Vacuum cavity and vacuum drying machine
By designing a flow guide mechanism in the vacuum cavity, evenly distribute the air flow on the surface of the part to be dried, the problem of uneven gas velocity on the substrate surface in the vacuum cavity is solved, the drying quality is improved and the crystallization is not uniform.
Patent Information
- Application Number
- CN202323510326.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2023-12-21
- Publication Date
- 2025-02-07
- Estimated Expiration
- 2033-12-21
AI Technical Summary
During the exhaust process of the existing vacuum cavity, the gas velocity distribution on the substrate surface is uneven, resulting in uneven crystallization on the substrate surface and corrugated phenomenon.
A vacuum cavity is designed, including an upper cavity plate, a lower cavity plate, a flow guide mechanism and a part to be dried. The flow guide mechanism is composed of multiple columns, partition plates and a flow guide plate to uniformly distribute the surface of the part to be dried. airflow.
By evenly distributing the air flow, the problem of uneven gas velocity on the substrate surface is solved, the drying quality on the substrate surface is improved, and the crystallization is reduced.
Smart Images
Figure CN222438318U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of vacuum drying equipment, in particular to a vacuum cavity and a vacuum drying machine. Background Art
[0002] The vacuum dryer mainly creates a high vacuum environment and uses the evaporation effect under low pressure conditions to quickly evaporate the water and other liquids in the object, thereby achieving the purpose of drying and crystallization. Compared with other drying equipment, the vacuum dryer has the advantages of high efficiency, easy control, small equipment size, easy maintenance, and good product surface quality.
[0003] The vacuum chamber is the main working mechanism of the vacuum dryer, and the chamber structure has an important influence on the drying effect of the substrate. Usually, in flat plate coating, the coated substrate is moved to the vacuum drying device for drying to evaporate the solvent in the slurry, thereby achieving rapid crystallization. The existing vacuum device includes a chamber, a machine table arranged in the chamber, and an exhaust port on the chamber. During the drying process, the exhaust port extracts the gas in the chamber, and the air pressure in the chamber drops, thereby promoting the volatilization of the solvent on the substrate and achieving rapid crystallization.
[0004] During the current vacuum chamber evacuation process, the gas velocity distribution on the substrate surface is uneven because the distances of various parts of the substrate surface relative to the exhaust port are unequal, which can easily cause uneven crystallization of the substrate surface and produce a ripple phenomenon. In addition, the structure of the existing vacuum chamber cannot be changed after manufacturing. Redesign and manufacturing will increase production costs and extend production cycles, resulting in low production efficiency and high consumption costs. Utility Model Content
[0005] The utility model aims to provide a vacuum chamber and a vacuum dryer to alleviate the technical problem in the prior art that during the vacuum chamber exhaust process, the gas velocity distribution on the surface of the substrate is uneven, which easily causes uneven crystallization on the surface of the substrate and produces a corrugated phenomenon.
[0006] In a first aspect, the utility model provides a vacuum chamber, comprising an upper chamber plate, a lower chamber plate, a flow guide mechanism and a to-be-dried object; the upper chamber plate covers the top of the lower chamber plate, and the upper chamber plate and the lower chamber plate form a closed space; the closed space forms a vacuum chamber under the action of an external vacuum pump;
[0007] The flow guiding mechanism and the object to be dried are both arranged in the enclosed space; and the flow guiding mechanism is arranged on the side of the object to be dried facing the air suction port; the flow guiding mechanism is used to evenly distribute the airflow on the surface of the object to be dried.
[0008] In combination with the first aspect, the utility model provides a first possible implementation of the first aspect, wherein the guide mechanism includes a plurality of cushion columns and a partition, the plurality of cushion columns are arranged on the end surface of the enclosed space facing the object to be dried, and the plurality of cushion columns are used to support the partition;
[0009] The partition is arranged between the air suction port and the object to be dried, and the airflow flows toward the object to be dried along the space between the partition and the inner wall of the enclosed space.
[0010] In combination with the first possible implementation of the first aspect, the utility model provides a second possible implementation of the first aspect, wherein the guide mechanism also includes a plurality of guide plates, and the plurality of guide plates are respectively arranged on the outer edges of the partitions, and the guide plates are used to adjust the size of the gap between the edge of the partition and the inner wall of the enclosed space.
