Vacuum CVD (Chemical Vapor Deposition) silicon carbide deposition atmosphere rotary furnace with uniform heating

Abstract

The utility model discloses a uniformly heated vacuum CVD (chemical vapor deposition) silicon carbide deposition atmosphere rotary furnace, which belongs to the technical field of rotary furnaces, and comprises a base, a silicon carbide deposition atmosphere rotary furnace body, an adjusting assembly and a driving assembly, the upper surface of the base is fixedly connected with two vertical beams, and the upper surfaces of the two vertical beams are jointly and fixedly connected with a cross beam; the upper surface of the silicon carbide deposition atmosphere rotary furnace body fixedly communicates with a discharging pipe, and a driving motor, a first bearing, a rotating rod, a first gear, a second bearing, a rotating shaft, a second gear, a stabilizing rod, the silicon carbide deposition atmosphere rotary furnace body, a heating net, a rotating motor, a third bearing, a rotating column, stirring blades and a round hole are matched; the raw materials can be heated more uniformly, and by arranging a protection frame, a discharging pipe, a reinforcing rod, a mounting hole, a stabilizing rod, a mounting screw, a first reinforcing column and a second reinforcing column, not only is the overall strength of the equipment greatly improved, but also the rotating motor can be protected.

Description

Technical Field

[0001] The utility model relates to the technical field of rotary furnaces, in particular to a vacuum CVD silicon carbide deposition atmosphere rotary furnace with uniform heating. Background Art

[0002] With the rapid development of electric vehicles, energy storage power stations and portable electronic devices, high-energy-density lithium-ion batteries have received more and more attention. However, the graphite negative electrode still firmly occupies a dominant position. Its theoretical specific capacity of 372mAh / g can no longer meet the requirements of high-energy-density battery negative electrode materials, which seriously restricts the improvement of lithium battery energy density. CVD carbon vapor-coated silicon or silicon oxygen lithium battery negative electrode materials are generally achieved by rotary kilns. The general working temperature is around 1000℃. The outer wall of the rotary kiln tube is exposed to the air, which is very easy to cause high-temperature oxidation. At present, the diameter of the rotary kiln tube is greater than 300 mm and the length exceeds 4000 mm. The tube must withstand a certain impact and a large torque when rotating. General quartz and conventional ceramic materials cannot meet the working conditions. At this stage, heat-resistant stainless steel is generally used for rotary kiln tubes.

[0003] However, when the current rotary kiln heats the raw materials, the raw materials inside will pile up together, causing uneven heating of the materials, resulting in poor quality of the materials produced by the equipment. Therefore, technical personnel in this field provide a vacuum CVD silicon carbide deposition atmosphere rotary kiln with uniform heating to solve the problems raised in the above background technology. Utility Model Content

[0004] The utility model aims to provide a vacuum CVD silicon carbide deposition atmosphere rotary furnace with uniform heating to solve the problems raised in the above background technology.

[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0006] A vacuum CVD silicon carbide deposition atmosphere rotary furnace with uniform heating comprises a base, a silicon carbide deposition atmosphere rotary furnace body, an adjustment component and a drive component, wherein the upper surface of the base is fixedly connected to two vertical beams, the upper surfaces of the two vertical beams are commonly fixedly connected to a cross beam, the upper surface of the silicon carbide deposition atmosphere rotary furnace body is fixedly connected to a discharge pipe, the upper surface of the silicon carbide deposition atmosphere rotary furnace body is provided with a feed port, the inner wall of the feed port is threadedly connected to a sealing plug, and the inner wall of the silicon carbide deposition atmosphere rotary furnace body is fixedly inlaid with a heating net.

[0007] As a further solution of the utility model: the adjustment component includes a rotating rod, a first bearing is fixedly embedded on the left side of one of the vertical beams, an inner ring of the first bearing is fixedly connected to the rotating rod, a driving motor is fixedly connected to the right side of one of the vertical beams, and an output end of the driving motor is fixedly connected to the rotating rod.

[0008] As a further solution of the utility model: the outer surface of the rotating rod is fixedly connected to the first gear, the side surfaces of the two vertical beams close to each other are fixedly inlaid with second bearings, the inner rings of the two second bearings are fixedly connected to the rotating shaft, the outer surface of one of the rotating shafts is fixedly connected to the second gear, and the first gear is meshed with the second gear.

[0009] As a further solution of the utility model: the outer surfaces of the two rotating shafts are fixedly connected with annularly arranged stabilizing rods, and the ends of the two groups of stabilizing rods close to each other are fixedly connected to the silicon carbide deposition atmosphere rotary furnace body.

