Control acquisition circuit system of scanner displacement table

Abstract

The utility model provides a control acquisition circuit system of a scanner displacement table, which is characterized in that a photoelectric acquisition circuit outputs a photomultiplier tube signal to a control unit, and the control unit acquires a position signal containing voice coil motor position information of the displacement table; after the driving capability of the control unit on the position signal of the voice coil motor is enhanced, a weak current control signal is sent to the motor driving control unit, so that the motor driving control unit sends a strong current control signal to the displacement table to control the movement of the displacement table along the X-axis direction; or the position signal, containing the stepping motor, of the displacement table is transmitted to the motor driving control unit through the displacement table, the position signal of the stepping motor is transmitted to the control unit through the motor driving control unit, and the control unit sends a weak current control signal to the motor driving control unit after obtaining the position signal, containing the stepping motor, of the displacement table. The motor drives the control unit to send a strong current signal to the displacement table to control the displacement table to act in the Y-axis direction, and therefore the position of the displacement table is controlled.

Description

Technical Field

[0001] The utility model relates to the technical field of scanners, in particular to a control and acquisition circuit system of a scanner displacement platform. Background Art

[0002] The translation stage is an important part of the laser confocal fluorescence scanner. During the scanning process, the translation stage scans line by line, and the photoelectric acquisition function in the control unit (including the position acquisition function and the photoelectric acquisition function) collects the light intensity signal at a certain moment, and its position acquisition function records the two-dimensional coordinate information of the translation stage at the same moment. The control unit corresponds each point of the two-dimensional coordinate information to the light intensity collected at this point, and a two-dimensional scanned image is obtained.

[0003] At present, the commonly used technology at home and abroad is that the control unit (including position acquisition function and photoelectric acquisition function) controls the translation stage to scan line by line through the motor drive and control unit. The motor drive and control unit perform closed-loop control on the translation stage according to the position feedback signal of the translation stage (usually the ABN signal of the grating ruler or Hall sensor). For some X-axis voice coil motors, the key position feedback signal is processed by the motor drive and control unit (for example, the position accuracy is changed from 1um to 5um) and then fed back to the control unit.

[0004] This creates a problem. When the translation stage scans back and forth at high speed, for example, the X-axis motor speed is greater than 350mm / s, the position signal of the high-precision grating scale (such as the ABN signal of a grating scale with an accuracy of 0.1um) is processed by the motor drive and control unit. A large time delay is generated, and this delay is not a fixed value. This causes the light intensity signal to be unable to accurately correspond to its two-dimensional position information, and the resulting two-dimensional scanned image is chaotic.

[0005] If the high-speed position signal of the X-axis motor is directly fed back to the control unit and the motor drive and control unit, the drive of the high-speed position signal will be insufficient.

[0006] In view of this, it is necessary to provide a new control and acquisition circuit system for a scanner translation stage to overcome the above-mentioned defects. Utility Model Content

[0007] The purpose of the utility model is to provide a control and acquisition circuit system for a scanner translation stage, which can accurately realize the photomultiplier tube signal corresponding to the two-dimensional position information of the translation stage, accurately control the position of the translation stage and obtain the position information of the translation stage in a very short time.

[0008] In order to achieve the above-mentioned purpose, the utility model provides a control and acquisition circuit system of a scanner displacement stage, comprising: a photoelectric acquisition circuit, a control unit, a motor drive control unit and a displacement stage;

[0009] The photoelectric collection circuit is electrically connected to the control unit, the control unit is electrically connected to the motor drive control unit and the displacement stage, and the motor drive control unit is electrically connected to the displacement stage.

[0010] The photoelectric collection circuit outputs a photomultiplier tube signal to the control unit, and the control unit obtains a position signal containing position information of a voice coil motor of the translation stage. After the driving capability of the position signal of the voice coil motor is enhanced in the control unit, a weak current control signal and the enhanced position signal are sent to the motor drive control unit, so that the motor drive control unit sends a strong current control signal to the translation stage to control the movement of the translation stage along the X-axis direction, or the position signal containing a stepper motor of the translation stage is transmitted from the translation stage to the motor drive control unit, and the position signal of the stepper motor is then transmitted to the control unit through the motor drive control unit. After the control unit obtains the position signal containing the stepper motor of the translation stage, it sends a weak current control signal to the motor drive control unit, so that the motor drive control unit sends a strong current signal to the translation stage to control the movement of the translation stage along the Y-axis direction, thereby controlling the position of the translation stage. The control unit corresponds the position information of the translation stage to the light intensity signal of the photoelectric collection circuit to obtain a two-dimensional scanning image.

[0011] Preferably, the photoelectric collection circuit includes an operational amplifier U3, a resistor R1 and an ADC chip U4, the first end of the resistor R1 is electrically connected to the reverse input end of the operational amplifier U3, the second end of the resistor R1 is electrically connected to the output end of the operational amplifier U3 and the ADC chip U4, and the same-direction input end of the operational amplifier U3 is grounded.

[0012] Preferably, the control unit includes a chip U2, a differential circuit driving chip U1, a first optocoupler module U5, a second optocoupler module U6 and a buffer chip U7, the ADC chip U4 is electrically connected to the chip U2, the chip U2 is electrically connected to the differential circuit driving chip U1, the first optocoupler module U5 and the second optocoupler module U6, the differential circuit driving chip U1, the first optocoupler module U5 and the second optocoupler module U6 are all electrically connected to the motor drive control unit, and the buffer chip U7 is electrically connected to the differential circuit driving chip U1 and the motor drive control unit.

