Furnace tube and low-pressure chemical vapor deposition equipment

Abstract

The embodiment of the utility model provides a furnace tube and low-pressure chemical vapor deposition equipment. The furnace tube comprises a furnace body, the furnace body is internally provided with an accommodating space used for accommodating a quartz boat, and the accommodating space comprises a first end and a second end which are arranged oppositely; the heating mechanism is connected outside the furnace body in a sleeving manner so as to heat the furnace body and provide a temperature field environment for the accommodating space; the air inlet pipe is spirally arranged in the accommodating space, and the air inlet pipe is used for being wound outside the quartz boat; wherein the air inlet pipe comprises an air inlet and an air outlet which are arranged oppositely, the air inlet is arranged close to the first end of the accommodating space and at least partially extends out of the furnace body, and the air outlet is arranged close to the second end of the accommodating space. According to the embodiment of the invention, the film coating quality of the furnace tube during film coating of the silicon-based material can be improved.

Description

Technical Field

[0001] The present application belongs to the field of photovoltaic processing technology, and specifically relates to a furnace tube and a low-pressure chemical vapor deposition device. Background Art

[0002] Low pressure chemical vapor deposition (LPCVD) is a type of chemical vapor deposition performed at a pressure lower than one atmosphere. It has the advantages of high process maturity and large-scale mass production experience, and is widely used in the field of photovoltaic processing technology.

[0003] Generally, the LPCVD equipment may include a furnace tube, which may be used to accommodate a quartz boat and form a reaction gas to coat the silicon-based material carried on the quartz boat. In practical applications, the better the uniformity of the temperature field in the furnace tube, the higher the quality of the coating.

[0004] However, in the existing technology, since there is a large difference between the temperature of the reaction gas introduced from the outside and the temperature inside the furnace tube, the introduction of the reaction gas will affect the uniformity of the temperature field in the furnace tube, thereby affecting the coating quality of the silicon-based material. Utility Model Content

[0005] The present application aims to provide a furnace tube and a low-pressure chemical vapor deposition device to solve the problem of poor coating quality of the existing low-pressure chemical vapor deposition device.

[0006] In order to solve the above technical problems, this application is implemented as follows:

[0007] In a first aspect, the present application discloses a furnace tube, the furnace tube comprising:

[0008] A furnace body, wherein a receiving space for receiving the quartz boat is provided in the furnace body, and the receiving space includes a first end and a second end which are arranged in opposite directions;

[0009] A heating mechanism, wherein the heating mechanism is sleeved outside the furnace body to heat the furnace body and provide a temperature field environment for the accommodation space;

[0010] and an air inlet pipe spirally arranged in the accommodation space, the air inlet pipe being used to be wound around the outside of the quartz boat;

[0011] Among them, the air inlet pipe includes an air inlet and an air outlet which are arranged in opposite directions. The air inlet is arranged near the first end of the accommodating space and at least partially extends out of the furnace body. The air inlet is used to introduce reaction gas, and the air inlet pipe is used to preheat the introduced reaction gas. The air outlet is arranged near the second end of the accommodating space, and the air outlet is used to discharge the reaction gas preheated by the air inlet pipe to the second end of the accommodating space, so that the reaction gas can move downward from the second end of the accommodating space to coat the silicon-based material on the quartz boat.

[0012] Optionally, the furnace tube further comprises: a flow balancing plate disposed in the accommodation space, the flow balancing plate being disposed close to the second end of the furnace body and having a gap between the flow balancing plate and the second end of the furnace body, and the flow balancing plate and the furnace body are enclosed to form a buffer cavity; wherein,

[0013] The gas outlet of the air inlet pipe at least partially passes through the flow equalizing plate and extends into the buffer cavity. The gas outlet is used to discharge the reaction gas preheated by the air inlet pipe into the buffer cavity. The flow equalizing plate is used to homogenize the reaction gas and guide the reaction gas to the quartz boat.

[0014] Optionally, the flow equalizing plate is provided with a plurality of evenly distributed through holes, and the plurality of through holes are used to equalize the reaction gas and guide the reaction gas to the quartz boat.

