Vacuum coating equipment capable of uniformly heating workpiece

Abstract

The vacuum coating equipment comprises a vacuum coating machine frame, a vacuum coating machine body is installed above the vacuum coating machine frame, a fixing clamp is installed in the vacuum coating machine body, the bottom end of the fixing clamp is connected with one end of a driven rotating shaft, and the other end of the driven rotating shaft is connected with the other end of the driven rotating shaft. The other end of the driven rotating shaft is connected with the interior of the speed reducer. The speed reducer is mounted below the vacuum coating rack, and the driving motor can be conveniently mounted through the fixing frame and the transverse bottom plate, so that the driving motor can conveniently drive the second bevel gear to rotate through the driving rotating shaft, and the second bevel gear drives the connecting rotating shaft to rotate through the first bevel gear; the fixing clamp can conveniently rotate in the vacuum coating machine body, and the situation that the driving motor is installed in the vacuum coating machine body, overheating is caused by high temperature, energy consumption of the driving motor is increased, the use efficiency is reduced, and meanwhile the service life of the driving motor is shortened is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating equipment, in particular to vacuum coating equipment which can heat a workpiece uniformly. Background Art

[0002] Vacuum coating machine mainly refers to a type of coating that needs to be carried out under a higher vacuum degree. There are many types, including vacuum resistance heating evaporation, electron gun heating evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, ion beam sputtering and many other types. The main idea is to divide it into evaporation and sputtering.

[0003] For example, the patent publication number is CN217781266U, a vacuum coating device for uniformly heating a workpiece includes a base, a supporting foot is fixedly installed on the outer surface of the lower end of the base, a vacuum coating machine body is arranged on the outer surface of the upper end of the base, a control panel is arranged on the outer surface of one side of the vacuum coating machine body, and an automatic rotating placement seat device for improving the uniformity of heating of the workpiece is arranged on the inner surface of the lower end of the vacuum coating machine body, and the automatic rotating placement seat device includes a mounting plate, and a motor mounting box is arranged on the outer surface of the upper end of the mounting plate. The vacuum coating equipment for uniformly heating the workpieces described in the utility model is provided with an automatic rotating placement seat device, has a simple structure, and does not require frequent manual flipping of the workpieces. Not only is the operation process simple and the labor intensity is low, which improves production efficiency, but it can also improve the uniformity of heating the workpieces to a certain extent, greatly improve the effect of subsequent coating, and improve production quality. However, when the above-mentioned vacuum coating machine is in use, the drive motor is installed inside the machine body, which causes the drive motor to be affected by the high temperature inside the machine body, causing the temperature of the drive motor to rise, affecting the service life of the motor. For this reason, we propose a vacuum coating equipment for uniformly heating the workpieces to solve the above-mentioned problem. Utility Model Content

[0004] The utility model aims to solve the shortcomings in the prior art and proposes a vacuum coating device which can heat the workpiece uniformly.

[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0006] A vacuum coating device for uniformly heating a workpiece comprises a vacuum coating frame, a vacuum coating body is installed above the vacuum coating frame, and a fixing fixture is installed inside the vacuum coating body, the bottom end of the fixing fixture is connected to one end of a driven rotating shaft, and the other end of the driven rotating shaft is connected to the inside of a reducer, the bottom end of the reducer is connected to one end of a connecting rotating shaft, and the other end of the connecting rotating shaft is fixedly connected with a first bevel tooth, the surface of the first bevel tooth is meshed with a second bevel tooth, and the side surface of the second bevel tooth is fixedly connected to one end of a driving rotating shaft, the other end of the driving rotating shaft is connected to a driving motor, and the connecting rotating shaft and the driving rotating shaft are both arranged inside a fixed frame.

[0007] Preferably, a transverse bottom plate is fixedly connected to the bottom surface of the fixed frame, and a driving motor is installed on a side surface of the transverse bottom plate away from the fixed frame, so that the driving motor and the fixed frame can be conveniently fixed by the transverse bottom plate.

