Blowing film tearing device

Abstract

The utility model provides a blowing film tearing device. The blowing film tearing device comprises a conveying module, a detection module, a blowing module and a control module. The conveying module conveys the substrate to the operation area. The substrate is provided with a hole adjacent to the front end edge, the substrate is covered with a thin film, and the thin film partially covers the hole. The detection module is spatially opposite to the operation area, and when the front end edge of the substrate is input to the operation area, the detection module is assembled to detect the position of the hole along the direction of the front end edge of the substrate. The air blowing module is adjacent to the detection module, and the air blowing module and the detection module are assembled to move along the direction of the front end edge of the substrate and selectively generate air flow towards the front edge part of the film. The control module is connected with the detection module and the air blowing module, sets a buffer section according to the position of the hole sensed by the detection module, and controls the air blowing module to stop generating air flow when passing through the buffer section and the hole, thereby avoiding the occurrence of membrane rupture.

Description

Technical Field

[0001] The utility model relates to an air blowing film tearing device, in particular to an air blowing film tearing device and an air blowing film tearing method capable of controlling the blowing stroke, so as to avoid blowing through holes or notches and avoid the risk of film breaking, while retaining a complete embossing path and improving the success rate of film tearing. Background Art

[0002] In the development and etching process of printed circuit boards, a double-layer film composed of a photoresist layer and a surface attachment layer is formed on the upper and / or lower surface of the substrate before development. After the photoresist layer is exposed, the surface attachment layer is peeled off to expose the photoresist layer, which is convenient for subsequent development and etching procedures.

[0003] The traditional film peeling machine mainly peels off the surface attachment layer by rolling an embossing wheel on the surface of the double-layer film, and then peeling off the surface attachment layer in the double-layer film with a film peeling device. When the embossing wheel applies force to roll the double-layer film on the substrate, the double-layer film on the front edge of the substrate will be concave and deformed and form an indentation to destroy the adhesion between the surface attachment layer and the photoresist layer. When the rotating rolling part moves away from the film, an air chamber is formed between the surface attachment layer and the photoresist layer, and the opening of the air chamber is formed between the front edge of the substrate and the photoresist layer. At this time, the film peeling device can complete the film peeling operation through a blowing mechanism and a peeling mechanism. The blowing mechanism can blow air at the opening of the air chamber formed between the double-layer film on the front edge of the substrate, so that the surface attachment layer adjacent to the front edge of the substrate peels off the photoresist layer, and then the peeling mechanism can connect the surface attachment layer adjacent to the front edge of the substrate to peel off the photoresist layer from the surface attachment layer.

[0004] However, in the actual process of tearing off the surface attachment layer, since there are often holes or notches at the front edge of the substrate, and the double-layer film at least partially covers these holes or notches when attached to the substrate. When the blowing mechanism blows air to the air chamber opening formed between the double-layer film on the front edge of the substrate, if the blowing pressure is insufficient, the surface attachment layer cannot be peeled off from the surface of the photoresist layer. On the contrary, if the blowing pressure is too large or directly facing the holes or notches at the front edge of the substrate, the photoresist layer at the holes or notches is easily broken or fragmented, thereby affecting the subsequent development and etching procedures and causing defects or scrapping.

[0005] In view of this, how to provide an air blowing and film tearing device and an air blowing and film tearing method with controllable blowing stroke to avoid blowing through holes or notches and avoid the risk of film breakage, while retaining the complete embossing path, improving the success rate of film tearing, and improving the defects of the known technology, is indeed a problem that urgently needs to be solved. Utility Model Content

[0006] The utility model aims to provide an air blowing film tearing device and an air blowing film tearing method with controllable blowing stroke, so as to avoid blowing through holes or notches and avoid the risk of film breaking, while retaining a complete embossing path and improving the success rate of film tearing.

