Clamp for double-sided polishing of monocrystalline silicon wafer

Abstract

The utility model relates to the technical field of monocrystalline silicon wafer processing, in particular to a clamp for double-sided polishing of a monocrystalline silicon wafer, which comprises a U-shaped frame for fixing the monocrystalline silicon wafer, and an adjustable movable clamping seat is mounted on one side in the U-shaped frame; the side, away from the movable clamping base, of the U-shaped frame and the movable clamping base are provided with an anti-skid clamping piece making contact with the monocrystalline silicon wafer, the back of the anti-skid clamping piece is provided with a fixed sliding strip, and the inner wall of the U-shaped frame and the movable clamping base are provided with installation sliding grooves matched with the fixed sliding strip in section size and in sliding fit with the fixed sliding strip; a clamping air cylinder is installed on the outer wall of the side, close to the movable clamping base, of the U-shaped frame. According to the utility model, through the cooperation of the movable clamping seat, the clamping cylinder and the guide rod, monocrystalline silicon wafers with different widths can be clamped, popularization is facilitated, the antiskid clamping pieces are in sliding fit with the mounting sliding grooves through the fixed sliding strips, mounting or dismounting is facilitated, selection can be carried out according to the monocrystalline silicon wafers with different thicknesses, and the adaptability is wider.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal silicon slice processing, in particular to a clamp for double-sided polishing of a single crystal silicon slice. Background Art

[0002] Single crystal silicon wafers are the raw materials for manufacturing semiconductor silicon devices, which are used to make high-power rectifiers, high-power transistors, diodes, switching devices, etc. The method for making single crystal silicon wafers is usually to first make polycrystalline silicon or amorphous silicon, and then use the direct pulling method or the floating zone melting method to grow rod-shaped single crystal silicon from the melt, and then obtain single crystal silicon wafers by cutting the single crystal silicon rods. Finally, the single crystal silicon wafers are ground, chamfered, polished and cleaned as needed. When double-sided polishing of single crystal silicon wafers, most of them need to be clamped and fixed by a fixture. Today's single crystal silicon wafer fixtures have poor fixing effect and loose clamping, which will cause the silicon wafer to fall off and affect the polishing effect. Utility Model Content

[0003] The utility model aims to provide a double-sided polishing fixture for single crystal silicon wafers, so as to solve the problem in the above background technology that the single crystal silicon wafer fixture has poor fixing effect and loose clamping, which may cause the silicon wafer to fall off and affect the polishing effect.

[0004] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0005] A fixture for double-sided polishing of a single crystal silicon wafer, comprising a U-shaped frame for fixing the single crystal silicon wafer, wherein an adjustable movable clamping seat is installed on one side of the U-shaped frame;

[0006] An anti-skid clip in contact with the single crystal silicon wafer is installed on one side of the U-shaped frame away from the movable clamp seat and on the movable clamp seat, a fixed slide bar is installed on the back of the anti-skid clip, and an installation slide groove that is adapted to the cross-sectional size of the fixed slide bar and slidably matched is opened on the inner wall of the U-shaped frame and the movable clamp seat;

[0007] A clamping cylinder is installed on the outer wall of one side of the U-shaped frame close to the movable clamp seat, and the piston rod of the clamping cylinder is connected to the back of the movable clamp seat. Guide rods are symmetrically arranged at both ends of the back of the movable clamp seat, and the guide rods are plugged into the side wall of the U-shaped frame.

[0008] Preferably, the cross-sections of the fixed slide bar and the mounting slide groove are both convex-shaped.

[0009] Preferably, the fixed slide bar is connected to the U-shaped frame or the movable clamp seat through a plurality of sets of fixing bolts.

[0010] Preferably, the number of the fixing bolts is at least 2 groups.

[0011] Preferably, a side of the anti-skid clip in contact with the single crystal silicon wafer is provided with a plurality of anti-skid protrusions arranged evenly and equidistantly.

[0012] Preferably, the anti-slip protrusion is made of wear-resistant rubber material, and the height of the protrusion is 1-3 mm.

[0013] Preferably, a fixing head is installed in the middle of one end of the U-shaped frame.

[0014] Preferably, an adjusting cylinder is installed on the fixed head, and an adjusting rod of the adjusting cylinder is connected to the outer wall of the fixed head.

