end.

[0014] In one embodiment of the present application, the first pump transports a third fluid from the water source to the first nozzle and the second nozzle, and the first nozzle and the second nozzle respectively spray the third fluid to the first filter element and the second filter element. After the third fluid passes through the first filter element and the second filter element, the third fluid flows through the first accommodating space to the water tank, and the third fluid is then transported to the drainage end via the second pump.

[0015] In one embodiment of the present application, it further includes: an auxiliary shell, which is arranged on an upper part of the shell, and the two ends of the auxiliary shell are respectively provided with an auxiliary air inlet and an auxiliary air outlet, and the auxiliary air inlet is connected to the end of the air supply component; an auxiliary water washing component, which is arranged on an inner side of the auxiliary shell, and the auxiliary water washing component and the auxiliary air inlet are separated to form a third accommodating space, and the auxiliary water washing component and the auxiliary air outlet are separated to form a fourth accommodating space, and the water washing component includes: a third water washing unit, a third air inlet is arranged at one lower part, and the third air inlet is arranged at the lower part. A third air outlet is arranged above the third water washing unit, the third air inlet is connected to the third accommodating space, and the third air outlet is connected to the fourth accommodating space; a fourth water washing unit is arranged adjacent to the side of the third water washing unit facing the auxiliary air outlet, a fourth air inlet is arranged below the fourth water washing unit, a fourth air outlet is arranged above the fourth water washing unit, the fourth air inlet is connected to the third accommodating space, the fourth air outlet is connected to the fourth accommodating space, and a third height of the third air inlet is greater than a fourth height of the fourth air inlet.

[0016] In an embodiment of the present application, the first fluid and the second fluid are a gas.

[0017] In an embodiment of the present application, the third fluid is a liquid.

[0018] The details of other effects and embodiments of the present application are described below with reference to the drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0020] Figure 1 It is a structural schematic diagram of an embodiment of the present application;

[0021] Figure 2 is a schematic diagram of fluid flow in one embodiment of the present application;

[0022] Figure 3 is a schematic diagram of pump connection of one embodiment of the present application;

[0023] Figure 4 It is a schematic diagram of the arrangement of the water washing components of one embodiment of the present application;

[0024] FIG. 5A to FIG. 5B is a schematic diagram of a multi-layer device according to an embodiment of the present application; and

[0025] Figure 6 It is a schematic diagram of a multi-layer water washing assembly according to an embodiment of the present application.

[0026] Explanation of symbols

[0027] 10 air supply component 12 fan

[0028] 20 shell 22 air inlet

[0029] 23 first accommodation space 24 air outlet

[0030] 25 second accommodating space 30 washing component

[0031] 32 first washing unit 321 first body

[0032] 322 First air inlet 324 First air outlet

[0033] 326 first filter element 328 first nozzle

[0034] 34 second washing unit 341 second body

[0035] 342 Second air inlet 344 Second air outlet

[0036] 346 second filter element 348 second nozzle

[0037] 40 water tank 50 first pump

[0038] 60 Water source 70 Second pump

[0039] 80 Drainage end A1 first fluid

[0040] A2 Second fluid H1 First height

[0041] H2 second height H3 third height

[0042] H4 fourth height L1 third fluid

[0043] 20' accessory housing 22' accessory air inlet

[0044] 23' The third storage space 24' The auxiliary air outlet

[0045] 25' fourth storage space 30' auxiliary washing component

[0046] 32' third water washing unit 322' third air inlet

[0047] 324' third air outlet 34' fourth water washing unit

[0048] 342' the fourth air inlet 344' the fourth air outlet DETAILED DESCRIPTION

[0049] In view of the above-mentioned problems of the prior art, the present application provides a gas processing device, which is a shell connected to an air supply component, a water washing component is arranged on an inner side of the shell, the water washing component includes a first water washing unit and a second water washing unit, a first height of a second air inlet of the first water washing unit is greater than a second height of a second air inlet of the second water washing unit, so that the first water washing unit and the second water washing unit are arranged in a stepped manner, and the stepped arrangement is utilized to increase the flow field uniformity of the fluid flowing through the gas processing device to improve the pollutant removal efficiency, thereby solving the problem of the prior art that pollutants cannot be effectively removed due to uneven flow or flow field, and a chemical filter must be used to cause secondary pollution.

