Self-cleaning window and vacuum treatment system

Abstract

The utility model relates to the technical field of vacuum equipment, and discloses a self-cleaning window, which comprises a window main body comprising a window accommodating hole and a feed through hole communicated with the window accommodating hole; the light-transmitting plate is arranged in the window accommodating hole of the window main body; the at least one non-closed conducting ring is arranged on at least one side surface of the light-transmitting plate; and the feed-through is connected with the feed-through hole of the window main body, the feed-through comprises a first electrode and a second electrode, and the first electrode and the second electrode are connected with the at least one non-closed conducting ring to form a closed-loop path which is used for heating the light-transmitting plate.

Description

Technical Field

[0001] The present disclosure relates to the technical field of vacuum equipment, and in particular to a self-cleaning window and a vacuum processing system. Background Art

[0002] In vacuum coating systems, such as MBE systems (molecular beam epitaxy systems), it is inevitable that materials will be deposited on the window glass during the coating growth process. This can reduce the transparency of the window glass and affect the measurement accuracy. In severe cases, the entire window glass is blocked by the deposited material and loses its transparency. At present, most domestic methods use window baffles in front of the window to reduce material deposition on the window glass, but this cannot fundamentally solve the problem. Moreover, the window glass needs to be disassembled before cleaning, which requires breaking the vacuum chamber and replacing and disassembling the window glass. Utility Model Content

[0003] The present disclosure provides a self-cleaning window, comprising:

[0004] A window body, comprising a window receiving hole and a feed-through hole communicating with the window receiving hole;

[0005] A light-transmitting plate, arranged in the window receiving hole of the window body;

[0006] At least one open conductive ring is disposed on at least one side surface of the light-transmitting plate; and

[0007] The feedthrough is connected to the feedthrough hole of the window body. The feedthrough includes a first electrode and a second electrode. The first electrode and the second electrode are connected to at least one unclosed conductive ring to form a closed loop path for heating the light-transmitting plate.

[0008] In some embodiments, at least one open conductive loop comprises:

[0009] A first open conductive ring is disposed on a first side surface of the light-transmitting plate; and

[0010] A second open conductive ring is disposed on a second side surface of the light-transmitting plate, the second side being opposite to the first side;

[0011] The first electrode and the second electrode are connected to the first unclosed conductive ring and the second unclosed conductive ring to form a parallel loop.

[0012] In some embodiments, the feedthrough further comprises:

[0013] A first electroelastic electrode elastically abuts against a first end of at least one open conductive ring; and

[0014] The second electroelastic electrode piece is elastically in contact with the second end of the at least one open conductive ring.

[0015] Feedthrough also includes:

[0016] A first terminal is sleeved with the lower end of the first electrode through a hole provided at the upper end, and the lower end of the first terminal is fixedly connected to the first elastic electrode sheet; and

[0017] The second terminal is sleeved with the lower end of the second electrode through a hole arranged at the upper end, and the lower end of the second terminal is fixedly connected with the second elastic electrode sheet.

[0018] In some embodiments, the feedthrough further comprises:

[0019] A first insulating sleeve and a second insulating sleeve are respectively sleeved on the outside of the first electrode and the second electrode, and are used to insulate the first electrode and the second electrode respectively; and / or

[0020] The insulating spacer comprises two through holes for respectively arranging the first terminal and the second terminal.

[0021] In some embodiments, the self-cleaning window further comprises:

[0022] A first positioning ring, disposed on the first side of the light-transmitting plate, the first positioning ring comprising a first step extending inwardly, the first step being used to support the first side of the light-transmitting plate; and

[0023] The second positioning ring is arranged on the second side of the light-transmitting plate. The second positioning ring comprises a second step extending inwardly. The second step is used to support the second side of the light-transmitting plate.

[0024] In some embodiments, the self-cleaning window further comprises:

[0025] A first electroelastic electrode elastically abuts against a first end of at least one open conductive ring; and

[0026] The second electroelastic electrode piece is elastically in contact with the second end of the at least one open conductive ring.

[0027] The first positioning ring includes a first isolating boss disposed on a side wall of the first step, the first isolating boss includes a pair of first grooves and a first boss disposed between the pair of first grooves;

[0028] The second positioning ring includes a second isolating boss arranged on the side wall of the second step, the second isolating boss includes a pair of second grooves and a second boss arranged between the pair of second grooves, the pair of first grooves respectively cooperate with the pair of second grooves to accommodate the first elastic electrode sheet and the second elastic electrode sheet.