[0015] Optionally, the furnace tube further comprises: a boat seat, the boat seat is arranged in the accommodating space, and the boat seat is used to carry the quartz boat; wherein,

[0016] The boat seat is rotatably connected to the furnace body to drive the quartz boat to rotate in the accommodating space.

[0017] Optionally, the furnace tube comprises a furnace shell and a cover plate, the cover plate is connected to the furnace shell, and the cover plate and the furnace shell are enclosed to form the accommodation space;

[0018] The furnace tube also includes: a driving mechanism and a supporting mechanism, wherein the supporting mechanism at least partially passes through the cover plate and is connected to the boat seat, and the driving mechanism is arranged outside the furnace body and connected to the supporting mechanism, and the driving mechanism is used to drive the supporting mechanism to rotate relative to the cover plate to drive the boat seat to rotate.

[0019] Optionally, the support mechanism comprises: a support bearing, a support plate and a plurality of support columns; wherein,

[0020] At least part of the support bearing passes through the cover plate and is connected to the driving mechanism, the support plate is connected to the support column, a plurality of the support columns are arranged between the support plate and the boat seat at intervals, and one end of the support column is connected to the support plate, and the other end is connected to the boat seat;

[0021] The driving mechanism is used to drive the support bearing to rotate, so as to drive the support plate, the support column and the boat seat to rotate together through the rotation of the support bearing.

[0022] Optionally, the furnace tube further comprises a first heat-insulating member, which is disposed between the support plate and the cover plate, and is used to achieve heat preservation and insulation between the cover plate and the support plate; wherein,

[0023] The first heat-insulating component includes at least one of a heat-insulating cotton component, a heat-insulating fiber component and a nano-ceramic component.

[0024] Optionally, the furnace tube further comprises a magnetic fluid seal, wherein the magnetic fluid seal is connected between the support bearing and the cover plate, and the magnetic fluid seal is used to achieve dynamic sealing between the support bearing and the cover plate.

[0025] Optionally, the furnace body is a stainless steel furnace body.

[0026] Optionally, the furnace tube is a vertical furnace tube, and the furnace body is placed vertically.

[0027] In a second aspect, the present application further discloses a low-pressure chemical vapor deposition device, and the low-pressure chemical vapor deposition device comprises: a furnace tube as described in any one of the above items.

[0028] In an embodiment of the present application, a spirally arranged air inlet pipe may be provided in the accommodation space of the furnace tube, and the air inlet of the air inlet pipe is arranged near the first end of the accommodation space and at least partially extends out of the furnace body to allow the reaction gas to pass through. The air outlet of the air inlet pipe is arranged near the second end of the accommodation space to discharge the gas to the second end of the accommodation space. Since the air inlet pipe is spirally distributed in the accommodation space, the reaction gas can be fully preheated in the process of flowing from the air inlet of the air inlet pipe to the air outlet. The temperature difference between the temperature of the reaction gas after preheating and the temperature of the accommodation space itself is small. In this way, the uniformity of the temperature field of the accommodation space during the discharge of the reaction gas can be improved. Thereby, the coating quality of the furnace tube when coating the silicon-based material can be improved.

[0029] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0031] Figure 1 It is a structural schematic diagram of a furnace tube described in an embodiment of the present application.

[0032] Figure numerals: 10 - furnace body, 101 - furnace shell, 102 - cover plate, 103 - flange, 11 - heating mechanism, 12 - air inlet pipe, 13 - flow equalizing plate, 131 - hanging column, 14 - boat seat, 15 - driving mechanism, 151 - driving member, 152 - transmission member, 16 - supporting mechanism, 161 - supporting bearing, 162 - supporting plate, 163 - supporting column, 17 - first thermal insulation member, 18 - magnetic fluid sealing member, 19 - exhaust port, 20 - fixing rod, 21 - temperature measuring tube, 22 - bracket, 23 - second thermal insulation member, 200 - quartz boat, 300 - frame, S - buffer chamber. DETAILED DESCRIPTION

[0033] The embodiments of the utility model will be described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the utility model, and cannot be understood as limiting the utility model. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of this application.

