Process ring collecting device
By designing a process ring collecting device including collecting units and buffer units, the problem of cluttered and fracturing the process of the craft ring in the process of the process ring, realizing the neat collection and data reliability of the craft ring, and improving the collection efficiency and equipment of the craft ring. Life life.
Patent Information
- Application Number
- CN202421138470.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-23
- Publication Date
- 2025-01-28
- Estimated Expiration
- 2034-05-23
AI Technical Summary
In the wafer back-end manufacturing process, the process ring is collected by free fall after being cut off, resulting in the process ring being messy and easy to break, affecting data collection and traceability.
Design a process ring collecting device, including the collection unit and buffer unit. The collection unit consists of a collection base and a guidance component. The guidance component can correct the whereabouts of the process ring, prevent deflection and break, and the buffer unit is used to further buffer.
Through the processing of the processing ring of the preset posture, the neat arrangement of the craft ring and the reduction of the breakthroughs have been realized, the reliability and traceability of the data are improved, the cleaning process is simplified, and the normal working time of the equipment is extended.
Smart Images
Figure CN222421906U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductor manufacturing, in particular to a process ring collecting device. Background Art
[0002] During the processing of the wafer, in order to ensure its sufficient structural strength, a process ring is usually left at the edge of the wafer, and the thickness of the process ring is thicker than that of the middle of the wafer.
[0003] In the wafer back-end manufacturing process, the process ring needs to be removed. After the existing wafer process ring is removed, it is usually free-falling so that the removed process ring falls into the recovery device. Since there are no protective measures, the process ring falls under its own gravity, making the collected process rings more messy, especially when the process ring deflects during the falling process, it is easy to cause the process ring to break due to impact. This makes it inconvenient to collect data such as the ring width and cutting width of the process ring. It also has a great impact on the traceability of the wafer and the data collection of the sample test.
[0004] To this end, the utility model provides a process ring collection device, which can make the process rings fall in a preset posture and be collected, so that the collected process rings are arranged more neatly and the breakage phenomenon caused by the process rings falling is improved. Utility Model Content
[0005] The utility model aims to provide a process ring collecting device, which can make the process rings fall in a preset posture and be collected, so that the collected process rings are arranged more neatly and improve the breakage phenomenon caused by the process rings falling.
[0006] The utility model provides a process ring collection device, comprising: a collection unit;
[0007] The collecting unit comprises a collecting base and a guiding assembly;
[0008] The first end of the guide component is connected to the collecting base, and the second end of the guide component extends upward so that the falling process ring is sheathed around the guide component.
[0009] Optionally, the collection unit further comprises a housing having a collection chamber with at least an upper opening;
[0010] The first end of the guide component is disposed in the collection chamber, the second end of the guide component extends toward the opening side of the collection chamber, and a gap is provided between the guide component and the inner peripheral wall of the collection chamber.
[0011] Optionally, the process ring collecting device further comprises a buffer unit;
[0012] The buffer unit is arranged on the collecting unit and is used for buffering the falling process ring.
[0013] Optionally, the buffer unit is arranged on the outer peripheral wall of the guide assembly.
[0014] Optionally, the buffer unit is a brush.
[0015] Optionally, the guide assembly includes a plurality of vertically extending guide members, the first ends of the guide members are connected to the collecting base, and the guide members are circumferentially arranged around a buffer center axis, and the buffer center axis extends vertically and passes through the collecting base.
[0016] Optionally, the guide assembly further includes an upper connecting seat, and the second end of each guide member is connected to the upper connecting seat.
[0017] Optionally, the guide is connected to the collecting base in an adjustable radial position.
[0018] Optionally, a slot is provided on one side of the guide member facing radially outward, and a part of the buffer unit is detachably inserted into the slot.
[0019] Optionally, one end of the buffer unit extends upward beyond the second end of the guide member and bends radially inward.