[0013] Preferably, the FXA pin of the chip U2 is electrically connected to the resistor R6, the resistor R6 is electrically connected to the pin 1 of the light receiving end of the first optocoupler of the first optocoupler module U5, the pin 2 of the light receiving end of the first optocoupler is grounded, the pin 1 of the light emitting end of the first optocoupler is electrically connected to the resistor R2, the resistor R2 is electrically connected to the pin BO of the buffer chip U7, and the pin 2 of the light emitting end of the first optocoupler is electrically connected to the pin B1 of the buffer chip U7;

[0014] The FXB pin of the chip U2 is electrically connected to the resistor R7, the resistor R7 is electrically connected to the pin 1 of the light receiving end of the second optocoupler of the first optocoupler module U5, the pin 2 of the light receiving end of the second optocoupler is grounded, the pin 1 of the light emitting end of the second optocoupler is electrically connected to the resistor R3, the resistor R3 is electrically connected to the pin B2 of the buffer chip U7, and the pin 2 of the light emitting end of the second optocoupler is electrically connected to the pin B3 of the buffer chip U7;

[0015] The FXN pin of the chip U2 is electrically connected to the resistor R8, the resistor R8 is electrically connected to the pin 1 of the light receiving end of the third optocoupler of the first optocoupler module U5, the pin 2 of the light receiving end of the third optocoupler is grounded, the pin 1 of the light emitting end of the third optocoupler is electrically connected to the resistor R4, the resistor R4 is electrically connected to the pin B4 of the buffer chip U7, and the pin 2 of the light emitting end of the third optocoupler is electrically connected to the pin B5 of the buffer chip U7;

[0016] The FYA pin of the chip U2 is electrically connected to the resistor R9, the resistor R9 is electrically connected to pin one of the light receiving end of the fourth optocoupler of the first optocoupler module U5, pin two of the light receiving end of the fourth optocoupler is grounded, pin one of the light emitting end of the fourth optocoupler is electrically connected to the resistor R5, the resistor R5 is electrically connected to pin one of the terminal CN4, and pin two of the light emitting end of the fourth optocoupler is electrically connected to pin two of the terminal CN4 and the motor drive control unit.

[0017] Preferably, the FYB pin of the chip U2 is electrically connected to the resistor R14, the resistor R14 is electrically connected to the pin 1 of the light-receiving end of the fifth optocoupler of the second optocoupler module U6, the pin 2 of the light-receiving end of the fifth optocoupler is grounded, the pin 1 of the light-emitting end of the fifth optocoupler is electrically connected to the resistor R10, the resistor R10 is electrically connected to the pin 3 of the wiring terminal CN4 and the motor drive control unit, the pin 2 of the light-emitting end of the fifth optocoupler is electrically connected to the pin 4 of the wiring terminal CN4 and the motor drive control unit;

[0018] The FYN pin of the chip is electrically connected to the resistor R15, the resistor R15 is electrically connected to the pin one of the light receiving end of the sixth optocoupler of the second optocoupler module U6, the pin two of the light receiving end of the sixth optocoupler is grounded, the pin one of the light emitting end of the sixth optocoupler is electrically connected to the resistor R11, the resistor R11 is electrically connected to the pin five of the terminal CN4 and the motor drive control unit, and the pin two of the light emitting end of the sixth optocoupler is electrically connected to the terminal CN4 and the motor drive control unit.

[0019] Preferably, the motor drive control unit includes an X-axis control unit and a Y-axis control unit, the resistor R2 is also electrically connected to pin 1 of terminal CN9 of the X-axis control unit, pin 2 of the first optocoupler is also electrically connected to pin 2 of terminal CN9 of the X-axis control unit, the resistor R3 is also electrically connected to pin 3 of terminal CN9 of the X-axis control unit, pin 2 of the second optocoupler is also electrically connected to pin 4 of terminal CN9 of the X-axis control unit, the resistor R4 is also electrically connected to pin 5 of terminal CN9 of the X-axis control unit, pin 2 of the third optocoupler is also electrically connected to pin 6 of terminal CN9 of the X-axis control unit, the resistor R5 is also electrically connected to pin 1 of terminal CN8 of the Y-axis control unit and pin 1 of terminal CN4, and pin 2 of the fourth optocoupler is also electrically connected to pin 2 of terminal CN8 of the Y-axis control unit and pin 2 of terminal CN4.

[0020] Preferably, the translation stage includes an X-axis unit and a Y-axis unit, the DIR pin and the VCC pin of the buffer chip U7 are electrically connected to the VCC power supply, the pin G, the pin 1G and the pin VCC of the differential circuit driving chip U1 are electrically connected to the VCC power supply, the pin A0 of the buffer chip U7 is electrically connected to the pin 1 of the wiring terminal CN12 of the X-axis unit, the pin A1 of the buffer chip U7 is electrically connected to the pin 2 of the wiring terminal CN12 of the X-axis unit, the pin A2 of the buffer chip U7 is electrically connected to the pin 3 of the wiring terminal CN12 of the X-axis unit, the pin A3 of the buffer chip U7 is electrically connected to the pin 4 of the wiring terminal CN12 of the X-axis unit, the pin A4 of the buffer chip U7 is electrically connected to the pin 5 of the wiring terminal CN12 of the X-axis unit, and the pin A5 of the buffer chip U7 is electrically connected to the pin 6 of the wiring terminal CN12 of the X-axis unit.

