Liftable cavity structure of vacuum equipment using atomic layer deposition technology

Abstract

The utility model discloses a liftable cavity structure of vacuum equipment using an atomic layer deposition technology, which belongs to the technical field of semiconductor manufacturing, and comprises an outer box body, a box cover, an upper cover, a lower cover, a lower cover, a lower cover, an upper cover and a lower cover, through the arrangement of the box door, a worker can conveniently place a sample to be reacted and deposited on a slide glass, then the box door is closed, the loading of the slide glass is simply and rapidly completed, the interior of the outer box body and the interior of the inner box body can be vacuumized through the first exhaust pipe and the second exhaust pipe respectively, and through the arrangement of the lifting mechanism, the operation is convenient and fast. Through the principle that air is pumped into the inner cavity and the outer cavity respectively, it is guaranteed that the film coating reaction can be smoothly completed, the vacuum preparation time of the equipment can be efficiently shortened through the design of the inner cavity and the outer cavity, and the production efficiency of the equipment is improved. And the pressure difference between the inner cavity and the outer cavity can be utilized to ensure that reaction gas does not overflow in the inner cavity, so that equipment maintenance and reaction completion are facilitated.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor manufacturing, and in particular relates to a liftable cavity structure of vacuum equipment utilizing atomic layer deposition technology. Background Art

[0002] Atomic layer deposition, as a cutting-edge nanostructure synthesis and thin film coating technology, is one of the representatives of high-end manufacturing. This technology periodically manipulates inert gases and precursors to alternately enter the equipment reaction chamber, achieving self-limiting and self-saturating chemical reactions on the substrate surface, allowing atoms to be effectively deposited. Compared with traditional chemical deposition methods, only one layer is deposited at a time during the atomic layer deposition process, and because the chemical reaction of a new layer of atomic film is only related to the previous layer, this technology has huge advantages in maintaining shape, deposited film accuracy, film step coverage and other performance indicators.

[0003] The reaction process of atomic layer deposition vacuum coating equipment usually requires the equipment to complete vacuum preparation in a relatively short time to ensure the efficiency of the coating reaction. At the same time, the principle of respectively extracting air from the inner and outer cavities can be used to ensure that the coating reaction can be completed smoothly, which is beneficial to the maintenance of the equipment and the completion of the reaction. Based on this, the utility model proposes a liftable cavity structure for a vacuum equipment utilizing atomic layer deposition technology. Utility Model Content

[0004] The purpose of the utility model is to provide a liftable chamber structure of a vacuum device using atomic layer deposition technology to solve the problems raised in the above background technology.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solution: a liftable chamber structure of a vacuum device using atomic layer deposition technology, comprising an outer box, and also comprising:

[0006] A box cover is arranged on the top surface of the outer box body, an inner box body is arranged inside the outer box body, a first air inlet pipe is fixed to an upper end of one side of the outer box body, a first air extraction pipe is fixed to a lower end of a side of the outer box body away from the first air inlet pipe, a second air inlet pipe is fixed to an outer surface of the inner box body, the second air inlet pipe movably penetrates the outer box body, a second air extraction pipe is fixed to an outer surface of the inner box body corresponding to the second air inlet pipe, the second air extraction pipe movably penetrates the outer box body;

[0007] The bearing plate is arranged inside the outer box body, the bearing plate cooperates with the inner box body, a mounting plate is arranged at the lower end of the outer box body, and a lifting mechanism is arranged on the surface of the mounting plate corresponding to the bearing plate.

[0008] It should be noted that the lifting mechanism includes:

[0009] An electric telescopic rod, which is fixedly mounted on the surface of the mounting plate, a slider is fixed to the telescopic end of the electric telescopic rod, a push rod is fixed to the top surface of the slider, the push rod movably penetrates the outer box, and the top end of the push rod is fixed in the middle of the bottom surface of the bearing plate;

[0010] The telescopic bellows is fixedly sleeved on the outer surface of the top rod, the surface fixed sleeve of the top rod is provided with an annular stopper, the bottom of the telescopic bellows is fixed to the bottom of the annular stopper, and the top surface of the telescopic bellows is fixed to the bottom surface of the outer box body.

[0011] It is further worth noting that a first sealing ring is installed at the bottom of the annular stopper, and the first sealing ring is in contact with the inner wall of the telescopic bellows.

