Seed crystal bar lifting device for ultrathin silicon wafer production

Abstract

The utility model relates to the technical field of silicon wafer manufacturing, in particular to a seed crystal bar lifting device for ultrathin silicon wafer production, which is characterized in that a holder is connected with one end of a seed crystal bar; the first driving shaft set and the second driving shaft set are arranged on the two sides of the clamping device and comprise two lead screws arranged in parallel and nuts arranged on the lead screws, and the clamping device is fixed to the two nuts through a connecting structure. The planetary gear disc set comprises a fixedly-arranged outer gear ring, a driving gear coaxial with the outer gear ring and two driven gears arranged in an annular gap between the outer gear ring and the driving gear, the driven gears are meshed with the driving gear and the outer gear ring respectively, and the lead screws are connected with the corresponding driven gears; the driving assembly provides driving force for the driving gear. By means of the planetary gear disc, the first driving shaft set, the second driving shaft set and the clamping device, accurate synchronization of lifting and rotating of the seed crystal bar is achieved, accurate control over the lifting speed and the rotating speed of the seed crystal bar is facilitated, and the uniformity and quality of crystal growth are guaranteed.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon slice manufacturing, in particular to a seed crystal rod pulling device for producing ultra-thin silicon slices. Background Art

[0002] Horizontal pulling of silicon wafers is a crystal growth technology that is mainly used to produce single crystal silicon with a specific crystal orientation. This technology can produce high-quality silicon wafers and is widely used in the semiconductor and solar cell industries.

[0003] In the horizontal pulling technology, the molten silicon naturally flows toward the seed crystal under the action of gravity, and the seed crystal rod and the crucible are axially stretched and rotated in the horizontal direction. Axial stretching is the process of slowly lifting the seed crystal rod from the molten silicon. This action causes the molten silicon to crystallize at the tip of the seed crystal rod to form a single crystal silicon ingot; while rotation is the rotational movement of the seed crystal rod around its axis, which is usually carried out synchronously with the pulling action, which helps to achieve uniform crystal growth and reduce crystal defects caused by uneven crystal growth rates, such as dislocations and micro-defects.

[0004] However, in the process of producing silicon wafers from seed crystal rods, using separate drives to control the pulling and rotation actions requires complex control logic, which increases the difficulty of debugging and makes it difficult to ensure the precise synchronization of pulling and rotation, resulting in uneven crystal growth and seriously affecting the quality of silicon wafers. Utility Model Content

[0005] The technical problem to be solved by the utility model is to provide a seed crystal rod pulling device for producing ultra-thin silicon slices, which effectively solves the problems in the background technology.

[0006] In order to achieve the above-mentioned purpose, the technical solution adopted by the utility model is: a seed crystal rod pulling device for ultra-thin silicon wafer production, comprising: a clamp connected to one end of the seed crystal rod;

[0007] A first drive shaft group and a second drive shaft group are arranged on both sides of the clamp, and include two screw rods arranged in parallel and nuts arranged on the screw rods, and the clamp is fixed on the two nuts through a connecting structure;

[0008] A planetary gear plate set, comprising a fixed outer gear ring, a driving gear coaxially arranged with the outer gear ring, and two driven gears arranged in an annular gap between the outer gear ring and the driving gear, the driven gears respectively meshing with the driving gear and the outer gear ring, and the lead screw is connected to the corresponding driven gears;

[0009] A driving assembly is connected to the driving gear to provide driving force for the driving gear.

[0010] Furthermore, it also includes a mounting seat, the mounting seat including a flange and a guide sleeve fixed at one end of the flange;

[0011] A mounting groove is provided on one side of the flange facing the guide sleeve, and the planetary gear plate set is arranged in the mounting groove;

[0012] A hollow cavity is provided in the guide sleeve along the axial direction, and the first drive shaft group and the second drive shaft group are placed in the hollow cavity.

[0013] Furthermore, the projection width of the outermost edge of the connection structure along the axial direction is greater than the projection width of the outermost edges of the two nuts along the axial direction;

[0014] A lubricating oil film is provided on the contact surface between the connecting structure and the hollow cavity.

[0015] Furthermore, a positioning boss is provided on the contact surface between the flange and the guide sleeve, and the positioning boss is embedded in the hollow cavity of the guide sleeve.

[0016] Further, the clamp includes a first mounting frame connected to the connecting structure, and a second mounting frame connected to the seed crystal rod;

[0017] The connecting ends of the first mounting frame and the second mounting frame are hinged, and an angle driving member is provided at the hinged position.

[0018] Further, the first mounting frame and the second mounting frame each include two connecting rods arranged parallel to the seed crystal rod;

[0019] A hinge shaft is provided at the hinge position of the first mounting frame and the second mounting frame, and a clamping seat parallel to the connecting rod is provided at one end away from the hinge shaft;

[0020] The plane where the two connecting rods are located is perpendicular to the plane where the two screw rods are located.