[0021] Pin 1 of the wiring terminal CN4 is electrically connected to pin 1 of the wiring terminal CN8 of the Y-axis control unit, pin 2 of the wiring terminal CN4 is electrically connected to pin 2 of the wiring terminal CN8 of the Y-axis control unit, pin 3 of the wiring terminal CN4 is electrically connected to pin 3 of the wiring terminal CN8 of the Y-axis control unit, pin 4 of the wiring terminal CN4 is electrically connected to pin 4 of the wiring terminal CN8 of the Y-axis control unit, pin 5 of the wiring terminal CN4 is electrically connected to pin 5 of the wiring terminal CN8 of the Y-axis control unit, pin 6 of the wiring terminal CN4 is electrically connected to pin 6 of the wiring terminal CN8 of the Y-axis control unit; pin 1 of the wiring terminal CN16 of the Y-axis control unit It is electrically connected to pin one of the terminal CN14 of the Y-axis unit, pin two of the terminal CN16 of the Y-axis control unit is electrically connected to pin two of the terminal CN14 of the Y-axis unit, pin three of the terminal CN16 of the Y-axis control unit is electrically connected to pin three of the terminal CN14 of the Y-axis unit, pin four of the terminal CN16 of the Y-axis control unit is electrically connected to pin four of the terminal CN14 of the Y-axis unit, pin five of the terminal CN16 of the Y-axis control unit is electrically connected to pin five of the terminal CN14 of the Y-axis unit, and pin six of the terminal CN16 of the Y-axis control unit is electrically connected to pin six of the terminal CN14 of the Y-axis unit.

[0022] Preferably, pin 1 of the chip U2 is electrically connected to pin 1A of the differential circuit driver chip U1, pin 2 of the chip U2 is electrically connected to pin 1A of the differential circuit driver chip U1, pin 3 of the chip U2 is electrically connected to pin 4A of the differential circuit driver chip U1, pin 4 of the chip U2 is electrically connected to pin 3A of the differential circuit driver chip U1, pin 1 of the connection terminal CN5 of the X-axis control unit is electrically connected to pin 1Y of the differential circuit driver chip U1, pin 2 of the connection terminal CN5 of the X-axis control unit is electrically connected to pin 1Z of the differential circuit driver chip U1, pin 3 of the connection terminal CN5 of the X-axis control unit is electrically connected to pin 4Y of the differential circuit driver chip U1, and pin 4 of the connection terminal CN5 of the X-axis control unit is electrically connected to pin 4Z of the differential circuit driver chip U1.

[0023] Preferably, pin 1 of the connection terminal CN7 of the Y-axis control unit is electrically connected to pin 2Y of the differential circuit driver chip U1, pin 1 of the connection terminal CN7 of the Y-axis control unit is electrically connected to pin 2Z of the differential circuit driver chip U1, pin 3 of the connection terminal CN7 of the Y-axis control unit is electrically connected to pin 3Y of the differential circuit driver chip U1, and pin 4 of the connection terminal CN7 of the Y-axis control unit is electrically connected to pin 3Z of the differential circuit driver chip U1.

[0024] Compared with the prior art, the beneficial effect is that the problem of insufficient driving capability of the X-axis high-speed position signal and easy generation of disordered time delay is solved. After the driving capability of the position signal in the buffer chip U7 of the control unit is enhanced, the enhanced position signal and weak current control signal are sent to the X-axis control unit of the motor drive control unit to control the X-axis unit of the displacement stage, thereby controlling the X-axis unit of the displacement stage. In this way, the photomultiplier tube signal can accurately correspond to the two-dimensional position information of the displacement stage, accurately control the position of the displacement stage and obtain the position information of the displacement stage, and the time required is very short, and no disordered time delay will be generated.

[0025] Other features and advantages of the utility model will be stated in the following description, and some will be apparent from the description, or can be understood through the implementation of the utility model. The features and advantages of the utility model can be realized and obtained by the elements and combinations specifically pointed out in the attached application scope. These and other features of the utility model will become more clearly understood according to the following description and the attached claims, or can be understood through the implementation of the embodiments described in the utility model. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.

[0027] Figure 1 This is a principle block diagram of the control and acquisition circuit system of the scanner displacement stage provided by the utility model.

[0028] Figure 2 This is a principle block diagram of another state of the control and acquisition circuit system of the scanner displacement stage provided by the utility model.

[0029] Figure 3 for Figure 1 The circuit diagram of the photoelectric acquisition circuit of the control and acquisition circuit system of the scanner translation stage is shown.

[0030] Figure 4 for Figure 1 The circuit diagram of the control unit of the control acquisition circuit system of the scanner translation stage is shown.

[0031] Figure 5 for Figure 1 The circuit diagram of the motor drive control unit of the control acquisition circuit system of the scanner translation stage is shown.

