Special-shaped quartz tube synthesized by indium phosphide crystals

Abstract

The utility model provides a special-shaped quartz tube synthesized by indium phosphide crystal, which comprises a first quartz tube and a second quartz tube which are hermetically connected, the first quartz tube comprises a crystal part and a red phosphorus part which are distinguished by a first heat insulation part, a quartz boat is arranged in the crystal part, and a quartz cap seals an opening position of the crystal part far away from the first heat insulation part; the second quartz tube comprises a connecting part and a diaphragm probe part which are distinguished by a second heat insulation part, the diaphragm probe part comprises a diaphragm part connected with the second heat insulation part and a probe part connected with the diaphragm part, the quartz diaphragm is arranged on the diaphragm part, at least two quartz rings are arranged on the probe part at intervals, and the quartz probe penetrates through the quartz rings to be in contact with the quartz diaphragm. And the quartz probe is used for sensing the deformation of the quartz diaphragm.

Description

Technical Field

[0001] The utility model relates to the field of indium phosphide crystals, in particular to a special-shaped quartz tube synthesized from indium phosphide crystals. Background Art

[0002] With the progress of the times and technological innovation, the second-generation compound semiconductor materials represented by indium phosphide have developed vigorously. InP crystals have many advantages such as high saturated electron drift velocity, strong radiation resistance, good thermal conductivity, and high photoelectric conversion efficiency. They are widely used in optical communications, high-frequency millimeter-wave devices, optoelectronic integrated circuits, and solar cells for outer space. The melting point of indium is 1070°C. At this temperature, indium phosphide material has a very high dissociation pressure, and the dissociation pressure at the melting point is 2.75MPa. According to the functional relationship between Antoine's saturated vapor pressure and temperature, lgP=AB / (T+C), under this condition, the phosphorus vapor pressure has exceeded 10MPa, which is much greater than the dissociation pressure of indium phosphide. Therefore, it is very difficult to synthesize indium phosphide single crystals directly from phosphorus and indium in a single crystal furnace. Therefore, high-purity indium and high-purity phosphorus are generally synthesized through polycrystalline synthesis, and indium phosphide crystals are synthesized and then indium phosphide crystals are used to grow indium phosphide single crystals. The use of a high-pressure single crystal furnace to prepare indium phosphide single crystals is the main method, and the method of doping with isoelectronic impurities is used to reduce the dislocation density of the crystal.

[0003] In the current indium phosphide crystal synthesis process, the raw materials red phosphorus and indium are mainly loaded into the quartz tube using a quartz tube, which is then vacuum-sealed and loaded into a single crystal furnace for high-temperature synthesis. This method has particularly high requirements for the control of gas pressure during the synthesis process, and the tube cracking rate is also very high. After the tube cracks, the red phosphorus burns in the furnace, causing irreparable damage to the equipment. In addition, since it is very difficult to control the gas pressure, the synthesis yield is very unstable. Utility Model Content

[0004] The utility model aims to provide a special-shaped quartz tube for synthesizing indium phosphide crystals. The quartz probe in the special-shaped quartz tube realizes the effect of accurately feeding back the pressure change in the tube, thereby avoiding the tube cracking of the special-shaped quartz tube during the synthesis of indium phosphide crystals. The synthesis yield of indium phosphide crystals is improved by arranging the first quartz tube and the second quartz tube, and the material of the second quartz tube can be reused, thereby saving costs.

[0005] To achieve the above objectives, the present invention provides a special-shaped quartz tube for synthesizing indium phosphide crystals, comprising: a first quartz tube and a second quartz tube that are sealed and connected, wherein the first quartz tube comprises a crystal portion and a red phosphorus portion separated by a first insulation portion, a quartz boat is placed in the crystal portion and a quartz cap seals the crystal portion away from the opening position of the first insulation portion; the second quartz tube comprises a connection portion and a diaphragm probe portion separated by a second insulation portion, the diaphragm probe portion comprises a diaphragm portion connected to the second insulation portion and a probe portion connected to the diaphragm portion, a quartz diaphragm is placed in the diaphragm portion, at least two quartz rings are spaced apart in the probe portion, the quartz probe passes through the quartz ring and contacts with the quartz diaphragm, and the quartz probe is used to sense the deformation of the quartz diaphragm.

