Induction coil structure and adjusting device
By designing independently-set induction coils and vertical adjustment structures, the problem that induction coils cannot be controlled separately and height adjustment in the prior art is solved, and uniform control of substrate temperature and uniformity of heating temperature are achieved.
Patent Information
- Application Number
- CN202420941315.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-06
- Publication Date
- 2025-02-11
- Estimated Expiration
- 2034-05-06
AI Technical Summary
The existing induction coil structure cannot achieve separate control and height adjustment, limiting uniform control of substrate temperature.
An induction coil structure is designed in which several induction coils are arranged independently, and the height of each induction coil is adjusted through a vertical adjustment structure to achieve uniform control of the substrate temperature.
Through independent control and height adjustment of the induction coil, temperature adjustment in different regions is achieved, improving the uniformity of the substrate heating temperature.
Smart Images
Figure CN222455306U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of semiconductor manufacturing, and particularly relates to an induction coil structure and an adjustment device. Background Art
[0002] Epitaxial growth is a method of growing a single crystal layer with certain requirements and the same crystal orientation as the substrate on a single crystal substrate (substrate). In the epitaxial growth heating process, an induction coil is usually set outside the reaction chamber. However, in the epitaxial growth process, the temperature uniformity of the substrate in the reaction chamber is required to be relatively good. The existing induction coils all adopt a series structure and cannot be controlled individually. In addition, the position of the induction coil relative to the reaction chamber is set in a fixed manner, and the induction coil cannot be adjusted in height, which limits the control of the substrate temperature. Utility Model Content
[0003] The utility model aims to provide an induction coil structure and an adjustment device to solve the above-mentioned problem and to achieve the purpose of uniformly controlling the reaction temperature of the substrate during the epitaxial growth process.
[0004] To achieve the above purpose, the utility model provides the following solutions:
[0005] An induction coil structure comprises a plurality of induction coils, wherein the plurality of induction coils are arranged in sequence from the center to the outside, the plurality of induction coils are arranged independently, and the plurality of induction coils are arranged below a reaction chamber.
[0006] Another solution provided by the present invention is an adjustment device for adjusting the position of the induction coil structure described in the above solution, wherein a vertical adjustment structure is provided under a plurality of the induction coils, and the vertical adjustment structure is used to adjust the height of each of the induction coils.
[0007] Preferably, the vertical adjustment structure includes a plurality of lifting rings, which are sequentially arranged from the center to the outside, each of which is fixedly connected under the corresponding induction coil, a lifting drive unit is installed at the bottom of the lifting ring, and adjacent lifting rings are vertically slidably connected.
[0008] Preferably, the lifting drive unit includes a rack fixedly connected to the bottom surface of the lifting ring, the rack is vertically arranged, several of the racks are not colinear, and several of the racks slide together through a first support plate, a lifting motor is installed on the first support plate, the lifting motor shaft is connected to a gear, and the gear is meshed with the rack.
[0009] Preferably, a bidirectional driving structure is connected to the bottom of the first support plate.
[0010] Preferably, the bidirectional driving structure comprises a transverse driving structure and a longitudinal driving structure, and the transverse driving structure is located above the longitudinal driving structure.
[0011] Preferably, the transverse driving structure includes at least two second sliding blocks fixedly connected to the bottom surface of the first support plate, the bottom ends of the second sliding blocks are slidably connected to the second support plate, the second support plate is rotatably connected to the first lead screw, any one of the second sliding blocks is threadedly engaged with the first lead screw, one end of the first lead screw passes through the second support plate and is axially connected to the output end of the transverse motor, the transverse motor is fixedly connected to the second support plate, and the longitudinal driving structure is located below the second support plate.
[0012] Preferably, the longitudinal driving structure includes at least two third sliders, the third slider is fixedly connected to the bottom surface of the second support plate, a third support plate is provided under the second support plate, the third slider is slidingly matched with the third support plate, the third support plate is rotatably connected to a second lead screw, the second lead screw is threadedly matched with any one of the third sliders, one end of the second lead screw passes through the third support plate axis and is connected to the output shaft of the longitudinal motor, the longitudinal motor is fixedly connected to the third support plate, and the second lead screw is perpendicular to the first lead screw.
