Drying equipment

Abstract

The utility model belongs to the technical field of semiconductor equipment, and provides drying equipment which comprises a drying groove, an air supply mechanism and an air outlet mechanism, the drying groove comprises a groove body, a working cavity is formed in the groove body, the groove body comprises a bottom groove plate located at the bottom of the working cavity, and an air inlet through hole and an air outlet through hole are formed in the bottom groove plate; the air supply mechanism comprises an air supply pipeline, a filter assembly and a fan, the air supply pipeline is communicated with the working chamber through the air inlet through hole, the air outlet mechanism comprises an air outlet pipeline, and the air outlet pipeline is communicated with the working chamber through the air outlet through hole. After outside air enters the air supply pipeline, harmful gas and particle impurities are effectively removed through the filter assembly, clean fresh air is provided for the working chamber after the outside air is blown by the fan, the air cleanliness in the drying tank is effectively improved, a to-be-dried test piece is prevented from being polluted in the drying tank, the air outlet pipeline exhausts humid air in the working chamber, and the drying efficiency is improved. And the air humidity in the drying groove is effectively reduced, and the drying efficiency is improved.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor equipment, and in particular to a drying equipment. Background Art

[0002] In the semiconductor and photovoltaic industries, silicon materials have become key materials for manufacturing solar cells and semiconductor devices due to their excellent electronic properties and abundant resources. As the basis of these devices, the surface quality of silicon wafers directly affects the electrical performance and efficiency of the final product. Therefore, in the manufacturing process of silicon wafers, the cleanliness of their surfaces is extremely strict. In the preparation process of silicon wafers, they will undergo a series of complex process treatments, including etching, polishing, deposition, etc. During the processing of silicon wafers, impurities such as HCL, KOH, etc. may remain on their surface. These residues will not only contaminate the surface of the silicon wafer, but also affect its electrical properties. Therefore, before the subsequent processes of the silicon wafers, they need to be cleaned and dried.

[0003] The drying tank is a commonly used device for drying silicon wafers. When using the drying tank to dry silicon wafers, the air quality in the drying tank is crucial to the drying effect of the silicon wafers. However, due to the lack of cleanliness in the factory and the limitations of the wet chemical cleaning process, there may be fine solid particles and harmful chemical gases such as HCl, KOH, O in or near the equipment. 3 If these particles and harmful gases diffuse into the drying tank, they will adhere to the surface of the silicon wafer, causing surface pollution of the silicon wafer and reducing the conversion efficiency of the solar cell. In addition, harmful chemical gases may also react chemically with the silicon wafer, reducing the carrier life of the cell, or oxidizing the surface of the silicon wafer to form an oxide layer, which will also seriously affect the conversion efficiency of the cell. Utility Model Content

[0004] The purpose of the present application is to provide a drying device for improving the air cleanliness in a drying tank and preventing silicon wafers from being contaminated in the drying tank.

[0005] In order to achieve the above-mentioned purpose and other related purposes, the present application provides a drying device, comprising:

[0006] The drying tank comprises a tank body, a working chamber is formed in the tank body, the tank body comprises a bottom tank plate located at the bottom of the working chamber, and an air inlet through hole and an air outlet through hole are arranged in the bottom tank plate;

[0007] An air supply mechanism, comprising an air supply pipeline and a filter assembly and a fan connected to the air supply pipeline, wherein the air supply pipeline is connected to the working chamber through the air inlet hole;

[0008] The air outlet mechanism comprises an air outlet pipeline, and the air outlet pipeline is connected with the working chamber through the air outlet through hole.

[0009] Optionally, the filtering component comprises:

[0010] a first filter, located between the first air supply port of the air supply pipeline and the fan, the first filter filtering harmful gases from the gas entering the air supply pipeline from the first air supply port;

[0011] a second filter, located between the first filter and the fan, the second filter performing a first particle filtration on the gas in the air supply pipeline;

[0012] The third filter is located between the fan and the drying tank, and performs a second particulate matter filtration on the gas in the air supply pipeline.

[0013] Optionally, the air supply pipeline further has a second air supply port, and the second air supply port is located between the third filter and the drying tank, and the first gas enters the air supply pipeline through the second air supply port.

