Special suspension conveying device for target material in semiconductor industry

Abstract

The utility model discloses a special suspension conveying device for a target material in the semiconductor industry, and particularly relates to the technical field of suspension conveying of the target material, the special suspension conveying device comprises a reinforcing supporting rod, hoisting casting assemblies are arranged at the two ends of the reinforcing supporting rod, and each hoisting casting assembly comprises a limiting cylinder arranged at one end of the reinforcing supporting rod; a guide column is arranged at the bottom of an inner cavity of the limiting cylinder, and a first connecting plate is arranged at the bottom of the guide column. The hoisting casting assembly is arranged, the suction cup makes contact with a workpiece, the first connecting plate drives the guide column to move in the limiting barrel, the spring is compressed, the buffering function is achieved, the suction cup and the workpiece can be tightly attracted conveniently, and the stability of the workpiece during transferring is guaranteed; and the stop lever rotates under the action of kinetic energy of compressed air and air pressure, so that the stop lever can move to the bottom of the workpiece, the function of lifting the workpiece is achieved, and the workpiece is prevented from falling off.

Description

Technical Field

[0001] The utility model relates to the technical field of target material suspension and transportation, and more specifically, to a special suspension and transportation device for target materials in the semiconductor industry. Background Art

[0002] The semiconductor industry's special target suspension and transportation device is used to suspend and transport the target during the target manufacturing process. The target is usually made of metal, alloy or other materials, and the material on the target is deposited on the substrate to form a thin film by evaporation or sputtering.

[0003] Among them, it was found through search that the patent application number CN202120426848.6 discloses a target material lifting device, including a main beam and a plurality of connecting parts, a lifting part is provided above the main beam, and a plurality of groups of lifting nuts with equal intervals are provided below the main beam, each group of lifting nuts includes a plurality of lifting nuts with equal intervals, the connecting part is connected to the lifting nut, and an embedded protective layer is provided on the inner side of the connecting part;

[0004] When this structure is in use, the contact surface of the target lifting device is wide enough to lift the target without damaging the target. However, this structure cannot ensure the stability of the target during lifting and transportation, and is not convenient enough to use. Utility Model Content

[0005] In order to overcome the above-mentioned defects of the prior art, the utility model provides a special suspension and transportation device for targets in the semiconductor industry, aiming to solve the problems raised in the above-mentioned background technology.

[0006] The utility model is implemented in this way. The utility model provides the following technical solutions: a special suspension and transportation device for target materials in the semiconductor industry comprises a reinforcing support rod, and both ends of the reinforcing support rod are provided with a hoisting casting assembly;

[0007] The hoisting casting assembly includes a limiting cylinder arranged at one end of the reinforcing support rod, a guide column is arranged at the bottom of the inner cavity of the limiting cylinder, and a first connecting plate is arranged at the bottom of the guide column;

[0008] A second connecting plate is disposed at the bottom of the first connecting plate, the first connecting plate and the second connecting plate are detachably connected, a suction cup is disposed at the bottom of the second connecting plate, a swing arm cylinder is disposed at one side of the limiting cylinder, and a stop rod is disposed at the bottom of the swing arm cylinder;

[0009] It can be seen that in the above technical solution, the first connecting plate drives the guide column to move in the limit cylinder and compresses the spring to realize the buffering function, which facilitates the close suction of the suction cup and the workpiece to ensure the stability of the workpiece during transportation. At the same time, the swing arm cylinder drives the baffle rod to rotate, and the kinetic energy and air pressure of the compressed air are used to rotate the baffle rod, so that the baffle rod can be moved to the bottom of the workpiece, so as to realize the function of lifting the workpiece and prevent the workpiece from falling.

[0010] Optionally, in a possible implementation, the guide column is slidably connected to the limiting cylinder, a spring is provided at the top of the guide column, a guide rod is provided at the bottom of the spring, the guide rod is mounted on the guide column, guide grooves are penetrated on both sides of the limiting cylinder, the guide rods match the guide grooves, the guide rods extend into the guide grooves and are slidably connected to the guide grooves, a connecting seat is provided at the top of the reinforcing support rod, a handle is provided on one side of the connecting seat, a side connecting seat is provided on one side of the swing arm cylinder, and the side connecting seat is mounted on one side of the reinforcing support rod;

[0011] It can be seen that in the above technical solution, the device is installed on the hook through the connecting seat to provide a good support point, and the setting of the handle makes it convenient for the staff to push and pull the device, thereby improving the convenience of the device in transporting workpieces. Through the setting of the guide rod and the guide groove, the guide column and the suction cup can be guided and limited during displacement, thereby ensuring the stability of the guide column during displacement.