[0006] Compared with the existing technology, this solution has the following characteristics and beneficial effects:

[0007] 1. A special-shaped quartz tube consisting of a first quartz tube and a second quartz tube connected in a sealed manner is designed. The raw materials are placed in the first quartz tube and the second quartz tube, and the pressure is detected by using a quartz probe in the special-shaped quartz tube, so that the operator can easily adjust the pressure in the polycrystalline furnace according to the detected pressure value to avoid the quartz tube from breaking, thereby improving the yield of crystallization;

[0008] 2. Heat is blocked by the cooperation of the first heat insulating part and the first thermal insulation layer, so that less heat from the crystal part is transferred to the red phosphorus part, and then heat is blocked by the cooperation of the second heat insulating part and the second thermal insulation layer, so that less heat from the red phosphorus part is transferred to the second quartz tube, so that the quartz diaphragm in the second quartz tube is always in a low temperature state, so that it can avoid the feedback of pressure changes affected by high-temperature baking. The design of the special-shaped quartz tube can also avoid the impact of feedback on pressure changes during high-temperature baking.

[0009] 3. The quartz diaphragm can be reused to extend its service life. After one use, the entire second quartz tube can be cut off and reused. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Figure 1 This is a schematic diagram of the overall structure of a special-shaped quartz tube according to an embodiment of the present solution;

[0011] Figure 2 It is a partial structural schematic diagram of a special-shaped quartz tube in one embodiment of the present scheme;

[0012] In the figure: 11-first quartz tube, 111-crystal part, 112-first thermal insulation part, 113-red phosphorus part, 12-second quartz tube, 121-connecting part, 122-second thermal insulation part, 123-diaphragm detection part, 1231-diaphragm part, 1232-probe part, 20-quartz boat, 30-quartz cap, 41-quartz diaphragm, 42-quartz ring, 43-quartz probe, 51-first thermal insulation layer, 52-second thermal insulation layer. DETAILED DESCRIPTION

[0013] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field belong to the scope of protection of the utility model.

[0014] Those skilled in the art should understand that, in the disclosure of the present invention, the terms "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship are based on the orientation or position relationship shown in the drawings, which are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, the above terms should not be understood as limiting the present invention.

[0015] It is to be understood that the term "one" should be understood as "at least one" or "one or more", that is, in one embodiment, the number of an element may be one, while in another embodiment, the number of the element may be multiple, and the term "one" should not be understood as a limitation on the quantity.

[0016] This scheme provides a special-shaped quartz tube synthesized from indium phosphide crystals. Figure 1 This is a schematic diagram of the structure of the special-shaped quartz tube provided by this solution. Figure 1 As shown, the special-shaped quartz tube for synthesizing indium phosphide crystals designed in this scheme includes: a first quartz tube 11 and a second quartz tube 12 which are sealed and connected, wherein the first quartz tube 11 includes a crystal part 111 and a red phosphorus part 113 which are separated by a first insulation part 112, a quartz boat 20 is placed in the crystal part 111 and a quartz cap 30 seals the crystal part 111 away from the opening position of the first insulation part 112; the second quartz tube 12 includes a connection part 121 and a diaphragm probe part 123 which are separated by a second insulation part 122, the diaphragm probe part 123 includes a diaphragm part 1231 connected to the second insulation part 122 and a probe part 1232 connected to the diaphragm part 1231, a quartz diaphragm 41 is placed in the diaphragm part 1231, at least two quartz rings 42 are arranged at intervals in the probe part 1232, the quartz probe 43 passes through the quartz ring 42 and contacts with the quartz diaphragm 41, and the quartz probe 43 is used to sense the deformation of the quartz diaphragm 41.

[0017] In some embodiments, the diameter of the first insulation part 112 in the first quartz tube 11 is smaller than the diameters of the crystal part 111 and the red phosphorus part 113, and the diameter of the crystal part 111 close to the second insulation part 112 gradually decreases toward the first insulation part 112, and the diameter of the red phosphorus part 113 close to the second insulation part 112 gradually increases away from the first insulation part 112. The first quartz tube 11 of the special-shaped quartz tube of this solution presents a "dumbbell" shape. The crystal part 111, the first insulation part 112 and the red phosphorus part 113 are sequentially connected.

