Vacuumizing interface device

Abstract

The utility model provides a vacuumizing interface device. According to the vacuumizing connector device, in the axial moving process of the valve rod, the corrugated pipe can stretch out and draw back along with the valve rod, air leakage between the valve rod and the valve body can be avoided in the vacuumizing process, the effect of always sealing is achieved, the ultrahigh vacuum capacity can be achieved through vacuum extraction, and the potential possibility of accidents such as vacuum leakage in the operation process is reduced; meanwhile, the screw joint piece and the cuboid-shaped rod body are used for fixing and limiting, so that the corrugated pipe is prevented from being deformed and damaged due to rotation of the valve rod in the vacuumizing operation process; however, a common axial sealing tool is only used for about 50 times, so that a new O-shaped ring needs to be replaced when leakage occurs in the vacuumizing process after the tool is abraded; the corrugated pipe is used for sealing, the corrugated pipe can be repeatedly used for hundreds of thousands of times without leakage, it is guaranteed that the interior of the valve body is clean and free of pollution, and the service life is longer.

Description

Technical Field

[0001] The utility model relates to the field of vacuum equipment, in particular to a vacuum interface device. Background Art

[0002] During the manufacturing or installation of vacuum equipment such as vacuum pipes, it is necessary to evacuate the equipment many times according to the vacuum requirements and the precision and complexity of the equipment. Figure 1 As shown, it includes a valve body 1, a valve stem 5, and a vacuum tube 4. The valve stem 5 can move axially in the valve stem 1, and the valve stem 5 and the valve body 1 are sealed by a first O-ring 11. The operation method is: use a nut 12 to connect the lower end of the valve body 1 to the vacuum connector 8 of the external device, and pass through a second O-ring 13; when vacuuming, move the valve stem 5 and pull up the sealing plug 81 in the vacuum connector 8, and then connect it to the external vacuum device (such as a vacuum pump) through the vacuum tube 4 to vacuumize. The tooling adopts the first O-ring 11 for sealing. For easy operation, vacuum silicone grease needs to be applied on the surface of the valve stem 5. After repeated use, dust and ash sticking to the valve stem 5 will pollute the external device; and the first O-ring 11 is easy to wear. When the first O-ring 11 is worn, it will cause the vacuum of the external device to fail and the product needs to be vacuumed again, which is time-consuming and labor-intensive.

[0003] Based on the defects of the current vacuum interface tooling, it is necessary to improve it. Utility Model Content

[0004] In view of this, the utility model proposes a vacuum interface device to solve the technical problems existing in the prior art.

[0005] In a first aspect, the utility model provides a vacuum interface device, comprising:

[0006] A valve body, wherein a valve cavity is provided therein, an end face of the valve body is provided with an end cover, the end cover is detachably connected to the valve body via a first clamp, and a vacuum tube communicating with the valve cavity is provided on the side of the valve body;

[0007] A valve stem is located in the valve cavity. A through hole is provided at the end cover corresponding to the valve stem. The diameter of the through hole is larger than the diameter of the valve stem. One end of the valve stem passes through the through hole to the outside of the end cover. The valve stem can reciprocate along the axis of the valve body.

[0008] A bellows, which is located in the valve cavity and sleeved on the outer periphery of the valve stem, one end of the bellows is sealed and fixed to the end cover, and the other end is sealed and fixed to the outer periphery of the valve stem;

[0009] A first screw hole is provided on the side of the end cover, and a screw connection piece is screwed into the first screw hole and abuts against the valve stem to fix the valve stem;

[0010] The end of the valve body away from the end cover is used to connect to the vacuum joint of an external device, and the end of the valve stem away from the end cover is provided with a threaded portion threadedly connected to the sealing plug of the vacuum joint, and the sealing plug can be accommodated in the valve cavity.

[0011] Preferably, the vacuum tube is obliquely arranged on the side of the valve body, and the angle between the vacuum tube and the valve body is 30 to 60 degrees.

[0012] Preferably, a flange is provided on one end of the vacuum tube close to the valve body, and a vacuum detector is installed on the flange.

[0013] Preferably, a second clamp is provided at the end of the valve body away from the end cover, and the second clamp is used to detachably connect the end of the valve body to the vacuum joint.

[0014] Preferably, a first sealing member is further provided at the connection between the end cover and the valve body to seal the end cover and the valve body.

[0015] Preferably, the valve stem includes a rod body and a valve cover, the rod body is located in the valve cavity, the valve cover is located outside the end cover, one end of the rod body passes through the through hole and is connected to the valve cover, the bellows is sleeved on the outer periphery of the rod body, and a threaded portion is provided at the end of the rod body away from the end cover.

[0016] Preferably, the rod body is in a rectangular parallelepiped shape, the valve cover is in a cylindrical shape, the cross-section of the through hole is rectangular, and the diameter of the valve cover is larger than the diameter of the through hole.

[0017] Preferably, the first clamp comprises:

[0018] First half of the clamp;

[0019] A second half clamp, one end of which is hinged to one end of the first half clamp;

[0020] The other end of the second half clamp and the other end of the first half clamp are both provided with a fixing block, and the fixing block is provided with a second screw hole. A screw is screwed into the second screw hole to fix the first half clamp and the second half clamp and form a clamp chamber, and the clamp chamber is used to fix the end cover to the valve body.

[0021] Preferably, the bellows is a metal bellows.

[0022] Preferably, the angle between the vacuum tube and the valve body is 45°.