[0014] Optionally, the air outlet mechanism also includes a differential pressure gauge and a valve, the differential pressure gauge is located at the air outlet of the air outlet pipeline, and the valve is located between the differential pressure gauge and the drying tank, and the valve is used to adjust the gas flow of the air outlet pipeline so that the gas flow of the air outlet pipeline is less than the gas flow of the air supply pipeline.

[0015] Optionally, the drying tank further comprises:

[0016] An inner slot plate is located in the working chamber, a bottom chamber is formed between the inner slot plate and the bottom slot plate, side chambers are formed between the two sides of the inner slot plate along the second direction and the slot body, and a placement slot is formed in the inner slot plate, wherein the top view profile of the bottom slot plate is a rectangular profile, and the extending directions of two adjacent sides of the rectangular profile of the bottom slot plate are respectively the first direction and the second direction;

[0017] The carrying flower basket is located in the placement groove of the inner groove plate and is used for carrying the test pieces to be dried.

[0018] Optionally, a heating component located in the bottom chamber is further provided in the drying tank, and the heating component includes a first heater and a second heater located on both sides of the bottom chamber along the second direction.

[0019] Optionally, an air supply assembly is also provided in the drying trough, and the air supply assembly includes a driving part, an air supply part and an air supply guide part, the air supply part is located in the bottom chamber, the driving part is located outside the working chamber, an air supply hole is provided in the bottom trough plate, the driving part is connected to the air supply part through the air supply hole, and the air supply guide part is located on a side of the air supply part away from the driving part and is connected to the inner trough plate.

[0020] Optionally, the air supply guide portion includes an air supply guide groove, an air supply fixing plate, and an air supply mesh cover, the air supply fixing plate is connected to the inner groove plate, a first through hole is provided in the air supply fixing plate, the air supply mesh cover completely covers the first through hole, the air supply guide groove is located between the air supply fixing plate and the air supply portion, and the first through hole exposes the opening of the air supply guide groove.

[0021] Optionally, the air supply mechanism further includes an air inlet guide pipe, which is located in the bottom chamber and communicated with the air supply pipeline, and the air outlet direction of the air inlet guide pipe is along the second direction toward both sides of the bottom chamber.

[0022] Optionally, the air outlet mechanism also includes an air outlet guide portion located in the bottom chamber, the air outlet guide portion includes an air outlet fixing plate, an air outlet mesh cover and an air outlet guide groove, the air outlet fixing plate is connected to the inner groove plate, a second through hole is provided in the air outlet fixing plate, the air outlet mesh cover completely covers the second through hole, the air outlet guide groove is located between the air outlet fixing plate and the air outlet duct and is connected to the air outlet duct, and the second through hole exposes the opening of the air outlet guide groove.

[0023] The drying equipment provided in this application has at least the following beneficial effects:

[0024] The drying equipment of the present application includes an air supply mechanism, an air outlet mechanism and a drying tank. In the air supply mechanism, a first filter, a second filter, a fan and a third filter are connected to an air supply pipeline in sequence, which effectively filters harmful gases and particulate impurities in the air and reduces damage to equipment such as the fan, thereby improving the air cleanliness in the drying tank and avoiding contamination of the test piece to be dried in the working chamber. A second air supply port for introducing the first gas is also provided in the air supply pipeline, which can further improve the air cleanliness in the drying tank; the air outlet mechanism can discharge the humid air in the working chamber. , effectively reducing the air humidity in the drying tank and improving the drying efficiency of the drying tank. The differential pressure gauge and valve can ensure that the drying tank is always in a positive pressure state, preventing external pollutants from entering the drying tank and contaminating the test pieces to be dried; an air supply component is provided in the drying tank, which cooperates with the air supply guide to form an internal circulation air path in the working chamber through the bottom chamber and the side chamber, thereby improving the gas replacement speed and drying efficiency in the working chamber; an air supply guide and an air supply guide are also provided in the drying tank, further improving the gas replacement speed and drying efficiency in the working chamber. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0026] Figure 1 Shown is a schematic diagram of the structure of the drying equipment provided in this application.

[0027] Figure 2 Display as Figure 1 The main structural schematic diagram of the drying tank in the drying equipment shown.