[0008] Preferably, the bottom surface of the reducer is fixedly connected to a connecting base plate, and guide columns are fixedly connected to the four corners of the bottom of the connecting base plate, and connecting side plates are fixedly connected to both sides of the top of the fixed frame, and the guide columns can conveniently guide the installation of the fixed frame.

[0009] Preferably, the guide column is configured to be cylindrical, and a circular hole adapted to the guide column is provided inside the connecting side plate. By configuring the guide column to be cylindrical, the wear force between the guide column and the connecting side plate can be reduced.

[0010] Preferably, a plug-in stud is fixedly connected at the center position of the surface of the connecting side plate, and a mounting nut is threadedly sleeved on the top end of the plug-in stud. The plug-in stud is driven by the connecting side plate to be inserted into the interior of the connecting bottom plate, so that the mounting nut can connect the plug-in stud.

[0011] Preferably, circular holes matching the plug-in studs are opened inside both sides of the connecting base plate, and the connecting base plate is sleeved between the plug-in studs and the mounting nuts. By sleeved between the plug-in studs and the mounting nuts, the mounting nuts can conveniently connect the connecting base plate to the fixed frame.

[0012] Preferably, the cross section of the fixing frame is set to be a rectangular frame, and a sealing strip is glued to the top surface of the fixing frame, and the sealing strip can increase the sealing performance.

[0013] Compared with the prior art, the beneficial effects of the utility model are:

[0014] 1. The device can conveniently install the driving motor by installing the reducer under the vacuum coating machine frame and through the fixing frame and the horizontal bottom plate, so that the driving motor can drive the second bevel gear to rotate through the active shaft, and the second bevel gear can drive the connecting shaft to rotate through the first bevel gear, so that the fixing fixture can be rotated inside the vacuum coating machine body, so as to avoid installing the driving motor inside the vacuum coating machine body, which will be affected by high temperature and cause overheating, increase the energy consumption of the driving motor, reduce the use efficiency, and reduce the service life of the driving motor.

[0015] 2. The device drives the guide column of the connecting bottom plate into the interior of the connecting side plate, so that the plug-in stud can pass through the interior of the connecting bottom plate. At this time, the mounting nut is sleeved on the surface of the plug-in stud, which is convenient for disassembly and installation between the fixed frame and the connecting bottom plate, and convenient for later disassembly and maintenance of the first bevel gear, the second bevel gear and the driving motor. At the same time, after the connecting bottom plate and the connecting side plate are installed, the sealing strip can be located between the connecting bottom plate and the fixed frame to increase the connection sealing and prevent dust from entering the interior. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a three-dimensional schematic diagram of a vacuum coating device for uniformly heating a workpiece proposed by the utility model;

[0017] Figure 2 for Figure 1 A three-dimensional bottom view of the reducer and the fixed frame structure;

[0018] Figure 3 for Figure 1 A schematic diagram of a three-dimensional separation state of a fixed frame and a connecting bottom plate structure;

[0019] Figure 4 for Figure 1 A three-dimensional cross-sectional schematic diagram of the fixing frame and sealing strip structure.

[0020] In the figure: 1. vacuum coating frame; 2. vacuum coating body; 3. fixing fixture; 4. driven shaft; 5. reducer; 6. connecting shaft; 7. first bevel gear; 8. second bevel gear; 9. driving shaft; 10. driving motor; 11. fixing frame; 12. horizontal bottom plate; 13. connecting bottom plate; 14. guide column; 15. connecting side plate; 16. plug-in stud; 17. mounting nut; 18. sealing strip. DETAILED DESCRIPTION