[0010] As a further solution of the utility model: the left side of the two vertical beams and the right side of the two vertical beams are fixedly connected with a first reinforcing column, the front side of the two vertical beams and the back side of the two vertical beams are fixedly connected with a second reinforcing column, and the bottom surfaces of the two groups of the first reinforcing columns and the bottom surfaces of the two groups of the second reinforcing columns are fixedly connected to the base.

[0011] As a further solution of the utility model: the driving assembly includes a rotating column, the inner bottom wall and the inner top wall of the silicon carbide deposition atmosphere rotary furnace body are fixedly embedded with third bearings, the inner rings of the two third bearings are fixedly connected to the rotating column, the outer surface of the rotating column is fixedly connected with a ring-arranged stirring blade, and the outer surface of each stirring blade is provided with two groups of circular holes.

[0012] As a further solution of the utility model: a rotating motor is fixedly connected to the bottom surface of the silicon carbide deposition atmosphere rotary furnace body, an output end of the rotating motor is fixedly connected to a rotating column, a protective frame is fixedly connected to the bottom surface of the silicon carbide deposition atmosphere rotary furnace body, and an inner wall of the protective frame is fixedly connected to the rotating motor.

[0013] As a further solution of the utility model: two groups of mounting holes are opened on the upper surface of the base, the inner wall of each mounting hole is threadedly connected with a mounting screw, the side surfaces of the two vertical beams close to each other are fixedly connected with reinforcing rods, and the top ends of the two reinforcing rods are fixedly connected to the cross beam.

[0014] Compared with the prior art, the beneficial effects of the utility model are:

[0015] The vacuum CVD silicon carbide deposition atmosphere rotary furnace with uniform heating can make the raw materials heated more evenly through the cooperation of the driving motor, the first bearing, the rotating rod, the first gear, the second bearing, the rotating shaft, the second gear, the stabilizing rod, the silicon carbide deposition atmosphere rotary furnace body, the heating net, the rotating motor, the third bearing, the rotating column, the stirring blades and the circular holes, thereby greatly increasing the practicality of the equipment. The provision of the protection frame, the discharge pipe, the reinforcing rod, the mounting hole, the stabilizing rod, the mounting screws, the first reinforcing column and the second reinforcing column not only greatly increases the overall strength of the equipment, but also can protect the rotating motor. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a three-dimensional structural schematic diagram of a vacuum CVD silicon carbide deposition atmosphere rotary furnace with uniform heating;

[0017] Figure 2 A top view of a vacuum CVD silicon carbide deposition atmosphere rotary furnace with uniform heating;

[0018] Figure 3 A top cross-sectional view of a silicon carbide deposition atmosphere rotary furnace body in a vacuum CVD silicon carbide deposition atmosphere rotary furnace with uniform heating;

[0019] Figure 4 A front cross-sectional view of a silicon carbide deposition atmosphere rotary furnace body in a vacuum CVD silicon carbide deposition atmosphere rotary furnace with uniform heating;

[0020] Figure 5 A vacuum CVD silicon carbide deposition atmosphere rotary furnace with uniform heating Figure 3 A schematic diagram of the structure with a partial enlargement at the center;

[0021] Figure 6 A vacuum CVD silicon carbide deposition atmosphere rotary furnace with uniform heating Figure 4 Schematic diagram of the structure with a partial enlargement at point B in the middle.

[0022] In the figure: 1. base; 2. vertical beam; 3. adjustment component; 301. drive motor; 302. first bearing; 303. rotating rod; 304. first gear; 305. second bearing; 306. rotating shaft; 307. second gear; 308. stabilizing rod; 4. silicon carbide deposition atmosphere rotary furnace body; 5. heating net; 6. drive component; 601. rotating motor; 602. third bearing; 603. rotating column; 604. stirring blade; 605. round hole; 7. protection frame; 8. discharge pipe; 9. reinforcement rod; 10. mounting hole; 11. mounting screw; 12. first reinforcement column; 13. second reinforcement column; 14. feed port; 15. sealing plug; 16. cross beam. DETAILED DESCRIPTION

[0023] In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the present utility model, unless otherwise specified, "multiple" means two or more.

[0024] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood by specific circumstances.

