Graphite boat dry cleaning device

Abstract

The utility model relates to the technical field of solar cell manufacturing, in particular to a graphite boat dry cleaning device. The device comprises a cleaning box and at least one flow uniformizing plate, a cavity is formed in the cleaning box, and each flow uniformizing plate is arranged in the cavity; at least one installation structure is arranged on the inner cavity wall of the cavity, the installation structures correspond to the flow uniformizing plates in a one-to-one mode, and the installation structures are matched with the corresponding flow uniformizing plates in an inserted mode. Compared with the traditional technical scheme that the flow uniformizing plate is fixed by means of screws, the device provided by the utility model has the advantages that the flow uniformizing plate is mounted in the cavity through the insertion matching of the mounting structure and the flow uniformizing plate. In the process of disassembling and assembling the flow uniformizing plate by a worker, the flow uniformizing plate only needs to be pushed into or pulled out of the cavity, and the step of disassembling screws is omitted, so that the working time and the downtime of the worker are reduced, the difficulty of disassembling and assembling work is reduced, and meanwhile, the problem of secondary disassembling and assembling caused by improper installation is completely eradicated.

Description

Technical Field

[0001] The utility model relates to the technical field of solar cell manufacturing, in particular to a graphite boat dry cleaning device. Background Art

[0002] At present, the industry usually adopts wet cleaning to clean the graphite boat, that is, immersing the graphite boat in acid or alkaline cleaning liquid, and repeatedly immersing, rinsing, and drying the graphite boat through the liquid; this wet cleaning takes a long time, is inefficient, and easily causes a disconnection with the production capacity of process equipment.

[0003] In order to overcome the shortcomings of wet cleaning process, more and more people are paying attention to dry cleaning of graphite boats. Dry cleaning devices usually set a flow plate for uniform gas inside the cleaning chamber. The existing flow plate is connected to the cavity wall of the cavity by a support column. During installation, the two ends of the support column are fixedly connected to the cavity wall and the flow plate by screws to achieve the installation of the flow plate.

[0004] The flow plate is easily deformed under the impact of airflow, so it needs to be repaired or replaced regularly. When removing the existing flow plate, you need to remove the screws on the flow plate first; the screws are prone to slipping and breaking after long-term high temperature and chemical corrosion, making it difficult to remove the flow plate and the operation is long, which can easily cause hypoxia for personnel inside the cavity; in addition, the long downtime for replacing the flow plate can easily delay the normal flow of the production line and affect production capacity. Utility Model Content

[0005] The utility model aims to provide a graphite boat dry cleaning device to solve the technical problems in the prior art such as difficulty in disassembling and assembling a uniform flow plate, which in turn leads to long operating time and downtime for personnel.

[0006] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0007] A graphite boat dry cleaning device comprises a cleaning box and at least one flow equalizer plate, wherein a cavity is formed in the cleaning box, each flow equalizer plate is arranged in the cavity, and at least one mounting structure is arranged on the inner wall of the cavity, wherein the mounting structure corresponds to the flow equalizer plate one by one, and the mounting structure is plugged into and matched with the corresponding flow equalizer plate.

[0008] Furthermore, each of the mounting structures comprises two slots arranged opposite to each other, and opposite sides of the flow equalizer plate are respectively inserted into the two slots corresponding to the mounting structure.

[0009] Furthermore, a plurality of support members are installed on the inner wall of the cavity, and each of the support members is recessed to form the slot.

[0010] Furthermore, each of the flow equalizer plates includes a flow equalizer plate body with a U-shaped structure, and opposite sides of the flow equalizer plate body extend outwards to form flanges, and each flange is inserted into the corresponding slot.

[0011] Furthermore, it also includes at least one limiting structure, and the limiting structure corresponds to the slot one by one;

[0012] Each of the limiting structures includes a sliding shaft and an elastic member, wherein: the sliding shaft is slidably mounted on the slot wall of the corresponding slot along a direction away from or approaching the corresponding flow plate; and the elastic member is used to provide elastic force to drive the sliding shaft to approach the corresponding flow plate.

[0013] Furthermore, each of the limiting structures also includes a mounting shell with a hollow structure, which is installed on the slot wall of the corresponding slot; one end of the sliding shaft is arranged in the mounting shell, and the other end thereof passes through the mounting shell; and the elastic member is arranged in the mounting shell.

[0014] Furthermore, at least one air inlet hole is provided on the cleaning box, and the flow equalizer plates correspond to the air inlet holes one by one, and each of the flow equalizer plates is located at the outlet of the corresponding air inlet hole.