[0011] In combination with the second possible implementation of the first aspect, the utility model provides a third possible implementation of the first aspect, wherein a plurality of inner-toothed magnetic columns are provided on the end surface of the partition facing the object to be dried, and the inner-toothed magnetic columns are used to support the object to be dried;
[0012] A magnetic component is arranged inside the partition, and a plurality of the inner magnetic columns are magnetically connected to the partition.
[0013] In combination with the third possible implementation of the first aspect, the utility model provides a fourth possible implementation of the first aspect, wherein the end of the inner magnetic column facing the object to be dried is detachably connected to a support rod.
[0014] In combination with the fifth possible implementation of the first aspect, the utility model provides a fifth possible implementation of the first aspect, wherein the end of the guide plate facing away from the partition is a curved surface, and a plurality of the guide plates are detachably connected to the partition.
[0015] In combination with the fifth possible implementation of the first aspect, the utility model provides a sixth possible implementation of the first aspect, wherein a connecting portion is provided at the end of the guide plate facing the partition, the connecting portion is provided with a connecting groove, and the guide plate is threadedly connected to the partition via the connecting groove.
[0016] In combination with the sixth possible implementation of the first aspect, the utility model provides a seventh possible implementation of the first aspect, wherein the end surface of the partition facing the cushion column is provided with a through hole adapted to the cushion column, and the partition is respectively connected with the multiple cushion columns through the multiple through holes.
[0017] In combination with the sixth possible implementation of the first aspect, the utility model provides an eighth possible implementation of the first aspect, which further includes a sealing ring, and a sealing groove is provided at the end where the lower cavity plate contacts the upper cavity plate, the sealing ring is placed in the sealing groove, and the sealing ring is used for sealing between the upper cavity plate and the lower cavity plate.
[0018] In a second aspect, the present application also provides a vacuum desiccant, comprising the vacuum chamber described above.
[0019] The embodiments of the utility model bring the following beneficial effects: the upper cavity plate cover is placed on the top of the lower cavity plate to form a closed space between the upper cavity plate and the lower cavity plate, thereby laying the foundation for a vacuum environment; the flow guiding mechanism and the workpiece to be dried are arranged in the closed space, and the flow guiding mechanism is arranged on the side of the workpiece to be dried facing the air suction port, the air suction port is connected to an external vacuum pump or other power parts, and during the vacuuming process of the air suction port, the air inside the cavity gradually flows to the air suction port. During this process, the gas on the surface of the workpiece to be dried becomes evenly distributed under the action of the flow guiding mechanism, thereby alleviating the technical problem in the prior art that during the vacuum cavity is being evacuated, the gas velocity on the surface of the substrate is unevenly distributed due to the different distances of each part relative to the air suction port, which easily causes uneven crystallization on the surface of the substrate and produces a corrugated phenomenon, thereby improving the drying quality of the substrate in the vacuum cavity. BRIEF DESCRIPTION OF THE DRAWINGS
[0020] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.
[0021] Figure 1 A schematic diagram of the internal structure of a vacuum chamber provided in an embodiment of the utility model;
[0022] Figure 2 In the vacuum chamber provided in the embodiment of the utility model Figure 1 A local enlarged schematic diagram of the middle A;
[0023] Figure 3 A schematic diagram of the structure of a partition in a vacuum chamber provided in an embodiment of the utility model;
[0024] Figure 4 In the vacuum chamber provided in the embodiment of the utility model Figure 3 A partial enlarged schematic diagram of point B in the middle;
[0025] Figure 5A schematic diagram of the structure of a guide plate in a vacuum chamber provided in an embodiment of the utility model.
[0026] Icons: 10 - upper cavity plate; 20 - lower cavity plate; 30 - exhaust port; 40 - sealing ring; 100 - flow guide mechanism; 110 - cushion column; 120 - partition; 130 - flow guide plate; 131 - connecting groove; 140 - internal magnetic column; 150 - support rod; 200 - object to be dried. DETAILED DESCRIPTION
[0027] The technical solution of the utility model will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0028] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.