[0034] The term "first" or "second" in the specification and claims of this application may include one or more of the features explicitly or implicitly. In the description of this utility model, unless otherwise specified, "multiple" means two or more. In addition, "and / or" in the specification and claims means at least one of the connected objects, and the character " / " generally means that the objects connected before and after are in an "or" relationship.

[0035] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0036] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0037] The embodiment of the present application provides a furnace tube, which can be used in LPCVD equipment, and the LPCVD equipment can specifically be a vertical LPCVD equipment or a horizontal LPCVD equipment. The embodiment of the present application only takes the vertical LPCVD equipment as an example for explanation, and the horizontal LPCVD equipment can be implemented by reference. In a specific application, the vertical furnace tube can make full use of the internal space of the furnace tube to arrange multiple quartz boats to increase production capacity. For example, the furnace tube can be used to arrange 4 or more quartz boats, and the embodiment of the present application does not specifically limit the number of quartz boats that can be arranged in the furnace tube.

[0038] Reference Figure 1 , shows a schematic structural diagram of a furnace tube according to an embodiment of the present application, such as Figure 1 As shown, the furnace tube may specifically include: a furnace body 10, wherein a storage space for accommodating the quartz boat 200 is provided in the furnace body 10, wherein the storage space may include a first end and a second end which are arranged in a manner opposite to each other; a heating mechanism 11, wherein the heating mechanism 11 is sleeved outside the furnace body 10 to heat the furnace body 10 and provide a temperature field environment for the storage space; and an air inlet pipe 12 which is spirally arranged in the storage space, wherein the air inlet pipe 12 may be used to be wound around the outside of the quartz boat 200; wherein the air inlet pipe 12 may include an air inlet and an air outlet which are arranged in a manner opposite to each other. The air inlet is arranged near the first end of the storage space and at least partially extends out of the furnace body 10, the air inlet can be used to introduce reaction gas, the air inlet pipe 12 can be used to preheat the introduced reaction gas, the air outlet is arranged near the second end of the storage space, the air outlet can be used to discharge the reaction gas preheated by the air inlet pipe 12 to the second end of the storage space, so that the reaction gas moves downward from the second end of the storage space to coat the silicon-based material on the quartz boat 200.

[0039] In an embodiment of the present application, a spirally arranged air inlet pipe 12 may be provided in the accommodation space of the furnace tube, and the air inlet of the air inlet pipe 12 is provided near the first end of the accommodation space and at least partially extends out of the furnace body 10 to allow the reaction gas to pass through. The air outlet of the air inlet pipe 12 is provided near the second end of the accommodation space to discharge the gas to the second end of the accommodation space. Since the air inlet pipe 12 is spirally distributed in the accommodation space, the reaction gas can be fully preheated in the process of flowing from the air inlet of the air inlet pipe 12 to the air outlet. The temperature difference between the temperature of the reaction gas after preheating and the temperature of the accommodation space itself is small. In this way, the uniformity of the temperature field of the accommodation space during the discharge of the reaction gas can be improved. Thus, the coating quality of the furnace tube when coating the silicon-based material can be improved.

[0040] Optionally, the furnace tube may be a vertical furnace tube, that is, the furnace body 10 may be placed vertically. When the furnace body 10 is placed vertically, the first end of the accommodation space may be the bottom end, and the second end may be the top end. Similarly, the furnace tube may also be a horizontal furnace tube, that is, the furnace body 10 may be placed horizontally. When the furnace body 10 is placed horizontally, the first end and the second end of the accommodation space may be two ends disposed in a horizontal direction away from each other.

[0041] It should be noted that the drawings described in the embodiments of the present application only show the case where the furnace tube is a vertical furnace tube and the furnace body 10 is placed vertically. The case where the furnace tube is a horizontal furnace tube can be implemented by reference.