[0028] Figure 3 Display as Figure 1 The left side structural schematic diagram of the drying tank in the drying equipment shown.

[0029] Figure 4 Display as Figure 1 Schematic diagram of the structure of the inner groove plate in the drying equipment shown.

[0030] Figure 5 Display as Figure 4 A top view of the inner groove plate is shown.

[0031] Figure 6 Shown is a schematic diagram of the structure of the air supply component in the drying equipment provided in this application.

[0032] Figure 7 Display as Figure 6 The schematic diagram of the structure of the air supply grille in the air supply assembly is shown.

[0033] Figure 8 Shown is a schematic diagram of the structure of the air outlet guide part in the drying equipment provided in this application.

[0034] Reference numerals:

[0035] 1. Drying trough; 11. trough body; 111. Working chamber; 1111. Bottom chamber; 1112. Side chamber; 112. Bottom trough plate; 12. Inner trough plate; 121. Inner trough air outlet; 122. First inner trough through hole; 123. Second inner trough through hole; 14. Carrying flower basket; 15. Heating assembly; 151. First heater; 152. Second heater; 16. Air supply assembly; 161. Driving unit; 162. Air supply unit; 163. Air supply guide unit; 1631. Air supply guide trough; 1632. Air supply fixing plate; 1633. Air supply mesh cover; 2. Air supply mechanism; 21. Air supply pipeline; 211. First air supply port; 212. Second air supply port; 22. Filter assembly; 221. First filter; 222. Second filter; 223. Third filter; 23. Fan; 24. Air inlet guide duct; 3. Air outlet mechanism; 31. Air outlet pipeline; 311. Air outlet; 32. Differential pressure gauge; 33. Valve; 34. Air outlet guide part; 341. Air outlet fixing plate; 342. Air outlet mesh cover; 343. Air outlet guide slot; 4. Air filtering mechanism. DETAILED DESCRIPTION

[0036] In order to make the technical purpose, technical solution and technical effect of the present application clearer, the technical solution in the present application will be clearly and completely described in conjunction with the embodiments below. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.

[0037] Therefore, the following detailed description of the embodiments of the present application is not intended to limit the scope of the present application for protection, but merely represents the selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work are within the scope of protection of the present application. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0038] In the description of the present application, it should be noted that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0039] In the description of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected" and "connected" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection. In addition, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "example", "specific example" or "some examples" means that the specific features, structures, materials or characteristics described in combination with the implementation or example are included in at least one implementation or example of the present application. In this specification, the schematic representation of the above terms does not necessarily refer to the same implementation or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more implementations or examples in a suitable scheme.

[0040] This embodiment provides a drying device, referring to Figure 1 , including a drying tank 1, an air supply structure 2 and an air outlet mechanism 3.

[0041] The drying tank 1 includes a tank body 11, in which a working chamber 111 is formed. The working chamber 111 is a clean space for the test piece to be dried. The tank body 11 includes a bottom tank plate 112, which is located at the bottom of the working chamber 111. The bottom tank plate 112 is provided with air inlet holes and air outlet holes, and the air inlet holes and the air outlet holes are arranged at intervals; the air supply structure 2 includes an air supply pipeline 21 and a filter assembly 22 and a fan 23 connected to the air supply pipeline 21. The air supply pipeline 21 is connected to the working chamber 111 through the air inlet hole, so that the external air entering the air supply pipeline 21 enters the working chamber 111 after being blown by the fan 23; the air outlet mechanism 3 includes an air outlet pipeline 31, and the air outlet pipeline 31 is connected to the working chamber 111 through the air outlet hole, so that the gas in the working chamber 111 flows out through the air outlet pipeline 31.

[0042] The external air enters the air supply duct 21 and passes through the filter assembly 22 to effectively filter harmful chemical gases such as HCl, KOH and particulate impurities therein, and after being blown by the fan 23, it can provide clean fresh air to the working chamber 111, effectively improving the air cleanliness in the drying tank 1 and avoiding the contamination of the test pieces to be dried in the drying tank 1; at the same time, the humid air in the working chamber 111 can be discharged through the air outlet duct 31, effectively reducing the air humidity in the drying tank 1 and improving the drying efficiency of the drying tank 1.

