Anti-micro-vibration base assembly for ion implanter

Abstract

The utility model discloses an anti-micro-vibration base assembly for an ion implanter, and belongs to the technical field of anti-micro-vibration bases. Comprising an anti-micro-vibration base, an ion implanter body is placed in the upper end of the anti-micro-vibration base, two sets of fixing mechanisms are arranged in the anti-micro-vibration base in a bilateral symmetry mode, and each fixing mechanism comprises a limiting plate and an abutting limiting rod. A rotating block is arranged at the end, away from the ion implanter body, of the abutting limiting rod, a rotating rod is arranged in the middle of the rotating block, and a gear is arranged on the circumferential surface of the rotating rod. Through the arranged fixing mechanism, when the ion implanter needs to be installed, the lower end of the ion implanter is inserted into the anti-micro-vibration base, then the abutting limiting rod is moved out of the anti-micro-vibration base, and then the abutting limiting rod is moved to the side wall of the ion implanter and abuts against the side face of the upper end of the ion implanter, so that fixing work of the ion implanter is completed, operation is simple and rapid, and installation is convenient. The practicability is high.

Description

Technical Field

[0001] The utility model belongs to the technical field of anti-micro-vibration bases, and in particular relates to an anti-micro-vibration base component for an ion implanter. Background Art

[0002] The anti-micro-vibration base is a device used to reduce or eliminate micro-vibrations. It is widely used in situations that require high precision and stability, such as semiconductor manufacturing, optical instruments, precision machinery and other fields. Its main function is to isolate vibration interference from the external environment, thereby protecting equipment installed on the base such as ion implanters from vibration and ensuring their stable operation and accurate measurement.

[0003] However, the existing anti-micro-vibration base is troublesome to install and disassemble, and during the disassembly process, the installation tools will inevitably collide and rub against the ion implanter, causing damage to the ion implanter or wear on the surface, affecting the use and appearance of the ion implanter. For this reason, we propose an anti-micro-vibration base assembly for an ion implanter. Utility Model Content

[0004] The utility model aims to provide an anti-micro-vibration base assembly for an ion implanter to solve the problems raised in the above-mentioned background technology.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: an anti-micro-vibration base assembly for an ion implanter, comprising an anti-micro-vibration base, an ion implanter body being placed inside the upper end of the anti-micro-vibration base, a fixing mechanism being arranged inside the anti-micro-vibration base, and two groups of the fixing mechanism being symmetrically arranged on the left and right, the fixing mechanism comprising a limit plate and an abutment limit rod, a rotating block being arranged at one end of the abutment limit rod away from the ion implanter body, a rotating rod being arranged in the middle of the rotating block, a gear being arranged on the circumferential surface of the rotating rod, a tooth plate being meshingly connected at the lower end of the gear, a push plate being arranged at one end of the tooth plate close to the limit plate, and the push plate being connected to the limit plate through a spring.

[0006] Preferably, a sliding groove is provided on the surface of the rotating block, a sliding block is slidably installed inside the sliding groove, and the abutting limit rod is slidably connected to the rotating block via the sliding block.

[0007] Preferably, a movable groove is opened inside the anti-micro-vibration base, and the limit plate, abutment limit rod, rotating block, gear, tooth plate, push plate and spring are all arranged inside the movable groove, and the side of the limit plate away from the spring abuts against the outer surface of the lower end of the ion implanter body.

[0008] Preferably, a movable groove is provided on the upper surface of the anti-micro-vibration base, and the movable groove is communicated with the active groove, and a sponge sealing pad is provided inside the movable groove.

[0009] Compared with the prior art, the beneficial effects of the utility model are:

[0010] The anti-micro-vibration base assembly for an ion implanter has a fixing mechanism that is set up. When the ion implanter needs to be installed, the lower end of the ion implanter is inserted into the anti-micro-vibration base, and then the abutment limit rod is moved out of the anti-micro-vibration base. Then, the abutment limit rod is moved to the side wall of the ion implanter and abuts against the upper end side thereof, thereby completing the fixing work of the ion implanter. The operation is simple, quick and highly practical. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 It is a three-dimensional structural schematic diagram of the utility model;

[0012] Figure 2 It is a three-dimensional structural schematic diagram of the fixing mechanism of the utility model;

[0013] Figure 3 It is a front cutaway stereogram of the utility model;

[0014] Figure 4 It is a top-sectional stereoscopic view of the utility model;

[0015] Figure 5 It is a schematic diagram of a three-dimensional structure in which the ion implanter of the utility model is fixedly mounted on the anti-micro-vibration base through a fixing mechanism.

