Angle-rotation double-guide-rail double-chip-mounting-head mechanism with force control function

Abstract

The utility model provides an angle-rotation double-guide-rail double-chip-mounting-head mechanism with force control, which adopts a double-head structure and can ensure that two chips can be sucked at the same time, and in a chip fixing process, a chip on one chip mounting head is fixed firstly and then the other chip is fixed, so that a series of displacement actions generated by a re-chip-taking action are reduced, and the production efficiency is improved. Therefore, the die bonding time is shortened, and the die bonding efficiency is greatly improved. And an existing double-head chip mounting mechanism adopts a precise linear guide rail guiding mode, so that the distance between two die bonding points is greatly shortened under the condition that the force control guiding precision is ensured, the die bonding displacement distance is reduced, and the time required for secondary die bonding is reduced. And the guide rail is used for guiding, so that the shaking of the die bonding head caused by acceleration, deceleration and displacement and the displacement direction deviation caused by displacement can be reduced.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor chip packaging equipment, and in particular to an angle-rotating double-guide-rail double-mounting head mechanism with force control. Background Art

[0002] The chip loading machine is a key equipment in the chip back-end packaging production line. The chip mounting process is as follows: the glue dispensing mechanism first dispenses glue on the lead frame, the ejector pin is aligned with the center of the chip, the ejector pin lifts the chip on the blue film, and then the IC chip is removed from the iron ring blue film by the mounting head, and then transferred to the mounting station where glue has been dispensed to complete the chip mounting.

[0003] Since some products need to mount chips at various angles, the requirements for mounting speed, mounting accuracy, and mounting force control are getting higher and higher. A mechanism that can not only improve the speed of solid crystals, but also ensure the requirements of mounting accuracy and mounting force control is needed. The existing single-head mechanism can no longer improve the efficiency of solid crystals under the existing accuracy requirements, and the existing double-head mechanism adopts a spring-type structure, which cannot guarantee the stability in the Z-axis direction. It is easy for the welding head to move in the Z direction at a high speed, which leads to a long setting time and a swing in the X and Y directions. However, the existing double-head mechanism adopts a spring-type structure, which cannot guarantee the stability in the Z-axis direction. It is easy for the welding head to move in the Z direction at a high speed, which leads to a long setting time and a swing in the X and Y directions. Summary of the invention

[0004] The purpose of the present invention is to solve the shortcomings of the prior art and to propose an angle rotating double-guide rail double-mounting head mechanism with force control.

[0005] To achieve the above-mentioned purpose, the present invention adopts the following technical scheme: an angle rotating double-guide rail double-patch head mechanism with force control, the mechanism comprising a motor bracket, a servo motor arranged at the front end of the motor bracket, a first Z-axis solid crystal mounting seat, a second Z-axis solid crystal mounting seat, a first matching fixed seat, a second matching fixed seat, a first crystal spotting part, a second crystal spotting part, a first crystal spotting matching part and a second crystal spotting matching part; the lower end of the servo motor is respectively provided with a first right synchronous wheel and a second right synchronous wheel;

[0006] The first mating fixed seat is provided with a first reading head, a first reading head front mounting seat, a first reading head rear mounting seat and a first welding head rotating motor seat; the first reading head is fixedly mounted on the first reading head front mounting seat; the first reading head front mounting seat is mounted on the front end of the first reading head rear mounting seat; the first reading head rear mounting seat is fixedly mounted on the first welding head rotating motor seat.

[0007] Preferably, the first mating fixed seat also includes a first air pipe joint and a first linear guide; the first air pipe joint is installed on the first reading head rear mounting seat; the first linear guide is installed on the first welding head rotating motor seat; the first welding head rotating motor seat is also fixedly mounted with a first spring seat; the first spring seat is also mounted with a first adjustment rod; the first welding head rotating motor seat is provided with a first force-controlled motor stator.

[0008] Preferably, a first rubber suction nozzle is provided at the bottom of the first crystal point part; a first suction nozzle rod is connected to the upper end of the first rubber suction nozzle; a first suction nozzle rotating shaft is also provided at the upper end of the first suction nozzle rod; a first left-side synchronous wheel is provided in the middle of the first crystal point part; and the first right-side synchronous wheel is connected to the first synchronous wheel through a first synchronous belt; a first shading sheet is also provided above the first left-side synchronous wheel; and a first bearing is also provided in the middle of the first crystal point part.

[0009] Preferably, the second crystal point portion is symmetrically arranged with respect to the first crystal point portion.

