Target material feeding mechanism of coating equipment

Abstract

The utility model provides a target material feeding mechanism of coating equipment, and relates to the field of target material feeding, the bottom end of a seat body is coaxially provided with a bevel gear B, and the bevel gear B is in meshing transmission with a bevel gear A arranged on an output shaft of a motor. The problems that when a target material is manually fed into coating equipment, the target material is prone to colliding with a body of the coating equipment due to insertion connection missing positioning, and the target material body and the coating equipment can be damaged are solved through the arrangement of a support, a movable base and a base body, and when the target material is installed, the target material is not prone to colliding with the body of the coating equipment; the base body can be pushed to the lower side by starting the electric push rod installed on the bottom end face of the support, and when the base body moves to the lower side, the target material piece installed in the base body can be synchronously driven to move to the lower side to achieve stable guiding installation operation of the target material piece, and then the purpose of being more practical is achieved.

Description

Technical Field

[0001] The utility model belongs to the field of target material feeding, in particular to a target material feeding mechanism of coating equipment. Background Art

[0002] The coating target material is a sputtering source that forms various functional thin films on a substrate under appropriate process conditions by magnetron sputtering, multi-arc ion plating or other types of coating systems. It is an important raw material in the tool coating process. The target material forms a wear-resistant and corrosion-resistant coating on the surface of the tool, which can significantly extend the service life of the tool. When this type of target material is in use, the coating equipment used for it mostly adopts a manual filling and material removal structure in order to be able to install the target material. When the target material is manually supplied to the interior of the coating equipment, it is easy to collide with the main body of the coating equipment due to lack of positioning during insertion, which will cause damage to the target material body and the coating equipment.

[0003] Therefore, in view of the deficiencies in the actual production and implementation of the above-mentioned scheme, it is revised and improved. At the same time, in the spirit and concept of seeking excellence, with the assistance of professional knowledge and experience, and after many ingenuity and experiments, the utility model is created. A target material feeding mechanism for a coating equipment is provided to solve the problem that the existing structure of mostly manual filling and material removal makes it easy for manual labor to cause collisions with the main body of the coating equipment when the target material is fed into the interior of the coating equipment due to the lack of positioning during insertion, which may cause damage to the target material body and the coating equipment. Utility Model Content

[0004] The utility model proposes a target material feeding mechanism for a coating device, which solves the problem that the structure of manual filling and material removal is mostly adopted in the prior art, so that when the target material is manually fed into the interior of the coating device, it is easy to cause collision with the main body of the coating device due to lack of positioning during insertion, which may cause damage to the target material body and the coating device.

[0005] The technical solution of the utility model is implemented as follows: a target material feeding mechanism of a coating device includes a motor, wherein the motor is provided at two locations, and the two motors are oppositely installed at the left and right sides of the inside of the shell, and the inner sides of the two motors are installed with output shafts, and the output shafts are installed with bevel gears A, and the motors and bevel gears A together form a driving structure, and the top of the shell is rotatably connected with a seat body, the main body of the seat body is a cylindrical structure, and the bottom end of the seat body is coaxially installed with a bevel gear B, and the bevel gear B is meshed with the bevel gear A arranged on the output shaft of the motor for transmission, and a brush is fixedly connected to the outer peripheral surface of the guide seat in an annular array:

[0006] As a preferred embodiment, a mounting plate is fixedly connected to the outer side of the shell, the mounting plate and the shell are vertically arranged, and there are four mounting plates in total, which are respectively fixedly connected to the four corners on the outer side of the shell, and screw holes are opened inside the mounting plates.

[0007] As a preferred embodiment, a cover plate is installed on the top of the shell, and the outer fixing rod of the cover plate is connected to a connecting plate. There are four connecting plates in total, and the four connecting plates are respectively fixedly connected to the four corners on the outer side of the cover plate, and the connecting plate and the mounting plate are connected by a fixing bolt.

[0008] As a preferred embodiment, a bracket is fixedly connected to the top end surface of the cover plate, the main body of the bracket is an L-shaped structure, a longitudinal groove is opened inside the longitudinal component of the bracket, and an electric push rod is installed on the bottom end surface of the horizontal and oblique component of the bracket.

[0009] As a preferred embodiment, a seat body is installed on the bottom output end of the electric push rod, the main body of the seat body is a cylindrical structure with an open bottom end, and a moving seat is fixedly connected to the rear side of the outer circumferential surface of the seat body, and two sliders are fixedly connected to the outer side of the moving seat in opposite directions, and the moving seat is slidably connected in the bracket through the sliders fixedly connected on its outer surface.

