Nozzle assembly and polycrystalline silicon fluidized bed reactor

Abstract

The utility model provides a nozzle assembly and a polycrystalline silicon fluidized bed reactor, and relates to the technical field of polycrystalline silicon, and the nozzle assembly comprises a faceplate arranged in the polycrystalline silicon fluidized bed reactor; the nozzle holder is hollow and penetrates through the faceplate; the nozzle comprises a hollow section and a solid section; the hollow section is connected with the inner side of the nozzle seat, a plurality of spray holes facing obliquely downward are uniformly distributed in the side wall of the upper end of the spray hole, the lower end of the hollow section is an air inlet end, and the spray hole and the air inlet end are respectively positioned on the upper side and the lower side of the disc chuck; the middle of the shielding part is connected with the solid section; the lower side of the middle of the shielding part is located above the spraying hole, and the edge of the shielding part is connected with a side blocking part. And through the arrangement of the shielding part, silicon powder can be prevented from entering the nozzle to cause blockage. The air outlet direction of the nozzle faces the periphery, so that the influence of a low-speed area existing in the part, which faces upwards and is close to the wall of the reactor, of the direct injection nozzle is weakened, the problem of equipment abrasion is relieved, and the service life of equipment is prolonged.

Description

Technical Field

[0001] The utility model relates to the technical field of polysilicon, in particular to a nozzle assembly and a polysilicon fluidized bed reactor. Background Art

[0002] The polysilicon fluidized bed reactor currently used adopts a direct injection nozzle, which has the following defects:

[0003] 1. Silicon powder easily enters the nozzle and causes blockage (easy to enter but difficult to exit).

[0004] 2. The gas outlet direction of the direct injection nozzle is upward, and there is a low-speed area near the reactor wall, which is easy to cause equipment wear (in the low-speed area, due to the increase in friction between the fluid and the reactor wall, a boundary layer is formed. The fluid speed in the boundary layer is low, and the contact time between the fluid and the reactor wall is long, which leads to an increase in the fluid shear stress in this area, causing wear). Utility Model Content

[0005] In view of the above situation, the utility model provides a nozzle assembly and a polysilicon fluidized bed reactor, aiming to solve the defects pointed out in the above background technology.

[0006] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0007] In a first aspect, the utility model provides a nozzle assembly, comprising:

[0008] A flower disk is arranged in a polysilicon fluidized bed reactor;

[0009] The nozzle seat is hollow and passes through the flower disc;

[0010] The nozzle comprises a hollow section and a solid section; the hollow section is connected to the inner side of the nozzle seat, a plurality of nozzle holes facing obliquely downward are evenly distributed on the upper side wall of the nozzle hole, the lower end of the hollow section is an air inlet end, and the nozzle hole and the air inlet end are respectively located on the upper and lower sides of the faceplate;

[0011] The middle part of the shielding component is connected to the solid section; the lower side of the middle part of the shielding component is located above the spray hole, and the edge of the shielding component is connected to the side blocking part.

[0012] In some embodiments of the present invention, the edge of the shielding component is bent downward to form the side blocking portion.

[0013] In some embodiments of the present invention, the nozzle seat is welded to the faceplate.

[0014] In some embodiments of the present invention, the hollow section is threadedly connected to the nozzle seat.

[0015] In some embodiments of the present invention, a first nut is threadedly connected to the hollow section, and the bottom of the first nut can abut against the top of the nozzle seat.

[0016] In some embodiments of the utility model, the middle portion of the shielding component is sleeved on the solid section, a second nut is threadedly connected to the solid section, and the bottom of the second nut can abut against the top of the shielding component.

[0017] In some embodiments of the present invention, the inner diameter of the side stop portion gradually increases from top to bottom.

[0018] In some embodiments of the present invention, the nozzle assembly also includes a filling ring; the filling ring is connected to the hollow section, the filling ring is located on the inner side of the side baffle, the bottom of the filling ring is flush with the top of the air outlet end of the spray hole, and the outer side of the filling ring is in contact with the inner side of the side baffle.