[0029] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0030] like Figure 1 - Figure 5 As shown, the utility model provides a vacuum chamber, comprising an upper chamber plate 10, a lower chamber plate 20, a flow guide mechanism 100 and a to-be-dried object 200; the upper chamber plate 10 covers the top of the lower chamber plate 20, and the upper chamber plate 10 and the lower chamber plate 20 form a closed space; the closed space forms a vacuum chamber under the action of an external vacuum pump;
[0031] The flow guiding mechanism 100 and the object to be dried 200 are both arranged in a closed space; and the flow guiding mechanism 100 is arranged on the side of the object to be dried 200 facing the air suction port 30; the flow guiding mechanism 100 evenly distributes the airflow on the surface of the object to be dried 200.
[0032] The upper cavity plate 10 is covered on the top of the lower cavity plate 20 to form a closed space between the upper cavity plate 10 and the lower cavity plate 20, thereby laying a foundation for a vacuum environment. The flow guiding mechanism 100 and the workpiece 200 to be dried are arranged in the closed space, and the flow guiding mechanism 100 is arranged on the side of the workpiece 200 to be dried facing the air suction port 30, the air suction port 30 is connected to an external vacuum pump or other power parts, and during the vacuuming process of the air suction port 30, as the air inside the cavity gradually flows to the air suction port 30, during this process, the gas on the surface of the workpiece 200 to be dried becomes evenly distributed under the action of the flow guiding mechanism 100, thereby alleviating the technical problem that during the vacuum cavity is evacuated, the gas velocity on the surface of the substrate is unevenly distributed due to the different distances of each part relative to the air suction port 30, which easily causes uneven crystallization on the surface of the substrate and produces a corrugated phenomenon, thereby improving the drying quality of the substrate in the vacuum cavity.
[0033] It should be noted that in this embodiment, the air outlet 30 is arranged on the lower cavity plate 20, wherein the upper cavity plate 10 and the lower cavity plate 20 respectively complete the closing action and form a complete closed cavity under the action of the equipment connected thereto; the object to be dried 200 can be but is not limited to a substrate structure.
[0034] At the same time, in order to improve the efficiency of vacuuming, a plurality of vacuum ports 30 are provided on the lower cavity plate 20 , and multiple rows are arranged along the width direction of the lower cavity plate 20 and are evenly distributed.
[0035] Furthermore, the flow guiding mechanism 100 includes a plurality of cushion columns 110 and a partition plate 120 . The plurality of cushion columns 110 are disposed on the end surface of the closed space facing the object to be dried 200 , and the plurality of cushion columns 110 are used to support the partition plate 120 .
[0036] The partition 120 is disposed between the air suction port 30 and the object to be dried 200 , and the airflow flows toward the object to be dried 200 along the space between the partition 120 and the inner wall of the closed space.
[0037] Before the vacuum work begins, the upper cavity plate 10 and the lower cavity plate 20 are in a separated state, and the staff places the partition 120 on the top of the cushion column 110 to complete the fixation of the partition 120. The function of the cushion column 110 is to keep a certain distance between the partition 120 and the air outlet to avoid blocking the air outlet 30, and at the same time prevent the partition 120 from being deformed during the air extraction process;
[0038] When the vacuum operation is in progress, due to the setting of the partition 120, when the vacuum port 30 is evacuating, the gas at the top of the enclosed space will flow along the partition 120 and the inner wall of the enclosed space to the object to be dried 200, thereby making the airflow steadily flow from the middle of the object to be dried 200 to the surroundings, thereby achieving the technical effect of uniform airflow distribution.
[0039] It should be noted that there are 12 cushion columns 110 fixed to the lower cavity plate 20 , and three rows are arranged along the width direction of the lower cavity plate 20 , with four cushion columns in each row, evenly distributed. This structure can support the partition plate 120 more stably.
[0040] Furthermore, the guide mechanism 100 also includes a plurality of guide plates 130 , which are respectively disposed on the outer edges of the partition 120 , and the guide plates 130 are used to adjust the size of the gap between the edge of the partition 120 and the inner wall of the enclosed space.