[0050] See also Figure 1 , which is a structural schematic diagram of an embodiment of the present application. As shown in the figure, this embodiment is the first embodiment. This embodiment is a gas processing device, which includes an air supply component 10, a shell 20 and a water washing component 30; in this embodiment, the air supply component 10 transports fluid from the outside (for example, outside the factory area) to the shell 20, but this is not limited thereto.

[0051] See again Figure 1 Also see Figure 2 , Figure 21 is a schematic diagram of fluid flow of an embodiment of the present application. As shown in the figure, in this embodiment, an air inlet 22 and an air outlet 24 are respectively arranged at the two ends of the shell 20, and the air inlet 22 is connected to one end of the air supply component 10. The water washing component 30 is arranged on an inner side of the shell 20. The water washing component 30 is spaced from the air inlet 22 to set a first accommodating space 23. The water washing component 30 is spaced from the air outlet 24 to set a second accommodating space 25. The water washing component 30 includes a first water washing unit 32 and a second water washing unit 34. A first air inlet 322 is arranged below the first water washing unit 32, and a first air outlet 324 is arranged above the first water washing unit 32. The first air inlet 322 is connected to the first accommodating space 23, and the first air outlet 324 is connected to the second accommodating space 25. The second water washing unit 34 is arranged from the air inlet 22 to the air outlet 24 in accordance with the direction of The first water washing unit 32 is disposed adjacently on one side of the first water washing unit 32, so that the air inlet 22, the first water washing unit 32, the second water washing unit 34 and the air outlet 24 are disposed in sequence, a second air inlet 342 is disposed below the second water washing unit 34, and a second air outlet 344 is disposed above the second water washing unit 34, the second air inlet 342 is connected to the first accommodating space 23, and the second air outlet 344 is connected to the second accommodating space 25. In this embodiment, there is a first height H1 between the first air inlet 322 of the first water washing unit 32 and the bottom surface of the shell 20, and there is a second height H2 between the second air inlet 342 of the second water washing unit 34 and the bottom surface of the shell 20, wherein the first height H1 is greater than the second height H2, so that the first water washing unit 32 and the second water washing unit 34 are arranged in a stepped manner from the air inlet 22 to the air outlet 24.

[0052] Continuing from the above, the first water washing unit 32 includes a first body 321, a first filter element 326 and a first nozzle 328, the first air inlet 322 is arranged at a lower part of the first body 321, the first air outlet 324 is arranged at an upper part of the first body 321, the first filter element 326 is arranged on an inner side of the first body 321, and the first nozzle 328 is arranged above the first filter element 326. The second water washing unit 34 includes a second body 341, a second filter element 346 and a second nozzle 348, the second air inlet 342 is arranged at a lower part of the second body 341, the second air outlet 344 is arranged at an upper part of the second body 341, the second filter element 346 is arranged on an inner side of the second body 341, and the second nozzle 348 is arranged above the second filter element 346.

[0053] See again Figure 2As shown in the figure, in this embodiment, the first fluid A1 enters from the other end of the air supply component 10. After the first fluid A1 flows through the air supply component 10, the first fluid A1 enters the first accommodating space 23 from the air inlet 22. After the first fluid A1 enters the first accommodating space 23, part of the first fluid A1 enters the first water washing unit 32 from the first air inlet 322, and the other part of the first fluid A1 enters the second water washing unit 34 from the second air inlet 342. The first water washing unit 32 and the second water washing unit 34 filter the pollutants of the first fluid A1 accordingly, so that the first fluid A1 forms a second fluid A2. The filtered second fluid A2 enters the second accommodating space 25 from the first air outlet 324 and the second air outlet 344 respectively. After the second fluid A2 enters the second accommodating space 25, it flows out from the air outlet 24.

[0054] Continuing with the above, in this embodiment, after the first fluid A1 enters the inner side of the first accommodating space 23, it is guided by the stepped arrangement of the first water washing unit 32 and the second water washing unit 34, so that the first fluid A1 enters the first water washing unit 32 and the second water washing unit 34 evenly. The filtering efficiency of the first water washing unit 32 and the second water washing unit 34 is improved by the uniform flow field of the first fluid A1, so that this embodiment can further eliminate the existing chemical filtering components.