[0043] Reference Figure 1 In this embodiment, the filter assembly 22 includes a first filter 221, a second filter 222 and a third filter 223. The first filter 221 is located between the first air supply port 211 of the air supply pipeline 21 and the fan 23. External gas enters the air supply pipeline 21 through the first air supply port 211. Optionally, the external gas entering the air supply pipeline 21 through the first air supply port 211 is air. The first filter 221 can filter harmful gases from the inflowing air to remove HCl, KOH, O 3 At the same time, the first filter 221 is arranged at the upstream position of the fan 23 along the air flow direction, which can also reduce the damage of harmful chemical gases to the equipment; optionally, the first filter 221 is a chemical filter, which can effectively absorb HCl, KOH, O 3 And other harmful chemical gases.

[0044] The second filter 222 is located between the first filter 221 and the fan 23. The second filter 222 can perform a first particle filtration on the gas in the air supply line 21 to remove the particle impurities with relatively large particle diameters in the gas, and by arranging the second filter 222 between the first filter 221 and the fan 23, it is possible to avoid the damage of the particle impurities in the gas to the fan 23 without affecting the air flow at the first air supply port 211; optionally, the second filter 222 is a primary filter, which can preliminarily filter the particle impurities with larger diameters in the gas. The third filter 223 is located between the fan 23 and the drying tank 1, and the third filter 223 can perform a second particle filtration on the gas in the air supply line 21 to remove the particle impurities in the gas and prevent the particle impurities from contaminating the test piece to be dried; optionally, the third filter 223 is a high-efficiency filter, which can effectively remove the particle in the gas.

[0045] In an optional embodiment, the air supply duct 21 is further provided with a second air supply port 212, and the second air supply port 212 is located between the third filter 223 and the drying tank 1. The first gas flows into the air supply duct 21 through the second air supply port 212 to enter the working chamber 111. The first gas can further improve the air cleanliness in the drying tank 1. Optionally, the first gas is nitrogen, and the gas flow rate of nitrogen at the second air supply port 212 can be set according to actual needs.

[0046] In this embodiment, the air outlet mechanism 3 further includes a differential pressure gauge 32 and a valve 33. The differential pressure gauge 32 is located at the air outlet 311 of the air outlet pipeline 31, and the valve 33 is located between the differential pressure gauge 32 and the drying tank 1. The differential pressure gauge 32 is used to monitor the negative pressure value at the air outlet 311 of the air outlet pipeline 31, and the valve 33 is used to adjust the gas flow rate of the air outlet pipeline 31 so that the gas flow rate in the air outlet pipeline 31 is less than the gas flow rate in the air supply pipeline 21, so as to ensure that the drying tank 1 is always in a positive pressure state, and to prevent external particles and other pollutants from entering the drying tank 1 to contaminate the test piece to be dried. At the same time, the humid gas in the working chamber 111 is discharged through the air outlet pipeline 31, which can effectively reduce the air humidity in the working chamber 111 and improve the drying efficiency. Optionally, the valve 33 is a manual ball valve.

[0047] Reference Figures 2 to 5 In this embodiment, the drying tank 1 further comprises an inner tank plate 12 and a flower basket 14. The inner tank plate 12 is located in the working chamber 111 and is used to hold the flower basket 14. A bottom chamber 1111 is formed between the inner tank plate 12 and the bottom tank plate 112. Side chambers 1112 are formed between the inner tank plate 12 and the tank body 11 on both sides along the second direction. Optionally, the top view profile of the bottom tank plate 112 is a rectangular profile; wherein the extending directions of the two adjacent sides of the rectangular profile of the bottom tank plate 112 are respectively the first direction and the second direction. Further, the first direction is the extending direction of the long side of the rectangular profile of the bottom tank plate 112, and the second direction is the extending direction of the short side of the rectangular profile of the bottom tank plate 112. A placement slot is formed in the inner tank plate 12, and the opening of the placement slot is located on the side of the inner tank plate 12 away from the bottom tank plate 112. The flower basket 14 is located in the placement slot of the inner tank plate 12, and the flower basket 14 is used to carry the test piece to be dried.