[0016] In the figure: 1. anti-micro-vibration base; 2. ion implanter body; 3. fixing mechanism; 301. limit plate; 302. abutment limit rod; 303. rotating block; 304. rotating rod; 305. gear; 306. tooth plate; 307. push plate; 308. spring; 4. slider; 5. slide groove; 6. movable groove; 7. sponge sealing pad; 8. movable groove. DETAILED DESCRIPTION

[0017] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0018] See also Figure 1 - Figure 5The utility model provides an anti-micro-vibration base assembly for an ion implanter, comprising an anti-micro-vibration base 1, an ion implanter body 2 is placed inside the upper end of the anti-micro-vibration base 1, a fixing mechanism 3 is arranged inside the anti-micro-vibration base 1, and two groups of the fixing mechanisms 3 are arranged symmetrically on the left and right sides. The arrangement of the two groups of fixing mechanisms 3 can limit and fix the left and right ends of the ion implanter body 2 after the ion implanter body 2 is plugged into the anti-micro-vibration base 1, thereby improving the fixing effect of the ion implanter body 2, so that the ion implanter body 2 and the anti-micro-vibration base 1 are installed together, so that the anti-micro-vibration base 1 can protect the ion implanter body 2;

[0019] The fixing mechanism 3 includes a limit plate 301 and an abutment limit rod 302. A rotating block 303 is arranged at one end of the abutment limit rod 302 away from the ion implanter body 2. A slide groove 5 is provided on the surface of the rotating block 303. A slider 4 is slidably installed inside the slide groove 5. The abutment limit rod 302 is slidably connected with the rotating block 303 through the slider 4. The setting of the slide groove 5 provides a movable space for the slider 4, so that the slider 4 can smoothly move horizontally back and forth inside the slide groove 5, and then the abutment limit rod 302 can smoothly move horizontally back and forth on the rotating block 303 through the slider 4. At the same time, the abutment limit rod 302 will not separate from the rotating block 303. A rotating rod 304 is arranged in the middle of the rotating block 303. The rotating block 303 and the rotating rod 304 are fixedly connected. When the rotating block 303 rotates, the rotating rod 304 can be synchronously driven to rotate. The circumferential surface of the rotating rod 304 is provided with a gear 305. The gear 305 The lower end of the toothed plate 306 is meshedly connected, and a push plate 307 is provided at one end of the toothed plate 306 close to the limit plate 301. The push plate 307 is connected to the limit plate 301 through a spring 308. When the abutment limit rod 302 is moved out from the inside of the anti-micro-vibration base 1, the abutment limit rod 302 can drive the rotating rod 304 to rotate through the rotating block 303, so that the rotating rod 304 drives the gear 305 to rotate, and the gear 305 rotates and meshes with the toothed plate 306, so that the toothed plate 30 6 moves toward the ion implanter body 2, and then pushes the push plate 307 toward the ion implanter body 2. At the same time, because the limit plate 301 abuts against the bottom side of the ion implanter body 2, the push plate 307 will squeeze the spring 308 when moving toward the ion implanter body 2, so that the elastic force of the spring 308 will be applied to the limit plate 301 and the push plate 307 respectively, and then the limit plate 301 has a better clamping effect on the ion implanter body 2;

[0020] A movable groove 6 is provided inside the anti-micro-vibration base 1, and a limit plate 301, abutment limit rod 302, rotating block 303, gear 305, tooth plate 306, push plate 307 and spring 308 are all arranged inside the movable groove 6. A side of the limit plate 301 away from the spring 308 abuts against the outer surface of the lower end of the ion implanter body 2. The setting of the movable groove 6 provides a movable space for the limit plate 301, abutment limit rod 302, rotating block 303, gear 305, tooth plate 306, push plate 307 and spring 308 inside thereof, so that the limit plate 301, tooth plate 306 and push plate 307 can all move horizontally left and right, and provide a rotation space for the abutment limit rod 302, rotating block 303 and gear 305, so that the abutment limit rod 302 can be moved out of or embedded in the anti-micro-vibration base 1;

[0021] A movable groove 8 is provided on the upper surface of the anti-micro-vibration base 1, and the movable groove 8 is connected with the movable groove 6. A sponge sealing pad 7 is provided inside the movable groove 8. The setting of the movable groove 8 provides a moving space for the abutment limit rod 302, so that the abutment limit rod 302 can smoothly move horizontally back and forth after moving out of the anti-micro-vibration base 1, and then facilitates the subsequent abutment against the side of the upper end of the ion implantation machine body 2. The setting of the sponge sealing pad 7 can close the movable groove 8 provided on the anti-micro-vibration base 1, prevent dust from entering the interior of the anti-micro-vibration base 1 to corrode parts such as gears 305, thereby improving the service life of the anti-micro-vibration base 1.