[0010] Preferably, a first pressure plate is provided on the upper surface of the first spot crystal matching part; a first welding head nozzle holder is provided below the first pressure plate; a first spacer is also provided inside the first welding head nozzle holder; a first photoelectric switch is also provided on the front end surface of the first welding head nozzle holder; a first contact is provided on the rear end surface of the first welding head nozzle holder; and a first force-controlled motor actuator is also provided on the first welding head nozzle holder.

[0011] Preferably, the second dot crystal matching portion is symmetrically arranged with respect to the first dot crystal matching portion.

[0012] Preferably, a second stopper is further provided on the second mating fixing seat; the second stopper is arranged on the inner side wall of the second mating fixing seat; the second stopper is fixedly connected to the second contact seat; a first grating scale is also installed on the side end of the front mounting seat of the first reading head; and a first compression spring is also installed on the first air pipe joint.

[0013] Preferably, the second matching fixing seat is symmetrically arranged with respect to the first matching fixing seat.

[0014] Compared with the prior art, the beneficial effects of the present invention are as follows: the double-head structure of the present invention ensures that two wafers are sucked at the same time. During the process of solidification, the chip on one of the mounting heads is solidified first, and then the other chip is solidified, thereby reducing a series of displacement actions caused by the re-crystal retrieval action, thereby shortening the solidification time and greatly improving the solidification efficiency. In addition, the existing double-head mounting mechanism adopts a precision linear guide guidance method, which not only ensures the force control guidance accuracy, but also greatly shortens the distance between the two solidification points, thereby reducing the solidification displacement distance, thereby reducing the time required for the second solidification. And because the guide rail guidance is adopted, the jitter of the solidification head caused by acceleration and deceleration and displacement and the displacement direction offset caused by displacement can be reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the splitting of the present invention;

[0016] Figure 2 It is an overall schematic diagram of the present invention. DETAILED DESCRIPTION

[0017] In order to provide a further understanding of the purpose, structure, features, and functions of the present invention, the following detailed description is given in conjunction with the embodiments.

[0018] Please refer to Figure 1 as well as Figure 2 The present invention provides a dual-guide dual-patch head mechanism with angle rotation and force control, the mechanism comprising a motor bracket 1, a servo motor 2 arranged at the front end of the motor bracket, a first Z-axis solid crystal mounting seat 3, a second Z-axis solid crystal mounting seat 4, a first matching fixed seat 5, a second matching fixed seat 6, a first crystal spotting portion 7, a second crystal spotting portion 8, a first crystal spotting matching portion 9 and a second crystal spotting matching portion 10; the lower end of the servo motor 2 is respectively provided with a first right synchronous wheel 21 and a second right synchronous wheel 22;

[0019] The first mating fixed seat 5 is provided with a first reading head 51, a first reading head front mounting seat 52, a first reading head rear mounting seat 53 and a first welding head rotating motor seat 54; the first reading head 51 is fixedly mounted on the first reading head front mounting seat 52; the first reading head front mounting seat 52 is mounted on the front end of the first reading head rear mounting seat 53; the first reading head rear mounting seat 53 is fixedly mounted on the first welding head rotating motor seat 54.

[0020] Preferably, the first mating fixed seat 5 also includes a first air pipe joint 55 and a first linear guide 56; the first air pipe joint 55 is installed on the first reading head rear mounting seat 53; the first linear guide 56 is installed on the first welding head rotating motor seat 54; the first welding head rotating motor seat 54 is also fixedly mounted with a first spring seat 57; the first spring seat 57 is also mounted with a first adjusting rod 58; the first welding head rotating motor seat 54 is provided with a first force control motor stator 59.

[0021] Preferably, a first rubber suction nozzle 71 is provided at the bottom of the first crystal point portion 7; the upper end of the first rubber suction nozzle 71 is connected to a first suction nozzle rod 72; the upper end of the first suction nozzle rod 72 is also provided with a first suction nozzle shaft 73; a first left-side synchronous wheel 74 is provided in the middle of the first crystal point portion 7; and it is connected to the first right-side synchronous wheel 21 through a first synchronous belt 75; a first shading sheet 76 is also provided above the first left-side synchronous wheel 74; and a first bearing 77 is also provided in the middle of the first crystal point portion 7.

[0022] Preferably, the second crystal point portion 8 is symmetrically arranged with respect to the first crystal point portion 7 .