[0015] Furthermore, it also includes at least one plasma generator installed on the cleaning box.

[0016] Furthermore, at least one graphite boat placement platform is provided at the bottom of the cavity, and a plurality of protrusions are provided on the upper end surface of each graphite boat placement platform.

[0017] Furthermore, it also includes a vacuum generator, which is connected to the air outlet on the cleaning box.

[0018] Beneficial effects of the utility model:

[0019] The utility model provides a graphite boat dry cleaning device, which includes a cleaning box and at least one flow equalizer plate. A cavity is formed in the cleaning box, and each flow equalizer plate is arranged in the cavity; at least one mounting structure is arranged on the inner wall of the cavity, and the mounting structure corresponds to the flow equalizer plate one by one, and the mounting structure is plugged and matched with the corresponding flow equalizer plate.

[0020] Compared with the traditional technical solution that relies on screws to fix the flow plate, the device provided by the present application installs the flow plate in the cavity by plugging and matching the installation structure and the flow plate. When disassembling and assembling the flow plate, the personnel only need to push or pull the flow plate into or out of the cavity, eliminating the step of removing the screws, thereby reducing the personnel's working time and downtime, reducing the difficulty of disassembly and assembly, and eliminating the problem of secondary disassembly and assembly caused by improper installation. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0022] Figure 1 A schematic diagram of the internal structure of a graphite boat dry cleaning device provided in an embodiment of the utility model;

[0023] Figure 2 A schematic diagram of the internal structure of a cleaning box provided in an embodiment of the utility model;

[0024] Figure 3 A schematic diagram of the connection structure of the cleaning box, the flow equalizer and the support member provided in the embodiment of the utility model;

[0025] Figure 4 A schematic diagram of the structure of the limiting structure provided in the embodiment of the utility model after the flow equalizer is installed;

[0026] Figure 5 A schematic diagram of the structure of the limiting structure provided in an embodiment of the utility model during the process of pushing or pulling the flow plate into or out of the cavity.

[0027] icon:

[0028] 1-cleaning box; 11-cavity; 12-support member; 121-slot; 13-air inlet; 14-air outlet;

[0029] 2-flow equalizer; 21-flow equalizer body; 22-flange; 221-limiting groove;

[0030] 3-limiting structure; 31-mounting shell; 32-sliding shaft; 33-elastic member;

[0031] 4-graphite boat placement table; 41-protrusion;

[0032] 5- Plasma generator;

[0033] 6- Vacuum generator. DETAILED DESCRIPTION

[0034] The technical solution of the utility model will be clearly and completely described below in conjunction with the embodiments. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0035] It should be noted that in the description of the present invention, the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0036] It should be noted that in the description of the present invention, the terms "connection" and "installation" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected or connected through an intermediate medium; it can be a mechanical connection or an electrical connection. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0037] The utility model embodiment provides a graphite boat dry cleaning device, referring to Figure 1 The device includes a cleaning box 1 and at least one flow equalizer plate 2, a cavity 11 is formed in the cleaning box 1, and each flow equalizer plate 2 is arranged in the cavity 11; at least one mounting structure is arranged on the inner wall of the cavity 11, the mounting structure corresponds to the flow equalizer plate 2 one by one, and the mounting structure is plugged into and matched with the corresponding flow equalizer plate 2.

[0038] Compared with the traditional technical solution that relies on screws to fix the flow plate 2, the device provided in the present application installs the flow plate 2 in the cavity 11 through the plug-in cooperation between the installation structure and the flow plate 2. When disassembling and assembling the flow plate 2, the personnel only need to push or pull the flow plate 2 into or out of the cavity 11, eliminating the step of removing the screws, thereby reducing the working time and downtime of the personnel, reducing the difficulty of disassembly and assembly, and eliminating the problem of secondary disassembly and assembly caused by inadequate installation.

[0039] Continue to refer to Figure 1 , the device further comprises:

[0040] At least one graphite boat placement platform 4, each graphite boat placement platform 4 is arranged at the bottom of the cavity 11, and a plurality of protrusions 41 are arranged on the upper end surface of each graphite boat placement platform 4;

[0041] At least one plasma generator 5 installed on the cleaning box 1;

[0042] The vacuum generator 6 is connected to the air outlet 14 on the cleaning box 1 .