[0021] Furthermore, the connection structure includes a fixing seat fixed on the two nuts, and a connecting seat arranged in the middle of the fixing seats;

[0022] The connecting seat is provided with a mounting groove for the fixing seat to pass through, and an opening groove communicating with the mounting groove is provided at one end of the connecting seat;

[0023] The clamp is fixed to one end of the connection seat away from the opening slot, and a locking nut is provided in a vertical direction of the opening slot.

[0024] Furthermore, the fixing seat comprises two clamping blocks respectively fixed on the two nuts, and the opposite surfaces of the two clamping blocks are provided with positioning shafts embedded in the mounting grooves.

[0025] Furthermore, an upper keyway and a lower keyway for a flat key to be embedded are respectively provided on the positioning shaft and the mounting groove.

[0026] Further, the driving assembly includes a servo motor and a reducer connected to a driving rod of the servo motor;

[0027] The output rod of the reducer is connected to a transmission shaft through a coupling, and the driving gear is arranged on the transmission shaft.

[0028] The beneficial effects of the utility model are as follows: in the utility model, through the arrangement of the planetary gear plate, the first drive shaft group, the second drive shaft group and the clamp, the precise synchronization of the linear pulling and rotation of the seed crystal rod can be achieved, which is crucial for maintaining a constant crystal orientation and reducing defects during the crystal growth process, and the planetary gear plate can provide a very precise transmission ratio, which helps to accurately control the pulling speed and rotation speed of the seed crystal rod, thereby ensuring the uniformity of crystal growth and the quality of silicon wafers. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0030] Figure 1 This is a schematic diagram of the overall structure of the seed crystal rod pulling device in the embodiment of the utility model;

[0031] Figure 2 This is an axonometric view of the internal structure of the seed crystal rod pulling device in the embodiment of the utility model;

[0032] Figure 3 A top view of the internal structure of the seed crystal rod pulling device in the embodiment of the utility model;

[0033] Figure 4 for Figure 3 AA section view;

[0034] Figure 5 It is an exploded schematic diagram of the connection structure in the embodiment of the utility model.

[0035] Figure numerals: 1. clamp; 11. first mounting frame; 12. second mounting frame; 13. angle driving member; 2. first drive shaft group; 3. second drive shaft group; 4. connecting structure; 41. fixing seat; 411. clamping block; 42. connecting seat; 5. planetary gear plate group; 51. outer ring gear; 52. driving gear; 53. driven gear; 6. driving assembly; 7. mounting seat; 71. flange; 711. mounting groove; 712. positioning boss; 72. guide sleeve. DETAILED DESCRIPTION

[0036] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0037] It should be noted that when an element is referred to as being "fixed to" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only and do not represent the only implementation method.

[0038] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art in the technical field of the present invention. The terms used in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more related listed items.

[0039] like Figures 1 to 5 The seed crystal rod lifting device for ultra-thin silicon wafer production shown in the figure comprises: a clamp 1, a first drive shaft group 2, a second drive shaft group 3, a planetary gear plate group 5 and a driving assembly 6, the clamp 1 is connected to one end of the seed crystal rod; the first drive shaft group 2 and the second drive shaft group 3 are arranged on both sides of the clamp 1, including two parallel screws and nuts arranged on the screws, and the clamp 1 is fixed on the two nuts through a connecting structure 4; the planetary gear plate group 5 comprises a fixed outer gear ring 51, a driving gear 52 coaxially arranged with the outer gear ring 51, and two driven gears 53 arranged in the annular gap between the outer gear ring 51 and the driving gear 52, the driven gear 53 is respectively meshed with the driving gear 52 and the outer gear ring 51, and the two screws are respectively connected to the corresponding driven gears 53; the driving assembly 6 is connected to the driving gear 52 to provide driving force for the driving gear 52. It should be noted that the rotation center of the seed crystal rod and the rotation center of the driving gear 52 are on the same straight line, which ensures that the rotation of the seed crystal rod is uniform.

[0040] The specific implementation process is to start the driving component 6, provide rotational force for the driving gear 52, and drive the two driven gears 53 to start self-rotation through the meshing transmission of the driving gear 52 and the two driven gears 53, and at the same time make the two driven gears 53 mesh with the outer gear ring 51 to rotate around the driving gear 52, wherein the self-rotation of the driven gear 53 can drive the screw rod to rotate, so that the nut makes a linear motion along the axis of the screw rod, and the linear motion is transmitted to the clamp 1 through the connecting mechanism, driving the seed crystal rod on the clamp 1 to be axially pulled up or lowered; and the revolution of the two driven gears 53 enables the clamp 1 to drive the seed crystal rod to realize the self-rotation of the seed crystal rod.