[0048] Reference Figure 2 and Figure 3In this embodiment, a heating specimen is also provided in the drying tank 1. The heating specimen is located in the bottom chamber 1111 and connected to the tank body 11. Optionally, the heating specimen includes a first heater 151 and a second heater 152. The first heater 151 and the second heater 152 are located on both sides of the bottom chamber 1111 along the second direction. Furthermore, the first heater 151 and the second heater 152 are both quartz heating tubes. By providing a heating assembly 15 in the bottom chamber 1111, the gas in the working chamber 111 can be heated to generate a temperature rise, so that the gas in the working chamber 111 meets the requirements of the drying process, and then the clean and dry hot air is blown to the surface of the specimen to be dried.

[0049] Reference Figure 2 and Figure 6 In this embodiment, an air supply component 16 is further provided in the drying tank 1. The air supply component 16 includes a driving part 161, an air supply part 162 and an air supply guide part 163. The driving part 161 is used to provide drive for the air supply part 162 so that the air supply part 162 generates internal circulation wind, accelerates the gas replacement speed in the working chamber 111, and improves the drying efficiency. The air supply guide part 163 can make more air above the air supply part 162 participate in the air internal circulation in the working chamber 111. The bottom slot plate 112 is provided with an air supply hole, the air supply portion 162 is located in the bottom chamber 1111, the driving portion 161 is located outside the working chamber 111, and the driving portion 161 is connected to the air supply portion 162 through the air supply hole; optionally, the air supply portion 162 can generate positive and negative wind along the second direction, the air supply portion 162 includes a wind wheel, and the driving portion 161 includes a high temperature resistant driving motor, and the driving motor is connected to the wind wheel through the air supply hole to drive the wind wheel to rotate; further, the wind wheel is a backward inclined wind wheel, which can blow air in the radial direction of the wind wheel. The air supply guide portion 163 is located on the side of the air supply portion 162 away from the driving portion 161, and is connected to the inner slot plate 12. The air supply guide portion 163 can guide the air away from the side of the air supply portion 162 to the air supply portion 162, so that more air above the air supply guide portion 163 can participate in the air internal circulation of the working chamber 111. Optionally, the air supply assembly 16 further includes an air supply fastening portion, through which the air supply assembly 16 is respectively connected to the bottom slot plate 112 and the inner slot plate 12 to fix the air supply assembly 16 in the drying slot 1.

[0050] In an alternative embodiment, reference Figure 6 and Figure 7The air supply guide part 163 includes an air supply guide groove 1631, an air supply fixing plate 1632, and an air supply mesh cover 1633. The air supply fixing plate 1632 is connected to the inner groove plate 12, a first through hole is provided in the air supply fixing plate 1632, a first inner groove through hole 122 is provided in the inner groove plate 12, the first inner groove through hole 122 exposes the first through hole, and the air supply mesh cover 1633 is located in the first through hole and completely covers the first through hole to prevent impurities such as debris in the inner groove plate 12 from entering the wind wheel. The air supply guide groove 1631 is located between the air supply fixing plate 1632 and the air supply part 162, and the first through hole exposes the opening of the air supply guide groove 1631; optionally, the air supply guide groove 1631 is a venturi tube guide groove; further, the air supply guide groove 1631 is fixedly connected to the air supply fixing plate 1632. The curved surface of the air supply guide groove 1631 can generate a pressure difference between the upper and lower ends thereof, so that more air above the air supply portion 162 can participate in the internal air circulation in the working chamber 111 .

[0051] In an alternative embodiment, reference Figure 8 The air supply mechanism 2 also includes an air inlet guide pipe 24, which is located in the bottom chamber 1111 and connected to the air supply pipeline 21. The air outlet direction of the air inlet guide pipe 24 is along the second direction toward the two sides of the bottom chamber 1111. The inner groove plate 12 is provided with inner groove blowing ports 121 on the side walls on both sides along the second direction. The air flowing in from the air supply pipeline 21 is blown to the surface of the test piece to be dried through the air inlet guide pipe 24, the bottom cavity, the side cavity, and the inner groove blowing ports 121, and flows out of the working chamber 111 through the air outlet pipeline 31 to form an internal circulation air path inside the working chamber 111.