[0020] With such configuration, the above-mentioned collection device, when the process ring is falling and being collected, is covered with a guide component. On the one hand, the guide component can correct the posture of the process ring when it falls, prevent the process ring from deflecting when it falls, and further prevent the outer peripheral surface of the process ring from colliding with the collection base when the process ring falls to the lowest point, resulting in breakage or damage, so as to complete the retention of the process ring. On the other hand, the guide component also corrects the posture of the process ring when it falls to the lowest point, so that the various process rings are arranged in order, which is helpful for emptying the collection device later, and also facilitates the collection of data such as the ring width and cutting width of the process ring, so as to provide more effective quality monitoring means after cutting and taking the ring. At the same time, it helps to provide effective evidence, provide data traceability for abnormal parts, eliminate interference factors caused by the falling of the process ring, and more effectively establish the root cause of the abnormality. In addition, the above-mentioned collection method is also convenient for cleaning the process ring, reducing cleaning time and extending the normal working time of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS
[0021] Figure 1 It is a structural schematic diagram of a process ring collecting device according to an embodiment of the utility model;
[0022] Figure 2 It is a schematic diagram of the top view of the structure of a process ring collecting device according to an embodiment of the utility model;
[0023] Figure 3 This is a schematic diagram of the assembly structure of the guide member and the buffer unit of one embodiment of the utility model;
[0024] Figure 4 This is a schematic structural diagram of a collecting base according to an embodiment of the utility model;
[0025] Figure 5 This is a schematic structural diagram of a process ring collecting device according to another embodiment of the present invention.
[0026] In the attached figure:
[0027] 10-collecting unit; 11-collecting base; 12-guiding assembly; 121-guiding member; 1211-guiding rod; 1212-brush fixing member; 1213-connecting hole; 122-upper connecting seat; 1221-waist-shaped hole; 1222-weight-reducing hole; 123-slot; 13-housing; 14-collecting chamber;
[0028] 20-buffer unit; 21-brush holder; 22-brush wire;
[0029] a- Buffer center axis. DETAILED DESCRIPTION
[0030] The process ring collection device proposed by the utility model is further described in detail below in combination with the accompanying drawings and specific embodiments. According to the following description, the advantages and features of the utility model will become clearer. It should be noted that the accompanying drawings are all in a very simplified form and are not in precise proportions, which are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the utility model.
[0031] As used in the present invention, the singular forms "one", "an", and "the" include plural objects, the term "or" is usually used to include the meaning of "and / or", the term "several" is usually used to include the meaning of "at least one", and the terms "at least two" or "a plurality" are usually used to include the meaning of "two or more". In addition, the terms "first", "second", and "third" are used only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features. Therefore, the features defined as "first", "second", and "third" may explicitly or implicitly include one or at least two of the features. In addition, as used in the present invention, "installed", "connected", "connected", and one element "set" on another element should be understood in a broad sense, usually only indicating that there is a connection, coupling, cooperation or transmission relationship between the two elements, and the connection, coupling, cooperation or transmission between the two elements can be direct or indirect through an intermediate element, and cannot be understood as indicating or implying the spatial position relationship between the two elements, that is, one element can be in any orientation such as inside, outside, above, below or one side of another element, unless the content clearly indicates otherwise. For ordinary technicians in this field, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances. In addition, directional terms such as above, below, up, down, upward, downward, left, right, etc. are used relative to the exemplary embodiments as shown in the figures, with the upward or upper direction toward the top of the corresponding figure, and the downward or lower direction toward the bottom of the corresponding figure.
[0032] Please refer to Figure 1 As shown, this embodiment provides a process ring collection device, including: a collection unit 10;
[0033] The collecting unit 10 includes a collecting base 11 and a guiding assembly 12;
[0034] The first end ( Figure 1 The lower end of the guide assembly 12 is connected to the collecting base 11, and the second end of the guide assembly 12 ( Figure 1 The upper end of the guide assembly 12 extends upward so that the falling process ring is sheathed on the guide assembly 12.
[0035] Combination Figure 1 and Figure 4 As shown, in this embodiment, the collecting base 11 is in a disc shape, and its shape is adapted to the shape of the process ring.
[0036] In this embodiment, the guide assembly 12 extends vertically and is located directly below the process ring cutting device, so that the process ring falls just outside the guide assembly 12 after being cut.
[0037] Preferably, the outer diameter of the collecting base 11 is larger than the outer diameter of the process ring, and the radial outer dimension of the outer contour of the guide assembly 12 is smaller than the inner diameter of the process ring. When the process ring is cut off, the process ring falls and is covered by the guide assembly 12, and then falls on the collecting base 11 along the guide assembly 12. As the number of process rings increases, each process ring is covered on the guide assembly 12 in turn and collected in order.