[0032] Figure 6 for Figure 1 The circuit diagram of the scanner translation stage and the control and acquisition circuit system of the translation stage are shown. DETAILED DESCRIPTION

[0033] In order to make the purpose, technical solution and beneficial technical effect of the utility model clearer, the utility model is further described in detail below in conjunction with the accompanying drawings and specific implementation methods. It should be understood that the specific implementation methods described in this specification are only for explaining the utility model, and are not intended to limit the utility model.

[0034] It should be understood that the terms "upper", "lower", "front", "back", "left", "right", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0035] It should also be noted that, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", "fix", "set" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral one; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this utility model can be determined according to the specific circumstances.

[0036] In addition, the terms "first", "second", and "third" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, a feature defined as "first", "second", and "third" may explicitly or implicitly include one or more of the features. In addition, the meaning of "multiple" and "several" refers to two or more, unless otherwise clearly and specifically defined.

[0037] See also Figures 1 to 6 , the utility model provides a control and acquisition circuit system of a scanner displacement stage, including: a photoelectric acquisition circuit, a control unit, a motor drive control unit and a displacement stage;

[0038] The photoelectric collection circuit is electrically connected to the control unit, the control unit is electrically connected to the motor drive control unit and the displacement stage, and the motor drive control unit is electrically connected to the displacement stage.

[0039] The photoelectric collection circuit outputs a photomultiplier tube signal to the control unit, and the control unit obtains a position signal containing position information of a voice coil motor of the translation stage. After the driving capability of the position signal of the voice coil motor is enhanced in the control unit, a weak current control signal and the enhanced position signal are sent to the motor drive control unit, so that the motor drive control unit sends a strong current control signal to the translation stage to control the movement of the translation stage along the X-axis direction, or the position signal containing a stepper motor of the translation stage is transmitted from the translation stage to the motor drive control unit, and the position signal of the stepper motor is then transmitted to the control unit through the motor drive control unit. After the control unit obtains the position signal containing the stepper motor of the translation stage, it sends a weak current control signal to the motor drive control unit, so that the motor drive control unit sends a strong current signal to the translation stage to control the movement of the translation stage along the Y-axis direction, thereby controlling the position of the translation stage. The control unit corresponds the position information (including the X-axis and the Y-axis) of the translation stage to the light intensity signal of the photoelectric collection circuit, so as to obtain a two-dimensional scanning image.

[0040] In a preferred embodiment, the photoelectric collection circuit includes an operational amplifier U3, a resistor R1 and an ADC chip U4, the first end of the resistor R1 is electrically connected to the reverse input end of the operational amplifier U3, the second end of the resistor R1 is electrically connected to the output end of the operational amplifier U3 and the ADC chip U4, and the same-direction input end of the operational amplifier U3 is grounded.

[0041] In a preferred embodiment, the control unit includes a chip U2, a differential circuit driving chip U1, a first optocoupler module U5, a second optocoupler module U6 and a buffer chip U7, the ADC chip U4 is electrically connected to the chip U2, the chip U2 is electrically connected to the differential circuit driving chip U1, the first optocoupler module U5 and the second optocoupler module U6, the differential circuit driving chip U1, the first optocoupler module U5 and the second optocoupler module U6 are all electrically connected to the motor drive control unit, and the buffer chip U7 is electrically connected to the differential circuit driving chip U1 and the motor drive control unit.

[0042] In a preferred embodiment, the FXA pin of the chip U2 is electrically connected to the resistor R6, the resistor R6 is electrically connected to the pin 1 of the light receiving end of the first optocoupler of the first optocoupler module U5, the pin 2 of the light receiving end of the first optocoupler is grounded, the pin 1 of the light emitting end of the first optocoupler is electrically connected to the resistor R2, the resistor R2 is electrically connected to the pin BO of the buffer chip U7, and the pin 2 of the light emitting end of the first optocoupler is electrically connected to the pin B1 of the buffer chip U7;

[0043] The FXB pin of the chip U2 is electrically connected to the resistor R7, the resistor R7 is electrically connected to the pin 1 of the light receiving end of the second optocoupler of the first optocoupler module U5, the pin 2 of the light receiving end of the second optocoupler is grounded, the pin 1 of the light emitting end of the second optocoupler is electrically connected to the resistor R3, the resistor R3 is electrically connected to the pin B2 of the buffer chip U7, and the pin 2 of the light emitting end of the second optocoupler is electrically connected to the pin B3 of the buffer chip U7;

[0044] The FXN pin of the chip U2 is electrically connected to the resistor R8, the resistor R8 is electrically connected to the pin 1 of the light receiving end of the third optocoupler of the first optocoupler module U5, the pin 2 of the light receiving end of the third optocoupler is grounded, the pin 1 of the light emitting end of the third optocoupler is electrically connected to the resistor R4, the resistor R4 is electrically connected to the pin B4 of the buffer chip U7, and the pin 2 of the light emitting end of the third optocoupler is electrically connected to the pin B5 of the buffer chip U7;

[0045] The FYA pin of the chip U2 is electrically connected to the resistor R9, the resistor R9 is electrically connected to pin one of the light receiving end of the fourth optocoupler of the first optocoupler module U5, pin two of the light receiving end of the fourth optocoupler is grounded, pin one of the light emitting end of the fourth optocoupler is electrically connected to the resistor R5, the resistor R5 is electrically connected to pin one of the terminal CN4, and pin two of the light emitting end of the fourth optocoupler is electrically connected to pin two of the terminal CN4 and the motor drive control unit.

