Diffusion sheet circle cutting jig

Abstract

The utility model belongs to the technical field of chip manufacturing process equipment, and particularly relates to a diffusion sheet circle cutting jig. The protective cover comprises supporting columns, an outer protective cover and a positioning piece. The top faces of the supporting columns are located on the same plane to form a supporting face. The outer protective cover covers the supporting columns, a cavity is formed in the outer protective cover, an opening surrounding the supporting columns is formed in the top of the outer protective cover, and an extraction opening communicating with the inner cavity is formed in the bottom of the outer protective cover; the positioning piece is arranged on the top of the outer shield in the circumferential direction, and the outer side wall of the positioning piece is used for making contact with the periphery of the diffusion sheet so as to position the diffusion sheet placed on the supporting face. The device is used for solving the problems that chippings splash everywhere and the diffusion sheet is easy to damage when the diffusion sheet is cut to be round.

Description

Technical Field

[0001] The utility model belongs to the technical field of chip manufacturing process equipment, and in particular relates to a diffusion sheet circle cutting jig. Background Art

[0002] Diffusion wafer scribing is an important step in the integrated circuit manufacturing process, and diffusion wafer cutting is an important step in the diffusion wafer manufacturing process. Cutting the circle usually refers to cutting and retaining the periphery of the required graphics in the diffusion wafer, and removing the unnecessary parts outside the cut circle area.

[0003] Diffusion wafers are usually cut by laser to separate chips. The laser moves from top to bottom along the cutting path to cut the wafer. Inevitably, some debris and sparks will be generated during the laser cutting process. When using it, it usually needs to be carried out in a closed environment. However, since the laser cutting is carried out from top to bottom, the sparks or debris generated during the cutting process will splash back onto the chip table, which can easily cause certain damage to the surface of the diffusion wafer. Utility Model Content

[0004] The technical problem to be solved by the utility model is to overcome the deficiencies of the prior art and provide a diffuser sheet cutting jig for solving the problem that when the diffuser sheet is cut into a circle, debris will splash everywhere and the diffuser sheet will be easily damaged.

[0005] The utility model solves the above technical problems with the following technical solutions: a diffuser cutting circle jig, comprising:

[0006] A plurality of support columns, wherein the top surfaces of the plurality of support columns are located in the same plane to form a support surface;

[0007] An outer shield, which is arranged outside the support column, a cavity is formed inside the outer shield, an opening surrounding the outside of the support column is formed at the top of the outer shield, and an air extraction port connected to the internal cavity is arranged at the bottom of the outer shield;

[0008] At least two positioning members are circumferentially arranged on the top of the outer shield, and the outer side walls of the positioning members are used to contact the outer periphery of the diffusion sheet to position the diffusion sheet placed on the support surface.

[0009] Compared with the prior art, the above technical solution has the following beneficial effects:

[0010] By placing the diffuser on the top surface of the outer shield extending out from the top of the support column, and then placing the outer shield outside the support column to cover the support column, when the diffuser placed on the support column is cut, the debris flying downward will be collected in the outer shield, and the outer shield is provided with an exhaust port, which continuously exhausts air during cutting, so that the debris generated by the cutting can be immediately extracted, thereby preventing the debris from rebounding and hitting the diffuser above.

[0011] Based on the above technical solution, the embodiment of the present application can also be improved as follows:

[0012] Furthermore, the plurality of support columns are arranged without contact with each other, and cutting gaps are left between the plurality of support columns and between the support columns and the outer shield.

[0013] Furthermore, the support surface is higher than the top surface of the outer shield.

[0014] The diffusion sheet placed on the supporting surface is prevented from contacting the top surface of the outer shield.

[0015] Furthermore, the top surface of the positioning member is higher than the supporting surface.

[0016] Make sure the outer side wall of the positioning piece can contact the outer periphery of the diffuser.

[0017] Furthermore, the support column is hollow inside, the top of the support column is provided with at least one adsorption hole connected with the inside thereof, and the bottom of the support column is provided with an adsorption port connected with the outside.