[0055] See again Figure 1 to Figure 2 Also see Figure 3 , Figure 3 This is a pump connection diagram of an embodiment of the present application. As shown in the figure, in this embodiment, the air supply component 10 includes a plurality of fans 12, and the fans 12 are adjacently arranged. The fans 12 are used to transport the first fluid A1, and the air intake volume is adjusted by the fans 12 to make the flow field of the first fluid A1 uniform.

[0056] Continuing from the above, in this embodiment, a water tank 40 is further included. The water tank 40 is disposed at a lower inner side of the first accommodating space 23 corresponding to the water washing assembly 30. The water tank 40 is used to receive fluid, such as liquid.

[0057] Continuing from the above, in this embodiment, a first pump 50 is further included. One end of the first pump 50 is connected to a water source 60, and the other end of the first pump 50 is connected to the first nozzle 328 and the second nozzle 348 to provide a third fluid L1.

[0058] Continuing from the above, in this embodiment, a second pump 70 is further included. One end of the second pump 70 is connected to the water tank 40 , and the other end of the second pump 70 is connected to a drainage port 80 .

[0059] Continuing with the above, in this embodiment, the first pump 50 conveys a third fluid L1 from the water source 60 to the first nozzle 328 and the second nozzle 348. The first nozzle 328 and the second nozzle 348 respectively spray the third fluid L1 to the first filter element 326 and the second filter element 346. The third fluid L1 is mixed with the first fluid A1 on the inner side of the first water washing unit 32 and the second water washing unit 34 to remove pollutants in the first fluid A1. The filtered first fluid A1 forms the second fluid A2. After the third fluid L1 passes through the first filter element 326 and the second filter element 346, the third fluid L1 flows through the first accommodating space 23 to the water tank 40. The third fluid L1 is then conveyed to the drainage end 80 via the second pump 70 for discharge.

[0060] Continuing from the above, in this embodiment, the first fluid A1 and the second fluid A2 are gases, and the third fluid L1 is a liquid, but this is not limited thereto.

[0061] See also Figure 4 , which is a schematic diagram of the arrangement of the water washing components of an embodiment of the present application. As shown in the figure, this embodiment is the second embodiment, which is based on the first embodiment. In this embodiment, the combination of the first water washing unit 32 and the second water washing unit 34 of the water washing component 30 is arranged in multiple arrangements to form a stepped arrangement of multiple water washing units, further guiding the flow direction of the first fluid A1 to make it more uniform, so as to increase the filtration efficiency of each water washing unit.

[0062] See also FIG. 5A to FIG. 5B , which is a schematic diagram of a multi-layer device of an embodiment of the present application. As shown in the figure, this embodiment is the third embodiment, which is based on the first embodiment or the second embodiment. In this embodiment, the gas processing device further includes an auxiliary shell 20' and an auxiliary water washing component 30'.

[0063] Continuing from the above, in the present embodiment, the auxiliary shell 20' is arranged at an upper part of the shell 20, and an auxiliary air inlet 22' and an auxiliary air outlet 24' are respectively arranged at the two ends of the auxiliary shell 20', and the auxiliary air inlet 22' is connected to the end of the air supply component 10, and the auxiliary water washing component 30' is arranged on an inner side of the auxiliary shell 20', and the auxiliary water washing component 30' and the auxiliary air inlet 22' are spaced to form a third accommodating space 23', and the auxiliary water washing component 30' and the auxiliary air outlet 24' are spaced to form a fourth accommodating space 25', and the auxiliary water washing component 30' includes a third water washing unit 32' and a fourth water washing unit 34', and a third air inlet 322' is arranged at a lower part of the third water washing unit 32', and a third air outlet 324' is arranged at an upper part of the third water washing unit 32', and the third air inlet 322 ' is connected to the third accommodating space 23', the third air outlet 324' is connected to the fourth accommodating space 25', the fourth water washing unit 34' is adjacently arranged on the side of the third water washing unit 32' facing the auxiliary air outlet 24', a fourth air inlet 342' is arranged below the fourth water washing unit 34', a fourth air outlet 344' is arranged above the fourth water washing unit 34', the fourth air inlet 342' is connected to the third accommodating space 23', and the fourth air outlet 344' is connected to the fourth accommodating space 25', wherein, as the first water washing unit 32 and the second water washing unit 34 in the first embodiment, the third air inlet 322' of the third water washing unit 32' has a third height H3, the fourth air inlet 342' of the fourth water washing unit 34' has a fourth height H4, and the third height H3 is greater than the fourth height H4.