[0023] Furthermore, the second crystal point portion 8 includes a second rubber suction nozzle 81 at the bottom; the upper end of the second rubber suction nozzle 81 is connected to a second suction nozzle rod 82; the upper end of the second suction nozzle rod 82 is also provided with a second suction nozzle shaft 83; the middle part of the second crystal point portion 8 is provided with a second left-side synchronous wheel 84; and it is connected to the second right-side synchronous wheel 22 through a second synchronous belt 85; a second shading sheet 86 is also provided above the second left-side synchronous wheel 84; and a second bearing 87 is also provided in the middle part of the second crystal point portion 8.

[0024] Preferably, a first pressure plate 91 is provided on the upper surface of the first spot crystal matching part 9; a first welding head nozzle holder 92 is provided below the first pressure plate 91; a first spacer sleeve 93 is also provided inside the first welding head nozzle holder 92; a first photoelectric switch 94 is also provided on the front end surface of the first welding head nozzle holder 92; a first contact 95 is provided on the rear end surface of the first welding head nozzle holder 92; and a first force-controlled motor mover 96 is also provided on the first welding head nozzle holder 92.

[0025] Preferably, the second dot crystal matching portion 10 is symmetrically arranged with the first dot crystal matching portion 9 .

[0026] Furthermore, the second spot crystal matching part 10 includes a second pressure plate 101 on the upper surface; a second welding head nozzle holder 102 is provided below the second pressure plate 101; a second spacer sleeve 103 is also provided in the second welding head nozzle holder 102; a second photoelectric switch 104 is also provided on the front end surface of the second welding head nozzle holder 102; a second contact 105 is provided on the rear end surface of the second welding head nozzle holder 102; and a second force control motor mover 106 is also provided on the second welding head nozzle holder 102.

[0027] Preferably, a second stop block 610 is also provided on the second mating fixing seat 6; the second stop block 610 is arranged on the inner wall of the second mating fixing seat 6; the second stop block 610 is fixedly connected to the second contact seat 613; a first grating scale 511 is also installed on the side end of the first reading head front mounting seat 52; and a first compression spring 512 is also installed on the first air pipe joint 55.

[0028] Preferably, the second matching fixing seat 6 and the first matching fixing seat 5 are symmetrically arranged.

[0029] Furthermore, the second mating fixed seat 6 is provided with a second reading head 61, a second reading head front mounting seat 62, a second reading head rear mounting seat 63 and a second welding head rotating motor seat 64; the second reading head 61 is fixedly mounted on the second reading head front mounting seat 62; the second reading head front mounting seat 62 is mounted at the front end of the second reading head rear mounting seat 63; the second reading head rear mounting seat 63 is fixedly mounted on the second welding head rotating motor seat 64.

[0030] Furthermore, the second mating fixed seat 6 also includes a second air pipe joint 65 and a second linear guide 66; the second air pipe joint 65 is installed on the second reading head rear mounting seat 63; the second linear guide 66 is installed on the second welding head rotating motor seat 64; the second welding head rotating motor seat 64 is also fixedly mounted with a second spring seat 67; the second spring seat 67 is also mounted with a second adjusting rod 68; the second welding head rotating motor seat 64 is provided with a second force control motor stator 69.

[0031] Specific implementation:

[0032] The servo motor 2 is mounted on the motor bracket 1, and then fixed together to the first welding head rotating motor seat 54 and the second welding head rotating motor seat 64 of the 15 welding head respectively; the first left synchronous wheel 74 and the second left synchronous wheel 84 are installed on the servo motor shaft, which are connected to the first right synchronous wheel 21 and the second right synchronous wheel 22 of the first suction nozzle rotating shaft 73 and the second suction nozzle rotating shaft 83 through the first synchronous belt 75 and the second synchronous belt 85, so as to drive the first suction nozzle rotating shaft 73 and the second suction nozzle rotating shaft 83 to rotate. The first force control motor stator 59 and the second force control motor stator 69 are fixed to the first welding head rotating motor seat 54 and the second welding head rotating motor seat 64 respectively; the first linear guide 56 and the second linear guide 66 are fixed to the first welding head rotating motor seat 54 and the second welding head rotating motor seat 64 respectively, and mainly play a guiding role.

[0033] The first reading head 51 and the second reading head 61 are respectively mounted on the first reading head front mounting seat 52 and the second reading head front mounting seat 62, and then respectively mounted on the first reading head rear mounting seat 53 and the second reading head rear mounting seat 63, and finally fixed on the first welding head rotating motor seat 54 and the second welding head rotating motor seat 64. The first air pipe joint 55 and the second air pipe joint 65 are mounted on the first reading head rear mounting seat 53 and the second reading head rear mounting seat 63, and mainly play the role of cooling the mover.

