Waste scraper for monocrystalline silicon wafer polishing

Abstract

The utility model relates to the technical field of monocrystalline silicon wafer polishing, in particular to a waste scraper for monocrystalline silicon wafer polishing, which comprises a polishing platform. A waste cleaning part is arranged above the polishing platform; a scraping plate used for cleaning the top of the connecting base is further installed in the fixing groove in a liftable mode, the front end of the scraping plate is bent downwards and abuts against the top face of the polishing platform, the connecting rod penetrates through the scraping plate and is in sliding connection with the scraping plate, and the bottom end of the spring abuts against the scraping plate. By arranging a polishing platform and a waste cleaning part, waste generated by monocrystalline silicon wafer polishing falls on the polishing platform, a motor drives a lead screw to rotate, the lead screw rotates to drive a connecting base to horizontally move, the connecting base drives a supporting rod and a mounting base to horizontally move at the same time, and at the moment, a scraping plate moves along the top of the polishing platform; the scraping plate can simultaneously push waste materials at the top of the polishing platform into the collecting box for collection; by means of the design, the polishing platform can be cleaned conveniently, waste generated by polishing can be collected conveniently, and the beneficial effect of being convenient to use is achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal silicon wafer polishing, in particular to a waste scraper for single crystal silicon wafer polishing. Background Art

[0002] A single crystal silicon wafer is a crystal with a basically complete lattice structure. Its main uses are as a semiconductor material and for solar photovoltaic power generation and heating. During the processing of single crystal silicon wafers, the single crystal silicon wafers need to be polished.

[0003] The utility model patent with authorization announcement number CN216781391U discloses a single crystal silicon polishing pressure sensing device mechanism, which includes a moving component, a detection component and a polishing component; the moving component is installed on the base, the detection component is installed on the moving component, and the polishing component is installed on the detection component; the moving component includes: a guide rail, a slider, a limit block, an electric telescopic rod, a spring, a connecting frame, and a fixed seat.

[0004] Although the single crystal silicon polishing pressure sensing device mechanism facilitates the polishing of single crystal silicon wafers through the polishing components, the device has the following problems during the polishing process: during the polishing process, the surface of the single crystal silicon wafer will be polished, and a large amount of waste will fall during the polishing process. The waste will accumulate on the top of the base, requiring manual cleaning by the staff, which is very inconvenient. In view of this, we propose a waste scraper for polishing single crystal silicon wafers. Utility Model Content

[0005] In order to solve the above-mentioned problem, the utility model provides a waste scraper for polishing single crystal silicon wafers.

[0006] In order to achieve the above purpose, the technical solution adopted by the utility model is as follows:

[0007] A waste scraper for polishing a single crystal silicon wafer, including a polishing platform;

[0008] A detachable collection box for collecting waste is provided at the lower front side of the polishing platform;

[0009] A waste cleaning part is provided above the polishing platform, and the waste cleaning part includes a connecting seat located below the polishing platform and capable of horizontal movement, support rods are fixed at both ends of the top of the connecting seat, and the top ends of the support rods extend to the top of the polishing platform, and detachable connecting sleeves are sleeved on the two support rods, and a mounting seat is fixed between the two connecting sleeves, and a fixing groove is provided on the mounting seat, and a plurality of connecting rods are fixed in the fixing groove, and springs are sleeved on the connecting rods; a scraper for cleaning the top of the connecting seat can also be installed in the fixing groove in a lifting manner, and the front end of the scraper is bent downward and pressed against the top surface of the polishing platform, the connecting rod passes through the scraper and is slidably connected to the scraper, and the bottom end of the spring presses against the scraper.

[0010] Furthermore, two sockets are fixed at the front end of the bottom of the polishing platform, and the bottom of the sockets are threadedly connected with connecting bolts; two blocks are fixed to the rear end of the collection box, and the blocks are plugged into and matched with the openings of the sockets, and the tops of the connecting bolts pass through the through holes on the blocks.

[0011] Furthermore, two fixed plates are fixed below the polishing platform, a screw is rotatably installed between the two fixed plates, and the connecting seat is threadedly connected to the screw, and a motor for driving the screw to rotate is installed on the rear fixed plate.

[0012] Furthermore, two guide rods are fixedly connected between the two fixing plates by bolts, and the guide rods are slidably connected to the connecting seat.

[0013] Furthermore, a fixing bolt is threadedly connected to the top end of the support rod, and the fixing bolt passes through the connecting sleeve and is threadedly connected to the support rod.

[0014] Furthermore, convex ridges are fixed on the top of the polishing platform at both left and right edges, and the convex ridges and the polishing platform are an integrally formed structure.

[0015] Furthermore, the connecting sleeve and the mounting seat are an integrally formed structure, and the connecting sleeve and the mounting seat are manufactured from stainless steel.