[0015] Compared with the prior art, the beneficial effects of the utility model are:

[0016] 1. In the double-sided polishing fixture of the single crystal silicon wafer, the single crystal silicon wafers of different widths can be clamped by the cooperation of the movable clamping seat, the clamping cylinder and the guide rod, which is convenient for promotion. The anti-slip clamp is slidably matched with the installation slide groove through the fixed slide bar, which is convenient for installation or disassembly. It can be selected according to the single crystal silicon wafers of different thicknesses, and has a wider adaptability.

[0017] 2. In the double-sided polishing fixture for single crystal silicon wafers, the fixed slide is connected to the U-shaped frame or the movable clamp seat by a plurality of sets of fixing bolts, and the number of the fixing bolts is at least sets, which increases the stability of the fixed slide, making it less likely to be displaced or deformed when subjected to vibration and pressure during the polishing process, and is also convenient for replacement and maintenance.

[0018] 3. In the double-sided polishing fixture for single crystal silicon wafers, a fixed head is installed in the middle of one end of the U-shaped frame, and an adjusting cylinder is installed on the fixed head. The adjusting rod of the adjusting cylinder is connected to the outer wall of the fixed head, so that the fixture can be easily adjusted in size to adapt to single crystal silicon wafers of different sizes. At the same time, the use of the adjusting cylinder also improves the flexibility and efficiency of the operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, further detailed explanation is provided, but the accompanying drawings do not constitute a limitation to the present invention.

[0020] Figure 1 It is a schematic diagram of the structure of the utility model;

[0021] Figure 2 It is a schematic diagram of the exploded structure of the utility model;

[0022] Figure 3 This is a schematic diagram of the cross-sectional structure of the U-shaped frame of the utility model;

[0023] Figure 4This is a structural schematic diagram of the installation and adjustment cylinder of the utility model.

[0024] The meaning of the symbols in the figure:

[0025] 10. U-shaped frame; 11. Anti-skid clip; 12. Mounting slide; 13. Fixed slide bar; 14. Fixed bolt; 15. Anti-skid protrusion;

[0026] 20. Fixed head; 21. Adjusting cylinder; 22. Adjusting rod;

[0027] 30. Movable clamping seat; 31. Clamping cylinder; 32. Guide rod. DETAILED DESCRIPTION

[0028] The following will combine the embodiments of the utility model and the drawings of the specification to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0029] In the description of the present invention, it should be understood that the terms "center", "vertical", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like indicating orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0030] A fixture for double-sided polishing of a single crystal silicon wafer, such as Figure 1-Figure 3As shown, it includes a U-shaped frame 10 for fixing a single crystal silicon wafer, an adjustable movable clamp seat 30 is installed on one side of the U-shaped frame 10; a non-slip clip 11 in contact with the single crystal silicon wafer is installed on the side of the U-shaped frame 10 away from the movable clamp seat 30 and on the movable clamp seat 30, a fixed slide 13 is installed on the back of the non-slip clip 11, and an installation slide groove 12 that is adapted to the cross-sectional size of the fixed slide 13 and slidably matched is opened on the inner wall of the U-shaped frame 10 and the movable clamp seat 30; a clamping cylinder 3 is installed on the outer wall of the U-shaped frame 10 close to the movable clamp seat 30 1. The piston rod of the clamping cylinder 31 is connected to the back of the movable clamping seat 30. The two ends of the back of the movable clamping seat 30 are symmetrically provided with guide rods 32. The guide rods 32 are plugged into the side walls of the U-shaped frame 10. Through the cooperation of the movable clamping seat 30, the clamping cylinder 31 and the guide rods 32, single crystal silicon wafers of different widths can be clamped, which is convenient for promotion. The anti-slip clip 11 is slidably matched with the installation slide groove 12 through the fixed slide bar 13, which is convenient for installation or disassembly. It can be selected according to single crystal silicon wafers of different thicknesses, and has wider adaptability.

[0031] It is worth noting that the cross-sections of the fixed slide bar 13 and the installation slide groove 12 are both convex-shaped, which improves the stability after installation.

[0032] Furthermore, the fixed slide 13 is connected to the U-shaped frame 10 or the movable clamp seat 30 through several groups of fixing bolts 14, and the number of fixing bolts 14 is at least 2 groups, which increases the stability of the fixed slide 13, making it less likely to be displaced or deformed when subjected to vibration and pressure during the polishing process, and is also convenient for replacement and maintenance.