[0046] In a preferred embodiment, the FYB pin of the chip U2 is electrically connected to the resistor R14, the resistor R14 is electrically connected to the pin one of the light receiving end of the fifth optocoupler of the second optocoupler module U6, the pin two of the light receiving end of the fifth optocoupler is grounded, the pin one of the light emitting end of the fifth optocoupler is electrically connected to the resistor R10, the resistor R10 is electrically connected to the pin three of the wiring terminal CN4 and the motor drive control unit, the pin two of the light emitting end of the fifth optocoupler is electrically connected to the pin four of the wiring terminal CN4 and the motor drive control unit;

[0047] The FYN pin of the chip is electrically connected to the resistor R15, the resistor R15 is electrically connected to the pin one of the light receiving end of the sixth optocoupler of the second optocoupler module U6, the pin two of the light receiving end of the sixth optocoupler is grounded, the pin one of the light emitting end of the sixth optocoupler is electrically connected to the resistor R11, the resistor R11 is electrically connected to the pin five of the terminal CN4 and the motor drive control unit, and the pin two of the light emitting end of the sixth optocoupler is electrically connected to the terminal CN4 and the motor drive control unit.

[0048] In a preferred embodiment, the motor drive control unit includes an X-axis control unit and a Y-axis control unit, the resistor R2 is also electrically connected to pin 1 of terminal CN9 of the X-axis control unit, pin 2 of the first optocoupler is also electrically connected to pin 2 of terminal CN9 of the X-axis control unit, the resistor R3 is also electrically connected to pin 3 of terminal CN9 of the X-axis control unit, pin 2 of the second optocoupler is also electrically connected to pin 4 of terminal CN9 of the X-axis control unit, the resistor R4 is also electrically connected to pin 5 of terminal CN9 of the X-axis control unit, pin 2 of the third optocoupler is also electrically connected to pin 6 of terminal CN9 of the X-axis control unit, the resistor R5 is also electrically connected to pin 1 of terminal CN8 of the Y-axis control unit and pin 1 of terminal CN4, and pin 2 of the fourth optocoupler is also electrically connected to pin 2 of terminal CN8 of the Y-axis control unit and pin 2 of terminal CN4.

[0049] In a preferred embodiment, the translation stage includes an X-axis unit and a Y-axis unit, the DIR pin and the VCC pin of the buffer chip U7 are electrically connected to the VCC power supply, the pin G, the pin 1G and the pin VCC of the differential circuit driving chip U1 are electrically connected to the VCC power supply, the pin A0 of the buffer chip U7 is electrically connected to the pin 1 of the wiring terminal CN12 of the X-axis unit, the pin A1 of the buffer chip U7 is electrically connected to the pin 2 of the wiring terminal CN12 of the X-axis unit, the pin A2 of the buffer chip U7 is electrically connected to the pin 3 of the wiring terminal CN12 of the X-axis unit, the pin A3 of the buffer chip U7 is electrically connected to the pin 4 of the wiring terminal CN12 of the X-axis unit, the pin A4 of the buffer chip U7 is electrically connected to the pin 5 of the wiring terminal CN12 of the X-axis unit, and the pin A5 of the buffer chip U7 is electrically connected to the pin 6 of the wiring terminal CN12 of the X-axis unit.

[0050] Pin 1 of the wiring terminal CN4 is electrically connected to pin 1 of the wiring terminal CN8 of the Y-axis control unit, pin 2 of the wiring terminal CN4 is electrically connected to pin 2 of the wiring terminal CN8 of the Y-axis control unit, pin 3 of the wiring terminal CN4 is electrically connected to pin 3 of the wiring terminal CN8 of the Y-axis control unit, pin 4 of the wiring terminal CN4 is electrically connected to pin 4 of the wiring terminal CN8 of the Y-axis control unit, pin 5 of the wiring terminal CN4 is electrically connected to pin 5 of the wiring terminal CN8 of the Y-axis control unit, pin 6 of the wiring terminal CN4 is electrically connected to pin 6 of the wiring terminal CN8 of the Y-axis control unit; pin 1 of the wiring terminal CN16 of the Y-axis control unit It is electrically connected to pin one of the terminal CN14 of the Y-axis unit, pin two of the terminal CN16 of the Y-axis control unit is electrically connected to pin two of the terminal CN14 of the Y-axis unit, pin three of the terminal CN16 of the Y-axis control unit is electrically connected to pin three of the terminal CN14 of the Y-axis unit, pin four of the terminal CN16 of the Y-axis control unit is electrically connected to pin four of the terminal CN14 of the Y-axis unit, pin five of the terminal CN16 of the Y-axis control unit is electrically connected to pin five of the terminal CN14 of the Y-axis unit, and pin six of the terminal CN16 of the Y-axis control unit is electrically connected to pin six of the terminal CN14 of the Y-axis unit.