[0007] Another object of the utility model is to provide an air blowing and film tearing device and an air blowing and film tearing method. By detecting the position of the hole adjacent to the front edge of the substrate by a detection module and then setting a buffer section at the outer periphery of the hole, the blowing stroke of the blowing module can be controlled accordingly to avoid blowing of the hole or notch and avoid the risk of film breakage. On the other hand, the rolling (embossing) stroke before the blowing stroke is allowed to pass through the buffer section, so a complete wrinkle can be formed on the surface of the double-layer film parallel to the front edge of the substrate, retaining the complete embossing path and improving the success rate of film tearing. When the blowing module blows air toward the double-layer film, a blowing action area will be formed at the front edge of the double-layer film. The buffer distance of the buffer section relative to the hole can be designed to be proportionally modulated according to the action radius of the blowing action area. When the jet hole of the blowing module contacts the buffer section, the blowing action area enters the buffer section but has not yet affected the double-layer film at the hole. At this time, interrupting the blowing stroke can effectively avoid the risk of film breakage. In addition, when the air jet hole of the blowing module leaves the buffer section, the blowing module can be started again to blow air toward the double-layer film, and the blowing action area formed by the air flow starts from the buffer section but does not affect the double-layer film at the hole. Therefore, the air flow generated by the blowing module can fully act on the embossed wrinkles, so that the film tearing unit can completely peel off the surface attachment layer from the photoresist layer, while also reducing the risk of film damage caused by blowing directly into the hole.

[0008] Another purpose of the utility model is to provide an air blowing and film tearing device and an air blowing and film tearing method. For the holes adjacent to the front edge of the substrate, the size, position, quantity, etc. can be detected by detection modules such as photoelectric sensors, optical fiber sensors, laser sensors, image sensors, etc. When the detection module is set at the front end of the moving direction of the blowing module, the size, position, quantity and other information of the holes can be obtained in advance. According to the size, position, quantity and other information of the holes adjacent to the front edge of the substrate, and in combination with the size of the blowing action area formed by the air flow blown out by the blowing module on the double-layer film, the buffer distance of an optimized buffer section can be set. When the blowing stroke of the blowing module is opened and closed in sections according to the buffer section, the airflow selectively generated by the blowing module can fully act on the embossed wrinkles, so as to facilitate the subsequent film tearing operation, while also effectively reducing the risk of film breakage caused by the airflow.

[0009] To achieve the above-mentioned purpose, the utility model provides an air blowing and film tearing device, including a conveying module, a detection module, an air blowing module and a control module. The conveying module is assembled to convey a front edge of a substrate to an operating area, wherein the substrate has at least one hole adjacent to the front edge, and a film is covered on the substrate, and a front edge of the film at least partially covers the at least one hole. The detection module is spaced relative to the operating area, and when the front edge of the substrate is input to the operating area, the assembly detects the position of the at least one hole along the front edge direction of the substrate. The air blowing module is arranged adjacent to the detection module and has an air jet hole. The assembly moves along the front edge direction of the substrate together with the detection module, and selectively generates an air flow toward the front edge of the film, wherein the detection module is arranged at the front end of the moving direction of the air blowing module. The control module connects the detection module and the air blowing module, wherein the control module sets a buffer section at the outer periphery of the at least one hole according to the position of the at least one hole sensed by the detection module, and controls the air jet hole of the air blowing module to stop generating air flow when it passes through the buffer section and the at least one hole.

[0010] In one embodiment, the air jet moves along the front edge of the substrate through at least one hole and enters a first buffer section and a second buffer section respectively. The first buffer section and the second buffer section have a buffer distance respectively.

[0011] In one embodiment, when the airflow generated by the air jet hole of the blowing module blows toward the leading edge of the film, the airflow forms a blowing action area at the leading edge with an action radius, wherein the buffer distance ranges from two-thirds to one-third of the action radius.

[0012] In one embodiment, the buffer distance is half of the effective radius.

[0013] In one embodiment, the film includes a photoresist layer and a surface attachment layer, the photoresist layer is disposed on the substrate, and the surface attachment layer is disposed on the photoresist layer.

[0014] In one embodiment, the air blowing and tearing film device also includes a rolling module, which is spatially opposite to the working area. When the front end edge of the substrate is input into the working area, the rolling module rolls the front edge of the film along the front end edge direction of the substrate, so that at least one wrinkle is generated on the front edge of the film, which is parallel to the front end edge of the substrate.

[0015] In one embodiment, when the air blowing module generates an air flow to blow toward at least one wrinkle, a portion of the surface attachment layer is separated from the photoresist layer.

[0016] In one embodiment, the air-blowing film-tearing device further includes a film-tearing unit, which is spatially opposite to the working area and is assembled to completely peel off the surface attachment layer from the photoresist layer.

[0017] In one embodiment, at least one corrugation is allowed to overlap with at least one hole.