[0029] In some embodiments, the first positioning ring includes at least one first insulation protrusion disposed on the first step for abutting the first side of the light-transmitting plate, and the second positioning ring includes at least one second insulation protrusion disposed on the second step for abutting the second side of the light-transmitting plate.

[0030] In some embodiments, the self-cleaning window further comprises:

[0031] At least one first heat-insulating sheet is arranged on a side of the first positioning ring away from the light-transmitting plate; and / or

[0032] At least one second heat-insulating sheet is arranged on a side of the second positioning ring away from the light-transmitting plate.

[0033] In some embodiments, the self-cleaning window further comprises:

[0034] The first positioning ring includes a first stop hole, the second positioning ring includes a second stop hole, the light-transmitting plate includes a third stop hole, and the stop pin is arranged through the first stop hole, the second stop hole and the third stop hole.

[0035] In some embodiments, the window body includes an inwardly extending flange and at least one locating pin disposed on an inner surface of the flange;

[0036] The second positioning ring includes at least one positioning hole arranged on a side surface away from the light-transmitting plate, which is used to cooperate with at least one positioning pin to limit the rotation of the second positioning ring.

[0037] In some embodiments, the self-cleaning window further comprises:

[0038] A compression nut, which is used to be threadedly fixedly connected to the window body; and / or

[0039] The heat-insulating cylinder is used to accommodate the first positioning ring, the second positioning ring and the light-transmitting plate. The heat-insulating cylinder comprises a notch arranged on the cylinder wall, which is used to engage with the first isolating boss and the second isolating boss.

[0040] In some embodiments, the window body further includes:

[0041] A window flange is arranged outside the feed-through hole;

[0042] A sealing gasket is arranged on the outside of the window flange to achieve a vacuum seal at the joint;

[0043] The feedthrough further comprises a feedthrough flange and a sealing fastener, wherein the sealing fastener is used to seal the feedthrough flange and the window flange via a sealing gasket;

[0044] The first electrode and the second electrode extend from the sealing fastener and the feed-through flange into the window body.

[0045] The present disclosure provides a vacuum processing system, comprising:

[0046] a vacuum chamber, including a window;

[0047] A self-cleaning window as in any one of the embodiments of the present disclosure, the self-cleaning window is installed on a window; and

[0048] At least one evaporation source is arranged in the vacuum chamber.

[0049] The self-cleaning window according to some embodiments of the present disclosure can bring beneficial technical effects. For example, by plating an unclosed conductive ring on both sides of the light-transmitting plate, and connecting the two sides through a feed-through to form a closed-loop path, the light-transmitting plate is heated by the principle of heating by electrical resistance, and the material deposited on the light-transmitting plate is thermally evaporated to actively solve the problem of material deposition affecting the transparency of the window. The structure is simple, and the situation of opening a cavity to replace the window is reduced. For another example, the design of the isolating boss can not only be used to accommodate the elastic electrode sheet, but also prevent the elastic electrode sheets on both sides from short-circuiting. For another example, the provision of the heat-insulating protrusion can reduce the contact area between the first positioning ring and the second positioning ring and the light-transmitting plate of the self-cleaning window, thereby reducing heat loss. BRIEF DESCRIPTION OF THE DRAWINGS

[0050] In order to more clearly illustrate the embodiments of the present disclosure or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only one embodiment of the present disclosure. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0051] Figure 1 An exploded view showing a self-cleaning window according to some embodiments of the present disclosure;

[0052] Figure 2 A schematic structural diagram of a self-cleaning window body according to some embodiments of the present disclosure is shown;

[0053] Figure 3 A schematic diagram showing the structure of a self-cleaning window light-transmitting plate according to some embodiments of the present disclosure is shown;

[0054] Figure 4 A schematic diagram of a positioning ring structure including a heat-insulating protrusion and an isolating boss according to some embodiments of the present disclosure is shown;

[0055] Figure 5 A schematic diagram of a positioning ring structure including positioning holes according to some embodiments of the present disclosure is shown;

[0056] Figure 6 A front view of a self-cleaning window according to some embodiments of the present disclosure is shown;

[0057] Figure 7 Show Figure 6 AA cross-section diagram;