[0042] like Figure 1 As shown, the furnace body 10 may specifically include a furnace shell 101 and a cover plate 102, the cover plate 102 is connected to the furnace shell 101, and the cover plate 102 and the furnace shell 101 are enclosed to form the accommodation space. In practical applications, a flange 103 may also be welded on one side of the furnace shell 101 close to the cover plate 102, and the flange 103 may be connected to the cover plate 102 by bolts, O-rings and other components to form a sealed accommodation space, so as to facilitate the coating reaction in the accommodation space. A water-cooling jacket may be built into the flange 103 to achieve cooling of the flange 103 and avoid safety hazards caused by high temperature of the flange 103. The cover plate 102 may be connected to the frame 300 to achieve fixed connection of the furnace body 10 on the frame 300. The heating mechanism 11 may be sleeved outside the furnace body 10 to heat the furnace body 10 to provide the accommodation space with a temperature field environment suitable for coating. Specifically, the heating mechanism 11 may be a resistance wire, etc., and the specific type of the heating mechanism 11 is not limited in the embodiment of the present application.

[0043] In a specific application, after the reaction gas is introduced into the air inlet of the air inlet pipe 12, the reaction gas can move along the spiral air inlet pipe 12 to the air outlet. Since the spiral air inlet pipe 12 bypasses a long distance in the furnace body 10, the reaction gas can be fully preheated in the process of the reaction gas flowing through the air inlet pipe 12. When the reaction gas is discharged from the air outlet of the air inlet pipe 12, the temperature of the reaction gas is very close to the temperature of the furnace body 10 itself, and the effect of the discharge of the reaction gas on the temperature field environment in the furnace body 10 can even be ignored. In this way, the uniformity of the temperature field of the accommodating space in the furnace body 10 can be greatly improved, and the coating quality of the silicon-based material when the furnace tube is coated can be improved.

[0044] For example, the reaction gas may include but is not limited to silane, oxygen, nitrogen, etc. This embodiment of the present application does not limit this.

[0045] In a specific application, the furnace tube may further include an exhaust port 19, which may be connected to the accommodation space. An exhaust device may be connected to the exhaust port 19, through which the gas in the accommodation space may be extracted to the outside of the furnace body 10, providing a certain degree of vacuum in the accommodation space.

[0046] Optionally, there may be multiple exhaust ports 19 , which may be evenly spaced along the circumference of the furnace body 10 . By extracting gas from the accommodation space through the multiple exhaust ports 19 , it is easier to achieve a vacuum degree in the accommodation space.

[0047] For example, the number of the exhaust ports 19 may include but is not limited to 3, 4 or 6, etc. The embodiment of the present application does not specifically limit the number of the exhaust ports 19.

[0048] like Figure 1 As shown, the furnace tube also includes: a flow equalizing plate 13 arranged in the accommodating space, the flow equalizing plate 13 is arranged close to the second end of the furnace body 10 and has a gap with the second end of the furnace body 10, and the flow equalizing plate 13 and the furnace body 10 are enclosed to form a buffer chamber S; wherein, the gas outlet of the air inlet pipe 12 at least partially passes through the flow equalizing plate 13 and extends into the buffer chamber S, and the gas outlet can be used to discharge the reaction gas preheated by the air inlet pipe 12 into the buffer chamber S to buffer the reaction gas. The flow equalizing plate 13 can be used to homogenize the reaction gas and guide the reaction gas into the quartz boat 200, so that the reaction gas can evenly and slowly fall on the quartz boat 200 below the flow equalizing plate 13, and the silicon-based material on the quartz boat 200 is evenly coated, thereby improving the coating quality of the silicon-based material.

[0049] Optionally, a plurality of evenly distributed through holes are provided on the flow equalizing plate 13, and the plurality of through holes can be used to homogenize the reaction gas and guide the reaction gas to the quartz boat 200, thereby improving the uniformity of the gas falling onto the quartz boat 200, and further improving the coating quality of the silicon-based material on the quartz boat 200.