[0038] In the above-mentioned collection device, the process ring is covered with the guide component 12 during the process of falling and being collected. The guide component 12 can correct the posture of the process ring when it falls, prevent the process ring from deflecting when it falls, and further prevent the outer peripheral surface of the process ring from colliding with the collection base 11 when the process ring falls to the lowest point, resulting in breakage or damage, so as to complete the retention of the process ring. The guide component 12 also corrects the posture of the process ring when it falls to the lowest point, so that each process ring is arranged in order, which is helpful for emptying the collection device later, and also facilitates the collection of data such as the ring width and cutting width of the process ring, so as to provide more effective quality monitoring means after cutting and taking the ring. At the same time, it helps to provide effective evidence, provide data traceability for abnormal parts, eliminate interference factors caused by the falling of the process ring, and more effectively establish the root cause of the abnormality. In addition, the above-mentioned collection method is also convenient for cleaning the process ring, reducing cleaning time and extending the normal working time of the equipment.
[0039] In this embodiment, the guide assembly 12 is arranged vertically. In other alternative embodiments, the guide assembly 12 may also have a certain angle with the vertical direction.
[0040] In other alternative embodiments, the collecting base 11 may also be a square thin plate structure, a block structure, etc. The specific shape of the collecting base 11 can be adaptively adjusted based on actual usage requirements.
[0041] Furthermore, the collection unit 10 further comprises a housing 13, wherein the housing 13 has a collection chamber 14 with an upper opening, and the bottom of the housing 13 is closed. Figure 1 and Figure 2 As shown, the housing 13 is cylindrical, so the collecting chamber 14 is cylindrical. The guide assembly 12 is located in the collecting chamber 14 and is coaxially arranged with the housing 13. The collecting base 11 is fixedly connected to the bottom of the collecting chamber 14, and the first end ( Figure 1 The lower end of the guide assembly 12 is located in the collection chamber 14, the second end of the guide assembly 12 extends toward the opening side of the collection chamber 14, the second end of the guide assembly 12 is flush with the opening side of the collection chamber 14, and there is a gap between the guide assembly 12 and the inner peripheral wall of the collection chamber 14. The gap is set to avoid the falling process ring, and the size of the gap can be adaptively adjusted based on actual use requirements.
[0042] By disposing the outer shell 13 , the process ring sleeved on the guide assembly 12 is collected in the collection chamber 14 along the guide assembly 12 , so that the process ring is physically isolated from the outside.
[0043] In this embodiment, the first end ( Figure 1 The lower end of the middle) and the second end ( Figure 1 The upper end of the guide assembly 12 is located in the collecting chamber 14, and the second end of the guide assembly 12 ( Figure 1 The first end (the upper end) of the guide assembly 12 is flush with the opening side of the collection chamber 14. In other alternative embodiments, the first end ( Figure 1 The lower end of the guide assembly 12 is located in the collecting chamber 14, and the second end of the guide assembly 12 ( Figure 1 The upper end of the guide assembly 12 may extend upward to the outside of the collection chamber 14. Alternatively, the second end ( Figure 1 The upper end in the middle), can extend upward and be slightly lower than the opening side of the collecting chamber 14.
[0044] Furthermore, the guide assembly 12 includes three vertically extending guide members 121 and an upper connecting seat 122. The first end ( Figure 1 The lower end of the guide member 121 is connected to the collecting base 11, and at this time, the first end of the guide member 121 also serves as the first end of the guide assembly 12.
[0045] Each of the guide members 121 is arranged circumferentially around the buffer center axis a, and the buffer center axis a extends vertically and passes through the collection base 11. In this embodiment, the buffer center axis a is the center axis of the housing 13. Since the housing 13 is coaxially arranged with the collection unit 10, the buffer center axis a is also the center axis of the collection unit 10. The center axis of the collection unit 10 is also the center axis of the collection base 11, so in essence, the three guide members 121 are evenly arranged circumferentially around the center axis of the collection base 11.
[0046] In other alternative embodiments, the buffer center axis a may also be offset from the center axis of the housing 13 or the center axis of the collecting unit 10 .
[0047] Please continue to refer to Figure 1 and Figure 2 As shown, the second end ( Figure 1 The upper end of the guide assembly 12 is connected to the upper connecting seat 122. At this time, the upper connecting seat 122 serves as the second end of the guide assembly 12. Figure 4 As shown, in this embodiment, the upper connecting seat 122 is disc-shaped as a whole, and the upper connecting seat 122 is coaxially arranged with the collecting base 11.
[0048] In other alternative embodiments, the number and distribution of the guide members 121 may be adaptively adjusted based on actual usage requirements. For example, two, four or more guide members 121 may be provided.
[0049] In this embodiment, the guide member 121 is connected to the collecting base 11 in an adjustable radial position. The radial direction here refers to the buffer center axis a as a reference datum, wherein the direction where the buffer center axis a is located is the axial direction.