[0052] In an alternative embodiment, reference Figure 2 and Figure 8The air outlet mechanism 3 also includes an air outlet guide portion 34, which is arranged in the bottom chamber 1111 and connected to the air outlet pipeline 31, so as to improve the gas replacement rate of the working chamber 111. Optionally, the air outlet mechanism 3 also includes an air outlet fastening portion for fixing the air outlet guide portion 34 in the drying tank 1. The air outlet guide portion 34 includes an air outlet guide groove 343, an air outlet fixing plate 341 and an air outlet mesh cover 342. The air outlet fixing plate 341 is connected to the inner groove plate 12. A second through hole is provided in the air outlet fixing plate 341. A second inner groove through hole 123 is provided in the inner groove plate 12. The second inner groove through hole 123 exposes the second through hole. The air outlet mesh cover 342 is located in the second through hole and completely covers the second through hole to prevent impurities such as debris in the inner groove plate 12 from entering the air outlet duct 31. The air outlet guide groove 343 is located between the air outlet fixing plate 341 and the air outlet duct 31 and is connected to the air outlet duct 31. The second through hole exposes the opening of the air outlet guide groove 343. Optionally, the air outlet guide groove 343 is a venturi tube guide groove. The air outlet guide groove 343 is fixedly connected to the air outlet fixing plate 341. The air outlet fixing plate 341 is fixedly connected to the inner groove plate 12.

[0053] In an optional embodiment, the air supply hole is located in the central area of ​​the bottom groove plate 112, and the air inlet holes include two, which are respectively located on both sides of the air supply hole along the first direction. The air supply structure 2 extends into the working chamber 111 through the two air inlet holes to transport gas into the working chamber 111; the air outlet holes also include two, which are respectively located on both sides of the air supply hole along the first direction. Accordingly, the number of the second inner groove holes 123 is also two, and the air inlet hole and the air outlet hole are spaced apart. The air outlet duct 31 discharges the air in the working chamber 111 through the two air outlet holes.

[0054] In an alternative embodiment, reference Figure 1 The drying device further comprises an air filter mechanism 4, which is located above the drying tank 1 and can deliver clean airflow to the drying tank 1 and its surroundings, while effectively blocking the diffusion of chemical gases in the device to the drying tank 1. Optionally, the air supply structure 2 is located below the air filter mechanism 4, so that the clean air provided by the air filter mechanism 4 can be delivered to the drying tank 1 through the air supply structure 2. Further, the air filter mechanism 4 is a fan 23 filter unit.

[0055] The drying device of the present application includes an air supply structure 2, an air outlet mechanism 3 and a drying tank 1. The air supply structure 2 includes a first filter 221, a second filter 222, a fan 23 and a third filter 223 arranged in sequence, which can effectively filter harmful chemical gases and particulate impurities in the air and reduce damage to equipment such as the fan 23, thereby improving the air cleanliness in the drying tank 1 and avoiding contamination of the test piece to be dried in the working chamber 111; the air outlet mechanism 3 includes an air outlet pipeline 31, a differential pressure gauge 32 and a valve 33, which can discharge the humid air in the working chamber 111, effectively reducing the air humidity in the drying tank 1 and improving the drying efficiency of the drying tank 1 , and ensure that the drying tank 1 is always in a positive pressure state, so as to prevent external pollutants from entering the drying tank 1 and contaminating the test pieces to be dried; a heating component 15 is provided in the drying tank 1, which can heat the gas in the working chamber 111 to meet the requirements of the drying process; an air supply component 16 is provided in the drying tank 1, which cooperates with the air supply guide 163, so that the gas in the working chamber 111 forms an internal circulation air path through the bottom chamber 1111 and the side chamber 1112, thereby improving the gas replacement speed and drying efficiency in the working chamber 111; an air supply guide 163 and an air supply guide are also provided in the drying tank 1, which further improve the gas replacement speed and drying efficiency in the working chamber 111.

[0056] The above embodiments are merely illustrative of the principles and effects of the present application and are not intended to limit the present application. Anyone familiar with the technology may modify, change or combine the above embodiments without violating the spirit and scope of the present application. Therefore, all equivalent modifications or changes made by a person of ordinary skill in the art without departing from the spirit and technical ideas disclosed in the present application shall still be covered by the claims of the present application.