[0050] It should be noted that, in practical applications, the size and shape of the through hole can be set according to actual conditions. For example, the shape of the through hole can be circular, rectangular or other polygonal. In the case where the shape of the through hole is circular, the diameter of the through hole can be 5 mm, 8 mm or 12 mm, etc. The embodiment of the present application does not specifically limit the shape and size of the through hole.

[0051] like Figure 1 As shown, a suspension column 131 is also provided on the flow balancing plate 13 , one end of the suspension column 131 is connected to the flow balancing plate 13 , and the other end is connected to the furnace shell 101 , so as to fix the flow balancing plate 13 to the furnace shell 101 .

[0052] Optionally, the furnace tube may further include: a boat seat 14, which is arranged in the accommodating space, and the boat seat 14 can be used to carry the quartz boat 200; wherein the boat seat 14 is rotatably connected to the furnace body 10 to drive the quartz boat 200 to rotate in the accommodating space, thereby further improving the coating uniformity of the silicon-based material on the quartz boat 200.

[0053] like Figure 1 As shown, the furnace tube may further include a fixing rod 20 , which may be connected to the boat seat 14 and located on the side of the quartz boat 200 . The fixing rod 20 may be used to fix the quartz boat 200 , thereby improving the connection reliability of the quartz boat 200 on the boat seat 14 .

[0054] Optionally, the furnace tube may further include: a driving mechanism 15 and a supporting mechanism 16, the supporting mechanism 16 at least partially passing through the cover plate 102 and connected to the boat seat 14, the driving mechanism 15 is arranged outside the furnace body 10 and connected to the supporting mechanism 16, the driving mechanism 15 can be used to drive the supporting mechanism 16 to rotate relative to the cover plate 102, so as to drive the boat seat 14 and the quartz boat 200 on the boat seat 14 to rotate together, thereby improving the coating uniformity of the silicon-based material on the quartz boat 200.

[0055] Optionally, the support mechanism 16 may include: a support bearing 161, a support plate 162 and a plurality of support columns 163; wherein, at least a portion of the support bearing 161 passes through the cover plate 102 and is connected to the driving mechanism 15, the support plate 162 is connected to the support column 163, a plurality of support columns 163 are arranged at intervals between the support plate 162 and the boat seat 14, and one end of the support column 163 is connected to the support plate 162, and the other end is connected to the boat seat 14; the driving mechanism 15 can be used to drive the support bearing 161 to rotate, so as to drive the support plate 162, the support column 163, the boat seat 14 and the quartz boat 200 to rotate together through the rotation of the support bearing 161, thereby improving the coating uniformity of the silicon-based material on the quartz boat 200.

[0056] like Figure 1 As shown, the driving mechanism 15 may specifically include a driving member 151 and a transmission member 152, and the output end of the driving member 151 is connected to the transmission member 152 to output power to the transmission member 152. The transmission member 152 is connected to the support bearing 161 to transmit the power output by the driving member 151 to the support bearing 161. For example, the driving member 151 may specifically be a motor, and the transmission member 152 may be a reducer.

[0057] Optionally, the furnace tube may further include a first thermal insulation component 17, which is disposed between the support plate 162 and the cover plate 102, and is used to achieve thermal insulation between the cover plate 102 and the support plate 162; wherein the first thermal insulation component 17 includes at least one of a thermal insulation cotton component, a thermal insulation fiber component and a nano-ceramic component.

[0058] In a specific application, when the first heat-insulating member 17 is a heat-insulating cotton member, a heat-insulating fiber member or a nano-ceramic member, since the heat-insulating cotton, the heat-insulating limiter and the nano-ceramic have good heat-insulating effects, the first heat-insulating member 17 can achieve good heat-insulating effects with a small longitudinal thickness. In this way, the volume of the first heat-insulating member 17 can be reduced, and the space in the furnace body 10 can be saved, so that more quartz boats 200 can be placed in the furnace body 10, thereby improving the production capacity of the furnace body 10.