[0019] In some embodiments of the present invention, the filling ring is made of cemented carbide.

[0020] In a second aspect, the utility model provides a polysilicon fluidized bed reactor, comprising the above-mentioned nozzle assembly.

[0021] The embodiments of the present invention have at least the following advantages or beneficial effects:

[0022] 1. By setting up the shielding components, silicon powder can be prevented from entering the nozzle and causing blockage, saving the cost of system shutdown and maintenance.

[0023] Second, the gas outlet direction of the nozzle is changed so that the gas outlet direction of the nozzle is directed in all directions, which weakens the upward gas outlet direction of the direct injection nozzle and the influence of the low-speed zone near the reactor wall, alleviates the equipment wear problem and extends the service life of the equipment.

[0024] Other features and advantages of the present invention will be set forth in the following description, and in part will become apparent from the description, or may be understood by practicing the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0026] Figure 1 A schematic diagram of the structure of the nozzle assembly provided in Example 1;

[0027] Figure 2 This is a schematic diagram of the structure of the filling circle provided in Example 2.

[0028] icon:

[0029] 1-disc, 2-nozzle holder,

[0030] 3-nozzle, 31-hollow section, 32-solid section, 33-spray hole,

[0031] 4-shielding component, 41-side blocking part,

[0032] 5- First nut,

[0033] 6- Second nut,

[0034] 7-Fill the circle. DETAILED DESCRIPTION

[0035] In the following, only some exemplary embodiments are briefly described. As those skilled in the art can appreciate, the described embodiments can be modified in various different ways without departing from the spirit or scope of the embodiments of the present invention.

[0036] In the description of the embodiments of the present invention, it should be understood that the terms "middle", "upper", "lower", "vertical", "top", "bottom", "inside", "outside", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the embodiments of the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they cannot be understood as limitations on the embodiments of the present invention.

[0037] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the embodiments of the present utility model, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined.

[0038] In the embodiments of the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral body; it can be directly connected, or indirectly connected through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present invention can be understood according to specific circumstances.

[0039] The embodiments of the present utility model are described in detail below with reference to the accompanying drawings.

[0040] Example 1

[0041] See also Figure 1 This embodiment provides a nozzle 3 assembly, including a faceplate 1, a nozzle seat 2, a nozzle 3 and a shielding component 4.

[0042] The faceplate 1 is arranged in a polycrystalline silicon fluidized bed reactor.

[0043] The nozzle seat 2 is hollow and penetrates the faceplate 1. The nozzle seat 2 is fixed on the faceplate 1 by welding or other methods.

[0044] The nozzle 3 includes a hollow section 31 and a solid section 32; the hollow section 31 is connected to the inner side of the nozzle holder 2, and a plurality of (8) spray holes 33 facing obliquely downward are evenly distributed on the upper side wall of the spray hole 33, and the lower end of the hollow section 31 is an air inlet end. The spray hole 33 and the air inlet end are respectively located on the upper and lower sides of the faceplate 1.

[0045] In a specific implementation scenario, the hollow section 31 is connected to the inner side of the nozzle seat 2 in the following manner: the hollow section 31 is threadedly connected to the nozzle seat 2; a first nut 5 is also threadedly connected to the hollow section 31, and the bottom of the first nut 5 can abut against the top of the nozzle seat 2.

[0046] The middle of the shielding component 4 is connected to the solid section 32; the lower side of the middle of the shielding component 4 is located above the spray hole 33, and the edge of the shielding component 4 is connected to the side block 41. In a specific implementation scenario, the edge of the shielding component 4 is bent downward to form the side block 41, and the inner side of the side block 41 is vertical.

[0047] In a specific implementation scenario, the middle portion of the shielding component 4 is connected to the solid segment 32 as follows: the middle portion of the shielding component 4 is sleeved on the solid segment 32, a second nut 6 is threadedly connected to the solid segment 32, and the bottom of the second nut 6 can abut against the top of the shielding component 4. In other implementation scenarios, the shielding component 4 can be connected to the nozzle 3 as a whole.