[0043] The working process of the above device is as follows:

[0044] First, place the graphite boat ( Figure 1 The graphite boat (indicated by the dotted line) is placed on the graphite boat placement platform 4, and the graphite boat is separated from the bottom wall of the graphite boat placement platform 4 by the protrusion 41 to facilitate cleaning of the bottom of the graphite boat;

[0045] Next, the vacuum generator 6 is started to evacuate the cavity 11 through the vacuum generator 6;

[0046] Subsequently, gas (preferably nitrogen trifluoride) is input into the cavity 11, and the plasma generator 5 is started. Each plasma generator 5 is electrically connected to a radio frequency power supply. During operation, the radio frequency power supply is used to discharge and generate plasma. The generated plasma bombards the doped amorphous silicon and silicon oxide films on the surface of the graphite boat and reacts with them, thereby achieving cleaning of the coating on the surface of the graphite boat.

[0047] After the cleaning is completed, a cleaning gas is input into the cavity 11 to purge the cavity 11 ; the cleaned graphite boat is taken out, and the cleaning work of the graphite boat is completed.

[0048] In this embodiment, the gas input into the cavity 11 is evenly dispersed in the cavity 11 through the flow-distributing plate 2, so that the surface of the graphite boat can be cleaned over a large range and evenly.

[0049] Furthermore, at least one air inlet hole 13 is provided on the cleaning box 1, and the flow equalizer plates 2 correspond to the air inlet holes 13 one by one, and each flow equalizer plate 2 is located at the outlet of the corresponding air inlet hole 13. The air inlet hole 13 is used to input gas into the cavity 11, and the gas flowing out of the air inlet hole 13 passes through the flow equalizer plate 2 and is evenly dispersed into the cavity 11.

[0050] In this embodiment, there are multiple flow equalizers 2, and accordingly, there are multiple air inlet holes 13. Multiple flow equalizers 2 are arranged on the top of the cleaning box 1 and are sequentially distributed along the length direction of the cleaning box 1, so that the gas entering the cavity 11 can be evenly dispersed in the cavity 11, which is beneficial to the cleaning of large-sized and / or multiple graphite boats.

[0051] On the basis of the above structure, the number of graphite boat placement platforms 4 is multiple, so that the device can clean multiple graphite boats at the same time, thereby improving the cleaning efficiency. In this embodiment, the graphite boat placement platform 4 corresponds to the flow plate 2 one by one, and the graphite boat placement platform 4 is arranged below the corresponding flow plate 2.

[0052] In this embodiment, the graphite boat placement table 4 is detachably mounted on the bottom plate of the cleaning box 1. The number and shape of the graphite boat placement table 4 can be adaptively changed according to the shape of the graphite boat, product specifications and user needs, so that the device has a wider range of applications.

[0053] Reference Figure 2 Each mounting structure includes two oppositely arranged slots 121, and opposite sides of the flow equalizing plate 2 are respectively inserted into the two slots 121 of the corresponding mounting structure. During the process of disassembling and assembling the flow equalizing plate 2, the operator only needs to align the opposite sides of the flow equalizing plate 2 with the two slots 121 and push or pull it into or out of the cavity 11, without the need for the operator to enter the cavity 11, eliminating the risk of oxygen deficiency that is likely to occur when the operator stays in the cavity 11 for a long time.

[0054] On the basis of the above structure, a door is provided at the front end and / or the rear end of the cleaning tank 1. When it is necessary to disassemble and assemble the flow equalizing plate 2 or take in and out the graphite boat, the door is opened, and the operator stands outside the cleaning tank 1 and pushes or pulls the flow equalizing plate 2 or the graphite boat into or out of the cavity 11.

[0055] Furthermore, a plurality of support members 12 are installed on the inner cavity wall of the cavity 11. A slot 121 is recessed on one side or opposite two sides of each support member 12. Specifically, the plurality of support members 12 are sequentially distributed along the length direction of the cleaning tank 1. A slot 121 is recessed on one side of the support members 12 located at the two end edge positions, and slots 121 are respectively recessed on the opposite two sides of the support members 12 located at the middle position; two slots 121 with opposite slot openings form a mounting structure.

[0056] In this embodiment, the cross-section of the support members 12 located at the two end edge positions is generally in the shape of an I, or a T, or an L, or a C, and the cross-section of the support members 12 located at the middle position is generally in the shape of an I. The upper end of each support member 12 is welded or fixed to the top wall of the cleaning tank 1 by fasteners such as screws, and its lower end is connected to one side of the flow equalizing plate 2.