[0064] Continuing from the above, in this embodiment, the first fluid A1 enters from the other end of the air supply component 10. After the first fluid A1 flows through the air supply component 10, the first fluid A1 enters the third accommodating space 23' through the auxiliary air inlet 22'. After the first fluid A1 enters the third accommodating space 23', part of the first fluid A1 enters the third water washing unit 32' through the third air inlet 322', and another part of the first fluid A1 enters the fourth water washing unit 34' through the fourth air inlet 342'. The third water washing unit 32' and the fourth water washing unit 34' filter the pollutants of the first fluid A1 accordingly, so that the first fluid A1 forms a second fluid A2. The filtered second fluid A2 enters the fourth accommodating space 25' from the third air outlet 324' and the fourth air outlet 344' respectively. After the second fluid A2 enters the fourth accommodating space 25', it flows out from the auxiliary air outlet 24'. The other component structures and their actuation relationships of this embodiment are the same as those of the first embodiment described above, so they are not repeated here.

[0065] See also Figure 6, which is a schematic diagram of a multi-layer water washing component of an embodiment of the present application. As shown in the figure, this embodiment is based on the first embodiment or the second embodiment. In this embodiment, the water washing component 30 or the auxiliary water washing component 30' can further stack the water washing units 32, 34, 32', 34' individually (the figure takes the first water washing unit 32 and the second water washing unit 34 as an example), so that the water washing units 32, 34, 32', 34' are arranged in a stepped manner and are further arranged in multiple layers to improve the filtering efficiency, wherein the first filter element 326 and the first nozzle 328 correspond to the multi-layer arrangement; the other component structures and their actuation relationships of this embodiment are the same as those of the above-mentioned first embodiment or the second embodiment, so they are not repeated here.

[0066] In one embodiment, the first air outlet 324 of the first water washing unit 32 and the second air outlet 344 of the second water washing unit 34 can be at the same horizontal position, so that the first air outlet 324 is flush with the second air outlet 344, and as in the above-mentioned embodiment of stacking water washing units, more water washing units are stacked in sequence toward the air outlet 24 to improve the filtering effect, but this is not limited to this.

[0067] Table (I) Removal efficiency relationship table of water washing unit:

[0068] L / G IPA DRE % PGMEA DRE % Acetone DRE % 0.56 96％ 99％ 66％ 0.60 97％ 99％ 66％ 0.66 97％ 99％ 74％ 0.70 97％ 99％ 68％ 0.78 98％ 99％ 84％ 0.90 99％ 99％ 90％ 1.00 99％ 99％ 95％

[0069] In the above table (I), G is the first fluid A1, and L is the third fluid L1, wherein the pollutants included in the first fluid A1 are exemplified by isopropyl alcohol (IPA), propylene glycol methyl ether acetate (PGMEA) and acetone, which are not limited here.

[0070] In the above embodiments, by adjusting the ratio and flow rate of the first fluid A1 and the third fluid L1, the pollutants included in the first fluid A1 can be effectively removed. As shown in Table (1) above, as the flow rate of the third fluid L1 increases, the removal efficiency (DRE) of the pollutants included in the first fluid A1 also increases.

[0071] In summary, the present application provides a gas treatment device, in which the water washing units of the water washing assembly are arranged in a stepped manner according to the flow direction of the fluid. The stepped structure stabilizes the fluid, increases the uniformity of the flow field inside the device, improves the pollutant removal efficiency of the device, and further reduces the use of chemical filtration components. This solves the problem that the prior art cannot effectively remove pollutants due to uneven gas flow or flow field, and a large number of chemical filtration components must be set up, which increases costs and easily causes secondary pollution.

[0072] The embodiments and / or implementation methods described above are only used to illustrate the preferred embodiments and / or implementation methods for realizing the technology of the present application, and are not intended to limit the implementation methods of the technology of the present application in any form. Any technical personnel in this field may make slight changes or modifications to other equivalent embodiments without departing from the scope of the technical means disclosed in the content of the present application, but they should still be regarded as technologies or embodiments that are essentially the same as the present application.