[0041] During the vacuuming process, the closer to the vacuum port 30, the faster the gas speed. Therefore, the closer to the vacuum port 30, the smaller the gap between the partition 120 and the inner wall of the cavity should be, and the farther away from the vacuum port 30, the larger the gap between the partition 120 and the inner wall of the cavity should be. According to this principle, the position of the guide plate 130 is set to change the size of the gap between the edge of the partition 120 and the inner wall of the cavity to control the gas speed at different positions; the guide plate 130 has no limit on shape, size, or quantity, as long as it meets the function.
[0042] It should be noted that the shape of the outer edge of the partition 120 can also be directly limited to adapt to the law of gas circulation. Specifically, the interval between the partition 120 and the enclosed space gradually increases in the direction away from the air suction port 30.
[0043] Furthermore, a plurality of inner-toothed magnetic columns 140 are provided on the end surface of the partition 120 facing the object to be dried 200, and the inner-toothed magnetic columns 140 are used to support the object to be dried 200;
[0044] A magnetic component is disposed inside the partition 120 , and a plurality of inner magnetic columns 140 are magnetically connected to the partition 120 .
[0045] Furthermore, the end of the inner magnetic column 140 facing the to-be-dried object 200 is detachably connected to a support rod 150 .
[0046] The material of the partition 120 is magnetic stainless steel, which is used to adsorb the inner magnetic column 140 to facilitate the connection between the inner magnetic column 140 and the partition 120. At the same time, there are multiple inner magnetic columns 140, and multiple rows are arranged along the width direction of the partition 120. The inner magnetic column 140 has embedded magnets and is directly adsorbed on the partition 120. There is a threaded hole at the axial center position for fixing the support rod 150, thereby playing a role in supporting the substrate (because both sides of the substrate have paint that needs to be dried, the bottom needs to be supported for double-sided drying. If only one side needs to be dried, the bottom support structure can be omitted).
[0047] It should be noted that the number of support rods 150 is consistent with the number of internal magnetic columns 140. The support rods 150 are threaded and fixed together with the internal magnetic columns 140 to support the substrate. The material of the support rods 150 is PEEK to prevent the internal magnetic columns 140 with a harder material from directly contacting the substrate and causing damage.
[0048] Furthermore, the end of the guide plate 130 facing away from the partition plate 120 is a curved surface, and the plurality of guide plates 130 are detachably connected to the partition plate 120 .
[0049] Furthermore, a connecting portion is provided at the end of the guide plate 130 facing the partition plate 120 , and a connecting groove 131 is provided at the connecting portion. The connecting groove 131 is a strip-shaped structure, and the guide plate 130 is threadedly connected to the partition plate 120 via the connecting groove 131 .
[0050] The guide vane 130 is a curved surface such as a fan or a semicircle, and the setting of the curved surface facilitates the conduction of airflow; the staff can adjust the gap between the guide vane 130 and the inner wall of the enclosed space by adjusting the connection groove 131 and the screw.
[0051] Furthermore, the end surface of the partition 120 facing the cushion column 110 is provided with a through hole adapted to the cushion column 110 , and the partition 120 is plugged into the plurality of cushion columns 110 respectively through the plurality of through holes.
[0052] The provision of the through holes facilitates the insertion between the spacer column 110 and the partition plate 120 , making the fixation of the partition plate 120 more stable, and at the same time, facilitates the connection between the partition plate 120 and the plurality of spacer columns 110 .
[0053] Furthermore, a sealing ring 40 is included. A sealing groove is provided at the end of the lower cavity plate 20 that contacts the upper cavity plate 10 . The sealing ring 40 is placed in the sealing groove. The sealing ring 40 is used for sealing between the upper cavity plate 10 and the lower cavity plate 20 .
[0054] The provision of the sealing ring 40 can improve the sealing of the enclosed space and prevent air leakage during the vacuuming process.
[0055] In a second aspect, this embodiment further provides a vacuum dryer, comprising the vacuum chamber described above.