[0018] In one embodiment, the detection module is selected from one of the group consisting of a photoelectric sensor, a fiber optic sensor, a laser sensor, and an image sensor.

[0019] To achieve the aforementioned purpose, the utility model further provides an air blowing film tearing method, comprising the following steps: (a) conveying a front end edge of a substrate to an operation area, wherein the substrate has at least one hole adjacent to the front end edge, the substrate is covered with a film, and a front edge portion of the film at least partially covers the at least one hole; (b) detecting the position of the at least one hole along the front end edge direction of the substrate; (c) setting a buffer section at the outer periphery of the at least one hole according to the position of the at least one hole; (d) moving an air jet hole along the front end edge direction of the substrate to generate an airflow toward the front edge portion of the film, wherein the airflow stops when the air jet hole passes through the buffer section and the at least one hole.

[0020] In one embodiment, the air jet moves along the front edge of the substrate through at least one hole and enters a first buffer section and a second buffer section respectively. The first buffer section and the second buffer section have a buffer distance respectively.

[0021] In one embodiment, when the airflow generated by the air jet hole blows toward the leading edge of the film, the airflow forms a blowing action area at the leading edge with an action radius, wherein the buffer distance ranges from two-thirds to one-third of the action radius.

[0022] In one embodiment, the buffer distance is half of the effective radius.

[0023] In one embodiment, the film includes a photoresist layer and a surface attachment layer, the photoresist layer is disposed on the substrate, and the surface attachment layer is disposed on the photoresist layer.

[0024] In one embodiment, step (a) further comprises the step of: (a1) rolling the front edge of the film along the front edge of the substrate to generate at least one wrinkle on the front edge of the film parallel to the front edge of the substrate.

[0025] In one embodiment, when the airflow generated by the air jet hole is blown toward at least one wrinkle, a portion of the surface attachment layer is separated from the photoresist layer.

[0026] In one embodiment, the air blowing film peeling method further includes a step (e) of completely peeling the surface attachment layer from the photoresist layer.

[0027] In one embodiment, at least one corrugation is allowed to overlap with at least one hole.

[0028] In one embodiment, step (b) is performed by a detection module, and the detection module is selected from one of the group consisting of a photoelectric sensor, a fiber optic sensor, a laser sensor, and an image sensor.

[0029] The beneficial effect of the utility model is that by detecting the position of the hole adjacent to the front edge of the substrate through the detection module, and then setting a buffer section on the outer periphery of the hole, the blowing stroke of the blowing module can be controlled accordingly to avoid blowing holes or recesses and avoid the risk of film breakage. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 The utility model discloses a block diagram of an air blowing and film tearing device.

[0031] Figure 2 The utility model discloses a schematic diagram of the embossing stroke and the blowing stroke of the air blowing film tearing device.

[0032] Figure 3A The utility model discloses a schematic diagram of an air blowing and film tearing device for conveying the front end edge of a substrate containing a film to an operating area.

[0033] Figure 3B The utility model discloses a schematic diagram of the air blowing and tearing film device causing wrinkles on the front edge of the film through a rolling module.

[0034] Figure 3C and Figure 3D The present invention discloses a schematic diagram of a detection module and an air blowing module in the air blowing and film tearing device of the present invention moving along the front end edge of a substrate and selectively generating an air flow toward the front end edge of a film.

[0035] Figure 3E The utility model discloses a schematic diagram of an air blowing film peeling device peeling off the upper surface attachment layer of a substrate from the photoresist layer through a film peeling unit.

[0036] Figure 3F The utility model discloses a schematic diagram of the upper surface attachment layer of the substrate being completely peeled off from the photoresist layer.

[0037] Figure 4 The utility model discloses a flow chart of the air blowing and film tearing method.