[0059] In some optional embodiments of the present application, the furnace tube may further include a magnetic fluid seal 18, which is connected between the support bearing 161 and the cover plate 102. The magnetic fluid seal 18 can be used to achieve dynamic sealing between the support bearing 161 and the cover plate 102, and has a good sealing effect, effectively ensuring the vacuum degree in the accommodation space.

[0060] It should be noted that, in actual applications, the support bearing 161 and the cover plate 102 may also be sealed by using a sealing ring or the like. The embodiment of the present application does not specifically limit the sealing method between the support bearing 161 and the cover plate 102 .

[0061] Optionally, the furnace body 10 is a stainless steel furnace body. Since stainless steel has the advantages of good toughness, high heat conduction efficiency and good stability, when the furnace body 10 is made of stainless steel, it is difficult to have risks such as short-term fracture, and the furnace tube can be effectively and stably operated for a long time. In practical applications, a high temperature resistant coating can be added to the furnace body 10 to further increase the service life of the furnace body 10.

[0062] like Figure 1 As shown, the furnace tube may further include a temperature measuring tube 21, which may extend from the top of the furnace body 10 to the accommodation space in the furnace body 10 to detect the temperature in the accommodation space, which is beneficial to the temperature control in the accommodation space. The temperature measuring tube 21 may be connected to the accommodation space through a bracket 22.

[0063] like Figure 1 As shown, the furnace tube may further include a second thermal insulation member 23 sleeved on the outside of the furnace tube. The second thermal insulation member 23 may be used to achieve thermal insulation of the heating mechanism 11. On the one hand, it may avoid heat loss of the heating mechanism 11. On the other hand, it may also avoid potential safety hazards caused by the high temperature of the heating mechanism 11 being transferred to the environment.

[0064] For example, the material of the second thermal insulation component 23 may include but is not limited to at least one of thermal insulation cotton, thermal insulation fiber and nano-ceramics. The embodiment of the present application does not specifically limit the material of the second thermal insulation component 23.

[0065] In summary, the furnace tube described in the embodiment of the present application can at least include the following advantages:

[0066] In an embodiment of the present application, a spirally arranged air inlet pipe may be provided in the accommodation space of the furnace tube, and the air inlet of the air inlet pipe is arranged near the first end of the accommodation space and at least partially extends out of the furnace body to allow the reaction gas to pass through. The air outlet of the air inlet pipe is arranged near the second end of the accommodation space to discharge the gas to the second end of the accommodation space. Since the air inlet pipe is spirally distributed in the accommodation space, the reaction gas can be fully preheated in the process of flowing from the air inlet of the air inlet pipe to the air outlet. The temperature difference between the temperature of the reaction gas after preheating and the temperature of the accommodation space itself is small. In this way, the uniformity of the temperature field of the accommodation space during the discharge of the reaction gas can be improved. Thereby, the coating quality of the furnace tube when coating the silicon-based material can be improved.

[0067] An embodiment of the present application further provides a low-pressure chemical vapor deposition device, and the low-pressure chemical vapor deposition device may specifically include any of the furnace tubes described above.

[0068] It should be noted that in the embodiment of the present application, the structure of the furnace tube is the same as the structure of the furnace tube described in any of the above embodiments, and its beneficial effects are also similar, which will not be repeated here.

[0069] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0070] Although the embodiments of the present invention have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A furnace tube, characterized in that: The furnace tube comprises: A furnace body (10), wherein a receiving space for receiving the quartz boat (200) is provided in the furnace body (10), and the receiving space comprises a first end and a second end which are arranged in opposition to each other; A heating mechanism (11), wherein the heating mechanism (11) is sleeved outside the furnace body (10) to heat the furnace body (10) and provide a temperature field environment for the accommodation space; and an air intake pipe (12) arranged in a spiral shape in the accommodation space, the air intake pipe (12) being used to be wound around the outside of the quartz boat (200); The air inlet pipe (12) comprises an air inlet and an air outlet which are arranged in opposite directions, the air inlet is arranged near the first end of the storage space and at least partially extends out of the furnace body (10), the air inlet is used to introduce reaction gas, the air inlet pipe (12) is used to preheat the introduced reaction gas, and the air outlet is arranged near the second end of the storage space, and the air outlet is used to discharge the reaction gas preheated by the air inlet pipe (12) to the second end of the storage space.

