Double-sided drilling device for electrode hole machining

Abstract

The utility model discloses a double-face drilling device for electrode hole machining, which comprises a workbench, a first supporting table and a second supporting table are respectively arranged on two sides of the top end of the workbench, a groove is arranged in the middle of the top end of the first supporting table, and drill bits are symmetrically arranged on two sides of the top end of the first supporting table. A guide rod is arranged on the side face of the second supporting table, one end of the guide rod is fixedly connected with a bearing ring, one end of the inner side of the bearing ring is fixedly connected with a baffle ring, and the other end of the baffle ring is fixedly connected with a limiting ring. Therefore, the problem that the length of the drill bit is limited is avoided, the load of the drill bit is indirectly reduced, and the efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of electrode drilling, in particular to a double-sided drilling device for electrode hole processing. Background Art

[0002] As communications develop from 4G to 5G, and electronic industries such as smartphones become more and more developed, people's requirements for chips are getting higher and higher. The semiconductor process technology is also developing from 24 nanometers to 7 nanometers and 5 nanometers to further improve the performance and capacity of chips. This requires more stringent production conditions than existing processes, such as higher power. In order to produce more stable chips, the requirements for the morphological diversity and size of the fine holes of the plasma electrode used in plasma engineering are also getting higher and higher. There are many fine holes processed on the plasma electrode, most of which are processed using drill bits;

[0003] However, due to the low applicability of the existing electrode drilling device, the existing processing drill bit generally has a thickness limit. If the thickness exceeds this limit, the processing is difficult due to the limitation of the length of the drill bit and the limitation of the processing life of the drill bit.

[0004] Therefore, those skilled in the art provide a double-sided drilling device for electrode hole processing to solve the problems raised in the above background technology. Utility Model Content

[0005] The utility model aims to solve the shortcomings in the prior art and proposes a double-sided drilling device for electrode hole processing.

[0006] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0007] A double-sided drilling device for electrode hole processing, comprising a workbench, wherein a first support platform and a second support platform are respectively installed on both sides of the top of the workbench, a groove is opened in the middle of the top of the first support platform, drill bits are symmetrically arranged on both sides of the top of the first support platform, and a guide rod is arranged on the side of the second support platform, one end of the guide rod is fixedly connected to a load-bearing ring, one end of the inner side of the load-bearing ring is fixedly connected to a retaining ring, and the other end of the retaining ring is fixedly connected to a limiting ring, an electrode plate is slidably installed on the inner side of the limiting ring, and a plurality of L-shaped blocks distributed in a ring array are arranged on the end of the limiting ring, an adjusting screw is installed through the L-shaped block, a plurality of thread grooves are opened on the limiting ring, and one end of the adjusting screw is threadedly connected to the thread groove.

[0008] Preferably, the inner diameter of the retaining ring is smaller than the inner diameter of the limiting ring, and one end of the electrode plate is in contact with the end of the limiting ring.

[0009] Preferably, guide rails are symmetrically installed on both sides of the top of the first support platform, and a movable seat is slidably connected to the top of the guide rails. Motor 1 is installed at one end of the guide rail, and a screw is fixedly connected to the output shaft end of the motor 1, and the screw passes through the guide rail. The movable seat is movably sleeved on the outside of the screw through a threaded sleeve, and fixed rods are movably penetrated on both sides of the movable seat, and both ends of the fixed rods are respectively fixed to both sides of the inner side of the guide rails, and motor 2 is installed on the top of the movable seat, and a drill bit is fixedly connected to one end of the output shaft of motor 2.

[0010] Preferably, protective covers are provided on both sides of the top of the first support platform, and the protective covers are arranged on the outside of the guide rail and the motor. Mounting plates are fixedly connected to the bottom ends of both sides of the protective covers, and the mounting plates are fixed to the first support platform by screws. Connecting holes are opened at the adjacent ends of the two protective covers, and the drill bit extends to the outside of the protective covers through the connecting holes.

[0011] Preferably, a fixed cavity is opened inside the second support platform, and a vertical screw module is installed in the fixed cavity. A transverse screw module is slidably connected to the vertical screw module, and a guide seat is slidably installed on the transverse screw module. The other end of the guide rod is fixedly connected to the guide seat, and a guide hole is opened on the side of the second support platform, and the outer side of the guide rod is slidably connected to the inner side of the guide hole.

[0012] Compared with the prior art, the beneficial effects of the utility model are as follows: the technical solution designed by the utility model symmetrically arranges two drill bits, and the two drill bits can drill holes on both sides of the same position of the electrode without turning the electrode over for drilling, thereby avoiding the problem of limited drill bit length. Compared with the traditional method of using a longer drill bit to process thicker workpieces, the drill bit load is larger, which reduces its service life. The double-sided drilling method adopted in this application can indirectly reduce the drill bit load and improve efficiency, and the workpiece can be stably fixed by setting a load ring. The drill bits on both sides can only move in the same straight line direction to ensure the accuracy of the drilling position. Changing the drilling position can change the position of the workpiece through the corresponding driving device. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] In order to more specifically and intuitively illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art are briefly introduced below.