[0016] Compared with the prior art, the utility model has the following beneficial effects:

[0017] Through the set polishing platform and waste cleaning part: the waste generated by the polishing of single crystal silicon wafers falls on the polishing platform, the motor drives the screw to rotate, the rotation of the screw drives the connecting seat to move horizontally, and the connecting seat simultaneously drives the support rod and the mounting seat to move horizontally. At this time, the scraper is along the top of the polishing platform, and the scraper can simultaneously push the waste on the top of the polishing platform into the collection box for collection; this design is convenient for cleaning the polishing platform and collecting the waste generated by polishing, and has the advantage of being easy to use. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0019] Figure 2 It is a structural schematic diagram of the collection box in the utility model;

[0020] Figure 3 This is a schematic diagram of the structure of the polishing platform in the utility model;

[0021] Figure 4 It is a structural schematic diagram of the connecting seat in the utility model;

[0022] Figure 5 It is a schematic diagram of a partial explosion structure in the utility model.

[0023] In the figure:

[0024] 1. Polishing platform; 10. Raised edge; 11. Insert sleeve; 12. Connecting bolt; 13. Collecting box; 14. Insert block;

[0025] 2. Waste cleaning unit; 20. Fixed plate; 21. Connecting seat; 22. Motor; 23. Screw rod; 24. Guide rod; 25. Support rod; 26. Connecting sleeve; 27. Mounting seat; 271. Fixed groove; 272. Connecting rod; 273. Spring; 28. Scraper. DETAILED DESCRIPTION

[0026] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0027] This embodiment provides a technical solution:

[0028] See also Figure 1-Figure 5 , a waste scraper for polishing a single crystal silicon wafer, comprising a polishing platform 1. A detachable collection box 13 for collecting waste is provided at the lower front side of the polishing platform 1; a waste cleaning part 2 is provided above the polishing platform 1, and the waste cleaning part 2 includes a connecting seat 21 located below the polishing platform 1 and capable of horizontal movement, support rods 25 are fixed at both ends of the top of the connecting seat 21, and the top ends of the support rods 25 extend to the upper part of the polishing platform 1, and detachable connecting sleeves 26 are sleeved on the two support rods 25, and a mounting seat 27 is fixed between the two connecting sleeves 26, and a fixing groove 271 is provided on the mounting seat 27, and a plurality of connecting rods 272 are fixed in the fixing groove 271, and springs 273 are sleeved on the connecting rods 272; a scraper 28 for cleaning the top of the connecting seat 21 can also be installed in the fixing groove 271 in a lifting manner, and the front end of the scraper 28 is bent downward and pressed against the top surface of the polishing platform 1, the connecting rod 272 passes through the scraper 28 and is slidably connected to the scraper 28, and the bottom end of the spring 273 presses against the scraper 28.

[0029] In this embodiment, two sockets 11 are fixed at the front end of the bottom of the polishing platform 1, and the bottom of the sockets 11 is threadedly connected with a connecting bolt 12; two plug blocks 14 are fixed to the rear end surface of the collection box 13, and the plug blocks 14 are plugged into and matched with the openings of the sockets 11, and the tops of the connecting bolts 12 pass through the through holes on the plug blocks 14. This design facilitates the installation and fixation of the collection box 13, and at the same time facilitates the disassembly of the collection box 13, so as to facilitate the collection and dumping of waste.

[0030] In this embodiment, two fixed plates 20 are fixed under the polishing platform 1, a screw rod 23 is rotatably installed between the two fixed plates 20, and the connecting seat 21 is threadedly connected to the screw rod 23, and a motor 22 for driving the screw rod 23 to rotate is installed on the fixed plate 20 on the rear side. The screw rod 23 is driven to rotate by the motor 22, which facilitates the horizontal movement of the connecting seat 21, facilitates the horizontal movement of the scraper 28, and facilitates the cleaning of waste on the top of the polishing platform 1 by the scraper 28.

[0031] In this embodiment, two guide rods 24 are fixedly connected between the two fixing plates 20 by bolts, and the guide rods 24 are slidably connected to the connecting seat 21. The setting of the guide rods 24 serves as a guide at both ends for the horizontal movement of the connecting seat 21, thereby ensuring the stability of the connecting seat 21 during horizontal movement.

[0032] In this embodiment, a fixing bolt 251 is threadedly connected at the top of the support rod 25, and the fixing bolt 251 passes through the connecting sleeve 26 and is threadedly connected to the support rod 25. The setting of the fixing bolt 251 is convenient for fixing the connecting sleeve 26 and the support rod 25, thereby facilitating the disassembly and assembly of the scraper 28 and the cleaning of the scraper 28.

[0033] In this embodiment, ridges 10 are fixed on the top of the polishing platform 1 at the left and right edges, and the ridges 10 and the polishing platform 1 are an integrally formed structure. The setting of the ridges 10 can accumulate waste on the top of the polishing platform 1 to prevent waste from falling from both sides of the top of the polishing platform 1.