[0018] In some specific embodiments, the main parts of the crystal part 111 of the first quartz tube 11 have the same diameter, and the main parts of the red phosphorus part 113 have the same diameter. The quartz boat 20 is placed in the crystal part 111 for placing indium bars, and the red phosphorus part 113 is used to place red phosphorus.

[0019] Specifically, the quartz boat 20 is composed of a boat bottom and boat walls disposed on both sides of the boat bottom, and the boat bottom and the boat walls form a boat cavity for accommodating the indium bar. In some embodiments, the boat walls on both sides of the boat bottom are designed to be arc-shaped to surround the boat cavity, and a guide bar protruding outward is provided on one side of the boat wall.

[0020] In order to seal the first quartz tube 11, the quartz cap 30 is arranged at the opening position of the crystal part 111 away from the first insulation part 112 to seal the first quartz tube 11. It should be noted that after the red phosphorus and indium bars are installed in the first quartz tube 11, the quartz cap 30 is placed in the opening position of the crystal part 111 away from the first insulation part 112 and welded.

[0021] In some embodiments, the second quartz part 12 is sealed and connected to the first quartz part 11, and the diameter of the connecting part 121 of the second quartz part 12 is smaller than the diameter of the red phosphorus part 113. Specifically, the diameter of the red phosphorus part 113 at a position close to the connecting part 121 gradually decreases toward the position where the connecting part 121 is located, and the diameter of the main body of the connecting part 121 is consistent.

[0022] Similarly, the diameter of the second thermal insulation portion 122 is smaller than the diameters of the connecting portion 121 and the diaphragm detection portion 123. Specifically, the diameter of the connecting portion 121 near the second thermal insulation portion 122 gradually decreases toward the second thermal insulation portion 122, and the diameter of the second thermal insulation portion 122 near the diaphragm detection portion 123 gradually decreases toward the diaphragm detection portion 123. In other words, the diameter of the connecting portion 121 is smaller than the diameter of the red phosphorus portion 113 and larger than the diameter of the second thermal insulation portion 122, and the diameter of the diaphragm portion of the diaphragm detection portion 123 is larger than the diameter of the second thermal insulation portion 122.

[0023] In addition, the diaphragm detection part 123 of the present solution includes a diaphragm part 1231 and a probe part 1232 which are connected in sequence, wherein the diameter of the diaphragm part 1231 close to the probe part 1232 gradually decreases, and the probe part 1232 is designed to be a straight cylinder connected to the diaphragm part 1231.

[0024] like Figure 2 As shown, the quartz diaphragm 41 is horizontally laid in the diaphragm part 1231, the quartz probe 43 is placed in the probe part 1232 and one end of the quartz probe 43 contacts the quartz diaphragm 41. The advantage of this design is that after the crystal reacts, the pressure in the quartz tube is transmitted to the sensor through the quartz diaphragm 41 and the quartz probe 43 for detection, so that the operator can easily adjust the pressure in the polycrystalline furnace according to the detection value to avoid the quartz tube from breaking, thereby improving the crystallization yield.

[0025] In some embodiments, the quartz diaphragm 41 is designed to be a flat plate with uniform thickness. In this way, compared with a circular or elliptical shape, the quartz diaphragm 41 produces a larger deformation amount in response to pressure changes. By enlarging the diameter of the deformed part, the quartz diaphragm 41 can provide more accurate feedback on pressure changes during the crystal synthesis process, thereby avoiding quartz tube rupture due to failure to adjust the air pressure in time due to pressure changes.

[0026] In addition, in order to ensure that the quartz probe 43 can always contact the quartz diaphragm 41 to detect pressure, at least two quartz rings 42 are arranged inside the probe part 1232 at intervals, and the quartz probe 43 passes through the quartz rings 42 and is fixed against the quartz diaphragm 41 .