[0048] In combination with the above content, this embodiment has at least the following beneficial effects:

[0049] 1. By setting the shielding component 4, it is possible to prevent silicon powder from entering the nozzle 3 and causing blockage, thereby saving the cost of system shutdown and maintenance.

[0050] Second, the gas outlet direction of the nozzle 3 is changed so that the gas outlet direction of the nozzle 3 is directed in all directions, which reduces the influence of the low-speed zone existing in the part close to the reactor wall where the gas outlet direction of the direct-injection nozzle 3 is directed upward, alleviates the problem of equipment wear, and prolongs the service life of the equipment.

[0051] Example 2

[0052] First, see Figure 1-2 The difference between this embodiment and embodiment 1 is that:

[0053] The inner side of the side baffle 41 is inclined, and the inner diameter of the side baffle 41 gradually increases from top to bottom, so that the side baffle 41 can be guided to reduce the impact of the airflow on the side baffle 41 .

[0054] Furthermore, the nozzle 3 assembly may also include a filling ring 7, which is connected to the hollow section 31, and is located on the inner side of the side baffle 41. The bottom of the filling ring 7 is flush with the top of the air outlet end of the spray hole 33, and the outer side of the filling ring 7 is tightly fitted with the inner side of the side baffle 41. In this way, the gap above the air outlet end of the spray hole 33 can be filled to avoid the formation of complex gas flow in the gap.

[0055] In a specific implementation scenario, the filling ring 7 is made of cemented carbide and is sleeved on the hollow section 31 by means of interference fit.

[0056] Second, see Figure 1-2 This embodiment provides a polysilicon fluidized bed reactor, including the above-mentioned nozzle 3 assembly.

[0057] Finally, it should be noted that the above are only preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention may be subject to various modifications and variations. In the absence of conflicts, the embodiments of the present application and the features in the embodiments may be combined with each other at will. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A nozzle assembly, characterized in that: include: A flower disk is arranged in a polysilicon fluidized bed reactor; The nozzle seat is hollow and passes through the flower disc; The nozzle comprises a hollow section and a solid section; the hollow section is connected to the inner side of the nozzle seat, a plurality of nozzle holes facing obliquely downward are evenly distributed on the upper side wall of the nozzle hole, the lower end of the hollow section is an air inlet end, and the nozzle hole and the air inlet end are respectively located on the upper and lower sides of the faceplate; The middle part of the shielding component is connected to the solid section; the lower side of the middle part of the shielding component is located above the spray hole, and the edge of the shielding component is connected to the side blocking part.

2. The nozzle assembly according to claim 1, characterized in that The edge of the shielding component is bent downward to form the side shielding portion.

3. The nozzle assembly according to claim 1, characterized in that The nozzle seat is welded to the faceplate.

4. The nozzle assembly according to claim 1, characterized in that The hollow section is threadedly connected to the nozzle seat.

5. The nozzle assembly according to claim 4, characterized in that A first nut is threadedly connected to the hollow section, and the bottom of the first nut can abut against the top of the nozzle seat.

6. The nozzle assembly according to claim 1, characterized in that The middle portion of the shielding component is sleeved on the solid section, a second nut is threadedly connected to the solid section, and the bottom of the second nut can abut against the top of the shielding component.

7. The nozzle assembly according to any one of claims 1 to 6, characterized in that: The inner diameter of the side stop portion increases gradually from top to bottom.

8. The nozzle assembly according to claim 7, characterized in that The nozzle assembly also includes a filling ring; the filling ring is connected to the hollow section, the filling ring is located on the inner side of the side baffle, the bottom of the filling ring is flush with the top of the air outlet end of the spray hole, and the outer side of the filling ring is in contact with the inner side of the side baffle.

9. The nozzle assembly according to claim 8, characterized in that The filling ring is made of hard alloy.

10. A polysilicon fluidized bed reactor, characterized in that: Comprising the nozzle assembly as described in any one of claims 1 to 9.

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