[0014] Figure 1 It is a schematic diagram of the structure proposed by the utility model;

[0015] Figure 2 This is a schematic diagram of the guide rail installation structure proposed by the utility model;

[0016] Figure 3 This is a schematic diagram of the drill bit installation structure proposed by the utility model;

[0017] Figure 4This is a schematic diagram of the structure of the load-bearing ring proposed by the utility model;

[0018] Figure 5 This is a schematic diagram of the guide rod installation structure proposed by the utility model.

[0019] In the figure: 1. workbench; 2. first support platform; 3. groove; 4. drill bit; 5. second support platform; 6. guide rod; 7. load-bearing ring; 8. retaining ring; 9. limit ring; 10. electrode plate; 11. L-shaped block; 12. adjusting screw; 13. guide rail; 14. motor 1; 15. lead screw; 16. movable seat; 17. protective cover; 18. mounting plate; 19. fixed cavity; 20. vertical lead screw module; 21. horizontal lead screw module; 22. guide seat. DETAILED DESCRIPTION

[0020] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0021] Reference Figure 1-5 , a double-sided drilling device for electrode hole processing, comprising a workbench 1, a workbench 1, a first support platform 2 and a second support platform 5 are respectively installed on both sides of the top of the workbench 1, a groove 3 is opened in the middle of the top of the first support platform 2, drill bits 4 are symmetrically arranged on both sides of the top of the first support platform 2, and a guide rod 6 is arranged on the side of the second support platform 5, one end of the guide rod 6 is fixedly connected to a load ring 7, one end of the inner side of the load ring 7 is fixedly connected to a retaining ring 8, and the other end of the retaining ring 8 is fixedly connected to a limiting ring 9, an electrode plate 10 is slidably installed on the inner side of the limiting ring 9, and a plurality of L-shaped blocks 11 distributed in a ring array are arranged at the end of the limiting ring 9, an adjusting screw 12 is penetrated and installed on the L-shaped block 11, a plurality of thread grooves are opened on the limiting ring 9, and one end of the adjusting screw 12 is threadedly connected in the thread groove, the inner diameter of the retaining ring 8 is smaller than the inner diameter of the limiting ring 9, and one end of the electrode plate 10 is fitted with the end of the limiting ring 9;

[0022] The technical solution adopted above uses a double drill bit to drill holes on both sides, so that the two drill bits can drill holes on both sides of the same position of the electrode without turning the electrode over for drilling, thereby avoiding the problem of limited drill bit length. The provided carrying ring 7 is convenient for placing the corresponding electrode plate 10. The electrode plate 10 is placed inside the carrying ring 7 and fits the retaining ring 8. Then, the L-shaped block 11 is installed so that one end of the L-shaped block 11 is against the electrode plate 10. The corresponding adjusting screw 12 is screwed in to fix the position of the L-shaped block 11. The position of the electrode plate 10 is fixed by the action of the L-shaped block 11 and the retaining ring 8, which facilitates drilling.

[0023] Guide rails 13 are symmetrically installed on both sides of the top of the first support platform 2, and a movable seat 16 is slidably connected to the top of the guide rail 13. A motor 14 is installed at one end of the guide rail 13. A lead screw 15 is fixedly connected to the output shaft end of the motor 14, and the lead screw 15 passes through the guide rail 13. The movable seat 16 is movably sleeved on the outside of the lead screw 15 through a thread. Fixed rods are movably penetrated on both sides of the movable seat 16, and the two ends of the fixed rods are respectively fixed to the two sides of the inner side of the guide rail 13. A motor 2 is installed on the top of the movable seat 16, and a drill bit 4 is fixedly connected to one end of the output shaft of the motor 2;

[0024] The technical solution adopted above can drive the movable seat 16 to move left and right along the guide rail 13 through the forward and reverse rotation of motor 14, so that the movable seat 16 can drive the drill bit 4 to move close to the workpiece for drilling operations. The drill bits 4 on both sides only perform linear motion on the same horizontal line to ensure the accuracy of the drilling positions of both. Motor 2 drives the drill bit 4 to rotate at high speed.

[0025] Protective covers 17 are provided on both sides of the top of the first support platform 2, and the protective covers 17 are provided on the outside of the guide rail 13 and the motor 14. The bottom ends of both sides of the protective covers 17 are fixedly connected with mounting plates 18, and the mounting plates 18 are fixed to the first support platform 2 by screws. The adjacent ends of the two protective covers 17 are provided with connecting holes, and the drill bit 4 extends to the outside of the protective covers 17 through the connecting holes.

[0026] In the technical solution adopted above, the function of the protective cover 17 is to prevent the motor 14, guide rail 13 and motor 2 and other structures from being exposed to the outside, and to provide corresponding protection. The diameter of the connecting hole is larger than the diameter of the drill bit 4, which is convenient for the drill bit 4 to move and perform corresponding drilling operations.