[0012] It should be further explained that a second sealing ring is installed on the top surface of the telescopic bellows, and the second sealing ring is in contact with the bottom surface of the outer box body.

[0013] As a preferred embodiment, a carrier sheet is placed on the top surface of the carrier plate, a third sealing ring is installed on the top surface of the inner box body, and the third sealing ring is in contact with the bottom surface of the box cover.

[0014] As a preferred embodiment, four bolts distributed in a rectangular shape are threaded through the top surface of the box cover, the box cover and the outer box body are connected by bolt threads, and a fourth sealing ring is installed on the bottom surface of the box cover, and the fourth sealing ring is fitted with the top surface of the outer box body.

[0015] As a preferred embodiment, a box door cooperating with the box cover is hingedly connected to one side of the outer box body, and a sealing gasket is fixed to one side of the box door corresponding to the outer box body.

[0016] Compared with the prior art, the utility model provides a liftable chamber structure of a vacuum device using atomic layer deposition technology, which has at least the following beneficial effects:

[0017] By setting the box door, it is convenient for the staff to place the sample to be reacted and deposited on the carrier, and then close the box door to complete the carrier loading simply and quickly. The outer box body and the inner box body can be vacuumed respectively through the first exhaust pipe and the second exhaust pipe. The slider is pushed up by the electric telescopic rod, and the slider drives the top rod to move up, thereby pushing the carrier plate up to make rigid contact with the bottom of the inner box body, so that the material on the carrier can react. The principle of respectively drawing air into the inner and outer cavities ensures that the coating reaction can be completed smoothly. The design of the inner and outer cavities can not only effectively shorten the vacuum preparation time of the equipment, but also use the pressure difference between the inner and outer cavities to ensure that the reaction gas does not overflow from the inner cavity, which is beneficial to the maintenance of the equipment and the completion of the reaction. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0019] Figure 2 It is a structural schematic diagram of the lifting mechanism, outer box body and bearing sheet of the utility model;

[0020] Figure 3 It is a partial structural sectional view of the utility model;

[0021] Figure 4 It is a side view of the overall structure of the utility model.

[0022] In the figure: 1. outer box body; 2. box cover; 3. inner box body; 4. first air inlet pipe; 5. first air exhaust pipe; 6. second air inlet pipe; 7. second air exhaust pipe; 8. bearing plate; 9. mounting plate; 10. lifting mechanism; 101. electric telescopic rod; 102. slider; 103. push rod; 104. telescopic bellows; 105. annular stopper; 11. first sealing ring; 12. second sealing ring; 13. carrier; 14. third sealing ring; 15. fourth sealing ring; 16. box door. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0024] See also Figure 1-4 The utility model provides a liftable chamber structure of a vacuum device using atomic layer deposition technology, comprising an outer box 1, and also comprising:

[0025] A box cover 2 is arranged on the top surface of the outer box body 1. An inner box body 3 is arranged inside the outer box body 1. A first air inlet pipe 4 is fixed to an upper end of one side of the outer box body 1. A first air extraction pipe 5 is fixed to a lower end of a side of the outer box body 1 away from the first air inlet pipe 4. A second air inlet pipe 6 is fixed to an outer surface of the inner box body 3. The second air inlet pipe 6 movably penetrates the outer box body 1. A second air extraction pipe 7 is fixed to an outer surface of the inner box body 3 corresponding to the second air inlet pipe 6. The second air extraction pipe 7 movably penetrates the outer box body 1.

[0026] The bearing plate 8 is arranged inside the outer box body 1 , and the bearing plate 8 cooperates with the inner box body 3 . A mounting plate 9 is arranged at the lower end of the outer box body 1 , and a lifting mechanism 10 is arranged on the surface of the mounting plate 9 corresponding to the bearing plate 8 .

[0027] It is worth mentioning that the outer box body 1 is fixed on the frame; the internal space of the outer box body 1 is the outer cavity, the interior of the inner box body 3 is the inner cavity, and the first air inlet pipe 4 and the first air exhaust pipe 5, the second air inlet pipe 6 and the second air exhaust pipe 7 are all externally connected to the exhaust device, and the air intake and exhaust of the inner cavity and the outer cavity have corresponding quantitative mechanisms respectively; the supporting plate 8 is in rigid sealing contact with the bottom surface of the inner box body 3 to ensure that there is a certain pressure difference between the inner and outer cavities, thereby ensuring the smooth completion of the reaction; the reaction gas or purge gas can be introduced into the outer box body 1 and the inner box body 3 through the first air inlet pipe 4 and the second air inlet pipe 6 to improve different reaction conditions for the materials.