[0013] Compared with the prior art, the utility model has the following advantages and technical effects:
[0014] Several induction coils are independently arranged and independently connected to a power supply, and each induction coil is controlled individually, so that the temperature generated by the induction coil is transferred to the substrate, and temperature regulation in different areas can be achieved.
[0015] A vertical adjustment structure is provided below the induction coil to adjust the height of each induction coil. The substrate can be heated to a higher temperature by using the principle that the induction coil is close to the reaction chamber. By adjusting the corresponding position of the induction coil, the uniformity of the substrate heating temperature can be adjusted. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] In order to more clearly illustrate the implementation of the utility model or the technical solution in the prior art, the following is a brief introduction to the drawings required for the implementation or the prior art description. Obviously, the drawings in the following description are only exemplary, and for ordinary technicians in this field, other implementation drawings can be derived from the provided drawings without creative work.
[0017] The structures, proportions, sizes, etc. illustrated in this specification are only used to match the contents disclosed in the specification so as to facilitate understanding and reading by persons familiar with the technology. They are not used to limit the conditions under which the present invention can be implemented, and therefore have no substantial technical significance. Any structural modification, change in proportion or adjustment of size shall still fall within the scope of the technical contents disclosed in the present invention without affecting the effects and purposes that can be achieved by the present invention.
[0018] Figure 1 This is a schematic diagram of the induction coil structure of the utility model;
[0019] Figure 2 This is another structural schematic diagram of the induction coil of the utility model;
[0020] Figure 3 This is a schematic diagram of the matching structure of the induction coil and the adjustment device of the utility model;
[0021] Figure 4 It is a structural schematic diagram of the vertical adjustment structure of the utility model.
[0022] Among them, 1. reaction chamber; 2. air inlet channel; 3. air outlet channel; 4. base; 5. rotating shaft; 6. induction coil; 7. lifting ring; 701. first slider; 702. rack; 8. first support plate; 801. lifting motor; 802. second slider; 803. first lead screw; 9. second support plate; 901. third slider; 10. third support plate; 1001. second lead screw; 1002. longitudinal motor. DETAILED DESCRIPTION
[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0024] In order to make the above-mentioned purposes, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below in conjunction with the accompanying drawings and specific implementation methods. Embodiment 1:
[0025] Reference Figure 1As shown, this embodiment provides an induction coil structure, including a plurality of induction coils 6, the plurality of induction coils 6 are sequentially sleeved from the center to the outside, the plurality of induction coils 6 are independently arranged, and the plurality of induction coils 6 are arranged below the reaction chamber 1. The connection electrodes of the plurality of induction coils 6 are located on the same straight line, the plurality of induction coils 6 are independently connected to a power source, and each induction coil is controlled individually, so that the temperature generated by the induction coil can be transferred to the substrate to achieve temperature regulation in different areas. Embodiment 2:
[0026] Reference Figure 2 As shown, the induction coil structure of this embodiment is different from that of the first embodiment only in that the connection electrodes of the plurality of induction coils 6 are arranged in a staggered manner. This arrangement can facilitate the grouping and connection of the induction coils 6, and can control the corresponding induction coils 6 in groups, or control the induction coils 6 individually.
[0027] Reference Figure 3-Figure 4 As shown, the utility model provides another solution, an adjustment device, which is used to adjust the position of the induction coil structure. A vertical adjustment structure is provided under the plurality of induction coils 6 , and the vertical adjustment structure is used to adjust the height of each induction coil 6 .
[0028] The induction coil 6 is arranged at the lower outer side of the reaction chamber 1. The side wall of the reaction chamber 1 is provided with an air inlet channel 2 and an air outlet channel 3. The air inlet channel 2 and the air outlet channel 3 are correspondingly arranged on both sides. A base 4 is rotatably provided in the reaction chamber 1. A rotating shaft 5 is fixedly connected to the center of the bottom surface of the base 4, and the rotating shaft 5 passes through the bottom surface of the reaction chamber 1.