[0021] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0022] Reference Figure 1-4 , a vacuum coating device for uniformly heating a workpiece, comprising a vacuum coating frame 1, a vacuum coating body 2 is installed above the vacuum coating frame 1, and a fixing fixture 3 is installed inside the vacuum coating body 2, the bottom end of the fixing fixture 3 is connected to one end of a driven rotating shaft 4, and the other end of the driven rotating shaft 4 is connected to the inside of a reducer 5, the bottom end of the reducer 5 is connected to one end of a connecting rotating shaft 6, and the other end of the connecting rotating shaft 6 is fixedly connected with a first bevel gear 7, the surface of the first bevel gear 7 is meshed with a second bevel gear 8, and the first bevel gear 7 is meshed with the second bevel gear 8, so that the driving rotating shaft 9 can drive the connecting rotating shaft 6 to rotate, so that the fixing fixture 3 can be rotated inside the vacuum coating body 2, and the side surface of the second bevel gear 8 is fixedly connected to one end of the driving rotating shaft 9, and the other end of the driving rotating shaft 9 is connected to a driving motor 10, and the connecting rotating shaft 6 and the driving rotating shaft 9 are both arranged inside a fixed frame 11.

[0023] Further, see Figure 2 and Figure 3 It can be known that the bottom surface of the fixed frame 11 is fixedly connected with a transverse bottom plate 12, and the side surface of the transverse bottom plate 12 away from the fixed frame 11 is installed with a driving motor 10. The transverse bottom plate 12 can facilitate the connection and support of the driving motor 10 and the fixed frame 11.

[0024] Further, see Figure 3 and Figure 4 It can be known that the bottom surface of the reducer 5 is fixedly connected with a connecting base plate 13, and the four corners of the bottom of the connecting base plate 13 are fixedly connected with guide columns 14, and the top two sides of the fixed frame 11 are fixedly connected with connecting side plates 15. The connecting base plate 13 can be used to conveniently drive the guide columns 14 to be inserted into the connecting side plates 15, so as to facilitate the installation of the fixed frame 11.

[0025] Further, see Figure 3 and Figure 4 It can be seen that the guide column 14 is set to be cylindrical, and a circular hole compatible with the guide column 14 is opened inside the connecting side plate 15. The circular hole opened inside the connecting side plate 15 can reduce the friction between the guide column 14 and the connecting side plate 15 when the guide column 14 is plugged in.

[0026] Further, see Figure 2 and Figure 3 It can be known that a plug-in stud 16 is fixedly connected at the center position of the surface of the connecting side plate 15, and a mounting nut 17 is threadedly sleeved on the top of the plug-in stud 16, and the mounting nut 17 can facilitate the function of limiting the plug-in stud 16.

[0027] Further, see Figure 2 and Figure 3It can be known that circular holes compatible with the plug-in studs 16 are opened inside the two sides of the connecting base plate 13, and the connecting base plate 13 is sleeved between the plug-in studs 16 and the mounting nuts 17. The circular holes opened in the temporal parts on both sides of the connecting base plate 13 can facilitate the insertion of the plug-in studs 16.

[0028] Further, see Figure 3 and Figure 4 It can be known that the cross section of the fixing frame 11 is set to be a rectangular frame, and a sealing strip 18 is glued to the top surface of the fixing frame 11 , and the sealing strip 18 can increase the sealing between the fixing frame 11 and the connecting bottom plate 13 .

[0029] Working principle: When the vacuum coating machine frame 1 is in use, according to the attached Figure 1 , Attachment Figure 2 , Attachment Figure 3 and attached Figure 4 , by driving the fixed frame 11 to sleeve the connecting side plate 15 on the surface of the guide column 14, the plug-in stud 16 can pass through the connecting bottom plate 13, and then the mounting nut 17 is sleeved on the surface of the plug-in stud 16, so that the fixed frame 11 can be connected to the connecting bottom plate 13, and the sealing strip 18 can seal between the fixed frame 11 and the connecting bottom plate 13, so that the second bevel gear 8 can mesh with the surface of the first bevel gear 7, and then by driving the motor 10, the active shaft 9 can drive the second bevel gear 8 to rotate, so that the second bevel gear 8 can drive the connecting shaft 6 to rotate through the first bevel gear 7, and when the connecting shaft 6 is rotating, the driven shaft 4 can drive the fixing fixture 3 to rotate inside the vacuum coating machine body 2 through the reducer 5, so as to improve the heating effect of the workpiece;

[0030] The above is the entire working principle of the utility model.