[0038] The reference numerals are as follows:

[0039] 1: Air blowing and film tearing device

[0040] 10: Substrate

[0041] 11: Front edge

[0042] 12: Holes

[0043] 13a, 13b: Buffer segment

[0044] 20: Film

[0045] 201: Photoresist layer

[0046] 202: Surface attachment layer

[0047] 21: Front edge

[0048] 22: Wrinkle

[0049] 30: Conveying module

[0050] 40: Detection module

[0051] 50: Blowing module

[0052] 51: Fumarole

[0053] 52: Blowing action area

[0054] 60: Control Module

[0055] 70: Rolling module

[0056] 80: Film tearing unit

[0057] B1, B2: Buffer distance

[0058] D: Aperture

[0059] F: Blowing stroke

[0060] P: total length of the path

[0061] R: effective radius

[0062] S: Blowing interruption distance

[0063] S10, S11, S20, S30, S40, S50: Steps

[0064] W: Work area

[0065] X, Y, Z: Axis DETAILED DESCRIPTION

[0066] Some typical embodiments that embody the features and advantages of the utility model will be described in detail in the following description. It should be understood that the utility model can have various changes in different ways, all of which do not depart from the scope of the utility model, and the description and drawings therein are essentially used for illustrative purposes, rather than for limiting the utility model. For example, if the following content of the present disclosure describes that a first feature is set on or above a second feature, it means that it includes an embodiment in which the first feature and the second feature are directly in contact, and also includes an embodiment in which the additional feature can be set between the first feature and the second feature, so that the first feature and the second feature may not be in direct contact. In addition, different embodiments in the present disclosure may use repeated reference symbols and / or marks. These repetitions are for the purpose of simplification and clarity, and are not used to limit the relationship between the various embodiments and / or the appearance structure. Furthermore, in order to facilitate the description of the relationship between a component or feature component and another (plural) component or (plural) feature component in the drawings, space-related terms such as "upper", "lower", "top", "bottom", "front" and similar terms may be used. In addition to the orientation shown in the drawings, spatially related terms are used to cover different orientations of the device in use or operation. The device may also be positioned in another manner (e.g., rotated 90 degrees or located in other orientations), and the description of the spatially related terms used is interpreted accordingly. In addition, when a component is referred to as "connected to" or "coupled to" another component, it may be directly connected to or coupled to another component, or there may be an intervening component. Although the numerical ranges and parameters of the broad scope of the present disclosure are approximate values, the numerical values ​​are stated in the specific examples as accurately as possible. In addition, it is understood that although the words "first", "second", "third" and the like may be used in the claims to describe different components, these components should not be limited by these terms, and the components described accordingly in the embodiments are represented by different component symbols. These terms are for different components respectively. For example: the first component may be referred to as the second component, and similarly, the second component may also be referred to as the first component without departing from the scope of the embodiment.

[0067] Figure 1 The utility model discloses a block diagram of an air blowing and film tearing device. Figure 2 The utility model discloses a schematic diagram of the embossing stroke and the blowing stroke of the air blowing film tearing device. FIG. 3A to FIG. 3F This is a schematic diagram of the operation of the air blowing and film tearing method of the utility model. Figure 1 , Figure 2 as well as FIG. 3A to FIG. 3F In this embodiment, the air blowing and film tearing device 1 mainly includes a conveying module 30, a detection module 40, an air blowing module 50, a control module 60, a rolling module 70 and a film tearing unit 80. The conveying module 30 is configured to convey a front edge 11 of a substrate 10 to an operation area W, such as Figure 3AAs shown, it is convenient for the subsequent embossing, blowing and film tearing operations. The conveying module 30 can be, for example but not limited to, composed of a belt roller set with an elastic belt.

[0068] In the present embodiment, the substrate 10 has at least one hole 12 adjacent to the front edge 11, and a thin film 20 is covered on the substrate 10, and a front edge portion 21 of the thin film 20 at least partially covers at least one hole 12. In the present embodiment, the thin film 20 also includes a photoresist layer 201 and a surface attachment layer 202, the photoresist layer 201 is disposed on the substrate 10, and the surface attachment layer 202 is disposed on the photoresist layer 201, that is, the photoresist layer 201 and the surface attachment layer 202 are stacked along the Z axis and overlap on the XY plane. In other embodiments, the upper surface and the lower surface of the substrate 10 can be covered with the thin film 20 respectively, and the subsequent embossing, blowing and film tearing operations can be performed separately or simultaneously, and the utility model is not limited thereto, which is explained first.