[0050] Furthermore, in this embodiment, the process ring collecting device further includes a buffer unit 20; the buffer unit 20 is disposed on a side wall of the guide member 121 along the radial outer side, and is used to buffer the falling process ring. In this embodiment, the buffer unit 20 is a brush. The brush filaments are preferably made of a soft material, which can provide a good buffering force on the one hand, and prevent the process ring from being scratched on the other hand. For example, the brush filaments can be made of polybutylene terephthalate (PBT), polypropylene (PP), animal hair, etc.
[0051] The radial position of the guide member 121 is adjustable, which can change the outer contour size (outer diameter) of the entire guide assembly 12 to adapt to the collection of process rings of different specifications. On the other hand, the radial position of the buffer unit 20 can also be adjusted to adjust the buffering force of the buffer unit 20 on the falling process ring.
[0052] Please refer to Figures 1 to 3 As shown, in this embodiment, the guide member 121 includes a guide rod 1211 and a brush fixing member 1212, wherein the guide rod 1211 has a cross section approximately in an L shape (such as Figure 3 As shown in the figure, the upper end of the guide member 121 is provided with two connection holes 1213 for connecting with the upper connection seat 122, wherein the upper connection seat 122 is provided with three waist-shaped holes 1221, each waist-shaped hole 1221 is symmetrically distributed with the central axis of the upper connection seat 122 as the center, and the length of the waist-shaped hole 1221 extends along the radial direction of the upper connection seat 122. The guide rod 1211 is connected to one of the connection holes 1213 after a screw passes through the waist-shaped hole 1221. Two connection holes 1213 are available, which is conducive to adjusting the connection position of the guide rod 1211; at the same time, the screw can move radially in the waist-shaped hole 1221 to adjust the radial position of the guide rod 1211, which is conducive to adjusting the position of the guide rod 1211 in a wide range along the radial direction.
[0053] In addition, in order to realize the lightweight design of the upper connecting seat 122, three circular weight-reducing holes 1222 are also provided on the upper connecting seat 122. Of course, the shape, number and opening position of the weight-reducing holes 1222 can be adjusted based on actual needs.
[0054] Please continue to refer to Figure 3As shown, the brush fixing part 1212 can be made of an aluminum alloy profile with a slot 123. The brush fixing part 1212 is connected to an inner right-angled side of the L-shaped cross-section of the guide rod 1211, so that the slot 123 and the two connecting holes 1213 are arranged in the same direction. When the connecting hole 1213 is matched with the waist-shaped hole 1221, the connecting hole 1213 and the slot 123 are located in a certain radial direction of the upper connecting seat 122.
[0055] Please continue to refer to Figure 3 As shown, the brush fixing member 1212 extends conformably along the length direction of the guide rod 1211, and the slot 123 also extends along the length direction of the guide rod 1211. The brush includes a brush holder 21 and a brush wire 22, and the brush wire 22 is fixed on the brush holder 21. The structure of the brush is prior art and will not be described here. The brush is in a long strip shape as a whole, and the brush holder 21 is detachably inserted into the slot 123.
[0056] The buffer unit 20 is set as a brush, so that the process ring has continuous buffer resistance during the falling process. In addition, the radial position of the guide component 12 can be adjusted to adjust the radial extension of the brush filaments 22, thereby adjusting the buffer resistance. This ensures that the overall structure of the collected process ring is complete, which is convenient for measuring data.
[0057] like Figure 1 As shown, the upper end of the buffer unit 20 extends upward, extends out of the slot 123, and exceeds the second end ( Figure 1 The upper ends of the three buffer units 20 together form a closing structure, which is conducive to guiding the falling process ring to be sleeved on the guide assembly 12.
[0058] like Figure 1 and Figure 2 As shown, taking the entire process ring collection device as a reference, the slot 123 is located on the radially outward side of the guide 121, so the brush wire 22 extends radially outward. When the process ring falls, the brush wire 22 contacts the process ring and provides an upward buffering force to slow down the falling speed of the process ring, preventing the process ring from being directly hit and broken during the recovery and falling process, and also helps to prevent the debris from splashing and affecting the cleanliness of the environment; at the same time, it helps to correct the falling and final posture of the process ring, making it convenient to empty the collection device.
[0059] In addition, if Figure 4 As shown, the collecting base 11 is also provided with a waist-shaped hole structure similar to that on the upper connecting base 122, and the lower end of the guide rod 1211 is also provided with two connecting hole structures similar to those on the upper end. The connection method between the guide rod 1211 and the collecting base 11 is similar to the connection method between the guide rod 1211 and the upper connecting base 122, and will not be described in detail here.