[0034] The first stopper 510 and the second stopper 610 are respectively fixed on the first welding head rotating motor seat 54 and the second welding head rotating motor seat 64. Due to the waist hole structure, it is convenient to adjust the height, so as to ensure that the height of the double solid crystal points is consistent, which is convenient for mounting. The first adjustment rod 58 and the second adjustment rod 68 are respectively installed on the first spring seat 57 and the second spring seat 67. The first spring seat 57 and the second spring seat 67 are respectively fixed on the first welding head rotating motor seat 54 and the second welding head rotating motor seat 64. Adjust the spring strength. Ensure that the first stopper 510 and the second stopper 610 are in contact with the first contact 95 and the second contact 105 respectively at the initial position of the suction nozzle.

[0035] The first nozzle rotating shaft 73 and the second nozzle rotating shaft 83 are fixed to the first welding head nozzle seat 92 and the second welding head nozzle seat 102 through the first bearing 77 and the second bearing 87 respectively, so as to realize 360° rotation. The first grating ruler 511 and the second grating ruler 611 are mounted on the side of the first welding head nozzle seat 92 and the second welding head nozzle seat 102. The first force control motor mover 96 and the second force control motor mover 106 are fixed to the first welding head nozzle seat 92 and the second welding head nozzle seat 102 respectively.

[0036] The first shading sheet 76 and the second shading sheet 86 are fixed between the first bearing 77 and the second bearing 87 with the first spacer 93 and the second spacer 103, respectively, to ensure the positioning of the inner and outer rings of the first bearing 77 and the second bearing 87. And the first shading sheet 76 and the second shading sheet 86 rotate with the first suction nozzle shaft 73 and the second suction nozzle shaft 83, respectively, and then trigger the first photoelectric switch 94 and the second photoelectric switch 104, so as to achieve the role of the rotation origin. The first photoelectric switch 94 and the second photoelectric switch 104 are fixed to the first welding head suction nozzle seat 92 and the second welding head suction nozzle seat 102, respectively. The first pressing plate 91 and the second pressing plate 101 are fixed to the first suction nozzle shaft 73 and the second suction nozzle shaft 83, and play the role of fixing the first bearing 77 and the second bearing 87. The first suction nozzle shaft 73 and the second suction nozzle shaft 83 are fixed to the first left synchronous wheel 74 and the second left synchronous wheel 84 by locking nuts. The first welding head nozzle holder 92 and the second welding head nozzle holder 102 are fixed on the first linear guide rail 56 and the second linear guide rail 66. The first linear guide rail 56 and the second linear guide rail 66 are also provided with linear guide sliders for sliding movement, so as to realize Z-axis force control. The linear guide sliders are combined with the first linear guide rail 56 and the second linear guide rail 66 to guide the Z-axis load accurately.

[0037] The first force-controlled motor mover 96 and the second force-controlled motor mover 106 generate an upward reverse thrust after being energized, which is mainly used to offset the deadweight of all accessories fixed on the guide rail so as to achieve an ideal balance state. When the first rubber suction nozzle 71 and the second rubber suction nozzle 81 contact the chip, a reaction pressure is generated, causing the first welding head suction nozzle holder 92 and the second welding head suction nozzle holder 102 fixed on the linear guide slider to move in the z-axis position. At this time, the first reading head 51 and the second reading head 61 respectively monitor the position offset of the first grating scale 511 and the second grating scale 611, and the friction coefficient of the guide rail is constant, so the pressure value on the chip can be accurately calculated (the displacement and force conversion relationship curve chart has been calibrated, such as a 0.1 micron stroke change corresponds to 1g force).

[0038] The first welding head rotating motor seat 54 and the second welding head rotating motor seat 64 are respectively mounted on the first Z-axis solid crystal mounting seat 3 and the second Z-axis solid crystal mounting seat 4 through hinge pins, and the hinge pins act as a rotating axis, which is convenient for adjusting the angular deviation in the direction of the suction nozzle rotating axis; then the first welding head rotating motor seat 54 and the second welding head rotating motor seat 64 are fixed by cylindrical pins, wherein the lower cylindrical pin acts as a rotating axis, and the upper cylindrical pin can adjust the angle in the direction of the rotating axis due to the action of the inner top screw of the spring.