[0058] Figure 8 A stereoscopic view of an assembled self-cleaning window according to some embodiments of the present disclosure is shown. In the above drawings, each reference numeral represents:

[0059] 10-Self-cleaning window

[0060] 100-Window body

[0061] 101-Window receiving hole

[0062] 102-Feedthrough hole

[0063] 110-Translucent board

[0064] 111- The third anti-rotation hole

[0065] 120a- first positioning ring

[0066] 120b- second positioning ring

[0067] 121-Second isolation boss

[0068] 1211- a pair of second grooves

[0069] 1212-Second boss

[0070] 122a, 122b, 122c- heat insulation protrusions

[0071] 123a- first anti-rotation hole

[0072] 123b- second anti-rotation hole

[0073] 124-Positioning hole

[0074] 130a- first heat insulation sheet

[0075] 130b- Second thermal insulation sheet

[0076] 140-Stop Transfer

[0077] 150-Location pin

[0078] 160-Insulation tube

[0079] 161-Gap

[0080] 170-Sealing Fasteners

[0081] 180-Window Flange

[0082] 190-Sealing gasket

[0083] 200-Unclosed Conductive Ring

[0084] 300a- first elastic electrode sheet

[0085] 300b- second elastic electrode sheet

[0086] 400-Feedthrough

[0087] 410a-first electrode

[0088] 410b- Second electrode

[0089] 420a- first insulating sleeve

[0090] 420b- Second insulating sleeve

[0091] 420c-third insulating sleeve

[0092] 420d-Fourth insulation sleeve

[0093] 430-Insulation sleeve

[0094] 440-Feedthrough Flange

[0095] 500a-First terminal

[0096] 500b-Second Binding Post

[0097] 510-hole

[0098] 600-Compression nut

[0099] 700-Set Screw

[0100] 800-Screw DETAILED DESCRIPTION

[0101] Some embodiments of the present disclosure will be described below in conjunction with the accompanying drawings. Obviously, the described embodiments are only exemplary embodiments of the present disclosure, rather than all embodiments.

[0102] In the description of the present disclosure, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", "top", "bottom" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present disclosure and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present disclosure. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance. In the description of the present disclosure, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection", "connected", and "coupling" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be the internal connection of two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present disclosure can be understood according to the specific circumstances.

[0103] Figure 1 An exploded view of a self-cleaning window 10 according to some embodiments of the present disclosure is shown; Figure 2 A schematic structural diagram of a self-cleaning window body 100 according to some embodiments of the present disclosure is shown; Figure 3 A schematic structural diagram of a self-cleaning window light-transmitting plate 110 according to some embodiments of the present disclosure is shown.

[0104] like Figure 1 and Figure 3 As shown, in some embodiments of the present disclosure, the self-cleaning window 10 may include a window body 100, a light-transmitting plate 110, at least one unclosed conductive ring 200 and a feedthrough 400. The window body 100 may include a window receiving hole 101 and a feedthrough hole 102 connected to the window receiving hole 101. The light-transmitting plate 110 may be disposed in the window receiving hole 101 of the window body 100 to provide a transparent observation window. At least one unclosed conductive ring 200 may be disposed on at least one side surface of the light-transmitting plate 110. The feedthrough 400 may be connected to the feedthrough hole 102 of the window body 100. The feedthrough 400 may include a first electrode 410a and a second electrode 410b, which are connected to at least one unclosed conductive ring 200 to form a closed loop path for heating the light-transmitting plate 110.

[0105] In some embodiments, Figure 3 As shown, at least one open conductive ring 200 may include a first open conductive ring and a second open conductive ring. The first open conductive ring is disposed on the first side surface of the light-transmitting plate 110, for example Figure 3The second open conductive ring is disposed on the second side surface of the light-transmitting plate 110 opposite to the first side, for example Figure 3 The first electrode 410a and the second electrode 410b are connected to the first unclosed conductive ring and the second unclosed conductive ring, so that the first unclosed conductive ring and the second unclosed conductive ring form a parallel loop.

[0106] In some embodiments, Figure 1 As shown, the feedthrough 400 may further include a first electroelastic pole piece 300a and a second electroelastic pole piece 300b. The first electroelastic pole piece 300a elastically abuts against a first end of at least one open conductive ring 200, and the second electroelastic pole piece 300b elastically abuts against a second end of at least one open conductive ring.