[0060] In this embodiment, two connection holes 1213 are provided to achieve adjustment of the connection position of the guide member 121. In other alternative embodiments, the number of the connection holes 1213 may be one, three or more.
[0061] In other alternative embodiments, the guide member 121 may be an integrally formed structure (different from a split structure consisting of the guide rod 1211 and the brush fixing member 1212). For example, the guide member 121 may include only one guide rod, and the slot 123 is directly opened on one side wall of the guide rod.
[0062] In this embodiment, the buffer unit 20 is disposed on the guide assembly 12, which can provide buffering on one hand and prevent the process ring from getting stuck on the guide assembly 12 on the other hand. In other alternative embodiments, the buffer unit 20 can also be disposed on the inner wall of the housing 13, for example, a brush is disposed on the inner wall of the housing 13. Alternatively, the buffer unit 20 can be disposed on both the inner wall of the guide assembly 12 and the inner wall of the housing 13.
[0063] In this embodiment, the guide assembly 12 adopts a split structure consisting of a plurality of guide members 121 and an upper connecting seat 122. The advantage is that the entire guide assembly 12 is a frame structure, which ensures good structural strength while also facilitating lightweight design. In other alternative embodiments, the guide assembly 12 may also be an integrated cylindrical structure, such as a hollow cylindrical tube or a solid cylindrical structure, or the guide assembly 12 may be an integrated long strip structure with other cross-sectional shapes.
[0064] In this embodiment, the buffer unit 20 is a brush. In other alternative embodiments, the buffer unit 20 may also be a rubber layer attached to the outer wall of the guide 121, which slows down the falling speed of the process ring through friction to form a buffering effect. Alternatively, the buffer unit 20 may be other known flexible buffer structures.
[0065] Please refer to Figure 5 As shown, Figure 5 Another embodiment of a process ring collecting device is provided in . The difference between this embodiment and the above embodiment lies in the difference in the assembly method of the collecting base 11 and the housing 13 .
[0066] Figure 5 In the embodiment, the top and bottom of the collecting chamber 14 of the shell 13 are both open, and the collecting base 11 is connected to the bottom of the shell 13 and closes the lower end of the collecting chamber 14 .
[0067] Of course, in other alternative embodiments, the collecting base 11 can be integrally formed with the bottom of the housing 13 .
[0068] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.
[0069] The above description is only a description of the preferred embodiment of the utility model, and is not any limitation on the scope of the utility model. Any changes and modifications made by ordinary technicians in the field of the utility model based on the above disclosure shall fall within the scope of protection of the claims.
Claims
1. A process ring collection device, characterized in that: include: Collection unit; The collecting unit comprises a collecting base and a guiding assembly; The first end of the guide component is connected to the collecting base, and the second end of the guide component extends upward so that the falling process ring is sheathed around the guide component.
2. The process ring collecting device according to claim 1, characterized in that: The collecting unit further comprises a housing having a collecting chamber at least open at the top; The first end of the guide component is disposed in the collection chamber, the second end of the guide component extends toward the opening side of the collection chamber, and a gap is provided between the guide component and the inner peripheral wall of the collection chamber.
3. The process ring collecting device according to claim 1 or 2, characterized in that: The process ring collecting device also includes a buffer unit; The buffer unit is arranged on the collecting unit and is used for buffering the falling process ring.
4. The process ring collecting device according to claim 3, characterized in that: The buffer unit is arranged on the outer peripheral wall of the guide assembly.
5. The process ring collecting device according to claim 4, characterized in that: The buffer unit is a brush.
6. The process ring collecting device according to claim 4, characterized in that: The guide assembly includes a plurality of vertically extending guide members, the first ends of the guide members are connected to the collecting base, and the guide members are circumferentially arranged around a buffer center axis, and the buffer center axis extends vertically and passes through the collecting base.
7. The process ring collecting device according to claim 6, characterized in that: The guide assembly further includes an upper connecting seat, and the second end of each guide member is connected to the upper connecting seat.
8. The process ring collecting device according to claim 6, characterized in that: The guide member is connected to the collecting base in an adjustable radial direction.
9. The process ring collecting device according to claim 6, characterized in that: The guide piece is provided with a slot on one side radially outward, and a part of the buffer unit is detachably inserted into the slot.
10. The process ring collecting device according to claim 9, characterized in that: One end of the buffer unit extends upward beyond the second end of the guide member and is bent radially inward.