[0010] As a preferred embodiment, a screw hole is opened at the front end of the outer peripheral surface of the base body, a fixing bolt is screwed inside the screw hole, and a target material is inserted into the bottom end of the base body, and a collecting cover is fixedly connected to the inner frame of the shell, and the collecting cover is used to collect waste chips, and a collecting tube is fixedly connected to the rear side of the collecting cover, and the collecting tube is used to recover waste chips.

[0011] After using the above technical solution, the beneficial effects of the utility model are:

[0012] 1. In the utility model, a brush that can rotate around the guide seat is provided, so that when the target material is inserted, the motor installed on the outside of the shell can be started to drive the bevel gear A to rotate, and the meshing transmission of the bevel gear A and the bevel gear B arranged at the bottom of the guide seat can realize the automatic cleaning operation of the outer surface of the current target material, so that when it is used, the accuracy of the target material in the subsequent coating can be significantly improved.

[0013] 2. In the utility model, by providing a bracket, a movable seat and a seat body, when the target material is installed, the seat body can be pushed downward by starting the electric push rod installed on the bottom end surface of the bracket, and when the seat body moves downward, it can synchronously drive the target material installed in the seat body to move downward to achieve a stable guided installation operation for the target material, thereby achieving a more practical purpose. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0015] Figure 1 It is a schematic diagram of the front and side structure of the target material feeding mechanism of the utility model after being disassembled;

[0016] Figure 2 It is a schematic diagram of the combined structure of the target material feeding mechanism of the utility model;

[0017] Figure 3 It is a schematic diagram of the combined structure of the electric push rod and the base body of the target material feeding mechanism of the utility model;

[0018] Figure 4 It is a schematic diagram of the combined structure of the guide seat and the brush of the target material feeding mechanism of the utility model;

[0019] Figure 5 It is a schematic diagram of the combined structure of the cover plate and the bracket of the target material feeding mechanism of the utility model;

[0020] Figure 6 It is a schematic diagram of the guide seat rotation direction structure of the target material feeding mechanism of the utility model;

[0021] In the figure, 1. shell; 101. mounting plate; 102. cover plate; 103. connecting plate; 104. fixing bolt; 2. bracket; 201. electric push rod; 202. seat body; 203. moving seat; 204. slider; 205. positioning bolt; 206. target material; 3. motor; 301. bevel gear A; 302. guide seat; 303. bevel gear B; 304. brush; 305. collection cover; 306. collection tube. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0023] like Figure 1-Figure 6As shown, a target material feeding mechanism of a coating device includes: a motor 3, wherein two motors 3 are provided, and the two motors 3 are oppositely installed at the left and right sides of the inside of a housing 1, and output shafts are installed on the inner sides of the two motors 3, and a bevel gear A301 is installed on the output shaft, and the motor 3 and the bevel gear A301 together form a driving structure, and the top end of the housing 1 is rotatably connected to a guide seat 302, the main body of the guide seat 302 is a cylindrical structure, and a bevel gear B303 is coaxially installed at the bottom end of the guide seat 302, and the bevel gear B30 3 is meshed with the bevel gear A301 arranged on the output shaft of the motor 3 for transmission, and a brush 304 is fixedly connected to the outer peripheral surface of the guide seat 302 in an annular array, a screw hole is opened at the front end of the outer peripheral surface of the seat body 202, a positioning bolt 205 is screwed inside the screw hole, and a target material 206 is inserted at the bottom end of the seat body 202, and a collecting cover 305 is fixedly connected to the inner bone of the shell 1, and the collecting cover 305 is used to collect waste chips, and a collecting pipe 306 is fixedly connected to the rear side of the collecting cover 305, and the collecting pipe 306 is used to recover waste chips.

[0024] Among them, a mounting plate 101 is fixedly connected to the outer side of the shell 1, the mounting plate 101 is vertically arranged with the shell 1, and there are four mounting plates 101 in total, which are respectively fixedly connected to the four corners on the outer side of the shell 1, and screw holes are opened inside the mounting plates 101, a cover plate 102 is installed on the top of the shell 1, and the outer fixing rod of the cover plate 102 is connected to a connecting plate 103, there are four connecting plates 103 in total, and the four connecting plates 103 are respectively fixedly connected to the four corners on the outer side of the cover plate 102, and the connecting plate 103 and the mounting plate 101 are connected by fixing bolts 104.

[0025] Among them, a bracket 2 is fixedly connected to the top surface of the cover plate 102, the main body of the bracket 2 is an L-shaped structure, and a longitudinal groove is opened inside the longitudinal component of the bracket 2, and an electric push rod 201 is installed on the bottom end surface of the horizontal and oblique component of the bracket 2, and a seat body 202 is installed on the bottom output end of the electric push rod 201. The main body of the seat body 202 is a cylindrical structure with an opening at the bottom end, and a moving seat 203 is fixedly connected to the rear side of the outer circumferential surface of the seat body 202, and two sliders 204 are fixedly connected to the outer side of the moving seat 203 in opposite directions, and the moving seat 203 is slidably connected in the bracket 2 through the slider 204 fixedly connected on its outer surface.