[0029] A further optimized solution is that the vertical adjustment structure includes a plurality of lifting rings 7, which are sequentially arranged from the center to the outside, each lifting ring 7 is fixedly connected under the corresponding induction coil 6, a lifting drive unit is installed at the bottom of the lifting ring 7, and adjacent lifting rings 7 are vertically slidably connected.
[0030] A slide groove may be provided on the inner wall of the lifting ring 7, and the slide groove is arranged vertically. A first slider 701 is fixedly connected to the outer wall of the lifting ring 7, and the first slider 701 slides in cooperation with the corresponding slide groove. The rotating shaft 5 passes through the innermost lifting ring 7, and each lifting drive unit is controlled to lift and lower the corresponding lifting ring 7. The lifting ring 7 drives the induction coil 6 to lift and lower, and each induction coil 6 can be independently controlled relative to the reaction chamber 1. The principle that the substrate can be heated to a higher temperature by placing the induction coil 6 close to the reaction chamber 1 is utilized, and the corresponding position of the induction coil 6 is adjusted to achieve adjustment of the uniformity of the substrate heating temperature.
[0031] A further optimized solution is that the lifting drive unit includes a rack 702 fixedly connected to the bottom surface of the lifting ring 7, the rack 702 is vertically arranged, several racks 702 are not colinear, and several racks 702 slide together through a first support plate 8, and a lifting motor 801 is installed on the first support plate 8. The lifting motor 801 shaft is connected to a gear, and the gear is meshed with the rack 702.
[0032] The lifting motor 801 can be a stepper motor. The lifting motor 801 can be controlled by PID to accurately control its rotation amount, thereby driving the gear to rotate. The gear drives the rack 702 to move up and down on the first support plate 8 to achieve the purpose of adjusting the height of the induction coil 6. Through PID control, the process temperature accuracy is guaranteed to reach ±1°C.
[0033] According to a further optimized solution, a bidirectional driving structure is connected to the bottom of the first support plate 8 .
[0034] A clearance hole is provided at the center of the first support plate 8 to ensure that the rotating shaft 5 passes through and to prevent the first support plate 8 from interfering with the rotating shaft 5 during movement.
[0035] According to a further optimized solution, the bidirectional driving structure includes a transverse driving structure and a longitudinal driving structure, and the transverse driving structure is located above the longitudinal driving structure.
[0036] A further optimized solution is that the transverse driving structure includes at least two second sliders 802 fixedly connected to the bottom surface of the first support plate 8, the bottom end of the second slider 802 is slidably connected to the second support plate 9, and the second support plate 9 is rotatably connected to the first lead screw 803, any one of the second sliders 802 is threadedly matched with the first lead screw 803, one end of the first lead screw 803 passes through the second support plate 9 and is axially connected to the output end of the transverse motor, the transverse motor is fixedly connected to the second support plate 9, and the longitudinal driving structure is located below the second support plate 9.
[0037] A further optimized solution is that the longitudinal drive structure includes at least two third sliders 901, the third sliders 901 are fixedly connected to the bottom surface of the second support plate 9, a third support plate 10 is provided below the second support plate 9, the third slider 901 is slidably matched with the third support plate 10, the third support plate 10 is rotatably connected with a second lead screw 1001, the second lead screw 1001 is threadedly matched with any one of the third sliders 901, one end of the second lead screw 1001 passes through the third support plate 10 and is connected to the output shaft of the longitudinal motor 1002, the longitudinal motor 1002 is fixedly connected to the third support plate 10, and the second lead screw 1001 is perpendicular to the first lead screw 803.