[0051] In a preferred embodiment, pin 1 of the chip U2 is electrically connected to pin 1A of the differential circuit driver chip U1, pin 2 of the chip U2 is electrically connected to pin 1A of the differential circuit driver chip U1, pin 3 of the chip U2 is electrically connected to pin 4A of the differential circuit driver chip U1, pin 4 of the chip U2 is electrically connected to pin 3A of the differential circuit driver chip U1, pin 1 of the connection terminal CN5 of the X-axis control unit is electrically connected to pin 1Y of the differential circuit driver chip U1, pin 2 of the connection terminal CN5 of the X-axis control unit is electrically connected to pin 1Z of the differential circuit driver chip U1, pin 3 of the connection terminal CN5 of the X-axis control unit is electrically connected to pin 4Y of the differential circuit driver chip U1, and pin 4 of the connection terminal CN5 of the X-axis control unit is electrically connected to pin 4Z of the differential circuit driver chip U1.

[0052] In a preferred embodiment, pin 1 of the connection terminal CN7 of the Y-axis control unit is electrically connected to pin 2Y of the differential circuit driver chip U1, pin 1 of the connection terminal CN7 of the Y-axis control unit is electrically connected to pin 2Z of the differential circuit driver chip U1, pin 3 of the connection terminal CN7 of the Y-axis control unit is electrically connected to pin 3Y of the differential circuit driver chip U1, and pin 4 of the connection terminal CN7 of the Y-axis control unit is electrically connected to pin 3Z of the differential circuit driver chip U1.

[0053] It should be noted that, in this embodiment, the model of the chip U2 is ZYNQ7020, the model of the differential circuit driver chip U1 is AM26LS31CDR, and the differential circuit driver chip U1 converts the pulse and direction signals emitted by the chip U2 from single-ended to differential, and sends them to the X-axis control unit and the Y-axis control unit.

[0054] The pin signal explanation is as shown in Table 1:

[0055] name meaning Remark X_DIRECTION X-axis direction signal output by U2, single-ended Y_DIRECTION Y-axis direction signal output by U2, single-ended X_PULSE X-axis pulse signal output by U2, single-ended Y_PULSE The Y-axis pulse signal output by U2 is single-ended X_DIRECTION_A U1 outputs the X-axis direction signal, differential + X_DIRECTION_B U1 outputs the X-axis direction signal, differential - X_PULSE_A U1 outputs the X-axis pulse signal, differential + X_PULSE_B U1 outputs the X-axis pulse signal, differential - Y_DIRECTION_A U1 outputs the Y-axis direction signal, differential + Y_DIRECTION_B U1 outputs the Y-axis direction signal, differential - Y_PULSE_A U1 outputs the Y-axis pulse signal, differential + Y_PULSE_B U1 outputs the Y-axis pulse signal, differential -

[0056] The first optical coupling module U5 and the second optical coupling module U6 are mainly used to convert the signals of the X-axis unit and the Y-axis unit of the translation stage from differential to single-ended and output them to the chip U2. For example, the following Table 2 shows that XA_P and XA_PM in Table 2 are differential signals indicating position information, which are directly connected to the control unit (including position acquisition function and photoelectric acquisition function) and are divided into two paths after signal enhancement by the buffer chip U7 in the control unit. One signal enters the chip U2, and the other signal is connected to CN9, and provides position feedback signals for the chip U2 of the control unit and the X-axis of the motor drive control unit at the same time. Among them, YA_P_C, YA_M_C, YB_P_C, YB_M_C, YN_P_C, and YN_M_C represent the position signals of the stepper motor after being processed by the motor control drive unit;

[0057] The signal interpretation is shown in Table 2 below:

[0058]

[0059] The working conditions of the buffer chip U7 are: the working voltage needs to be 5V, the delay is less than 10ns, and the driving current of each output port is greater than 20mA.

[0060] The pin signal interpretation of the buffer chip U7 is as follows in Table 3:

[0061] name meaning XA_P_EN Enhanced X-axis differential position signal A+ XA_M_EN Enhanced X-axis differential position signal A- XB_P_EN Enhanced X-axis differential position signal B+ XB_M_EN Enhanced X-axis differential position signal B- XN_P_EN Enhanced X-axis differential position signal N+ XN_M_EN Enhanced X-axis differential position signal N- YA_P_EN Enhanced Y-axis differential position signal A+ YA_M_EN Enhanced Y-axis differential position signal A- YB_P_EN Enhanced Y-axis differential position signal B+ YB_M_EN Enhanced Y-axis differential position signal B- YN_P_EN Enhanced Y-axis differential position signal N+ YN_M_EN Enhanced Y-axis differential position signal N-

[0062] The ADC chip U4 of the photoelectric acquisition circuit outputs a photomultiplier tube signal to the chip U2 of the control unit. The chip U2 of the control unit obtains the position signal containing the position information of the displacement stage. After the driving capability of the position signal is enhanced in the buffer chip U7 of the control unit, the enhanced position signal and the weak current control signal are sent to the X-axis control unit of the motor drive control unit to control the action of the X-axis unit and / or the Y-axis unit of the displacement stage, thereby controlling the position of the X-axis unit and / or the Y-axis unit of the displacement stage. In this way, the photomultiplier tube signal can accurately correspond to the two-dimensional position information of the displacement stage, the position of the displacement stage can be accurately controlled, and the position information of the displacement stage can be obtained in a very short time.