[0026] During use, when the tool is installed inside the coating equipment for coating processing, the shell 1 can be placed on one side of the feed port of the coating equipment for installation, and the through hole opened in the shell 1 can be aligned with the coating equipment. At this time, the target material 206 to be used is inserted into the bottom position of the seat body 202 fixedly connected to the bottom end surface of the electric push rod 201, and the positioning bolt 205 is screwed into the inside of the seat body 202 to limit the target material 206. After the limiting operation is completed, the electric push rod 201 installed on the bottom end surface of the bracket 2 is started to push the seat body 202 downward. When the seat body 202 moves downward, the moving seat 203 fixedly connected to the rear side of the seat body 202 and the slider 204 can be synchronously driven to move along the bracket 2 to achieve rapid and stable guidance, until the target material 206 is inserted into the interior of the coating equipment and the corresponding subsequent coating processing operation is performed.

[0027] When the target material 206 is inserted, the motor 3 installed on the outside of the shell 1 can be synchronously started to drive the bevel gear A301 to rotate, and the guide seat 302 can be driven to rotate through the meshing transmission of the bevel gear A301 and the bevel gear B303 arranged at the bottom of the guide seat 302. When the guide seat 302 rotates, the brush 304 on its outer surface can be synchronously driven to rotate, and the rotation of the brush 304 can be used to achieve a rapid surface cleaning operation of the target material 206, and by utilizing the collection cover 305 arranged in the shell 1, the waste chips remaining on the surface of the target material 206 can be quickly removed and collected, thereby achieving a more practical purpose.

Claims

1. A target material feeding mechanism for a coating device, characterized in that: The invention comprises a motor (3), wherein the motor (3) is provided at two locations, and the two motors (3) are installed oppositely at left and right sides of the inside of a housing (1), and output shafts are installed on the inner sides of the two motors (3), and a bevel gear A (301) is installed on the output shaft, and the motor (3) and the bevel gear A (301) together form a driving structure, and the top end of the housing (1) is rotatably connected to a guide seat (302), the main body of the guide seat (302) is a cylindrical structure, and a bevel gear B (303) is coaxially installed on the bottom end of the guide seat (302), and the bevel gear B (303) is meshed with the bevel gear A (301) arranged on the output shaft of the motor (3) for transmission, and a brush (304) is fixedly connected to the outer peripheral surface of the guide seat (302) in the form of a ring array.

2. The target material feeding mechanism of a coating device according to claim 1, characterized in that: A mounting plate (101) is fixedly connected to the outer side of the shell (1), the mounting plate (101) and the shell (1) are arranged vertically, and there are four mounting plates (101) in total, the four mounting plates (101) are respectively fixedly connected to the four corners of the outer side surface of the shell (1), and screw holes are opened inside the mounting plates (101).

3. The target material feeding mechanism of a coating device according to claim 1, characterized in that: A cover plate (102) is installed at the top end of the shell (1), and a connecting plate (103) is connected to an outer fixing rod of the cover plate (102). The connecting plates (103) are provided at four locations, and the four connecting plates (103) are respectively fixedly connected to the four corners of the outer surface of the cover plate (102). The connecting plates (103) and the mounting plate (101) are connected via fixing bolts (104).

4. The target material feeding mechanism of a coating device according to claim 3, characterized in that: A bracket (2) is fixedly connected to the top end surface of the cover plate (102); the main body of the bracket (2) is an L-shaped structure; a longitudinal groove is provided inside the longitudinal component of the bracket (2); and an electric push rod (201) is installed on the bottom end surface of the transverse oblique component of the bracket (2).

5. The target material feeding mechanism of a coating device according to claim 4, characterized in that: A seat body (202) is installed on the bottom output end of the electric push rod (201); the main body of the seat body (202) is a cylindrical structure with an opening at the bottom end; a movable seat (203) is fixedly connected to the rear side of the outer peripheral surface of the seat body (202); and two sliding blocks (204) are fixedly connected to the outer side of the movable seat (203) in opposite directions; the movable seat (203) is slidably connected to the bracket (2) via the sliding blocks (204) fixedly connected to the outer side surface thereof.

6. The target material feeding mechanism of a coating device according to claim 5, characterized in that: The outer peripheral front end of the seat body (202) is provided with a screw hole, a positioning bolt (205) is screwed into the interior of the screw hole, and a target material (206) is inserted into the bottom end of the seat body (202), and the inner frame of the shell (1) is fixedly connected to a collection cover (305), the collection cover (305) is used to collect waste chips, and the rear side of the collection cover (305) is fixedly connected to a collection pipe (306), the collection pipe (306) is used to recover waste chips.

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