[0038] By controlling the longitudinal motor 1002 to rotate, the longitudinal motor 1002 drives the second lead screw 1001 to rotate, and the second lead screw 1001 drives the third slider 901 to move longitudinally, thereby driving the second support plate 9 to achieve longitudinal movement. At this time, the first support plate 8 generates longitudinal movement, thereby driving the induction coil 6 to achieve longitudinal movement, and controlling the transverse motor to rotate, the transverse motor drives the first lead screw 803 to rotate, and the first lead screw 803 drives the second slider 802 to move transversely, thereby the second slider 802 drives the first support plate 8 to achieve transverse movement, and finally the induction coil 6 generates transverse movement. Through the movement of the induction coil 6 in two directions, the heating process of the substrate is a mobile heating process, so that the substrate in the entire reaction chamber 1 is heated more evenly, which effectively improves the production efficiency.
[0039] In the description of the present invention, it should be understood that the terms "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.
[0040] The embodiments described above are only descriptions of the preferred methods of the present invention, and are not intended to limit the scope of the present invention. Without departing from the design spirit of the present invention, various modifications and improvements made to the technical solutions of the present invention by ordinary technicians in this field should fall within the protection scope determined by the claims of the present invention.
Claims
1. An induction coil structure, characterized in that: It comprises a plurality of induction coils (6), wherein the plurality of induction coils (6) are arranged in sequence from the center to the outside, the plurality of induction coils (6) are arranged independently, and the plurality of induction coils (6) are arranged below the reaction chamber (1).
2. An adjustment device, characterized in that: Used to adjust the position of the induction coil structure according to claim 1, a vertical adjustment structure is provided below a plurality of the induction coils (6), and the vertical adjustment structure is used to adjust the height of each of the induction coils (6).
3. The adjustment device according to claim 2, characterized in that The vertical adjustment structure comprises a plurality of lifting rings (7), the plurality of lifting rings (7) being arranged in sequence from the center to the outside, each of the lifting rings (7) being fixedly connected below the corresponding induction coil (6), a lifting drive unit being installed at the bottom of the lifting ring (7), and adjacent lifting rings (7) being vertically slidably connected.
4. The adjustment device according to claim 3, characterized in that The lifting drive unit comprises a rack (702) fixedly connected to the bottom surface of the lifting ring (7); the rack (702) is vertically arranged; a plurality of the racks (702) are not collinear; the plurality of the racks (702) slide together through a first support plate (8); a lifting motor (801) is mounted on the first support plate (8); a gear is connected to the shaft of the lifting motor (801); the gear is meshed with the rack (702).
5. The adjustment device according to claim 4, characterized in that A bidirectional driving structure is connected to the bottom of the first support plate (8).
6. The adjustment device according to claim 5, characterized in that The bidirectional driving structure comprises a transverse driving structure and a longitudinal driving structure, and the transverse driving structure is located above the longitudinal driving structure.
7. The adjustment device according to claim 6, characterized in that The transverse driving structure comprises at least two second sliding blocks (802) fixedly connected to the bottom surface of the first supporting plate (8), the bottom ends of the second sliding blocks (802) are slidably connected to the second supporting plate (9), the second supporting plate (9) is rotatably connected to a first lead screw (803), any one of the second sliding blocks (802) is threadedly engaged with the first lead screw (803), one end of the first lead screw (803) passes through the second supporting plate (9) and is axially connected to the output end of the transverse motor, the transverse motor is fixedly connected to the second supporting plate (9), and the longitudinal driving structure is located below the second supporting plate (9).
8. The adjustment device according to claim 7, characterized in that The longitudinal drive structure comprises at least two third sliders (901), the third sliders (901) being fixedly connected to the bottom surface of the second support plate (9), a third support plate (10) being provided below the second support plate (9), the third sliders (901) being slidably matched with the third support plate (10), the third support plate (10) being rotatably connected with a second lead screw (1001), the second lead screw (1001) being threadably matched with any one of the third sliders (901), one end of the second lead screw (1001) passing through the third support plate (10) and being axially connected to an output shaft of a longitudinal motor (1002), the longitudinal motor (1002) being fixedly connected to the third support plate (10), and the second lead screw (1001) being perpendicular to the first lead screw (803).