[0041] In the utility model, by setting the planetary gear plate, the first drive shaft group 2, the second drive shaft group 3 and the clamp 1, the precise synchronization of the linear pulling and rotation of the seed crystal rod can be achieved, which is crucial for maintaining a constant crystal orientation and reducing defects during the crystal growth process. The planetary gear plate can provide a very precise transmission ratio, which helps to accurately control the pulling speed and rotation speed of the seed crystal rod and ensure the uniformity and quality of crystal growth.

[0042] The lifting device in the utility model also includes a mounting seat 7, which includes a flange 71 and a guide sleeve 72 fixed to one end of the flange 71; a mounting groove 711 is provided on the side of the flange 71 facing the guide sleeve 72, and the planetary gear plate group 5 is arranged in the mounting groove 711; a hollow cavity is provided in the guide sleeve 72 along the axial direction, and the first drive shaft group 2 and the second drive shaft group 3 are placed in the hollow cavity.

[0043] By setting the mounting seat 7, the transmission structure is completely placed in the hollow cavity, which plays a protective role and prolongs the service life of the transmission structure; and the flange 71 fixes the outer gear ring 51, effectively ensuring the feasibility of the two driven gears 53 to revolve.

[0044] Based on the above embodiment, the axial projection width of the outermost edge of the connecting structure 4 is greater than the axial projection width of the outermost edges of the two nuts; and a lubricating oil film is provided on the contact surface between the connecting structure 4 and the hollow cavity, which effectively reduces the friction resistance and ensures the smooth movement of the connecting structure 4 in the hollow cavity, thereby ensuring the consistency of the rotation angles of the two ends of the screw rod relative to the driving gear 52, which helps to improve the accuracy of the seed rod pulling and rotation.

[0045] In another preferred embodiment, the contact surface between the flange 71 and the guide sleeve 72 is provided with a positioning boss 712, and the positioning boss 712 is embedded in the hollow cavity of the guide sleeve 72 to ensure the coaxial accuracy of the guide sleeve 72 and the outer gear ring 51, avoid the jumping of the clamp 1 during the rotation process, ensure the rotation stability of the seed crystal rod, and improve the molding quality of the silicon wafer.

[0046] In a preferred embodiment of the utility model, the clamp 1 includes a first mounting frame 11 connected to the connecting structure 4, and a second mounting frame 12 connected to the seed crystal rod; the connecting ends of the first mounting frame 11 and the second mounting frame 12 are hingedly arranged, allowing a certain degree of rotational freedom between the first mounting frame 11 and the second mounting frame 12, and an angle driving member 13 is provided at the hinged position, which can rotate the second mounting frame 12 after the seed crystal rod is completely separated from the depyrogenic furnace to cut off the silicon wafer, reduce material waste in the subsequent processing of the silicon wafer, and improve material utilization.

[0047] In addition, in the preferred embodiment, the first mounting frame 11 and the second mounting frame 12 each include two connecting rods arranged parallel to the seed crystal rod; a hinge axis is provided at the hinge position of the first mounting frame 11 and the second mounting frame 12, and a clamping seat parallel to the connecting rod is provided at the end away from the hinge axis; through the reasonable layout of the connecting rod and the clamping seat, the seed crystal rod can be uniformly clamped, the bending or breakage of the seed crystal rod caused by uneven force distribution can be reduced, and the plane where the two connecting rods are located is perpendicular to the plane where the two lead screws are located. The vertical layout reduces the motion interference between the connecting rod and the lead screw, which helps to improve the rigidity of the overall structure and reduce elastic deformation during the pulling process.

[0048] The connection structure 4 in the utility model includes a fixing seat 41 fixed on two nuts, and a connection seat 42 arranged in the middle position of the fixing seat 41; the precise positioning of the clamp 1 and the screw system can be realized to ensure the accurate lifting of the seed crystal rod, and the connection seat 42 is provided with a mounting groove 711 for the fixing seat 41 to pass through, and an open groove connected to the mounting groove 711 is provided at one end of the connection seat 42; the clamp 1 is fixed at one end of the connection seat 42 away from the open groove, and a locking nut is provided in the vertical direction of the open groove, which simplifies the assembly process between the clamp 1 and the connection structure 4, making assembly and maintenance more convenient.

[0049] In order to adapt to the different distances between the two screw rods, the fixed base 41 adopts a split structure. The fixed base 41 includes two clamping blocks 411 respectively fixed on two nuts. The opposite surfaces of the two clamping blocks 411 are provided with positioning shafts embedded in the mounting groove 711 to facilitate the adjustment of the distance between the two nuts so that the two screw rods are in a parallel state, which helps to reduce the swing or vibration of the seed crystal rod during the pulling process, thereby improving its stability.