[0057] In other embodiments, the support members 12 may not be provided, and the slots 121 are directly provided on the inner cavity wall of the cavity 11; specifically, there are a plurality of bumps on the top end surface of the cavity 11, and a slot 121 is recessed on one side or opposite two sides of each bump, and two slots 121 with opposite slot openings form a mounting structure. That is, providing the support members 12 is only one implementation manner of the mounting structure. In other embodiments, the mounting structure may also be directly machined on the inner cavity wall of the cavity 11.

[0058] Reference Figure 3 Each flow equalizing plate 2 includes a flow equalizing plate main body 21 in a U-shaped structure. Opposite sides of the flow equalizing plate main body 21 respectively extend outward to form flanges 22, and each flange 22 is inserted into the corresponding slot 121.

[0059] In the above structure, the main body 21 of the flow plate is clamped between the two support members 12, and the displacement of the flow plate 2 along the length direction of the cleaning box 1 is limited by the two support members 12. Each flange 22 is inserted into the corresponding slot 121 and overlapped on the lower slot wall of the slot 121; when the device is stopped, the flow plate 2 is not easy to shake in the vertical direction under the action of its own weight; when the device is working, the gas passes through the flow plate 2 from top to bottom, and the flow plate 2 is close to the lower slot wall of the slot 121 under the impact of the airflow. At this time, the flow plate 2 is even less likely to shake in the vertical direction.

[0060] Optionally, there are multiple plasma generators 5, and the plasma generators 5 correspond one-to-one to the flow plate 2, and each plasma generator 5 is arranged between the corresponding flow plate 2 and the top surface of the cavity 11. Providing multiple plasma generators 5 can improve the efficiency of plasma generation. At the same time, since the plasma generators 5 correspond one-to-one to the flow plate 2, the plasma can be evenly distributed in the cavity 11, thereby improving the cleaning effect of the graphite boat.

[0061] Continue to refer to Figure 3 , the device also includes a limiting structure 3, each slot 121 is provided with at least one limiting structure 3; Figure 4 and Figure 5 , each limiting structure 3 includes:

[0062] The sliding shaft 32 is slidably mounted on the slot wall of the corresponding slot 121 in a direction away from or approaching the corresponding flow equalizer plate 2;

[0063] The elastic member 33 is used to provide elastic force to drive the sliding shaft 32 to approach the corresponding flow plate 2;

[0064] The mounting shell 31 is a hollow structure, and the mounting shell 31 is mounted on the slot wall of the corresponding slot 121 ; one end of the sliding shaft 32 is disposed in the mounting shell 31 , and the other end thereof passes through the mounting shell 31 ; and the elastic member 33 is disposed in the mounting shell 31 .

[0065] Specifically, refer to Figure 4 , at least one limiting groove 221 is provided on each flange 22 of the flow plate 2; in a corresponding set of slots 121 and flanges 22, the flange 22 is inserted into the slot 121, and the limiting structure 3 in the slot 121 corresponds to the limiting groove 221 on the flange 22 one by one; when the flow plate 2 is installed, the end of the sliding shaft 32 passing through the installation shell 31 is inserted into the corresponding limiting groove 221 and abuts against the bottom of the corresponding limiting groove 221, so that the flow plate 2 can be limited, further avoiding the flow plate 2 from shaking or shifting. When the flow plate 2 needs to be disassembled, refer to Figure 5, a person applies a push or pull force to the flow plate 2, and the sliding shaft 32 overcomes the elastic force of the elastic member 33 under the action of the external force and escapes from the corresponding limit groove 221, releasing the restriction on the flow plate 2, so that the flow plate 2 can be smoothly pushed into or pulled out of the cavity 11.

[0066] Furthermore, in order to allow the sliding shaft 32 to smoothly escape from the corresponding limiting groove 221 , the end of the sliding shaft 32 that passes through the mounting shell 31 is hemispherical, and the periphery of the notch of the limiting groove 221 is chamfered.

[0067] In this embodiment, a plurality of limiting structures 3 are provided in each slot 121, and the plurality of limiting structures 3 are sequentially distributed along the length direction of the slot 121. Exemplarily, three limiting structures 3 are provided in each slot 121, wherein two limiting structures 3 are respectively located at both ends of the slot 121 along the length direction, and the other limiting structure is located in the middle of the slot 121. The flange 22 can be limited at multiple points by the plurality of limiting structures 3, thereby improving the installation strength of the flow equalizer 2.