[0033] Specifically, a plurality of evenly and equidistantly arranged anti-skid protrusions 15 are provided on the side of the anti-skid clip 11 in contact with the single crystal silicon wafer. The anti-skid protrusions 15 are made of wear-resistant rubber material, and the height of the protrusions is 1-3 mm, which increases the friction between the anti-skid clip 11 and the single crystal silicon wafer to prevent the single crystal silicon wafer from sliding or shifting during the polishing process. At the same time, the wear-resistant rubber material is also conducive to improving the anti-skid effect and service life.

[0034] In addition, if Figure 4 As shown, a fixed head 20 is installed in the middle of one end of the U-shaped frame 10, and an adjusting cylinder 21 is installed on the fixed head 20. The adjusting rod 22 of the adjusting cylinder 21 is connected to the outer wall of the fixed head 20, so that the size of the clamp can be easily adjusted to adapt to single crystal silicon wafers of different sizes. At the same time, the use of the adjusting cylinder 21 also improves the flexibility and efficiency of the operation.

[0035] The working principle of the double-sided polishing fixture for single-crystal silicon wafers of the utility model is as follows: when in use, the operator selects the anti-skid clip 11 of the corresponding size according to the thickness of the single-crystal silicon wafer to be polished, slides the anti-skid clip 11 with the installation slide groove 12 through the fixed slide bar 13, and connects the fixed slide bar 13 to the U-shaped frame 10 or the movable clamp seat 30 through several groups of fixing bolts 14, places the single-crystal silicon wafer in the middle of the U-shaped frame 10, and controls the clamping cylinder 31 so that the movable clamp seat 30 clamps and fixes the single-crystal silicon wafer, and then double-sided polishing can be performed.

[0036] The above shows and describes the basic principle, main features and advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments. The above embodiments and descriptions are only preferred examples of the utility model and are not used to limit the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, which fall within the scope of the utility model to be protected. The scope of protection of the utility model is defined by the attached claims and their equivalents.

Claims

1. A fixture for double-sided polishing of a single crystal silicon wafer, comprising a U-shaped frame (10) for fixing the single crystal silicon wafer, characterized in that: An adjustable movable clamping seat (30) is installed on one side of the U-shaped frame (10); An anti-skid clip (11) in contact with the single crystal silicon wafer is installed on the side of the U-shaped frame (10) away from the movable clamp seat (30) and on the movable clamp seat (30), a fixed slide bar (13) is installed on the back of the anti-skid clip (11), and an installation slide groove (12) that is adapted to the cross-sectional size of the fixed slide bar (13) and is slidably matched is provided on the inner wall of the U-shaped frame (10) and the movable clamp seat (30); A clamping cylinder (31) is installed on the outer wall of one side of the U-shaped frame (10) close to the movable clamp seat (30), and the piston rod of the clamping cylinder (31) is connected to the back of the movable clamp seat (30). Guide rods (32) are symmetrically arranged at both ends of the back of the movable clamp seat (30), and the guide rods (32) are plug-fitted with the side wall of the U-shaped frame (10).

2. The double-sided polishing fixture for a single crystal silicon wafer according to claim 1, characterized in that: The cross-sections of the fixed slide bar (13) and the installation slide groove (12) are both convex-shaped.

3. The double-sided polishing fixture for a single crystal silicon wafer according to claim 1, characterized in that: The fixed slide bar (13) is connected to the U-shaped frame (10) or the movable clamp seat (30) via a plurality of sets of fixing bolts (14).

4. The double-sided polishing fixture for a single crystal silicon wafer according to claim 3, characterized in that: The number of the fixing bolts (14) is at least 2 groups.

5. The double-sided polishing fixture for a single crystal silicon wafer according to claim 1, characterized in that: The side of the anti-skid clip (11) in contact with the single crystal silicon wafer is provided with a plurality of anti-skid protrusions (15) arranged evenly and equidistantly.

6. The double-sided polishing fixture for a single crystal silicon wafer according to claim 5, characterized in that: The anti-slip protrusion (15) is made of wear-resistant rubber material, and the height of the protrusion is 1-3 mm.

7. The double-sided polishing fixture for a single crystal silicon wafer according to claim 1, characterized in that: A fixing head (20) is installed at the middle of one end of the U-shaped frame (10).

8. The double-sided polishing fixture for a single crystal silicon wafer according to claim 7, characterized in that: An adjusting cylinder (21) is installed on the fixed head (20), and an adjusting rod (22) of the adjusting cylinder (21) is connected to the outer wall of the fixed head (20).

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