[0107] In some embodiments, Figure 1 As shown, the first elastic electrode sheet 300a and the second elastic electrode sheet 300b are W-shaped, and each includes two electrode sheet branches located at the bottom corner of the W. When the card is set on the light-transmitting plate 110, the two electrode sheet branches are respectively located on both sides of the light-transmitting plate 110, and are respectively connected to one end of the unclosed conductive ring on the surface of both sides of the light-transmitting plate 110. Those skilled in the art can understand that the first elastic electrode sheet 300a and the second elastic electrode sheet 300b can be integrally formed or connected by two elastic electrode sheets, and can adopt other suitable shapes.

[0108] In some embodiments, the feedthrough 400 may further include a first terminal 500a and a second terminal 500b. Figure 1 As shown. The first terminal 500a is sleeved with the lower end of the first electrode 410a through the hole 510 set at the upper end, and the lower end of the first terminal 500a is fixedly connected to the first elastic electrode sheet 300a. The second terminal 500b is sleeved with the lower end of the second electrode 410b through the hole 510 set at the upper end, and the lower end of the second terminal 500b is fixedly connected to the second elastic electrode sheet 300b.

[0109] Those skilled in the art will appreciate that the first terminal 500a can be fixed to the lower end of the first electrode 410a, and the second terminal 500b can be fixed to the lower end of the second electrode 410b by a set screw 700. The first elastic electrode sheet 300a and the second elastic electrode sheet 300b can be fixed to the first terminal 500a and the second terminal 500b by screws 800, respectively. For example, a first screw hole can be provided at the lower part of the first terminal 500a and the second terminal 500b, and a second screw hole can be provided at the upper part of the first elastic electrode sheet 300a and the second elastic electrode sheet 300b, and the screw 800 fixes the elastic electrode sheet and the terminal through the first screw hole and the second screw hole.

[0110] In some embodiments, Figure 1 As shown, the feedthrough 400 may further include a first insulating sleeve 420a and a second insulating sleeve 420b. The first insulating sleeve 420a and the second insulating sleeve 420b are respectively sleeved outside the first electrode 410a and the second electrode 410b, and are respectively used to insulate the first electrode 410a and the second electrode 410b from other components. In some embodiments, the feedthrough 400 may further include an insulating spacer 430, such as Figure 1 As shown. The insulating spacer 430 includes two through holes for respectively arranging the first terminal 500a and the second terminal 500b. The two through holes on the insulating spacer 430 can separate the first terminal 500a and the second terminal 500b, and limit them respectively to avoid contact with each other.

[0111] Those skilled in the art will appreciate that the insulating sleeves may be sleeved only at the places outside the first electrode 410a and the second electrode 410b that are easy to touch other parts. For example, the first insulating sleeve 420a and the second insulating sleeve 420b may be sleeved at the exposed lower ends of the first electrode 410a and the second electrode 410b, respectively, and / or the third insulating sleeve 420c and the fourth insulating sleeve 420d may be sleeved at the exposed upper ends of the first electrode 410a and the second electrode 410b, respectively. Those skilled in the art will appreciate that the insulating sleeves may be ceramic insulating sleeves.

[0112] In some embodiments, Figure 1 The self-cleaning window 10 shown may further include a first positioning ring 120a and a second positioning ring 120b. The first positioning ring 120a is disposed on a first side of the light-transmitting plate 110, for example Figure 1 On the left side shown in FIG. 1 , the second positioning ring 120 b is disposed on the second side of the light-transmitting plate 110 , for example, Figure 1 The first positioning ring 120a includes a first step extending inwardly, and the first step is used to support the first side of the light-transmitting plate 110, for example Figure 1 The second positioning ring 120b includes a second step extending inwardly, and the second step is used to support the second side of the light-transmitting plate 110, for example Figure 1 right side shown.

[0113] Figure 4 FIG. 1 is a schematic diagram showing the structure of a second positioning ring 120b including a heat insulating protrusion and an isolation boss according to some embodiments of the present disclosure. Figure 4 As shown, in some embodiments, the second positioning ring 120b may further include a second isolation boss 121 disposed on the side wall of the second step. The second isolation boss 121 includes a pair of second grooves 1211 and a second boss 1212 disposed between the pair of second grooves 1211. Figure 4The second positioning ring 120b shown is similar, and the first positioning ring 120a can also include a first isolation boss arranged on the side wall of the first step. The first isolation boss includes a pair of first grooves and a first boss arranged between the pair of first grooves. The pair of second grooves 1211 respectively cooperate with the pair of first grooves to accommodate the first elastic electrode sheet 300a and the second elastic electrode sheet 300b.