[0068] In this embodiment, the upper end of the mounting shell 31 is fixed to the upper groove wall of the slot 121 by screws; the upper end of the sliding shaft 32 is arranged in the mounting shell 31, and the lower end thereof passes through the mounting shell 31; the elastic member 33 is specifically a compression spring, which is mounted on the sliding shaft 32, and the two ends of the elastic member 33 are respectively abutted against the upper groove wall of the slot 121 and the shoulder of the sliding shaft 32, thereby being able to apply an elastic force to the sliding shaft 32 to move downward.

[0069] In summary, in the graphite boat dry cleaning device provided by the present application, the two flanges 22 of each flow plate 2 are respectively inserted into the corresponding slots 121, and the limiting structure 3 in the slots 121 can further limit the position of the flow plate 2, so that the flow plate 2 is stably installed in the cavity 11; when the flow plate 2 needs to be disassembled, the personnel can push or pull the flow plate 2 into or out of the cavity 11 outside the cleaning box 1, eliminating the step of removing the screws, and there is no need for personnel to enter the cavity 11, thereby reducing the operating time and downtime of the personnel, and eliminating the risk of hypoxia caused by personnel staying in the cavity 11 for a long time. In addition, the device is conducive to the cleaning operation of large-sized and / or multiple graphite boats, and the use of plasma cleaning method can clean the graphite boat more thoroughly.

[0070] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, ordinary technicians in this field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not make the essence of the corresponding technical solution deviate from the scope of the technical solution of the embodiments of the utility model.

Claims

1. A graphite boat dry cleaning device, comprising a cleaning box (1) and at least one flow plate (2), wherein a cavity (11) is formed in the cleaning box (1), and each of the flow plates (2) is arranged in the cavity (11), characterized in that: At least one mounting structure is provided on the inner cavity wall of the cavity (11), the mounting structure corresponds to the flow equalizer plate (2) one by one, and the mounting structure is plug-fitted with the corresponding flow equalizer plate (2).

2. The graphite boat dry cleaning device according to claim 1, characterized in that: Each of the mounting structures comprises two slots (121) arranged opposite to each other, and opposite sides of the flow equalizer plate (2) are respectively inserted into the two slots (121) corresponding to the mounting structure.

3. The graphite boat dry cleaning device according to claim 2, characterized in that: A plurality of support members (12) are mounted on the inner wall of the cavity (11), and one side surface or two opposite sides of each support member (12) is recessed to form the slot (121).

4. The graphite boat dry cleaning device according to claim 2, characterized in that: Each of the flow equalizer plates (2) comprises a flow equalizer plate body (21) in a U-shaped structure, and opposite sides of the flow equalizer plate body (21) respectively extend outwards to form flanges (22), and each flange (22) is inserted into a corresponding slot (121).

5. The graphite boat dry cleaning device according to claim 2, characterized in that: It also includes a limiting structure (3), each of the slots (121) is provided with at least one limiting structure (3), and each limiting structure (3) includes: A sliding shaft (32) is slidably mounted on a slot wall of the corresponding slot (121) in a direction away from or approaching the corresponding flow equalizer plate (2); The elastic member (33) is used to provide an elastic force for driving the sliding shaft (32) to approach the corresponding flow equalizer plate (2).

6. The graphite boat dry cleaning device according to claim 5, characterized in that: Each of the limiting structures (3) further comprises a mounting shell (31) having a hollow structure, wherein the mounting shell (31) is mounted on the slot wall of the corresponding slot (121); one end of the sliding shaft (32) is arranged in the mounting shell (31), and the other end thereof passes through the mounting shell (31); and the elastic member (33) is arranged in the mounting shell (31).

7. The graphite boat dry cleaning device according to any one of claims 1 to 6, characterized in that: At least one air inlet hole (13) is provided on the cleaning box (1), the flow equalizer plates (2) correspond to the air inlet holes (13) one by one, and each flow equalizer plate (2) is located at the outlet of the corresponding air inlet hole (13).

8. The graphite boat dry cleaning device according to any one of claims 1 to 6, characterized in that: It also comprises at least one plasma generator (5) installed on the cleaning box (1).

9. The graphite boat dry cleaning device according to any one of claims 1 to 6, characterized in that: At least one graphite boat placement platform (4) is provided at the bottom of the cavity (11), and a plurality of protrusions (41) are provided on the upper end surface of each graphite boat placement platform (4).

10. The graphite boat dry cleaning device according to any one of claims 1 to 6, characterized in that: It also comprises a vacuum generator (6), wherein the vacuum generator (6) is connected to the air outlet (14) on the cleaning box (1).

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