[0069] In this embodiment, the rolling module 70 of the air blowing and tearing device 1 is used for embossing. The rolling module 70 is spatially opposite to the working area W. When the front edge 11 of the substrate 10 is input into the working area, the rolling module 70 can roll the front edge 21 of the film 20 along the direction of the front edge 11 of the substrate 10 (for example, along the X-axis direction), so that the front edge 21 of the film 20 generates at least one wrinkle 22, which is parallel to the front edge 11 of the substrate 10, such as Figure 3B As shown. In the present embodiment, at least one wrinkle 22 mainly separates the surface attachment layer 202 of the front edge portion 21 of the film 20 from the photoresist layer 201, so as to facilitate the subsequent blowing and film tearing operations. Of course, the manner in which the rolling module 70 forms the wrinkles 22 or the pattern, size and type of the wrinkles 22 can be adjusted according to the actual application requirements, and the utility model is not limited thereto. It should be noted that when the rolling module 70 forms at least one wrinkle 22, at least one wrinkle 22 is allowed to overlap with at least one hole 12. In other words, the embossing operation of the rolling module 70 does not affect the film 20 adjacent to the hole 12, that is, the rolling (embossing) operation before the blowing operation can form a complete wrinkle 22 on the surface of the double-layer film 20 parallel to the front edge 11 of the substrate 10, so as to retain the complete embossing path and improve the success rate of film tearing.

[0070] It is worth noting that in order to achieve the control of the blowing stroke F, the blowing module 50 of the blowing and film tearing device 1 of the utility model is further combined with the detection module 40. In the present embodiment, the detection module 40 is spatially relative to the working area W, and when the front end edge 11 of the substrate 10 is input into the working area W, the assembly detects the position of at least one hole 12 along the direction of the front end edge 11 of the substrate 10 (for example, along the X-axis direction). In addition, the blowing module 50 is arranged adjacent to the detection module 40, and has an air jet hole 51, which is assembled together with the detection module 40 to move along the direction of the front end edge 11 of the substrate 10 (for example, along the X-axis direction), and selectively generates an airflow toward the leading edge 21 of the film 20, such as Figure 3C and Figure 3D It should be noted that the blowing module 50 further selectively generates airflow to blow toward the front edge 21 of the film 20 according to the result of the detection module 40 detecting the hole 12 to control the blowing stroke F, so the detection module 40 is further disposed at the front end of the moving direction (e.g., along the X-axis direction) of the blowing module 50. In addition, in this embodiment, the detection module 40 is selected from one of the group consisting of a photoelectric sensor, a fiber optic sensor, a laser sensor, and an image sensor.

[0071] In the present embodiment, the control module 60 connects the detection module 40 and the blowing module 50. In the present embodiment, when the blowing module 50 generates an airflow to blow toward at least one wrinkle 22, a blowing action area 52 is formed at the leading edge 21 of the double-layer film 20. At this time, the surface attachment layer 202 at the wrinkle 22 of the film 20 is partially separated from the photoresist layer 201 to facilitate the subsequent film tearing operation. In the present embodiment, to avoid the risk of film breakage, the control module 60 further sets a buffer section 13a, 13b at the outer periphery of at least one hole 12 according to the position of at least one hole 12 sensed by the detection module 40, and controls the air jet hole 51 of the blowing module 50 to stop generating airflow when passing through the buffer section 13a, 13b and at least one hole 12. Reference Figure 2 , Figure 3C and Figure 3D。In this embodiment, the detection module 40 and the air blowing module 50 move simultaneously along the front edge 11 direction of the substrate 10 (for example, along the X-axis direction). When the air blowing module 50 blows air flow towards the double-layer film 20, a blowing action area 52 will be formed at the front edge part 21 of the double-layer film 20 and directly act on the film 20. In the moving direction of the air blowing module 50, when the air jet hole 51 enters a first buffer section 13a before passing through at least one hole 12, and then passes through at least one hole 12 and enters a second buffer section 13b. To avoid the risk of the film 20 being broken by the air flow, when the blowing action area 52 formed by the air jet hole 51 of the air blowing module 50 enters the buffer section 13a but has not yet affected the double-layer film 20 at the hole 12, at this time, the control module 60 controls the air blowing module 50 to interrupt the air blowing stroke F, which can effectively avoid the risk of film breakage. In addition, when the air jet hole 51 of the air blowing module 50 leaves the buffer section 13b, the control module 60 can start the air blowing module 50 again to blow air flow towards the double-layer film 20 through the air jet hole 51, and then the blowing action area 52 formed by the air flow starts to act within the buffer section 13b but does not affect the double-layer film 20 at the hole 12.