[0027] A fixed cavity 19 is provided inside the second support platform 5, a vertical screw module 20 is installed in the fixed cavity 19, a horizontal screw module 21 is slidably connected to the vertical screw module 20, a guide seat 22 is slidably installed on the horizontal screw module 21, the other end of the guide rod 6 is fixedly connected to the guide seat 22, a guide hole is provided on the side of the second support platform 5, and the outer side of the guide rod 6 is slidably connected to the inner side of the guide hole;

[0028] In the technical solution adopted above, the vertical screw module 20 and the transverse screw module 21 are used for vertical and transverse driving. The vertical screw module 20 can drive the transverse screw module 21 to move up and down on the vertical plane, and the transverse screw module 21 can drive the guide seat 22 to move forward and backward on the transverse plane. Therefore, the two sides cooperate with each other to control the up and down and forward and backward movements of the guide rod 6 and the supporting ring 7, thereby changing the punching position on the electrode plate 10.

[0029] Working principle:

[0030] When performing the drilling operation of the electrode plate 10, the electrode plate 10 is placed in the carrying ring 7, and then the electrode plate 10 is fixed by the L-shaped block 11, and the motor 2 and the corresponding motor 1 14 are started to drive the drill bit 4 to rotate at high speed while making the drill bit 4 gradually approach the electrode plate 10 and perform the drilling operation. By setting the drill bits 4 on both sides, holes can be drilled on both sides of the electrode plate 10, thereby avoiding the problem of limited drill bit length. The drill bits 4 on both sides move on the same straight line, so that the drilling positions of the two must be the same. When the drilling position needs to be adjusted, the corresponding vertical screw module 20 and the horizontal screw module 21 are started to change the position of the carrying ring 7, thereby changing the drilling position. The driving method of the vertical screw module 20 and the horizontal screw module 21 is similar to the method of driving the drill bit 4 to move.

[0031] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A double-sided drilling device for electrode hole processing, comprising a workbench (1), characterized in that: The workbench (1) comprises a first support platform (2) and a second support platform (5) respectively mounted on both sides of the top of the workbench (1); a groove (3) is provided in the middle of the top of the first support platform (2); drill bits (4) are symmetrically arranged on both sides of the top of the first support platform (2); a guide rod (6) is arranged on the side of the second support platform (5); a load ring (7) is fixedly connected to one end of the guide rod (6); a retaining ring (8) is fixedly connected to one end of the inner side of the load ring (7); a limiting ring (9) is fixedly connected to the other end of the retaining ring (8); an electrode plate (10) is slidably mounted on the inner side of the limiting ring (9); a plurality of L-shaped blocks (11) distributed in a ring array are arranged at the end of the limiting ring (9); an adjusting screw (12) is penetrated and mounted on the L-shaped block (11); a plurality of thread grooves are provided on the limiting ring (9); and one end of the adjusting screw (12) is threadedly connected in the thread groove.

2. A double-sided drilling device for electrode hole processing according to claim 1, characterized in that: The inner diameter of the retaining ring (8) is smaller than the inner diameter of the limiting ring (9), and one end of the electrode plate (10) is in contact with the end of the limiting ring (9).

3. A double-sided drilling device for electrode hole processing according to claim 1, characterized in that: Guide rails (13) are symmetrically mounted on both sides of the top of the first support platform (2), and a movable seat (16) is slidably connected to the top of the guide rail (13). A motor (14) is mounted on one end of the guide rail (13), and a lead screw (15) is fixedly connected to the output shaft end of the motor (14), and the lead screw (15) passes through the guide rail (13). The movable seat (16) is movably sleeved on the outside of the lead screw (15) through a threaded sleeve. Fixed rods are movably penetrated on both sides of the movable seat (16), and the two ends of the fixed rods are respectively fixedly connected to the inner sides of the guide rail (13). A motor (2) is mounted on the top of the movable seat (16), and a drill bit (4) is fixedly connected to one end of the output shaft of the motor (2).

4. A double-sided drilling device for electrode hole processing according to claim 3, characterized in that: Protective covers (17) are provided on both sides of the top of the first support platform (2), and the protective covers (17) are arranged on the outside of the guide rail (13) and the motor (14). The bottom ends of both sides of the protective covers (17) are fixedly connected with mounting plates (18), and the mounting plates (18) are fixed to the first support platform (2) by screws. The adjacent ends of the two protective covers (17) are provided with connecting holes, and the drill bit (4) extends to the outside of the protective covers (17) through the connecting holes.

5. A double-sided drilling device for electrode hole processing according to claim 1, characterized in that: A fixed cavity (19) is provided inside the second support platform (5), a vertical screw module (20) is installed in the fixed cavity (19), a horizontal screw module (21) is slidably connected to the vertical screw module (20), a guide seat (22) is slidably installed on the horizontal screw module (21), the other end of the guide rod (6) is fixedly connected to the guide seat (22), a guide hole is provided on the side of the second support platform (5), and the outer side of the guide rod (6) is slidably connected to the inner side of the guide hole.

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