[0114] like Figure 4 As shown, in some embodiments, the second positioning ring 120b may further include at least one second heat-insulating protrusion disposed on the second step, such as heat-insulating protrusions 122a, 122b, and 122c, for abutting against the second side of the light-transmitting plate 110, such as Figure 1 Similarly, the first positioning ring 120a may also include at least one first heat-insulating protrusion disposed on the first step, for abutting against the first side of the light-transmitting plate 110, for example Figure 1 Left side shown.

[0115] It will be appreciated by those skilled in the art that although the present invention Figure 4 Only three heat insulation protrusions are shown, but the first positioning ring 120a and the second positioning ring 120b may also include other numbers of heat insulation protrusions. The provision of the heat insulation protrusions can reduce the contact area between the positioning ring and the light-transmitting plate 110. In some embodiments, the first positioning ring 120a and the second positioning ring 120b may be ceramic positioning rings.

[0116] like Figure 1 As shown, in some embodiments, the self-cleaning window 10 may further include at least one first heat-insulating sheet 130a and at least one second heat-insulating sheet 130b. The at least one first heat-insulating sheet 130a is disposed on a side of the first positioning ring 120a away from the light-transmitting plate 110, for example, Figure 1 At least one second heat-insulating sheet 130b is disposed on a side of the second positioning ring 120b away from the light-transmitting plate 110, for example Figure 1 right side shown.

[0117] Those skilled in the art will appreciate that although Figure 1 Only two heat insulation sheets 130a and two heat insulation sheets 130b are respectively provided on both sides of the first positioning ring 120a and the second positioning ring 120b, but the self-cleaning window may also include other numbers of heat insulation sheets.

[0118] like Figure 1 , Figure 3 and Figure 4As shown, in some embodiments, the self-cleaning window 10 may further include a stop pin 140. The first positioning ring 120a includes a first stop hole 123a, the second positioning ring 120b includes a second stop hole 123b, the light-transmitting plate 110 includes a third stop hole 111, and the stop pin 140 is disposed through the first stop hole 123a, the second stop hole 123b and the third stop hole 111, and can be used to prevent the first positioning ring 120a, the second positioning ring 120b and the light-transmitting plate 110 from rotating relative to each other.

[0119] In some embodiments, Figure 1 and Figure 4 As shown, the first anti-rotation hole 123a can pass through the first boss, and the second anti-rotation hole 123b can pass through the second boss 1212. Figure 3 As shown, the third anti-rotation hole 111 is arranged at the unclosed part of the unclosed conductive ring 200.

[0120] In some embodiments, Figure 2 As shown, the window body 100 may further include a flange extending inwardly and at least one positioning pin 150 disposed on the inner surface of the flange. Figure 5 As shown, the second positioning ring 120b includes a side surface (eg, Figure 1 At least one positioning hole 124 on the right side surface (as shown) is used to cooperate with the positioning pin 150 to limit the rotation of the second positioning ring 120b.

[0121] In some embodiments, Figure 5 As shown, two positioning holes 124 are provided on the positioning ring 120b. Figure 2 As shown, two positioning pins 150 are provided on the self-cleaning window body 100, and the two positioning holes 124 cooperate with the two positioning pins 150 to limit the rotation of the second positioning ring 120b, and cooperate with the anti-rotation pin 140 to prevent the first positioning ring 120a, the second positioning ring 120b and the light-transmitting plate 110 from rotating relative to the window body 100. It can be understood by those skilled in the art that the number of positioning holes 124 and positioning pins 150 can also be less than or greater than two. It can be understood by those skilled in the art that positioning holes can also be provided only on the second positioning ring 120b, but considering the versatility of parts, the first positioning ring 120a and the second positioning ring 120b can be made into the same structure, that is, both are provided with positioning holes.

[0122] In some embodiments, Figure 1As shown, the self-cleaning window 10 may further include a compression nut 600. The compression nut 600 is used to be threadedly fixedly connected to the window body 100 to install the first heat insulation sheet 130a, the first positioning ring 120a, the light-transmitting plate 110, the second positioning ring 120b, the second heat insulation sheet 130b and other components in the window receiving hole 101 of the window body 100.