Claims

1. A gas processing device, characterized in that: The gas processing device comprises: an air supply assembly; A housing, with an air inlet and an air outlet respectively disposed at two ends thereof, the air inlet being connected to one end of the air supply assembly; and A water washing assembly is arranged on an inner side of the housing, a first accommodation space is arranged between the water washing assembly and the air inlet, and a second accommodation space is arranged between the water washing assembly and the air outlet, and the water washing assembly includes: a first water washing unit, comprising a first body, a first filter and a first nozzle, a first air inlet is disposed at a lower portion of the first body, a first air outlet is disposed at an upper portion of the first body, the first air inlet is connected to the first accommodation space, the first air outlet is connected to the second accommodation space, the first filter is disposed at an inner side of the first body, and the first nozzle is disposed at an upper portion of the first filter; and a second water washing unit, comprising a second body, a second filter and a second nozzle, a second air inlet is disposed at a lower portion of the second body, a second air outlet is disposed at an upper portion of the second body, the second air inlet is connected to the first accommodation space, the second air outlet is connected to the second accommodation space, a first height of the first air inlet is greater than a second height of the second air inlet, the second filter is disposed at an inner side of the second body, and the second nozzle is disposed at an upper portion of the second filter; The air inlet, the first water washing unit, the second water washing unit and the air outlet are arranged in sequence, a first fluid enters from the air supply component, after the first fluid flows through the air supply component, the first fluid enters the first accommodation space from the air inlet, after the first fluid enters the first accommodation space, part of the first fluid enters the first water washing unit from the first air inlet, and another part of the first fluid enters the second water washing unit from the second air inlet, the first water washing unit and the second water washing unit filter the first fluid to form a second fluid The second fluid enters the second accommodating space from the first air outlet and the second air outlet. After entering the second accommodating space, the second fluid flows out from the air outlet. The first nozzle and the second nozzle spray a third fluid to the first filter element and the second filter element. The third fluid mixes with the first fluid on an inner side of the first water washing unit and the second water washing unit to form the second fluid. After the third fluid passes through the first filter element and the second filter element, the third fluid flows out of the first water washing unit and the second water washing unit.

2. The gas processing device according to claim 1, characterized in that: The air supply component includes a plurality of fans, which are arranged adjacent to each other and transport the first fluid.

3. The gas processing device according to claim 1, characterized in that: The invention further comprises a first pump, one end of which is connected to a water source, and the other end of the first pump is connected to the first nozzle and the second nozzle.

4. The gas processing device according to claim 3, characterized in that: The utility model further comprises a water tank, which is arranged at a lower inner side of the first accommodating space corresponding to the water washing component.

5. The gas processing device according to claim 4, characterized in that: The invention further comprises a second pump, one end of which is connected to the water tank, and the other end of the second pump is connected to a drainage end.

6. The gas processing device according to claim 5, characterized in that: The first pump delivers the third fluid from the water source to the first nozzle and the second nozzle. The first nozzle and the second nozzle respectively spray the third fluid to the first filter element and the second filter element. After the third fluid passes through the first filter element and the second filter element, the third fluid flows through the first accommodating space to the water tank. The third fluid is then delivered to the drainage end via the second pump.

7. The gas processing device according to claim 1, characterized in that: Also includes: An auxiliary shell is disposed on an upper portion of the shell, and an auxiliary air inlet and an auxiliary air outlet are respectively disposed at two ends of the auxiliary shell, and the auxiliary air inlet is connected to the end of the air supply component; An auxiliary water washing assembly is arranged on an inner side of the auxiliary housing, the auxiliary water washing assembly and the auxiliary air inlet are spaced apart to form a third accommodation space, and the auxiliary water washing assembly and the auxiliary air outlet are spaced apart to form a fourth accommodation space, and the water washing assembly comprises: a third water washing unit, a third air inlet is disposed at a lower portion thereof, a third air outlet is disposed at an upper portion of the third water washing unit, the third air inlet is connected to the third accommodating space, and the third air outlet is connected to the fourth accommodating space; as well as A fourth water washing unit is arranged adjacent to a side of the third water washing unit facing the auxiliary air outlet, a fourth air inlet is arranged below the fourth water washing unit, a fourth air outlet is arranged above the fourth water washing unit, the fourth air inlet is connected to the third accommodating space, the fourth air outlet is connected to the fourth accommodating space, and a third height of the third air inlet is greater than a fourth height of the fourth air inlet.

8. The gas processing device according to claim 1, characterized in that: The first fluid and the second fluid are a gas.

9. The gas processing device according to claim 6, characterized in that: The third fluid is a liquid.

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