[0056] This embodiment can achieve the following technical effects:
[0057] 1. This embodiment improves the uniformity of gas velocity on the substrate surface and improves the defect of ripples generated by crystallization on the substrate surface by changing the edge shape of the partition 120 in the confined space or adding the guide plate 130;
[0058] 2. In this embodiment, all components arranged in the confined space can be disassembled and replaced. The added guide plate 130 can be designed into different shapes, and the installation position can be moved and adjusted. The size of the gap between the edge of the partition plate 120 and the inner wall of the chamber can be controlled by moving and adjusting, thereby improving the uniformity of the gas velocity on the substrate surface and coping with different pumping speed conditions;
[0059] 3. This embodiment avoids redesigning and manufacturing the enclosed space by replacing components in the enclosed space, thereby reducing production costs, shortening production cycles, and improving production efficiency.
[0060] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, ordinary technicians in this field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not make the essence of the corresponding technical solution deviate from the scope of the technical solution of the embodiments of the utility model.
Claims
1. A vacuum chamber, characterized in that: The invention comprises an upper cavity plate (10), a lower cavity plate (20), a flow guide mechanism (100) and a to-be-dried object (200); the upper cavity plate (10) covers the top of the lower cavity plate (20), and the upper cavity plate (10) and the lower cavity plate (20) form a closed space; The enclosed space forms a vacuum cavity under the action of an external vacuum pump; The flow guiding mechanism (100) and the object to be dried (200) are both arranged in the enclosed space; and the flow guiding mechanism (100) is arranged on a side of the object to be dried (200) facing the air suction port (30); the flow guiding mechanism (100) is used to evenly distribute the airflow on the surface of the object to be dried (200).
2. The vacuum chamber according to claim 1, characterized in that: The flow guiding mechanism (100) comprises a plurality of cushion columns (110) and a partition plate (120); the plurality of cushion columns (110) are arranged on the end surface of the enclosed space facing the object to be dried (200), and the plurality of cushion columns (110) are used to support the partition plate (120); The partition (120) is disposed between the air suction port (30) and the object to be dried (200), and the airflow flows toward the object to be dried (200) along the space between the partition (120) and the inner wall of the enclosed space.
3. The vacuum chamber according to claim 2, characterized in that: The guide mechanism (100) further comprises a plurality of guide plates (130), wherein the plurality of guide plates (130) are respectively arranged on the outer edge of the partition plate (120), and the plurality of guide plates (130) are used to adjust the size of the gap between the edge of the partition plate (120) and the inner wall of the enclosed space.
4. The vacuum chamber according to claim 2, characterized in that: The end surface of the partition (120) facing the object to be dried (200) is provided with a plurality of inner-toothed magnetic columns (140), and the inner-toothed magnetic columns (140) are used to support the object to be dried (200); A magnetic component is disposed inside the partition (120), and a plurality of the inner magnetic columns (140) are magnetically connected to the partition (120).
5. The vacuum chamber according to claim 4, characterized in that: The end of the inner magnetic column (140) facing the object to be dried (200) is detachably connected to a support rod (150).
6. The vacuum chamber according to claim 3, characterized in that: The end of the guide plate (130) facing away from the partition plate (120) is a curved surface, and a plurality of the guide plates (130) are detachably connected to the partition plate (120).
7. The vacuum chamber according to claim 6, characterized in that: The guide plate (130) is provided with a connecting portion at the end portion facing the partition plate (120), and the connecting portion is provided with a connecting groove (131). The connecting groove (131) is a strip-shaped structure, and the guide plate (130) is threadedly connected to the partition plate (120) via the connecting groove (131).
8. The vacuum chamber according to claim 2, characterized in that: The end surface of the partition (120) facing the cushion column (110) is provided with a through hole matched with the cushion column (110), and the partition (120) is respectively plugged with a plurality of the cushion columns (110) through the plurality of through holes.
9. The vacuum chamber according to claim 1, characterized in that: It also includes a sealing ring (40), and a sealing groove is provided at the end of the lower cavity plate (20) that contacts the upper cavity plate (10), and the sealing ring (40) is placed in the sealing groove. The sealing ring (40) is used for sealing between the upper cavity plate (10) and the lower cavity plate (20).
10. A vacuum dryer, characterized in that: A vacuum chamber comprising any one of claims 1 to 9.