[0123] In some embodiments, Figure 1 As shown, the self-cleaning window 10 may further include an insulating tube 160 for accommodating the first positioning ring 120a, the second positioning ring 120b and the light-transmitting plate 110. The insulating tube 160 may further insulate the light-transmitting plate 110 to prevent heat from dissipating too quickly and maintain the temperature of the light-transmitting plate 110.

[0124] In some embodiments, Figure 1 As shown, the wall of the heat-insulating cylinder 160 may further include a notch 161 for engaging with the isolating bosses on the first positioning ring 120a and the second positioning ring 120b.

[0125] In some embodiments, the first positioning ring 120 a , the second positioning ring 120 b , the light-transmitting plate 110 , the heat-insulating tube 160 , and the stop pin 140 can be integrally mounted in the window receiving hole 101 of the self-cleaning window body 100 .

[0126] In some embodiments, after the first positioning ring 120a, the second positioning ring 120b, the light-transmitting plate 110, the heat-insulating tube 160 and the stop pin 140 are integrally mounted in the window receiving hole 101 of the self-cleaning window body 100, the locking nut 600 is screwed into the self-cleaning window body 100 to play a fixing role.

[0127] Figure 6 A front view showing a self-cleaning window according to some embodiments of the present disclosure, Figure 7 Shows Figure 6 AA cross-section diagram, Figure 8 1 is a perspective view of an assembled self-cleaning window 10 according to some embodiments of the present disclosure.

[0128] In some embodiments, Figure 1 As shown, the self-cleaning window body 100 may further include a window flange 180 and a sealing gasket 190. The window flange 180 is disposed outside the feedthrough hole, and the sealing gasket 190 is disposed outside the window flange 180 to achieve vacuum sealing at the joint. The feedthrough 400 also includes a feedthrough flange 440 and a sealing fastener 170. The sealing fastener 170 is used to seal the feedthrough flange 440 with the window flange 180 through the sealing gasket 190. The first electrode 410a and the second electrode 410b extend from the sealing fastener 170 and the feedthrough flange 440 into the window body 100, as shown in FIG. Figure 1, Figure 6-Figure 8 shown.

[0129] In some embodiments, the window flange model is a CF16 flange, and of course it can also be any other suitable flange model.

[0130] In some embodiments of the present disclosure, a vacuum processing system may include a vacuum chamber, a self-cleaning window such as any one of the embodiments of the present disclosure (e.g., self-cleaning window 10), and at least one evaporation source. The vacuum chamber may include a window, and the self-cleaning window may be mounted on the window of the vacuum chamber. At least one evaporation source may be disposed in the vacuum chamber for evaporating a target material onto a sample. During the evaporation process of the evaporation source, the target material is likely to tend to adhere to the light-transmitting plate of the self-cleaning window. In an embodiment of the present disclosure, by energizing the unclosed conductive ring on the light-transmitting plate to generate heat, the light-transmitting plate is heated, and the target material attached to the light-transmitting plate is evaporated again, thereby achieving an automatic cleaning effect.

[0131] It should be pointed out that the above are only exemplary embodiments of the present disclosure and are not intended to limit the present disclosure. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present disclosure should be included in the protection scope of the present disclosure.

Claims

1. A self-cleaning window, characterized in that: include: A window body, comprising a window receiving hole and a feed-through hole communicating with the window receiving hole; A light-transmitting plate, arranged in the window receiving hole of the window body; At least one open conductive ring is disposed on at least one side surface of the light-transmitting plate; as well as A feedthrough is connected to the feedthrough hole of the window body, and the feedthrough includes a first electrode and a second electrode. The first electrode and the second electrode are connected to the at least one unclosed conductive ring to form a closed loop path for heating the light-transmitting plate.

2. The self-cleaning window according to claim 1, characterized in that: At least one open conductive loop comprises: A first open conductive ring is disposed on a first side surface of the light-transmitting plate; and A second open conductive ring is disposed on a second side surface of the light-transmitting plate, the second side being opposite to the first side; The first electrode and the second electrode are connected to the first unclosed conductive ring and the second unclosed conductive ring to form a parallel loop.