[0063] The present invention is not limited to what is described in the specification and implementation modes, and therefore, additional advantages and modifications can be easily realized by those familiar with the art. Therefore, without departing from the spirit and scope of the general concept defined by the claims and their equivalents, the present invention is not limited to the specific details, representative devices, and illustrative examples shown and described herein.

Claims

1. A control and acquisition circuit system for a scanner displacement stage, characterized in that: include: Photoelectric acquisition circuit, control unit, motor drive control unit and translation stage; The photoelectric collection circuit is electrically connected to the control unit, the control unit is electrically connected to the motor drive control unit and the translation stage, and the motor drive control unit is electrically connected to the translation stage.

2. The control and acquisition circuit system of the scanner displacement stage as claimed in claim 1, characterized in that: The photoelectric collection circuit includes an operational amplifier U3, a resistor R1 and an ADC chip U4. The first end of the resistor R1 is electrically connected to the reverse input end of the operational amplifier U3, the second end of the resistor R1 is electrically connected to the output end of the operational amplifier U3 and the ADC chip U4, and the same-direction input end of the operational amplifier U3 is grounded.

3. The control and acquisition circuit system of the scanner displacement stage as claimed in claim 2, characterized in that: The control unit includes a chip U2, a differential circuit driving chip U1, a first optocoupler module U5, a second optocoupler module U6 and a buffer chip U7. The ADC chip U4 is electrically connected to the chip U2. The chip U2 is electrically connected to the differential circuit driving chip U1, the first optocoupler module U5 and the second optocoupler module U6. The differential circuit driving chip U1, the first optocoupler module U5 and the second optocoupler module U6 are all electrically connected to the motor drive control unit. The buffer chip U7 is electrically connected to the differential circuit driving chip U1 and the motor drive control unit.

4. The control and acquisition circuit system of the scanner translation stage as claimed in claim 3, characterized in that: The FXA pin of the chip U2 is electrically connected to the resistor R6, the resistor R6 is electrically connected to the pin 1 of the light receiving end of the first optocoupler of the first optocoupler module U5, the pin 2 of the light receiving end of the first optocoupler is grounded, the pin 1 of the light emitting end of the first optocoupler is electrically connected to the resistor R2, the resistor R2 is electrically connected to the pin BO of the buffer chip U7, and the pin 2 of the light emitting end of the first optocoupler is electrically connected to the pin B1 of the buffer chip U7; The FXB pin of the chip U2 is electrically connected to the resistor R7, the resistor R7 is electrically connected to the pin 1 of the light receiving end of the second optocoupler of the first optocoupler module U5, the pin 2 of the light receiving end of the second optocoupler is grounded, the pin 1 of the light emitting end of the second optocoupler is electrically connected to the resistor R3, the resistor R3 is electrically connected to the pin B2 of the buffer chip U7, and the pin 2 of the light emitting end of the second optocoupler is electrically connected to the pin B3 of the buffer chip U7; The FXN pin of the chip U2 is electrically connected to the resistor R8, the resistor R8 is electrically connected to the pin 1 of the light receiving end of the third optocoupler of the first optocoupler module U5, the pin 2 of the light receiving end of the third optocoupler is grounded, the pin 1 of the light emitting end of the third optocoupler is electrically connected to the resistor R4, the resistor R4 is electrically connected to the pin B4 of the buffer chip U7, and the pin 2 of the light emitting end of the third optocoupler is electrically connected to the pin B5 of the buffer chip U7; The FYA pin of the chip U2 is electrically connected to the resistor R9, the resistor R9 is electrically connected to pin one of the light receiving end of the fourth optocoupler of the first optocoupler module U5, pin two of the light receiving end of the fourth optocoupler is grounded, pin one of the light emitting end of the fourth optocoupler is electrically connected to the resistor R5, the resistor R5 is electrically connected to pin one of the terminal CN4, and pin two of the light emitting end of the fourth optocoupler is electrically connected to pin two of the terminal CN4 and the motor drive control unit.

5. The control and acquisition circuit system of the scanner translation stage as claimed in claim 4, characterized in that: The FYB pin of the chip U2 is electrically connected to the resistor R14, the resistor R14 is electrically connected to the pin 1 of the light receiving end of the fifth optocoupler of the second optocoupler module U6, the pin 2 of the light receiving end of the fifth optocoupler is grounded, the pin 1 of the light emitting end of the fifth optocoupler is electrically connected to the resistor R10, the resistor R10 is electrically connected to the pin 3 of the wiring terminal CN4 and the motor drive control unit, the pin 2 of the light emitting end of the fifth optocoupler is electrically connected to the pin 4 of the wiring terminal CN4 and the motor drive control unit; The FYN pin of the chip is electrically connected to the resistor R15, the resistor R15 is electrically connected to the pin one of the light receiving end of the sixth optocoupler of the second optocoupler module U6, the pin two of the light receiving end of the sixth optocoupler is grounded, the pin one of the light emitting end of the sixth optocoupler is electrically connected to the resistor R11, the resistor R11 is electrically connected to the pin five of the terminal CN4 and the motor drive control unit, the pin two of the light emitting end of the sixth optocoupler is electrically connected to the pin six of the terminal CN4 and the motor drive control unit.