[0025] See also Figures 1 to 6 In the embodiment of the utility model, a vacuum CVD silicon carbide deposition atmosphere rotary furnace with uniform heating includes a base 1, a silicon carbide deposition atmosphere rotary furnace body 4, an adjustment component 3 and a drive component 6. The upper surface of the base 1 is fixedly connected to two vertical beams 2, and the upper surfaces of the two vertical beams 2 are commonly fixedly connected to a cross beam 16. The upper surface of the silicon carbide deposition atmosphere rotary furnace body 4 is fixedly connected to a discharge pipe 8. The upper surface of the silicon carbide deposition atmosphere rotary furnace body 4 is provided with a feed port 14, and the inner wall of the feed port 14 is threadedly connected to a sealing plug 15. The inner wall of the silicon carbide deposition atmosphere rotary furnace body 4 is fixedly inlaid with a heating net 5.

[0026] The adjusting component 3 includes a rotating rod 303, wherein a first bearing 302 is fixedly embedded on the left side of one of the vertical beams 2, and the inner ring of the first bearing 302 is fixedly connected to the rotating rod 303, and a driving motor 301 is fixedly connected to the right side of one of the vertical beams 2, and the output end of the driving motor 301 is fixedly connected to the rotating rod 303, and a first gear 304 is fixedly connected to the outer surface of the rotating rod 303, and a second bearing 305 is fixedly embedded on the side of the two vertical beams 2 close to each other, and the inner rings of the two second bearings 305 are fixedly connected to a rotating shaft 306, and the outer surface of one of the rotating shafts 306 is fixedly connected to a second gear 307, and the first gear 304 is connected to the second gear 307. 07 are meshed with each other, and the outer surfaces of the two rotating shafts 306 are fixedly connected with ring-arranged stabilizing rods 308, and the ends of the two groups of stabilizing rods 308 close to each other are fixedly connected to the silicon carbide deposition atmosphere rotary furnace body 4, which can not only make the heating of the raw materials more uniform, but also greatly increase the stability of the silicon carbide deposition atmosphere rotary furnace body 4, the left side of the two vertical beams 2 and the right side of the two vertical beams 2 are fixedly connected with the first reinforcing column 12, the front side of the two vertical beams 2 and the back side of the two vertical beams 2 are fixedly connected with the second reinforcing column 13, the bottom surfaces of the two groups of first reinforcing columns 12 and the bottom surfaces of the two groups of second reinforcing columns 13 are fixedly connected to the base 1, which greatly increases the overall stability of the equipment.

[0027] The driving assembly 6 includes a rotating column 603, the inner bottom wall of the silicon carbide deposition atmosphere rotary furnace body 4 and the inner top wall of the silicon carbide deposition atmosphere rotary furnace body 4 are fixedly inlaid with third bearings 602, the inner rings of the two third bearings 602 are fixedly connected to the rotating column 603, the outer surface of the rotating column 603 is fixedly connected with a ring-arranged stirring blade 604, and the outer surface of each stirring blade 604 is provided with two groups of circular holes 605, the bottom surface of the silicon carbide deposition atmosphere rotary furnace body 4 is fixedly connected with a rotating motor 601, and the rotating motor 601 The output end is fixedly connected to the rotating column 603, the bottom surface of the silicon carbide deposition atmosphere rotary furnace body 4 is fixedly connected with a protective frame 7, the inner wall of the protective frame 7 is fixedly connected to the rotating motor 601, and two groups of mounting holes 10 are opened on the upper surface of the base 1. The inner wall of each mounting hole 10 is threadedly connected with a mounting screw 11, and the side surfaces of the two vertical beams 2 close to each other are fixedly connected with reinforcing rods 9, and the top ends of the two reinforcing rods 9 are fixedly connected to the cross beam 16, which not only greatly increases the stability of the equipment, but also makes the material heated more evenly.

[0028] The working principle of the utility model is: first, the staff can place the equipment in the use position and turn on the power supply, and then put the raw materials into the interior of the silicon carbide deposition atmosphere rotary furnace body 4 through the feed port 14, and then start the heating network 5, the driving motor 301 and the rotating motor 601 respectively, the heating network 5 can heat the raw materials inside the silicon carbide deposition atmosphere rotary furnace body 4, the driving motor 301 can drive the silicon carbide deposition atmosphere rotary furnace body 4 to rotate, while the silicon carbide deposition atmosphere rotary furnace body 4 rotates, the rotating motor 601 can drive the stirring blade 604 to stir the raw materials inside the silicon carbide deposition atmosphere rotary furnace body 4, the stabilizing rod 308, the reinforcing rod 9, the first reinforcing column 12 and the second reinforcing column 13 can prevent the equipment from being deformed during operation.