[0050] On the basis of the above embodiment, in order to further ensure the coaxial accuracy of the seed crystal rod and the driving gear 52, an upper keyway and a lower keyway for embedding a flat key are respectively provided on the positioning shaft and the mounting groove 711, which can prevent the connecting seat 42 from rotating during the pulling process, so that the seed crystal rod can move stably along the predetermined axis, thereby effectively ensuring the quality of the silicon wafer on the seed crystal rod.

[0051] In the preferred embodiment of the utility model, the driving assembly 6 includes a servo motor and a reducer connected to the driving rod of the servo motor; the output rod of the reducer is connected to the transmission shaft through a coupling, and the driving gear 52 is arranged on the transmission shaft. The servo motor and the reducer can provide accurate speed and position control, which is very important for accurately controlling the pulling and rotation of the seed crystal rod.

[0052] Those skilled in the art should understand that the present invention is not limited by the above embodiments. The above embodiments and the description are only for explaining the principle of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which are within the scope of the present invention. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. A seed crystal rod pulling device for ultra-thin silicon wafer production, characterized in that: include: A holder connected to one end of the seed crystal rod; A first drive shaft group and a second drive shaft group are arranged on both sides of the clamp, and include two screw rods arranged in parallel and nuts arranged on the screw rods, and the clamp is fixed on the two nuts through a connecting structure; A planetary gear plate set, comprising a fixed outer gear ring, a driving gear coaxially arranged with the outer gear ring, and two driven gears arranged in an annular gap between the outer gear ring and the driving gear, the driven gears respectively meshing with the driving gear and the outer gear ring, and the lead screw is connected to the corresponding driven gears; A driving assembly is connected to the driving gear to provide driving force for the driving gear.

2. The seed crystal rod pulling device for producing ultra-thin silicon wafers according to claim 1, characterized in that: It also includes a mounting seat, which includes a flange and a guide sleeve fixed at one end of the flange; A mounting groove is provided on one side of the flange facing the guide sleeve, and the planetary gear plate set is arranged in the mounting groove; A hollow cavity is provided in the guide sleeve along the axial direction, and the first drive shaft group and the second drive shaft group are placed in the hollow cavity.

3. The seed crystal rod pulling device for producing ultra-thin silicon wafers according to claim 2, characterized in that: The projection width of the outermost edge of the connecting structure along the axial direction is greater than the projection width of the outermost edges of the two nuts along the axial direction; A lubricating oil film is provided on the contact surface between the connecting structure and the hollow cavity.

4. The seed crystal rod pulling device for producing ultra-thin silicon wafers according to claim 2, characterized in that: A positioning boss is provided on the contact surface between the flange and the guide sleeve, and the positioning boss is embedded in the hollow cavity of the guide sleeve.

5. The seed crystal rod pulling device for producing ultra-thin silicon wafers according to claim 1, characterized in that: The clamp includes a first mounting frame connected to the connecting structure, and a second mounting frame connected to the seed crystal rod; The connecting ends of the first mounting frame and the second mounting frame are hinged, and an angle driving member is provided at the hinged position.

6. The seed crystal rod pulling device for producing ultra-thin silicon wafers according to claim 5, characterized in that: The first mounting frame and the second mounting frame each include two connecting rods arranged parallel to the seed crystal rod; A hinge shaft is provided at the hinge position of the first mounting frame and the second mounting frame, and a clamping seat parallel to the connecting rod is provided at one end away from the hinge shaft; The plane where the two connecting rods are located is perpendicular to the plane where the two screw rods are located.

7. The seed crystal rod pulling device for producing ultra-thin silicon wafers according to claim 1, characterized in that: The connecting structure comprises a fixing seat fixed on the two nuts, and a connecting seat arranged in the middle of the fixing seats; The connecting seat is provided with a mounting groove for the fixing seat to pass through, and an opening groove communicating with the mounting groove is provided at one end of the connecting seat; The clamp is fixed to one end of the connection seat away from the opening slot, and a locking nut is provided in a vertical direction of the opening slot.

8. The seed crystal rod pulling device for producing ultra-thin silicon wafers according to claim 7, characterized in that: The fixing seat comprises two clamping blocks respectively fixed on the two nuts, and the opposite surfaces of the two clamping blocks are provided with positioning shafts embedded in the mounting grooves.

9. The seed crystal rod pulling device for producing ultra-thin silicon wafers according to claim 8, characterized in that: An upper keyway and a lower keyway for a flat key to be embedded are respectively provided on the positioning shaft and the mounting groove.

10. The seed crystal rod pulling device for producing ultra-thin silicon wafers according to claim 1, characterized in that: The driving assembly includes a servo motor and a reducer connected to a driving rod of the servo motor; The output rod of the reducer is connected to a transmission shaft through a coupling, and the driving gear is arranged on the transmission shaft.

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