[0031] In the present invention, the installation method, connection method or setting method of all the components mentioned above are common mechanical methods, and the specific structures, models and coefficient indicators of all its components are its own technology. As long as it can achieve its beneficial effects, it can be implemented, so it will not be elaborated.

[0032] The above embodiments are preferred implementation modes of the present invention, but the implementation modes of the present invention are not limited by the above embodiments. Any other changes, modifications, substitutions, combinations, and simplifications that do not deviate from the spirit and principle of the present invention should be equivalent replacement methods and are included in the protection scope of the present invention.

[0033] In the present utility model, unless otherwise stated, the directional words contained in the terms such as "up, down, left, right, front, back, inside, outside, vertical, horizontal" only represent the orientation of the term in normal use, or are common names understood by those skilled in the art, and should not be regarded as limitations on the term. At the same time, number series nouns such as "first", "second" and "third" do not represent specific quantities and orders, but are merely used to distinguish names. Moreover, the terms "include", "comprise" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device that includes a series of elements includes not only those elements, but also includes other elements that are not explicitly listed, or also includes elements inherent to such process, method, article or device.

Claims

1. A vacuum coating device for uniformly heating a workpiece, comprising a vacuum coating frame (1), characterized in that: A vacuum coating machine body (2) is installed above the vacuum coating machine frame (1), and a fixing fixture (3) is installed inside the vacuum coating machine body (2), the bottom end of the fixing fixture (3) is connected to one end of a driven shaft (4), and the other end of the driven shaft (4) is connected to the inside of a reducer (5), the bottom end of the reducer (5) is connected to one end of a connecting shaft (6), and the other end of the connecting shaft (6) is fixedly connected to a first bevel gear (7), the surface of the first bevel gear (7) is meshed with a second bevel gear (8), and the side surface of the second bevel gear (8) is fixedly connected to one end of an active shaft (9), the other end of the active shaft (9) is connected to a driving motor (10), and the connecting shaft (6) and the active shaft (9) are both arranged inside a fixed frame (11).

2. The vacuum coating device for uniformly heating a workpiece according to claim 1, characterized in that: The bottom end surface of the fixed frame (11) is fixedly connected to a transverse bottom plate (12), and a driving motor (10) is installed on a side surface of the transverse bottom plate (12) away from the fixed frame (11).

3. The vacuum coating device for uniformly heating a workpiece according to claim 1, characterized in that: The bottom surface of the reducer (5) is fixedly connected to a connecting bottom plate (13), and the four corners of the bottom of the connecting bottom plate (13) are fixedly connected to guide columns (14), and both sides of the top of the fixed frame (11) are fixedly connected to connecting side plates (15).

4. The vacuum coating device for uniformly heating a workpiece according to claim 3, characterized in that: The guide column (14) is configured to be cylindrical, and a circular hole matching the guide column (14) is provided inside the connecting side plate (15).

5. The vacuum coating device for uniformly heating a workpiece according to claim 3, characterized in that: A plug-in stud (16) is fixedly connected at the center position of the surface of the connecting side plate (15), and a mounting nut (17) is threadedly sleeved on the top end of the plug-in stud (16).

6. The vacuum coating device for uniformly heating a workpiece according to claim 3, characterized in that: Circular holes matching the plug-in studs (16) are provided inside the two sides of the connecting base plate (13), and the connecting base plate (13) is sleeved between the plug-in studs (16) and the mounting nuts (17).

7. The vacuum coating device for uniformly heating a workpiece according to claim 1, characterized in that: The cross section of the fixing frame (11) is arranged to be a rectangular frame, and a sealing strip (18) is glued to the top surface of the fixing frame (11).

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