[0018] By setting the support column to be hollow inside, negative pressure is formed inside the support column, and the diffusion sheet placed on the support column is adsorbed and fixed on the support column through the adsorption holes, which is convenient for cutting.

[0019] Furthermore, the outer shield comprises:

[0020] A base, a plurality of support columns are installed on the base, and the adsorption ports provided at the bottoms of the support columns penetrate the base;

[0021] The cylinder is fixed on the base, and the cavity is formed between the cylinder and the base. The air extraction port is connected to the cylinder.

[0022] Furthermore, a groove connecting the plurality of adsorption ports is provided on the base.

[0023] Furthermore, a plurality of connection holes for installing the positioning member are circumferentially arranged on the top of the outer shield. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0025] Figure 1 It is a schematic diagram of the top structure of the utility model.

[0026] Figure 2 for Figure 1 Schematic diagram of the structure viewed from above.

[0027] Figure 3 for Figure 1 Schematic diagram of the cross-sectional structure along the AA axis.

[0028] Figure 4 for Figure 3 Enlarged structural diagram at A in the middle.

[0029] Reference numerals:

[0030] 1. Support column; 2. Outer shield; 3. Opening; 4. Air extraction port; 5. Positioning piece;

[0031] 6. Adsorption hole; 7. Adsorption port;

[0032] 8. base; 9. cylinder; 10. cavity;

[0033] 11. Groove. DETAILED DESCRIPTION

[0034] The following embodiments of the technical solution of the utility model are described in detail in conjunction with the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solution of the utility model, and are therefore only used as examples, and cannot be used to limit the protection scope of the utility model.

[0035] It should be noted that, unless otherwise specified, the technical terms or scientific terms used in this application should have the common meanings understood by technicians in the field to which the utility model belongs.

[0036] In the description of the present application, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", "top", "bottom", "inside", "outside", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0037] In addition, the terms "first", "second", etc. are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. In the description of the present utility model, the meaning of "plurality" is more than two, unless otherwise clearly and specifically limited.

[0038] In this application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this utility model can be understood according to specific circumstances.

[0039] Example

[0040] like Figure 1-4 As shown, the utility model provides a diffuser circle cutting jig, which includes: four support columns, an outer shield and two positioning pieces.

[0041] The top surfaces of the four support columns are located in the same plane to form a support surface, and the diffuser to be cut is placed on the top support surface of the support columns, wherein the size, number and position of the support columns correspond to the size, position and number of the discs to be cut on the diffuser. After the cutting is completed, the four support columns support four discs correspondingly, and the size, number and position of the discs on the diffuser can be set differently according to different diffusers;

[0042] The outer shield is arranged outside the support column, and a cavity is formed inside the outer shield. An opening is arranged at the top of the outer shield and surrounds the outside of several support columns, that is, the inner contour of the opening of the outer shield is located outside the support columns, and the support columns are surrounded therein. The top of the support column can extend from the top opening of the outer shield. The bottom of the outer shield is provided with an exhaust port connected to the internal cavity, and the exhaust port is connected to an external negative pressure gas source to continuously draw suction during the cutting process.

[0043] Two positioning members are circumferentially arranged at the top of the outer shield, and the outer side wall of the positioning member is used to contact the outer periphery of the diffuser to position the diffuser placed on the support surface. Positioning can be achieved when the outer periphery of the diffuser contacts the outer side wall of the positioning member. Since the positioning members are circumferentially arranged, two positioning members can achieve positioning, and then the angle can be adjusted by aligning the markings on the diffuser with the positioning members.

[0044] By placing the diffuser on the top surface of the outer shield extending out from the top of the support column, and then placing the outer shield outside the support column to cover the support column, when the diffuser placed on the support column is cut, the debris flying downward will be collected in the outer shield, and the outer shield is provided with an exhaust port, which continuously exhausts air during cutting, so that the debris generated by the cutting can be immediately extracted, thereby preventing the debris from rebounding and hitting the diffuser above.

[0045] To ensure smooth cutting, the multiple support columns do not interfere with each other, the support columns are not arranged to contact each other, cutting gaps are left between the support columns and between the support columns and the outer shield, the multiple support columns do not contact each other to form a cutting gap, and the external support column does not contact the inner wall of the opening to form a cutting gap.