[0072] In this embodiment, the first buffer section 13a has a buffer distance B1, and the second buffer section 13b has a buffer distance B2. The buffer distance B1 and the buffer distance B2 are, for example, the same but not limited thereto. In addition, when the air flow generated by the air jet hole 51 of the air blowing module 50 blows towards the front edge part 21 of the film 20, the formed blowing action area 52 has an action radius R. The buffer distances B1 and B2 of the buffer sections 13a and 13b relative to the hole can be proportionally adjusted and designed according to the action radius R of the blowing action area 52. In addition, the size and shape of the blowing action area 52 can be controlled by controlling the output flow rate of the air blowing module 50 and the size of the air jet hole 51. However, since it is not an essential technical feature of the present invention, it will not be elaborated herein. In this embodiment, both the buffer distance B1 and the buffer distance B2 are one-half of the action radius R, that is In other embodiments, the range of the buffer distance B1 and the buffer distance B2 is between two-thirds of the action radius R and one-third of the action radius R, that is Compared with the total length P of the single embossing path for forming at least one wrinkle 22 by the rolling module 70, the air blowing stroke F of the air blowing group 50 is carried out in segments, and the air blowing interruption distance S is greater than the aperture D of the hole 12 and less than the sum of the aperture D, the buffer distance B1 and the buffer distance B2, that is, D < S < (D + B1 + B2). Thus, the air flow generated by the air blowing module 50 can fully act on the embossed wrinkle 22, which is beneficial for the subsequent film tearing operation.

[0073] In this embodiment, the film tearing unit 80 of the air blowing film tearing device 1 performs a film tearing operation after the air blowing operation. The film tearing unit 80 is also assembled in space relative to the working area W to completely peel the upper surface attaching layer 202 of the film 20 from the photoresist layer 201. As Figure 3E As shown, the film peeling unit 80 can be operated by clamping, sticking or side wind blowing to remove the surface attachment layer 202 along the front edge 21 of the film 20 in the direction opposite to the Y axis. When the surface attachment layer 202 on the film 20 is completely peeled off from the photoresist layer 201, the risk of film damage caused by blowing directly into the hole 12 is also reduced. The resulting substrate 10 is as shown in FIG. Figure 3F As shown, the photoresist layer 201 is exposed, and subsequent processes such as development and etching can be performed.

[0074] As can be seen from the above, the size, position, quantity, etc. of the holes 12 adjacent to the front edge 11 of the substrate 10 can be detected by a detection module 40 such as a photoelectric sensor, an optical fiber sensor, a laser sensor, an image sensor, etc. When the detection module 40 is set at the front end of the moving direction of the blowing module 50 (for example, along the X-axis direction), the size, position, quantity, etc. of the holes can be obtained in advance. According to the size, position, quantity, etc. of the holes 12 adjacent to the front edge 11 of the substrate 10, and in combination with the size of the blowing action area 52 formed by the blowing module 50 blowing out the airflow on the double-layer film 20, an optimized buffer distance B1, B2 of the buffer section 13a, 13b can be set. When the blowing stroke F of the blowing module 50 is opened and closed in sections according to the buffer sections 13a, 13b, the airflow selectively generated by the blowing module 50 can fully act on the embossed wrinkles 22, so as to facilitate the subsequent film tearing operation, and at the same time effectively reduce the risk of film breakage caused by the airflow. Of course, the present invention can be used not only in thin films 20 with photoresist layers 201 by controlling the blowing stroke F by detecting the position of the holes 12. In other different applications, once the thin film 20 on the substrate 10 is subjected to blowing operation near the holes 12 and there is a risk of film breakage, the blowing stroke F can be controlled by the mechanism of the present invention, thereby effectively avoiding the risk of film breakage.

[0075] According to the aforementioned air blowing film tearing device, the utility model further provides an air blowing film tearing method. Figure 4 The flowchart of the air blowing and film tearing method of the utility model is disclosed. Figure 1 , Figure 2 , FIG. 3A to FIG. 3F and Figure 4 In this embodiment, first, as in step S10, the front edge 11 of the substrate 10 is transported to the work area W by a conveying module 30 such as a belt roller set. In this embodiment, the substrate 10 has at least one hole 12 adjacent to the front edge 11, and the surface of the substrate 10 is covered with a film 20, and the front edge 21 of the film 20 at least partially covers the hole 12.