[0027] In some embodiments, a first thermal insulation layer 51 is sleeved on the outer side of the first thermal insulation part 112, and a second thermal insulation layer 51 is sleeved on the outer side of the second thermal insulation part 122. The advantage of such a design is that the first thermal insulation part 112 and the first thermal insulation layer 51 cooperate to block heat, so that less heat from the crystal part 111 is transferred to the red phosphorus part 113, and then the second thermal insulation part 122 and the second thermal insulation layer 52 cooperate to block heat, so that less heat from the red phosphorus part 113 is transferred to the second quartz tube 12, so that the quartz diaphragm 41 in the second quartz tube 12 is always in a low temperature state, so that it can avoid the feedback of pressure changes due to high-temperature baking. At the same time, the quartz diaphragm 41 can be reused to extend the service life. After one use, the entire second quartz tube 12 can be cut off and reused.

[0028] In some embodiments, the material of the first thermal insulation layer 51 and the second thermal insulation layer 52 is thermal insulation cotton.

[0029] The present utility model is not limited to the above-mentioned optimal implementation mode. Anyone can derive other various forms of products under the inspiration of the present utility model. However, no matter what changes are made in the shape or structure, all those having the same or similar technical solutions as the present application fall within the protection scope of the present utility model.

Claims

1. A special-shaped quartz tube synthesized from indium phosphide crystals, characterized in that: include: A first quartz tube and a second quartz tube are sealed and connected, wherein the first quartz tube includes a crystal part and a red phosphorus part separated by a first insulation part, a quartz boat is placed in the crystal part and a quartz cap seals the crystal part away from the opening position of the first insulation part; the second quartz tube includes a connection part and a diaphragm probe part separated by a second insulation part, the diaphragm probe part includes a diaphragm part connected to the second insulation part and a probe part connected to the diaphragm part, a quartz diaphragm is placed in the diaphragm part, at least two quartz rings are arranged at intervals in the probe part, the quartz probe passes through the quartz ring and contacts with the quartz diaphragm, and the quartz probe is used to sense the deformation of the quartz diaphragm.

2. The special-shaped quartz tube synthesized by indium phosphide crystal according to claim 1, characterized in that: The diameter of the first insulation part in the first quartz tube is smaller than the diameters of the crystal part and the red phosphorus part, and the diameter of the crystal part close to the second insulation part gradually decreases toward the first insulation part, and the diameter of the red phosphorus part close to the second insulation part gradually increases away from the first insulation part.

3. The special-shaped quartz tube synthesized by indium phosphide crystal according to claim 1, characterized in that: The quartz boat consists of a boat bottom and boat walls arranged on both sides of the boat bottom, and the boat bottom and the boat walls form a boat cavity for accommodating indium bars.

4. The special-shaped quartz tube synthesized by indium phosphide crystal according to claim 1, characterized in that: The diameter of the second insulation part is smaller than that of the connecting part and the diaphragm detection part. The diameter of the connecting part close to the second insulation part gradually decreases toward the second insulation part, and the diameter of the second insulation part close to the diaphragm detection part gradually decreases toward the diaphragm detection part.

5. The special-shaped quartz tube synthesized by indium phosphide crystal according to claim 1, characterized in that: The diaphragm detection part comprises a diaphragm part and a probe part which are connected in sequence, wherein the diameter of the diaphragm part close to the probe part gradually decreases.

6. The special-shaped quartz tube synthesized by indium phosphide crystal according to claim 1, characterized in that: The quartz diaphragm is laid horizontally in the diaphragm portion.

7. The special-shaped quartz tube synthesized by indium phosphide crystal according to claim 1, characterized in that: The quartz diaphragm is designed to be a flat plate with uniform thickness.

8. The special-shaped quartz tube synthesized by indium phosphide crystal according to claim 1, characterized in that: A first heat-insulating layer is sleeved on the outer side of the first heat-insulating part, and a second heat-insulating layer is sleeved on the outer side of the second heat-insulating part.

9. The special-shaped quartz tube synthesized by indium phosphide crystal according to claim 8, characterized in that: The material of the first thermal insulation layer and the second thermal insulation layer is thermal insulation cotton.

10. The special-shaped quartz tube synthesized by indium phosphide crystal according to claim 1, characterized in that: After the red phosphorus and the indium bar are installed in the first quartz tube, the quartz cap is put into the opening position of the crystal part away from the first heat insulation part and welded.

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