[0028] Further Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, it is worth to explain in detail that the lifting mechanism 10 includes:

[0029] The electric telescopic rod 101 is fixedly mounted on the surface of the mounting plate 9. A slider 102 is fixed to the telescopic end of the electric telescopic rod 101. A push rod 103 is fixed to the top surface of the slider 102. The push rod 103 movably penetrates the outer box body 1. The top end of the push rod 103 is fixed to the middle of the bottom surface of the bearing plate 8.

[0030] The telescopic bellows 104 is fixedly sleeved on the outer surface of the top rod 103, and the surface of the top rod 103 is fixedly sleeved with an annular stopper 105. The bottom of the telescopic bellows 104 is fixed to the bottom of the annular stopper 105, and the top surface of the telescopic bellows 104 is fixed to the bottom surface of the outer box body 1. It is worth noting that a limited slot is provided on the surface of the mounting plate 9 corresponding to the slider 102, and the slider 102 is slidably connected in the limited slot, thereby improving the stability of the slider 102 when driving the top rod 103 to move; the movement change of the telescopic bellows 104 during the lifting process will change the vacuum environment change existing in the lifting process.

[0031] Further Figure 2 and Figure 3 As shown, it is worth explaining in detail that a first sealing ring 11 is installed at the bottom of the annular stopper 105 , and the first sealing ring 11 is in contact with the inner wall of the telescopic bellows 104 .

[0032] Further Figure 1 and Figure 3As shown, it is worth explaining in detail that a second sealing ring 12 is installed on the top surface of the telescopic bellows 104, and the second sealing ring 12 is in contact with the bottom surface of the outer box body 1, so that the sealing between the top surface of the telescopic bellows 104 and the outer box body 1 is improved by the second sealing ring 12; a door 16 matching the box cover 2 is hinged on one side of the outer box body 1, and a sealing gasket is fixed on one side of the box door 16 corresponding to the outer box body 1, so that the material can be put in conveniently through the box door 16, and the sealing gasket is squeezed with the inner walls of the outer box body 1 and the box cover 2 after the box door 16 is closed, so as to maintain the sealing of the outer box body 1 during operation.

[0033] It is worth noting that, during the lifting and lowering process of the telescopic bellows 104 , the vacuum degree of the reaction environment is increased by the first sealing ring 11 and the second sealing ring 12 .

[0034] Further Figure 3 As shown, it is worth explaining in detail that a carrier sheet 13 is placed on the top surface of the carrier plate 8, and the carrier sheet 13 carries and fixes the sample to be deposited; a third sealing ring 14 is installed on the top surface of the inner box body 3, and the third sealing ring 14 is in contact with the bottom surface of the box cover 2.

[0035] Further Figure 1 and Figure 3 As shown, it is worth explaining in detail that the top surface thread of the box cover 2 is penetrated by four bolts distributed in a rectangular shape, the box cover 2 and the outer box body 1 are connected by bolt threads, and a fourth sealing ring 15 is installed on the bottom surface of the box cover 2. The fourth sealing ring 15 fits with the top surface of the outer box body 1, and the box cover 2 is connected to the outer box body 1 by bolts. After the connection, the fourth sealing ring 15 improves the sealing between the box cover 2 and the outer box body 1.

[0036] This solution has the following working process: the box door 16 is opened, at this time the carrier plate 8 is located below the inner box body 3, the staff places the sample to be reacted and deposited on the carrier 13, and then closes the box door 16 to complete the loading of the carrier 13 simply and quickly, and the outer box body 1 and the inner box body 3 can be vacuumed respectively through the first exhaust pipe 5 and the second exhaust pipe 7, and the slider 102 is pushed up by the electric telescopic rod 101, and the slider 102 drives the top rod 103 to move up, thereby pushing the carrier plate 8 up and rigidly contacting the bottom of the inner box body 3, so that the material on the carrier 13 reacts, and the principle of respectively drawing air into the inner and outer cavities ensures that the coating reaction can be completed smoothly. The design of the inner and outer cavities can not only effectively shorten the vacuum preparation time of the equipment, but also use the pressure difference between the inner and outer cavities to ensure that the reaction gas does not overflow from the inner cavity, which is beneficial to the maintenance of the equipment and the completion of the reaction.