[0039] The present invention has been described by the above-mentioned relevant embodiments, however, the above-mentioned embodiments are only examples for implementing the present invention. It must be pointed out that the disclosed embodiments do not limit the scope of the present invention. On the contrary, changes and modifications made without departing from the spirit and scope of the present invention are all within the scope of patent protection of the present invention.

Claims

1. A dual-guide dual-mount head mechanism with angle rotation and force control, characterized in that: The mechanism comprises a motor support (1), a servo motor (2) arranged at the front end of the motor support, a first Z-axis solid crystal mounting seat (3), a second Z-axis solid crystal mounting seat (4), a first matching fixed seat (5), a second matching fixed seat (6), a first crystal spotting portion (7), a second crystal spotting portion (8), a first crystal spotting matching portion (9) and a second crystal spotting matching portion (10); a first right-side synchronous wheel (21) and a second right-side synchronous wheel (22) are respectively arranged at the lower end of the servo motor (2); a first reading head (51), a first reading head front mounting seat (52), a first reading head rear mounting seat (53) and a first welding head rotating motor seat (54) are arranged on the first matching fixed seat (5); the first reading head (51) is fixedly mounted on the first reading head front mounting seat (52); the first reading head front mounting seat (52) is mounted at the front end of the first reading head rear mounting seat (53); the first reading head rear mounting seat (53) is fixedly mounted on the first welding head rotating motor seat (54).

2. The angle-rotating dual-guide-rail dual-mounting head mechanism with force control as claimed in claim 1, characterized in that: The first mating fixed seat (5) also includes a first air pipe joint (55) and a first linear guide rail (56); the first air pipe joint (55) is mounted on the first reading head rear mounting seat (53); the first linear guide rail (56) is mounted on the first welding head rotating motor seat (54); a first spring seat (57) is also fixedly mounted on the first welding head rotating motor seat (54); a first adjusting rod (58) is also mounted on the first spring seat (57); and a first force-controlled motor stator (59) is provided on the first welding head rotating motor seat (54).

3. The angle-rotating dual-guide-track dual-mounting head mechanism with force control as claimed in claim 1, characterized in that: A first rubber suction nozzle (71) is provided at the bottom of the first crystal point part (7); the upper end of the first rubber suction nozzle (71) is connected to a first suction nozzle rod (72); the upper end of the first suction nozzle rod (72) is also provided with a first suction nozzle rotating shaft (73); a first left synchronous wheel (74) is provided in the middle of the first crystal point part (7), and is connected to the first right synchronous wheel (21) through a first synchronous belt (75); a first shading sheet (76) is also provided above the first left synchronous wheel (74), and a first bearing (77) is also provided in the middle.

4. The angle-rotating dual-guide-rail dual-mounting head mechanism with force control as claimed in claim 3, characterized in that: The second crystallization portion (8) is symmetrically arranged with respect to the first crystallization portion (7).

5. The angle-rotating dual-guide-track dual-mounting head mechanism with force control as claimed in claim 1, characterized in that: A first pressure plate (91) is provided on the upper surface of the first spot crystal matching part (9); a first welding head nozzle holder (92) is provided below the first pressure plate (91); a first spacer sleeve (93) is also provided inside the first welding head nozzle holder (92); a first photoelectric switch (94) is also provided on the front end surface of the first welding head nozzle holder (92); a first contact point (95) is provided on the rear end surface of the first welding head nozzle holder (92); and a first force-controlled motor mover (96) is also provided on the first welding head nozzle holder (92).

6. The angle-rotating dual-guide-track dual-mounting head mechanism with force control as claimed in claim 5, characterized in that: The second crystal matching portion (10) is symmetrically arranged with respect to the first crystal matching portion (9).

7. The angle-rotating dual-guide-rail dual-mounting head mechanism with force control as claimed in claim 2, characterized in that: A second stopper (610) is also provided on the second mating fixing seat (6); the second stopper (610) is arranged on the inner side wall of the second mating fixing seat (6); the second stopper (610) is fixedly connected to the second contact seat (613); a first grating ruler (511) is also installed on the side end of the first reading head front mounting seat (52); and a first compression spring (512) is also installed on the first air pipe joint (55).

8. The angle-rotating dual-guide-track dual-mounting head mechanism with force control as claimed in claim 1, characterized in that: The second matching fixing seat (6) is symmetrically arranged with respect to the first matching fixing seat (5).

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