[0034] In this embodiment, the connecting sleeve 26 and the mounting seat 27 are an integrally formed structure, and the connecting sleeve 26 and the mounting seat 27 are made of stainless steel. The structural strength of the connecting sleeve 26 and the mounting seat 27 formed in one day is higher, which ensures the connection reliability and stability of the connecting sleeve 26 and the mounting seat 27, and ensures the stable use of the connecting sleeve 26 and the mounting seat 27.

[0035] It should be added that, under the elastic action of the spring 273, a downward force can be applied to the scraper 28, under which the front end of the scraper 28 can be pressed against the polishing platform 1, making it convenient to clean the waste on the top of the polishing platform 1 through the scraper 28.

[0036] It is worth noting that the motor 22 involved in this embodiment is an existing conventional technology and will not be described in detail here.

[0037] During specific use, the user first turns on the power of the motor 22, and the motor 22 starts to work. The output shaft of the motor 22 rotates to drive the screw 23 to rotate. As the screw 23 rotates, the connecting seat 21 moves horizontally along the two guide rods 24. The connecting seat 21 also drives the support rod 25, the connecting sleeve 26 and the mounting seat 27 to move horizontally. At the same time, the mounting seat 27 drives the scraper 28 to move horizontally, and the scraper 28 pushes the waste on the top of the polishing platform 1 into the collection box 13.

[0038] The above shows and describes the basic principle, main features and advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments. The above embodiments and descriptions are only preferred examples of the utility model and are not used to limit the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, which fall within the scope of the utility model to be protected. The scope of protection of the utility model is defined by the attached claims and their equivalents.

Claims

1. A waste scraper for polishing a single crystal silicon wafer, comprising a polishing platform (1), characterized in that: A detachable collection box (13) for collecting waste is provided at the lower front side of the polishing platform (1); A waste cleaning part (2) is provided above the polishing platform (1), and the waste cleaning part (2) comprises a connecting seat (21) located below the polishing platform (1) and capable of horizontal movement, support rods (25) are fixed at both ends of the top of the connecting seat (21), the top ends of the support rods (25) extend to the top of the polishing platform (1), and the two support rods (25) are sleeved with detachable connecting sleeves (26), and a mounting seat (27) is fixed between the two connecting sleeves (26), and the mounting seat (27) is provided with a A fixed groove (271) is provided in which a plurality of connecting rods (272) are fixed, and springs (273) are sleeved on the connecting rods (272); a scraper (28) for cleaning the top of the connecting seat (21) is also installed in the fixed groove (271) in a lifting manner, the front end of the scraper (28) is bent downward and pressed against the top surface of the polishing platform (1), the connecting rod (272) passes through the scraper (28) and is slidably connected to the scraper (28), and the bottom end of the spring (273) presses against the scraper (28).

2. The waste scraper for polishing single crystal silicon wafers according to claim 1, characterized in that: Two insert sleeves (11) are fixed at the front end of the bottom of the polishing platform (1), and the bottom of the insert sleeves (11) is threadedly connected with a connecting bolt (12); two insert blocks (14) are fixed at the rear end of the collection box (13), and the insert blocks (14) are plugged into and matched with the openings of the insert sleeves (11), and the top ends of the connecting bolts (12) pass through the through holes on the insert blocks (14).

3. The waste scraper for polishing a single crystal silicon wafer according to claim 1, characterized in that: Two fixed plates (20) are fixed below the polishing platform (1), a screw rod (23) is rotatably mounted between the two fixed plates (20), and the connecting seat (21) is threadedly connected to the screw rod (23), and a motor (22) for driving the screw rod (23) to rotate is mounted on the rear fixed plate (20).

4. The waste scraper for polishing a single crystal silicon wafer according to claim 3, characterized in that: Two guide rods (24) are fixedly connected between the two fixing plates (20) by means of bolts, and the guide rods (24) are slidably connected to the connecting seat (21).

5. The waste scraper for polishing single crystal silicon wafers according to claim 1, characterized in that: A fixing bolt (251) is threadedly connected to the top end of the support rod (25), and the fixing bolt (251) passes through the connecting sleeve (26) and is threadedly connected to the support rod (25).

6. The waste scraper for polishing a single crystal silicon wafer according to claim 1, characterized in that: The top of the polishing platform (1) is fixed with convex ridges (10) at both left and right edges, and the convex ridges (10) and the polishing platform (1) are an integrally formed structure.

7. The waste scraper for polishing a single crystal silicon wafer according to claim 1, characterized in that: The connecting sleeve (26) and the mounting seat (27) are an integrally formed structure, and the connecting sleeve (26) and the mounting seat (27) are manufactured products made of stainless steel.

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