[0046] Among them, the supporting surface is higher than the top surface of the outer protective cover, so that the diffusion sheet placed on the supporting surface avoids contact with the top surface of the outer protective cover, thereby avoiding excessive wear; at the same time, the supporting surface extends out of the top surface of the outer protective cover, so that a gap is formed between the supporting surface and the outer protective cover, which is convenient for subsequent vacuum ports to continue vacuuming.

[0047] Wherein, the top surface of the positioning member is higher than the supporting surface, ensuring that the outer side wall of the positioning member can contact the outer periphery of the diffusion sheet.

[0048] In this embodiment, the support column is hollow inside, and at least one adsorption hole connected to the interior of the support column is provided on the top of the support column. In this embodiment, a plurality of adsorption holes are provided, which are arranged in a circle with the center of the top surface of the support column, so as to more stably adsorb the diffuser placed thereon. The support column is provided with an adsorption port connected to the outside at the bottom, and the adsorption port is connected to an external negative pressure air source.

[0049] By setting the support column to be hollow inside, negative pressure is formed inside the support column, and the diffusion sheet placed on the support column is adsorbed and fixed on the support column through the adsorption holes, which is convenient for cutting.

[0050] The outer shield comprises a base and a cylinder.

[0051] The support column is installed on the base, and the suction port opened at the bottom of the support column passes through the base opening where the suction port at the bottom of the support column is set, so as to facilitate connection with an external negative pressure air source. The cylinder is fixed on the base to form the cavity between the cylinder and the base, and the air suction port is connected to the cylinder.

[0052] In order to ensure stable air pressure between multiple suction ports, a groove connecting the multiple suction ports is opened on the base to connect the multiple suction ports so that when negative pressure is drawn from the suction ports, the negative pressure in multiple support columns can be balanced and stable.

[0053] A plurality of connection holes for installing the positioning member are circumferentially arranged on the top of the outer shield. The positioning member can be connected to the connection holes by screws or the like, making disassembly and adjustment more convenient.

[0054] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, ordinary technicians in this field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not make the essence of the corresponding technical solution deviate from the scope of the technical solution of the embodiments of the utility model.

Claims

1. A diffuser circle cutting jig, characterized in that: include: A plurality of support columns, wherein the top surfaces of the plurality of support columns are located in the same plane to form a support surface; An outer shield, which is arranged outside the support column, a cavity is formed inside the outer shield, an opening surrounding the outside of the support column is formed at the top of the outer shield, and an air extraction port connected to the internal cavity is arranged at the bottom of the outer shield; At least two positioning members are circumferentially arranged on the top of the outer shield, and the outer side walls of the positioning members are used to contact the outer periphery of the diffusion sheet to position the diffusion sheet placed on the support surface.

2. The circle cutting jig according to claim 1, characterized in that: The support columns are arranged without contact with each other, and cutting gaps are left between the support columns and between the support columns and the outer shield.

3. The circle cutting jig according to claim 1, characterized in that: The supporting surface is higher than the top surface of the outer shield.

4. The circle cutting jig according to claim 3, characterized in that: The top surface of the positioning member is higher than the supporting surface.

5. The circle cutting jig according to claim 1, characterized in that: The support column is hollow inside, the top of the support column is provided with at least one adsorption hole communicating with the inside, and the bottom of the support column is provided with an adsorption port communicating with the outside.

6. The circle cutting jig according to claim 5, characterized in that: The outer shield comprises: A base, a plurality of support columns are installed on the base, and the adsorption ports provided at the bottoms of the support columns penetrate the base; The cylinder is fixed on the base, and the cavity is formed between the cylinder and the base. The air extraction port is connected to the cylinder.

7. The circle cutting jig according to claim 6, characterized in that: The base is provided with a groove which is connected with the plurality of adsorption ports.

8. The circle cutting jig according to claim 1, characterized in that: A plurality of connection holes for installing the positioning member are circumferentially arranged on the top of the outer shield.

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