[0029] The above is only a preferred specific implementation of the utility model, but the protection scope of the utility model is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical solution and utility model concept of the utility model within the technical scope disclosed by the utility model, which should be included in the protection scope of the utility model. For those skilled in the art, it is obvious that the utility model is not limited to the details of the above exemplary embodiments, and can be implemented in other specific forms without departing from the spirit or basic features of the utility model. Therefore, no matter from which point of view, the embodiments should be regarded as exemplary and non-restrictive. The scope of the utility model is limited by the attached claims rather than the above description, so it is intended to include all changes that fall within the meaning and scope of the equivalent elements of the claims in the utility model. Any figure mark in the claims should not be regarded as limiting the claims involved.

[0030] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A vacuum CVD silicon carbide deposition atmosphere rotary furnace with uniform heating, comprising a base (1), a silicon carbide deposition atmosphere rotary furnace body (4), an adjustment component (3) and a drive component (6), characterized in that: The upper surface of the base (1) is fixedly connected to two vertical beams (2), the upper surfaces of the two vertical beams (2) are commonly fixedly connected to a horizontal beam (16), the upper surface of the silicon carbide deposition atmosphere rotary furnace body (4) is fixedly connected to a discharge pipe (8), the upper surface of the silicon carbide deposition atmosphere rotary furnace body (4) is provided with a feed port (14), the inner wall of the feed port (14) is threadedly connected to a sealing plug (15), and the inner wall of the silicon carbide deposition atmosphere rotary furnace body (4) is fixedly inlaid with a heating net (5); the adjustment component (3) comprises a rotating rod (303), the left side surface of one of the vertical beams (2) is fixedly inlaid with a first bearing (302), the inner ring of the first bearing (302) and the rotating rod (303) is fixedly connected, the right side surface of one of the vertical beams (2) is fixedly connected to a driving motor (301), and the output end of the driving motor (301) is fixedly connected to the rotating rod (303); the driving assembly (6) includes a rotating column (603), the inner bottom wall of the silicon carbide deposition atmosphere rotary furnace body (4) and the inner top wall of the silicon carbide deposition atmosphere rotary furnace body (4) are fixedly inlaid with a third bearing (602), the inner rings of the two third bearings (602) are fixedly connected to the rotating column (603), the outer surface of the rotating column (603) is fixedly connected to a ring-arranged stirring blade (604), and the outer surface of each stirring blade (604) is provided with two groups of circular holes (605).

2. The vacuum CVD silicon carbide deposition atmosphere rotary furnace with uniform heating according to claim 1, characterized in that: The outer surface of the rotating rod (303) is fixedly connected to a first gear (304); a second bearing (305) is fixedly embedded in a side surface of the two vertical beams (2) close to each other; the inner rings of the two second bearings (305) are fixedly connected to a rotating shaft (306); the outer surface of one of the rotating shafts (306) is fixedly connected to a second gear (307); and the first gear (304) is meshed with the second gear (307).

3. The vacuum CVD silicon carbide deposition atmosphere rotary furnace with uniform heating according to claim 2, characterized in that: The outer surfaces of the two rotating shafts (306) are both fixedly connected with annularly arranged stabilizing rods (308), and the ends of the two groups of stabilizing rods (308) close to each other are both fixedly connected to the silicon carbide deposition atmosphere rotary furnace body (4).

4. The vacuum CVD silicon carbide deposition atmosphere rotary furnace with uniform heating according to claim 1, characterized in that: The left sides of the two vertical beams (2) and the right sides of the two vertical beams (2) are fixedly connected to first reinforcing columns (12), the front sides of the two vertical beams (2) and the back sides of the two vertical beams (2) are fixedly connected to second reinforcing columns (13), and the bottom surfaces of the two groups of the first reinforcing columns (12) and the bottom surfaces of the two groups of the second reinforcing columns (13) are fixedly connected to the base (1).

5. The vacuum CVD silicon carbide deposition atmosphere rotary furnace with uniform heating according to claim 1, characterized in that: A rotating motor (601) is fixedly connected to the bottom surface of the silicon carbide deposition atmosphere rotary furnace body (4), an output end of the rotating motor (601) is fixedly connected to a rotating column (603), a protective frame (7) is fixedly connected to the bottom surface of the silicon carbide deposition atmosphere rotary furnace body (4), and an inner wall of the protective frame (7) is fixedly connected to the rotating motor (601).

6. The vacuum CVD silicon carbide deposition atmosphere rotary furnace with uniform heating according to claim 1, characterized in that: Two groups of mounting holes (10) are formed on the upper surface of the base (1), and the inner wall of each mounting hole (10) is threadedly connected with a mounting screw (11). The side surfaces of the two vertical beams (2) close to each other are fixedly connected with reinforcing rods (9), and the top ends of the two reinforcing rods (9) are fixedly connected to the cross beam (16).

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