[0012] Technical effects and advantages of the utility model:

[0013] By setting the hoisting casting assembly, compared with the prior art, the overall design is simple and the structure is reasonable. Through the corresponding coordination of various structures, the device is installed on the hook through the connecting seat to provide a good support point, and the setting of the handle makes it convenient for the staff to push and pull the device, thereby improving the convenience of the device in transporting the workpiece;

[0014] The device moves downward so that the suction cup contacts the workpiece, and the first connecting plate drives the guide column to move in the limiting cylinder and compresses the spring to achieve a buffering function, so that the suction cup and the workpiece are closely attracted to ensure the stability of the workpiece during transportation;

[0015] At the same time, the swing arm cylinder drives the baffle rod to rotate, and the kinetic energy and air pressure of the compressed air are used to rotate the baffle rod, so that the baffle rod can be moved to the bottom of the workpiece, thereby realizing the function of lifting the workpiece and preventing the workpiece from falling. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the present disclosure, the following briefly introduces the drawings required to be used in some embodiments of the present disclosure. Obviously, the drawings described below are only drawings of some embodiments of the present disclosure. For ordinary technicians in this field, other drawings can also be obtained based on these drawings. In addition, the drawings described below can be regarded as schematic diagrams, and are not limitations on the actual size of the product involved in the embodiments of the present disclosure, the actual process of the method, the actual timing of the signal, etc.

[0017] Figure 1 It is the front view of the overall structure of the utility model.

[0018] Figure 2 It is a side view of the overall structure of the utility model.

[0019] Figure 3 It is a stereoscopic diagram of the suction cup, the second connecting plate, the limiting cylinder and the first connecting plate of the utility model.

[0020] Figure 4 This is a three-dimensional diagram of the reinforced support rod, handle, connecting seat, swing arm cylinder and stop rod of the utility model.

[0021] Figure 5 For this utility model Figure 3 Exploded diagram.

[0022] The accompanying drawings are marked as follows: 1. Strengthening support rod; 2. Limiting cylinder; 3. Guide column; 4. First connecting plate; 5. Second connecting plate; 6. Suction cup; 7. Spring; 8. Guide rod; 9. Guide groove; 10. Swing arm cylinder; 11. Stop rod; 12. Connecting seat; 13. Handle; 14. Side connecting seat. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] As attached Figure 1-5The semiconductor industry target material special suspension and transportation device shown in the figure, through the lifting casting assembly arranged on the strengthening support rod 1, is moved to the top of the workpiece through the device, and is displaced downward so that the suction cup 6 contacts the workpiece, and the first connecting plate 4 drives the guide column 3 to displace in the limit cylinder 2, and compresses the spring 7 to realize the buffering function, so that the suction cup 6 and the workpiece are tightly attracted to each other, and the stability of the workpiece during transportation is ensured. At the same time, the swing arm cylinder 10 drives the blocking rod 11 to rotate, and the kinetic energy and air pressure of the compressed air are used to rotate the blocking rod 11, and then the blocking rod 11 can be displaced to the bottom of the workpiece, so as to realize the function of lifting the workpiece and prevent the workpiece from falling, and the specific structure of the assembly is set as follows;

[0025] The hoisting casting assembly includes a limiting cylinder 2 arranged at one end of the reinforcing support rod 1, a guide column 3 is arranged at the bottom of the inner cavity of the limiting cylinder 2, and a first connecting plate 4 is arranged at the bottom of the guide column 3;

[0026] A second connecting plate 5 is provided at the bottom of the first connecting plate 4, the first connecting plate 4 and the second connecting plate 5 are detachably connected, a suction cup 6 is provided at the bottom of the second connecting plate 5, a swing arm cylinder 10 is provided at one side of the limiting cylinder 2, and a stop rod 11 is provided at the bottom of the swing arm cylinder 10;

[0027] The guide column 3 is slidably connected with the limiting cylinder 2, a spring 7 is arranged on the top of the guide column 3, a guide rod 8 is arranged on the bottom of the spring 7, the guide rod 8 is installed on the guide column 3, guide grooves 9 are penetrated on both sides of the limiting cylinder 2, the guide rod 8 matches the guide grooves 9, the guide rod 8 extends into the guide grooves 9 and is slidably connected with the guide grooves 9, a connecting seat 12 is arranged on the top of the reinforcing support rod 1, a handle 13 is arranged on one side of the connecting seat 12, a side connecting seat 14 is arranged on one side of the swing arm cylinder 10, and the side connecting seat 14 is installed on one side of the reinforcing support rod 1.