[0076] In step S11, the front edge portion 21 of the film 20 is rolled along the front edge 11 of the substrate 10 (e.g., along the X-axis direction) by the rolling module 70, so that the front edge portion 21 of the film 20 generates at least one wrinkle 22 parallel to the front edge 11 of the substrate 10, such as Figure 3B As shown. In the subsequent process, there is a need to perform operations on the front edge 21 of the film 20. If the film 20 at the hole 12 is directly blown, there is a risk of film breakage. Therefore, in step S20, a detection module 40 such as a photoelectric sensor, an optical fiber sensor, a laser sensor, an image sensor, etc. can be used to detect the position of at least one hole 12 along the front edge 11 of the substrate 10 (for example, along the X-axis direction). The blowing module 50 is combined with the function of the detection module 40 to pre-detect the hole position where film breakage may occur during the blowing operation.

[0077] Next, in step S30, the control module 60 can set a buffer section 13a, 13b at the outer periphery of at least one hole 12 according to the position of at least one hole 12 sensed by the detection module 40, so as to plan the blowing stroke F of the blowing module 50 (see Figure 2 ). In this embodiment, the buffer distances B1 and B2 of the buffer sections 13a and 13b relative to the holes can be designed to be proportionally adjusted according to the effective radius R of the blowing action area 52. For example, the buffer distance B1 and the buffer distance B2 are both half of the effective radius R. Or the range of the buffer distance B1 and the buffer distance B2 is between two-thirds and one-third of the effective radius R. By adjusting the optimal conditions, the airflow generated by the subsequent blowing module 50 can fully act on the embossed wrinkles 22, while avoiding possible film breakage.

[0078] Finally, in step S40, the blowing operation to be performed by the blowing module 50 can move the jet hole 51 along the front edge 11 of the substrate 10 (for example, along the X-axis direction) to generate an airflow toward the front edge 21 of the film 20. Since the jet hole 51 enters a first buffer section 13a before passing through at least one hole 12, but has not yet affected the double-layer film 20 at the hole 12, the control module 60 controls the blowing module 50 to interrupt the blowing stroke F, which can effectively avoid the risk of film breakage. In addition, when the jet hole 51 of the blowing module 50 leaves the buffer section 13b, the blowing module 50 generates an airflow through the jet hole 51 again to blow toward the double-layer film 20, and the blowing action area 52 formed by the airflow starts to act from the buffer section 13b but does not affect the double-layer film 20 at the hole 12, ensuring that the airflow generated by the blowing module 50 can fully act on the embossed wrinkles 22.

[0079] Of course, after the air blowing operation eliminates the risk of possible film breakage, the film tearing unit 80 of the air blowing film tearing device 1 can perform subsequent film tearing operations, such as step S50, to completely peel off the upper surface attachment layer 202 of the film 20 from the photoresist layer 201, such as Figure 3F Of course, as mentioned above, the utility model controls the blowing stroke F by detecting the position of the hole 12 (see Figure 2 ) can be applied to the film 20 with the photoresist layer 201. In other different applications, when the film 20 on the substrate 10 is subjected to a blowing operation adjacent to the hole 12 and there is a risk of film breakage, the mechanism of the utility model can be used to achieve controllability of the blowing stroke F, thereby effectively avoiding the risk of film breakage.