2. The furnace tube according to claim 1, characterized in that The furnace tube further comprises: a flow balancing plate (13) arranged in the accommodation space, the flow balancing plate (13) being arranged close to the second end of the furnace body (10) and having a gap between the flow balancing plate (13) and the second end of the furnace body (10), the flow balancing plate (13) and the furnace body (10) enclosing a buffer cavity (S); wherein, The gas outlet of the gas inlet pipe (12) at least partially passes through the flow equalizing plate (13) and extends into the buffer chamber (S); the gas outlet is used to discharge the reaction gas preheated by the gas inlet pipe (12) into the buffer chamber (S); the flow equalizing plate (13) is used to homogenize the reaction gas and guide the reaction gas to the quartz boat (200).

3. The furnace tube according to claim 2, characterized in that The flow equalizing plate (13) is provided with a plurality of evenly distributed through holes, and the plurality of through holes are used to equalize the reaction gas and guide the reaction gas to the quartz boat (200).

4. The furnace tube according to claim 1, characterized in that The furnace tube further comprises: a boat seat (14), the boat seat (14) being arranged in the accommodation space, and the boat seat (14) being used to carry the quartz boat (200); wherein, The boat seat (14) is rotatably connected to the furnace body (10) to drive the quartz boat (200) to rotate in the accommodating space.

5. The furnace tube according to claim 4, characterized in that The furnace tube comprises a furnace shell (101) and a cover plate (102), wherein the cover plate (102) is connected to the furnace shell (101), and the cover plate (102) and the furnace shell (101) are enclosed to form the accommodation space; The furnace tube further comprises: a driving mechanism (15) and a supporting mechanism (16); the supporting mechanism (16) at least partially passes through the cover plate (102) and is connected to the boat seat (14); the driving mechanism (15) is arranged outside the furnace body (10) and is connected to the supporting mechanism (16); the driving mechanism (15) is used to drive the supporting mechanism (16) to rotate relative to the cover plate (102) so as to drive the boat seat (14) to rotate.

6. The furnace tube according to claim 5, characterized in that The support mechanism (16) comprises: a support bearing (161), a support plate (162) and a plurality of support columns (163); wherein: At least a portion of the support bearing (161) passes through the cover plate (102) and is connected to the driving mechanism (15); the support plate (162) is connected to the support column (163); a plurality of support columns (163) are arranged at intervals between the support plate (162) and the boat seat (14); one end of the support column (163) is connected to the support plate (162), and the other end is connected to the boat seat (14); The driving mechanism (15) is used to drive the support bearing (161) to rotate, so that the support plate (162), the support column (163) and the boat seat (14) are driven to rotate together through the rotation of the support bearing (161).

7. The furnace tube according to claim 6, characterized in that The furnace tube further comprises a first thermal insulation member (17), the first thermal insulation member (17) being arranged between the support plate (162) and the cover plate (102), the first thermal insulation member (17) being used to achieve thermal insulation between the cover plate (102) and the support plate (162); wherein, The first heat-insulating component (17) comprises at least one of a heat-insulating cotton component, a heat-insulating fiber component and a nano-ceramic component.

8. The furnace tube according to claim 6, characterized in that The furnace tube further comprises a magnetic fluid seal (18), wherein the magnetic fluid seal (18) is connected between the support bearing (161) and the cover plate (102), and the magnetic fluid seal (18) is used to achieve dynamic sealing between the support bearing (161) and the cover plate (102).

9. The furnace tube according to any one of claims 1 to 8, characterized in that The furnace body (10) is a stainless steel furnace body (10).

10. The furnace tube according to any one of claims 1 to 8, characterized in that The furnace tube is a vertical furnace tube, and the furnace body is placed vertically.

11. A low pressure chemical vapor deposition device, characterized in that: The low-pressure chemical vapor deposition equipment comprises: the furnace tube according to any one of claims 1 to 10.

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