6. The control and acquisition circuit system of the scanner translation stage as claimed in claim 5, characterized in that: The motor drive control unit includes an X-axis control unit and a Y-axis control unit, the resistor R2 is also electrically connected to pin 1 of the connection terminal CN9 of the X-axis control unit, the pin 2 of the first optocoupler is also electrically connected to pin 2 of the connection terminal CN9 of the X-axis control unit, the resistor R3 is also electrically connected to pin 3 of the connection terminal CN9 of the X-axis control unit, the pin 2 of the second optocoupler is also electrically connected to pin 4 of the connection terminal CN9 of the X-axis control unit, the resistor R4 is also electrically connected to pin 5 of the connection terminal CN9 of the X-axis control unit, the pin 2 of the third optocoupler is also electrically connected to pin 6 of the connection terminal CN9 of the X-axis control unit, the resistor R5 is also electrically connected to pin 1 of the connection terminal CN8 of the Y-axis control unit and pin 1 of the connection terminal CN4, and the pin 2 of the fourth optocoupler is also electrically connected to pin 2 of the connection terminal CN8 of the Y-axis control unit and pin 2 of the connection terminal CN4.

7. The control and acquisition circuit system of the scanner translation stage as claimed in claim 6, characterized in that: The translation stage includes an X-axis unit and a Y-axis unit, the DIR pin and the VCC pin of the buffer chip U7 are electrically connected to the VCC power supply, the pin G, the pin 1G and the pin VCC of the differential circuit driving chip U1 are electrically connected to the VCC power supply, the pin A0 of the buffer chip U7 is electrically connected to the pin 1 of the connection terminal CN12 of the X-axis unit, the pin A1 of the buffer chip U7 is electrically connected to the pin 2 of the connection terminal CN12 of the X-axis unit, the pin A2 of the buffer chip U7 is electrically connected to the pin 3 of the connection terminal CN12 of the X-axis unit, the pin A3 of the buffer chip U7 is electrically connected to the pin 4 of the connection terminal CN12 of the X-axis unit, the pin A4 of the buffer chip U7 is electrically connected to the pin 5 of the connection terminal CN12 of the X-axis unit, and the pin A5 of the buffer chip U7 is electrically connected to the pin 6 of the connection terminal CN12 of the X-axis unit. Pin 1 of the wiring terminal CN4 is electrically connected to pin 1 of the wiring terminal CN8 of the Y-axis control unit, pin 2 of the wiring terminal CN4 is electrically connected to pin 2 of the wiring terminal CN8 of the Y-axis control unit, pin 3 of the wiring terminal CN4 is electrically connected to pin 3 of the wiring terminal CN8 of the Y-axis control unit, pin 4 of the wiring terminal CN4 is electrically connected to pin 4 of the wiring terminal CN8 of the Y-axis control unit, pin 5 of the wiring terminal CN4 is electrically connected to pin 5 of the wiring terminal CN8 of the Y-axis control unit, pin 6 of the wiring terminal CN4 is electrically connected to pin 6 of the wiring terminal CN8 of the Y-axis control unit; pin 1 of the wiring terminal CN16 of the Y-axis control unit It is electrically connected to pin one of the terminal CN14 of the Y-axis unit, pin two of the terminal CN16 of the Y-axis control unit is electrically connected to pin two of the terminal CN14 of the Y-axis unit, pin three of the terminal CN16 of the Y-axis control unit is electrically connected to pin three of the terminal CN14 of the Y-axis unit, pin four of the terminal CN16 of the Y-axis control unit is electrically connected to pin four of the terminal CN14 of the Y-axis unit, pin five of the terminal CN16 of the Y-axis control unit is electrically connected to pin five of the terminal CN14 of the Y-axis unit, and pin six of the terminal CN16 of the Y-axis control unit is electrically connected to pin six of the terminal CN14 of the Y-axis unit.

8. The control and acquisition circuit system of the scanner translation stage as claimed in claim 7, characterized in that: Pin 1 of the chip U2 is electrically connected to pin 1A of the differential circuit driver chip U1, pin 2 of the chip U2 is electrically connected to pin 1A of the differential circuit driver chip U1, pin 3 of the chip U2 is electrically connected to pin 4A of the differential circuit driver chip U1, pin 4 of the chip U2 is electrically connected to pin 3A of the differential circuit driver chip U1, pin 1 of the connection terminal CN5 of the X-axis control unit is electrically connected to pin 1Y of the differential circuit driver chip U1, pin 2 of the connection terminal CN5 of the X-axis control unit is electrically connected to pin 1Z of the differential circuit driver chip U1, pin 3 of the connection terminal CN5 of the X-axis control unit is electrically connected to pin 4Y of the differential circuit driver chip U1, and pin 4 of the connection terminal CN5 of the X-axis control unit is electrically connected to pin 4Z of the differential circuit driver chip U1.

9. The control and acquisition circuit system of the scanner displacement stage as claimed in claim 8, characterized in that: Pin 1 of the connection terminal CN7 of the Y-axis control unit is electrically connected to pin 2Y of the differential circuit driver chip U1, pin 1 of the connection terminal CN7 of the Y-axis control unit is electrically connected to pin 2Z of the differential circuit driver chip U1, pin 3 of the connection terminal CN7 of the Y-axis control unit is electrically connected to pin 3Y of the differential circuit driver chip U1, and pin 4 of the connection terminal CN7 of the Y-axis control unit is electrically connected to pin 3Z of the differential circuit driver chip U1.

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