[0037] The electric telescopic rod 101 can be purchased on the market. The electric telescopic rod 101 is equipped with a power supply, which is a mature technology in the art and has been fully disclosed, so it is not repeated in the specification.

[0038] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art who is familiar with the present technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be covered within the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.

[0039] Finally: The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present utility model should be included in the protection scope of the present utility model.

Claims

1. A liftable chamber structure of a vacuum device using atomic layer deposition technology, comprising an outer box (1), characterized in that: Also includes: A box cover (2), the box cover (2) being arranged on the top surface of the outer box body (1), an inner box body (3) being arranged inside the outer box body (1), a first air inlet pipe (4) being fixed to an upper end of one side of the outer box body (1), a first air extraction pipe (5) being fixed to a lower end of a side of the outer box body (1) away from the first air inlet pipe (4), a second air inlet pipe (6) being fixed to an outer surface of the inner box body (3), the second air inlet pipe (6) being movably passed through the outer box body (1), a second air extraction pipe (7) being fixed to an outer surface of the inner box body (3) corresponding to the second air inlet pipe (6), the second air extraction pipe (7) being movably passed through the outer box body (1); A load-bearing plate (8) is arranged inside the outer box body (1), the load-bearing plate (8) cooperates with the inner box body (3), a mounting plate (9) is arranged at the lower end of the outer box body (1), and a lifting mechanism (10) is arranged on the surface of the mounting plate (9) corresponding to the load-bearing plate (8).

2. The liftable chamber structure of vacuum equipment using atomic layer deposition technology according to claim 1, characterized in that: The lifting mechanism (10) comprises: An electric telescopic rod (101), the electric telescopic rod (101) is fixedly mounted on the surface of a mounting plate (9), a slider (102) is fixed to the telescopic end of the electric telescopic rod (101), a top rod (103) is fixed to the top surface of the slider (102), the top rod (103) movably passes through the outer box (1), and the top end of the top rod (103) is fixed to the middle of the bottom surface of the bearing plate (8); The telescopic bellows (104) is fixedly sleeved on the outer surface of the top rod (103), and an annular stopper (105) is fixedly sleeved on the surface of the top rod (103). The bottom of the telescopic bellows (104) is fixed to the bottom of the annular stopper (105), and the top surface of the telescopic bellows (104) is fixed to the bottom surface of the outer box body (1).

3. The liftable chamber structure of vacuum equipment using atomic layer deposition technology according to claim 2, characterized in that: A first sealing ring (11) is installed at the bottom of the annular stopper (105), and the first sealing ring (11) is in contact with the inner wall of the telescopic bellows (104).

4. The liftable chamber structure of vacuum equipment using atomic layer deposition technology according to claim 2, characterized in that: A second sealing ring (12) is installed on the top surface of the telescopic bellows (104), and the second sealing ring (12) is in contact with the bottom surface of the outer box body (1).

5. The liftable chamber structure of vacuum equipment using atomic layer deposition technology according to claim 1, characterized in that: A carrier sheet (13) is placed on the top surface of the carrier plate (8), a third sealing ring (14) is installed on the top surface of the inner box body (3), and the third sealing ring (14) is in contact with the bottom surface of the box cover (2).

6. The liftable chamber structure of vacuum equipment using atomic layer deposition technology according to claim 1, characterized in that: The top surface of the box cover (2) is threaded with four bolts distributed in a rectangular shape, the box cover (2) is threadedly connected to the outer box body (1) via the bolts, and a fourth sealing ring (15) is installed on the bottom surface of the box cover (2), and the fourth sealing ring (15) is in contact with the top surface of the outer box body (1).

7. The liftable chamber structure of vacuum equipment using atomic layer deposition technology according to claim 1, characterized in that: A box door (16) that matches the box cover (2) is hingedly connected to one side of the outer box body (1), and a sealing gasket is fixed to one side of the box door (16) corresponding to the outer box body (1).

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