3. The self-cleaning window according to claim 1, characterized in that: The feedthrough further comprises: A first elastic electrode sheet elastically abuts against a first end of the at least one open conductive ring; and The second elastic electrode sheet is elastically in contact with the second end of the at least one open conductive ring. The feedthrough further comprises: A first terminal, which is sleeved with the lower end of the first electrode through a hole provided at the upper end, and the lower end of the first terminal is fixedly connected to the first elastic electrode sheet; and The second terminal is sleeved with the lower end of the second electrode through a hole arranged at the upper end, and the lower end of the second terminal is fixedly connected with the second elastic electrode sheet.

4. The self-cleaning window according to claim 3, characterized in that: The feedthrough further comprises: A first insulating sleeve and a second insulating sleeve are respectively sleeved on the outside of the first electrode and the second electrode, and are respectively used to insulate the first electrode and the second electrode; and / or The insulating spacer comprises two through holes for respectively arranging the first terminal and the second terminal.

5. The self-cleaning window according to claim 1, characterized in that: Also includes: A first positioning ring, disposed on a first side of the light-transmitting plate, the first positioning ring comprising a first step extending inwardly, the first step being used to support the first side of the light-transmitting plate; as well as The second positioning ring is arranged on the second side of the light-transmitting plate. The second positioning ring comprises a second step extending inwardly. The second step is used to support the second side of the light-transmitting plate.

6. The self-cleaning window according to claim 5, characterized in that: Also includes: A first elastic electrode sheet elastically abuts against a first end of the at least one open conductive ring; as well as The second elastic electrode sheet is elastically in contact with the second end of the at least one open conductive ring. The first positioning ring includes a first isolating boss disposed on a side wall of the first step, the first isolating boss includes a pair of first grooves and a first boss disposed between the pair of first grooves; The second positioning ring includes a second isolating boss arranged on the side wall of the second step, the second isolating boss includes a pair of second grooves and a second boss arranged between the pair of second grooves, the pair of first grooves respectively cooperate with the pair of second grooves to accommodate the first elastic electrode sheet and the second elastic electrode sheet.

7. The self-cleaning window according to claim 5, characterized in that: The first positioning ring includes at least one first heat insulation protrusion arranged on the first step for abutting against the first side of the light-transmitting plate, and the second positioning ring includes at least one second heat insulation protrusion arranged on the second step for abutting against the second side of the light-transmitting plate.

8. The self-cleaning window according to claim 5, characterized in that: Also includes: At least one first heat-insulating sheet, arranged on a side of the first positioning ring away from the light-transmitting plate; and / or At least one second heat-insulating sheet is arranged on a side of the second positioning ring away from the light-transmitting plate.

9. The self-cleaning window according to claim 5, characterized in that: Also includes: The first positioning ring includes a first stop hole, the second positioning ring includes a second stop hole, the light-transmitting plate includes a third stop hole, and the stop pin is disposed through the first stop hole, the second stop hole and the third stop hole.

10. The self-cleaning window according to claim 5, characterized in that: The window body includes an inwardly extending flange and at least one positioning pin disposed on an inner surface of the flange; The second positioning ring includes at least one positioning hole arranged on a side surface away from the light-transmitting plate, which is used to cooperate with the at least one positioning pin to limit the rotation of the second positioning ring.

11. The self-cleaning window according to claim 6, characterized in that: Also includes: A compression nut, the compression nut being used for being threadedly fixedly connected to the window body; and / or The heat-insulating cylinder is used to accommodate the first positioning ring, the second positioning ring and the light-transmitting plate. The heat-insulating cylinder includes a notch arranged on the cylinder wall, which is used to engage with the first isolating boss and the second isolating boss.

12. The self-cleaning window according to claim 1, characterized in that: The main window also includes: A window flange is arranged outside the feedthrough hole; A sealing gasket, arranged on the outer side of the window flange, for achieving vacuum sealing at the joint; The feedthrough further comprises a feedthrough flange and a sealing fastener, wherein the sealing fastener is used to seal the feedthrough flange and the window flange via the sealing gasket; The first electrode and the second electrode extend from the sealing fastener and the feed-through flange into the window body.

13. A vacuum processing system, characterized in that: include: a vacuum chamber, including a window; The self-cleaning window according to any one of claims 1 to 12, wherein the self-cleaning window is mounted on the window; as well as At least one evaporation source is disposed in the vacuum chamber.

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