[0022] The working principle and use process of the utility model are as follows: when the ion implanter needs to be installed, the anti-micro-vibration base 1 and the ion implanter body 2 are first moved to the installation site, and then the lower end of the ion implanter body 2 is inserted into the upper end of the anti-micro-vibration base 1. At this time, the left and right sides of the lower end of the ion implanter body 2 respectively abut the limit plates 301 on the left and right sides, and then the sponge sealing pad 7 is taken out from the inside of the movable groove 8, and then the abutment limit rod 302 is screwed out from the inside of the anti-micro-vibration base 1 and is in a vertical state, and then the abutment limit rod 302 at the front end is moved backward, and the abutment limit rod 302 at the rear end is moved forward, and then the abutment limit rod 302 is loosened. At this time, the four abutment limit rods 302 respectively abut the upper ends of the outer surfaces of the left and right sides of the ion implanter body 2, and at the same time, when the abutment limit rod 302 is moved out of the anti-micro-vibration base 1, the abutment limit rod 302 can drive the rotating rod 304 to rotate through the rotating block 303, so that the rotating rod 3 04 drives gear 305 to rotate, and gear 305 rotates and meshes with tooth plate 306, so that tooth plate 306 moves toward ion implanter body 2, and then pushes push plate 307 toward ion implanter body 2. At the same time, because limit plate 301 abuts against the bottom side of ion implanter body 2, push plate 307 will squeeze spring 308 when moving toward ion implanter body 2, so that the elastic force of spring 308 will be applied to limit plate 301 and push plate 307 respectively, strengthening the clamping effect of limit plate 301 on the bottom of ion implanter body 2. At the same time, push plate 307 applies a reverse force to gear 305, so that gear 305 applies a reverse force to rotating rod 304 and rotating block 303, and then applies a force to abut limit rod 302 in the direction of ion implanter body 2, which also strengthens the abutting and limiting effect of abutting limit rod 302 on ion implanter body 2, and improves the stability of ion implanter body 2.

[0023] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An anti-micro-vibration base assembly for an ion implanter, comprising an anti-micro-vibration base (1), an ion implanter body (2) being placed inside the upper end of the anti-micro-vibration base (1), characterized in that: A fixing mechanism (3) is arranged inside the anti-micro-vibration base (1), and two groups of the fixing mechanism (3) are symmetrically arranged on the left and right. The fixing mechanism (3) comprises a limit plate (301) and an abutment limit rod (302). A rotating block (303) is arranged at one end of the abutment limit rod (302) away from the ion implanter body (2). A rotating rod (304) is arranged in the middle of the rotating block (303). A gear (305) is arranged on the circumferential surface of the rotating rod (304). A toothed plate (306) is meshedly connected at the lower end of the gear (305). A push plate (307) is arranged at one end of the toothed plate (306) close to the limit plate (301). The push plate (307) is connected to the limit plate (301) via a spring (308).

2. The anti-microvibration base assembly for an ion implanter according to claim 1, characterized in that: A sliding groove (5) is provided on the surface of the rotating block (303), a sliding block (4) is slidably installed inside the sliding groove (5), and the abutting limit rod (302) is slidably connected to the rotating block (303) via the sliding block (4).

3. The anti-microvibration base assembly for an ion implanter according to claim 1, characterized in that: The anti-micro-vibration base (1) is provided with a movable groove (6) inside, and the limit plate (301), the abutment limit rod (302), the rotating block (303), the gear (305), the tooth plate (306), the push plate (307) and the spring (308) are all arranged inside the movable groove (6), and the side of the limit plate (301) away from the spring (308) abuts against the outer surface of the lower end of the ion implanter body (2).

4. The anti-microvibration base assembly for an ion implanter according to claim 3, characterized in that: A movable groove (8) is provided on the upper surface of the anti-micro-vibration base (1), and the movable groove (8) is connected to the movable groove (6), and a sponge sealing pad (7) is provided inside the movable groove (8).

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