[0080] In summary, the utility model provides an air blowing and film tearing device and an air blowing and film tearing method capable of controlling the blowing stroke, so as to avoid blowing holes or notches and avoid the risk of film breakage, while retaining a complete embossing path and improving the success rate of film tearing. By detecting the position of the hole adjacent to the front edge of the substrate by a detection module, and then setting a buffer section at the outer periphery of the hole, the blowing stroke of the blowing module can be controlled accordingly, so as to avoid blowing holes or notches and avoid the risk of film breakage. On the other hand, the rolling (embossing) stroke before the blowing stroke is allowed to pass through the buffer section, so that complete wrinkles can be formed on the surface of the double-layer film parallel to the front edge of the substrate, retaining a complete embossing path and improving the success rate of film tearing. When the blowing module blows airflow toward the double-layer film, a blowing action area is formed at the front edge of the double-layer film. The buffer distance of the buffer section relative to the hole can be designed to be proportionally adjusted according to the action radius of the blowing action area. When the jet hole of the blowing module contacts the buffer section, the blowing action area enters the buffer section but has not yet affected the double-layer film at the hole. At this time, interrupting the blowing stroke can effectively avoid the risk of film breakage. In addition, when the jet hole of the blowing module leaves the buffer section, the blowing module can be started again to blow air toward the double-layer film, and the blowing action area formed by the airflow starts to act from the buffer section but does not affect the double-layer film at the hole. As a result, the airflow generated by the blowing module can fully act on the embossed wrinkles, so that the film tearing unit can completely peel off the surface attachment layer from the photoresist layer, while also reducing the risk of film breakage caused by blowing directly on the hole. The utility model is aimed at holes adjacent to the front edge of the substrate, and can detect the size, position, quantity, etc. through detection modules such as photoelectric sensors, optical fiber sensors, laser sensors, image sensors, etc. When the detection module is set at the front end of the moving direction of the blowing module, the size, position, quantity, etc. of the hole can be obtained in advance. According to the size, position, number and other information of the holes near the front edge of the substrate, and in combination with the size of the blowing action area formed by the airflow blown out by the air blowing module on the double-layer film, the buffer distance of an optimized buffer section can be set. When the blowing stroke of the air blowing module is closed and opened in sections according to the buffer section, the airflow selectively generated by the air blowing module can fully act on the embossed wrinkles, which is conducive to the subsequent film tearing operation, and also effectively reduces the risk of film breakage caused by airflow.

[0081] The present invention can be modified in various ways by those skilled in the art, but all of them are within the protection scope of the appended claims.

Claims

1. An air blowing and tearing film device, characterized in that: include: A conveying module is assembled to convey a front edge of a substrate to an operation area, wherein the substrate has at least one hole adjacent to the front edge, the substrate is covered with a film, and a front edge of the film at least partially covers the at least one hole, and the outer periphery of the at least one hole has a buffer section; a detection module, spatially opposite to the operation area, and configured to detect the position of the at least one hole along the direction of the front edge of the substrate when the front edge of the substrate is input into the operation area; an air blowing module, disposed adjacent to the detection module and having an air jet hole, assembled together with the detection module to move along the front edge direction of the substrate and selectively generate an air flow toward the front edge of the film, wherein the detection module is disposed at the front end of the moving direction of the air blowing module; as well as A control module is connected to the detection module and the blowing module, wherein the control module controls the jet hole of the blowing module to generate the airflow according to the position of the at least one hole sensed by the detection module.

2. The air blowing and tearing film device according to claim 1, characterized in that: The air jet hole moves along the front edge direction of the substrate through the at least one hole and enters a first buffer section and a second buffer section respectively. The first buffer section and the second buffer section have a buffer distance respectively.

3. The air blowing and tearing film device according to claim 2, characterized in that: When the airflow generated by the air jet hole of the blowing module blows toward the leading edge of the film, the airflow forms a blowing action area at the leading edge with an action radius, wherein the buffer distance ranges from two-thirds to one-third of the action radius.

4. The air blowing and tearing film device according to claim 3, characterized in that: The buffer distance is half of the effective radius.

5. The air blowing and tearing film device according to claim 1, characterized in that: The film comprises a photoresist layer and a surface attachment layer. The photoresist layer is arranged on the substrate, and the surface attachment layer is arranged on the photoresist layer.

6. The air blowing and tearing film device according to claim 5, characterized in that: It also includes a rolling module, which is spatially opposite to the working area. When the front end edge of the substrate is input into the working area, the rolling module rolls the front edge of the film along the direction of the front end edge of the substrate, so that the front edge of the film has at least one wrinkle parallel to the front end edge of the substrate.

7. The air blowing and tearing film device according to claim 6, characterized in that: When the air blowing module generates the air flow to blow toward the at least one wrinkle, the surface attachment layer is partially separated from the photoresist layer.

8. The air blowing and tearing film device according to claim 7, characterized in that: The invention also comprises a film peeling unit which is arranged relative to the working area in space and is configured to completely peel off the surface attachment layer from the photoresist layer.

9. The air blowing and tearing film device according to claim 6, characterized in that: The at least one corrugation is allowed to overlap with the at least one hole.

10. The air blowing and tearing film device according to claim 1, characterized in that: The detection module is selected from one of the group consisting of a photoelectric sensor, a fiber optic sensor, a laser sensor, and an image sensor.

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