Claims

1. A drying device, characterized in that: include: The drying tank comprises a tank body, a working chamber is formed in the tank body, the tank body comprises a bottom tank plate located at the bottom of the working chamber, and an air inlet through hole and an air outlet through hole are arranged in the bottom tank plate; An air supply mechanism, comprising an air supply pipeline and a filter assembly and a fan connected to the air supply pipeline, wherein the air supply pipeline is connected to the working chamber through the air inlet hole; The air outlet mechanism comprises an air outlet pipeline, and the air outlet pipeline is connected with the working chamber through the air outlet through hole.

2. The drying device according to claim 1, characterized in that: The filter assembly comprises: a first filter, located between the first air supply port of the air supply pipeline and the fan, the first filter filtering harmful gases from the gas entering the air supply pipeline from the first air supply port; a second filter, located between the first filter and the fan, the second filter performing a first particle filtration on the gas in the air supply pipeline; The third filter is located between the fan and the drying tank, and performs a second particulate matter filtration on the gas in the air supply pipeline.

3. The drying device according to claim 2, characterized in that: The air supply pipeline further has a second air supply port, and the second air supply port is located between the third filter and the drying tank, and the first gas enters the air supply pipeline through the second air supply port.

4. The drying device according to claim 1, characterized in that: The air outlet mechanism also includes a differential pressure gauge and a valve. The differential pressure gauge is located at the air outlet of the air outlet pipeline. The valve is located between the differential pressure gauge and the drying tank. The valve is used to adjust the gas flow rate of the air outlet pipeline so that the gas flow rate of the air outlet pipeline is less than the gas flow rate of the air supply pipeline.

5. The drying device according to claim 1, characterized in that: The drying tank also includes: An inner slot plate is located in the working chamber, a bottom chamber is formed between the inner slot plate and the bottom slot plate, side chambers are formed between the two sides of the inner slot plate along the second direction and the slot body, and a placement slot is formed in the inner slot plate, wherein the top view profile of the bottom slot plate is a rectangular profile, and the extending directions of two adjacent sides of the rectangular profile of the bottom slot plate are respectively the first direction and the second direction; The carrying flower basket is located in the placement groove of the inner groove plate and is used for carrying the test pieces to be dried.

6. The drying device according to claim 5, characterized in that: The drying tank is further provided with a heating component located in the bottom chamber, and the heating component includes a first heater and a second heater located at two sides of the bottom chamber along the second direction.

7. The drying device according to claim 5, characterized in that: An air supply assembly is also provided in the drying trough, and the air supply assembly includes a driving part, an air supply part and an air supply guide part. The air supply part is located in the bottom chamber, and the driving part is located outside the working chamber. An air supply hole is provided in the bottom trough plate, and the driving part is connected to the air supply part through the air supply hole. The air supply guide part is located on a side of the air supply part away from the driving part and is connected to the inner trough plate.

8. The drying device according to claim 7, characterized in that: The air supply guide portion includes an air supply guide groove, an air supply fixing plate, and an air supply mesh cover. The air supply fixing plate is connected to the inner groove plate. A first through hole is provided in the air supply fixing plate. The air supply mesh cover completely covers the first through hole. The air supply guide groove is located between the air supply fixing plate and the air supply portion, and the first through hole exposes the opening of the air supply guide groove.

9. The drying device according to claim 5, characterized in that: The air supply mechanism further includes an air inlet guide pipe, which is located in the bottom chamber and communicated with the air supply pipeline, and the air outlet direction of the air inlet guide pipe is along the second direction toward the two sides of the bottom chamber.

10. The drying device according to claim 5, characterized in that: The air outlet mechanism also includes an air outlet guide portion located in the bottom chamber, the air outlet guide portion includes an air outlet fixing plate, an air outlet mesh cover and an air outlet guide groove, the air outlet fixing plate is connected to the inner groove plate, a second through hole is provided in the air outlet fixing plate, the air outlet mesh cover completely covers the second through hole, the air outlet guide groove is located between the air outlet fixing plate and the air outlet duct and is connected to the air outlet duct, and the second through hole exposes the opening of the air outlet guide groove.

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