[0028] According to the above structure, when in use, the worker installs the device at a designated position, and installs the device on a hook through the connecting seat 12, providing a good support point, and the setting of the handle 13 facilitates the worker to push and pull the device, thereby improving the convenience of the device in transporting workpieces;

[0029] When the device is transferring the workpiece, the device moves to the top of the workpiece and moves downward so that the suction cup 6 contacts the workpiece. The first connecting plate 4 drives the guide column 3 to move in the limiting cylinder 2 and compresses the spring 7 to achieve a buffering function, so that the suction cup 6 is tightly engaged with the workpiece to ensure the stability of the workpiece during transfer.

[0030] At the same time, the swing arm cylinder 10 drives the blocking rod 11 to rotate, and the kinetic energy and air pressure of the compressed air are used to rotate the blocking rod 11, so that the blocking rod 11 can be moved to the bottom of the workpiece, so as to realize the function of lifting the workpiece and prevent the workpiece from falling;

[0031] At the same time, by providing the guide rod 8 and the guide groove 9, the guide column 3 and the suction cup 6 can be guided and limited when they are displaced, thereby ensuring the stability of the guide column 3 when it is displaced.

[0032] Different from the prior art, the present application discloses a special suspension and transportation device for target materials in the semiconductor industry. The device moves to the top of the workpiece and moves downward so that the suction cup 6 contacts the workpiece. The first connecting plate 4 drives the guide column 3 to move in the limiting cylinder 2 and compresses the spring 7 to achieve a buffering function, which facilitates the close combination of the suction cup 6 and ensures the stability of the workpiece during transportation. At the same time, the swing arm cylinder 10 drives the baffle rod 11 to rotate, and the kinetic energy and air pressure of the compressed air are used to rotate the baffle rod 11, so that the baffle rod 11 can be moved to the bottom of the workpiece, thereby achieving the function of lifting the workpiece and preventing the workpiece from falling.

[0033] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A special suspension and transportation device for target materials in the semiconductor industry, comprising a reinforced support rod (1), characterized in that: Both ends of the reinforcing support rod (1) are provided with a hoisting casting assembly; The hoisting casting assembly comprises a limiting cylinder (2) arranged at one end of the reinforcing support rod (1), a guide column (3) is arranged at the bottom of the inner cavity of the limiting cylinder (2), and a first connecting plate (4) is arranged at the bottom of the guide column (3); A second connecting plate (5) is provided at the bottom of the first connecting plate (4); the first connecting plate (4) and the second connecting plate (5) are detachably connected; and a suction cup (6) is provided at the bottom of the second connecting plate (5).

2. The semiconductor industry target material special suspension and transportation device according to claim 1, characterized in that: The guide column (3) is slidably connected to the limiting cylinder (2), and a spring (7) is provided on the top of the guide column (3).

3. The semiconductor industry target material dedicated suspension and transportation device according to claim 2, characterized in that: A guide rod (8) is provided at the bottom of the spring (7), and the guide rod (8) is mounted on the guide column (3).

4. The semiconductor industry target material dedicated suspension and transportation device according to claim 3, characterized in that: Guide grooves (9) are provided through both sides of the limiting cylinder (2), the guide rods (8) match the guide grooves (9), and the guide rods (8) extend into the guide grooves (9) and are slidably connected to the guide grooves (9).

5. The semiconductor industry target material dedicated suspension and transportation device according to claim 1, characterized in that: A swing arm cylinder (10) is provided on one side of the limiting cylinder (2), and a stop rod (11) is provided at the bottom of the swing arm cylinder (10).

6. The semiconductor industry target material dedicated suspension and transportation device according to claim 1, characterized in that: A connecting seat (12) is provided at the top of the reinforcing support rod (1), and a handle (13) is provided on one side of the connecting seat (12).

7. The semiconductor industry target material dedicated suspension and transportation device according to claim 5, characterized in that: A side connecting seat (14) is provided on one side of the swing arm cylinder (10), and the side connecting seat (14) is installed on one side of the reinforcing support rod (1).

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