[0023] Compared with the prior art, the vacuum interface device of the utility model has the following beneficial effects:

[0024] 1. The vacuum interface device of the utility model can follow the expansion and contraction of the bellows during the axial movement of the valve stem, and can avoid air leakage between the valve stem and the valve body during vacuuming, so as to achieve the effect of constant sealing. The vacuum extraction can reach the ultra-high vacuum capability, reducing the potential possibility of accidents such as vacuum leakage during operation; at the same time, the valve stem is fixed and limited by the screw connector to prevent the bellows from being deformed and damaged due to the rotation of the valve stem during the vacuuming operation; the commonly used axial sealing tooling is worn out after only being used for about fifty times, resulting in leakage during the vacuuming process and requiring replacement of a new O-ring; while the utility model uses a bellows for sealing, which can be used reciprocally for 100,000 times without leakage, and ensures that the inside of the valve body is clean and pollution-free, with a longer service life;

[0025] 2. The angle between the vacuum tube and the valve body of the vacuum interface device of the utility model is 30-60°, the gas resistance is small during vacuuming, the gas in the external equipment can be extracted in time, and the production efficiency is improved;

[0026] 3. The vacuum interface device of the utility model has a flange on one end of the vacuum tube close to the valve body, and a vacuum detector (such as a gauge) is installed on the flange. By installing the vacuum detector on the flange, the vacuum degree of the external device can be accurately monitored. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the following is a brief introduction to the drawings required for the embodiments or the prior art descriptions. Obviously, the drawings described below are only some embodiments of the utility model, and for ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0028] Figure 1 It is a structural schematic diagram of a vacuum interface device in the prior art;

[0029] Figure 2 It is a structural schematic diagram of the vacuum interface device of the utility model;

[0030] Figure 3 It is a schematic diagram of the connection structure between the end cover and the valve stem of the utility model;

[0031] Figure 4 It is a schematic diagram of the angle between the vacuum tube and the valve body of the utility model;

[0032] Figure 5 It is a schematic diagram of the valve body of the utility model moving to drive the sealing plug to move above the vacuum tube;

[0033] Figure 6 It is a schematic diagram of a flange provided on the vacuum tube of the utility model;

[0034] Figure 7 It is a structural schematic diagram of the first clamp of the utility model. DETAILED DESCRIPTION

[0035] In order to make the purpose, technical scheme and advantages of the embodiments of the present invention clearer, the technical scheme in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings here can be arranged and designed in various different configurations.

[0036] Those skilled in the art will appreciate that, unless expressly stated, the singular forms "a", "an", "said" and "the" used herein may also include plural forms. It should be further understood that the term "comprising" used in the specification of the present application refers to the presence of the features, integers, steps, operations, elements and / or components, but does not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components and / or groups thereof. It should be understood that when we refer to an element as being "connected" to another element, it may be directly connected to the other element, or there may be intermediate elements. In addition, the "connection" used here may include wireless connections. The term "and / or" used here includes all or any unit and all combinations of one or more associated listed items.

[0037] In the present application, unless otherwise clearly specified and limited, a first feature being “above” or “below” a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being “above”, “above”, and “above” a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being “below”, “below”, and “below” a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0038] It should be understood that although the terms first, second, etc. may be used in the present disclosure to describe various information, such information should not be limited to these terms. These terms are only used to distinguish the same type of information from each other.

[0039] The following will be combined with the implementation of the utility model to clearly and completely describe the technical solutions in the implementation of the utility model. Obviously, the described implementation is only a part of the implementation of the utility model, not all of the implementations. Based on the implementation of the utility model, all other implementations obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0040] The utility model provides a vacuum interface device, such as Figures 1 to 7 As shown, including:

[0041] A valve body 1 is provided with a valve cavity 10 therein, an end face of the valve body 1 is provided with an end cover 2, the end cover 2 is detachably connected to the valve body 1 via a first clamp 3, and a vacuum tube 4 communicating with the valve cavity 10 is provided on the side of the valve body 1;

[0042] The valve stem 5 is located in the valve cavity 10. The end cover 2 is provided with a through hole 21 corresponding to the valve stem 5. The diameter of the through hole 21 is slightly larger than the diameter of the valve stem 5. One end of the valve stem 5 passes through the through hole 21 to the outside of the end cover 2. The valve stem 5 can reciprocate along the axis direction of the valve body 1.

[0043] The bellows 6 is located in the valve cavity 10 and sleeved on the outer periphery of the valve stem 5. One end of the bellows 6 is sealed and fixed to the end cover 2, and the other end is sealed and fixed to the outer periphery of the valve stem 5.

[0044] A first screw hole 22 is formed on the side of the end cover 2, and a screw connection member 7 is screwed into the first screw hole 22 and abuts against the valve stem 5 to fix the valve stem 5;

[0045] Among them, the end of the valve body 1 away from the end cover is used to connect with the vacuum connector 8 of the external device, and the end of the valve stem 5 away from the end cover 2 is provided with a threaded portion 51 threadedly connected to the sealing plug 81 of the vacuum connector, and the sealing plug 81 can be accommodated in the valve cavity 10.

[0046] It should be noted that the vacuum interface device of the utility model comprises a valve body 1, an end cover 2, a first clamp 3, a vacuum tube 4, a valve stem 5, a bellows 6, and a screw connection 7; a valve cavity 10 is provided in the valve body 1 (that is, the interior of the valve body 1 is hollow), specifically, the valve body 1 is a cylindrical body with a hollow interior, the end cover 2 is adapted to the valve body 1, and the end cover 2 is also cylindrical; an end face of the valve body 1 is provided with an end cover 2, specifically, an upper end face of the valve body 1 is provided with an end cover 2; the end cover 2 and the valve body 1 are detachably fixedly connected through the first clamp 3; the vacuum tube 4 is arranged on the side of the valve body 1 and is connected to the valve cavity 10; the valve stem 5 is coaxially arranged in the valve cavity 10, and a through hole 21 is provided at the end cover 2 corresponding to the valve stem 5, the diameter of the through hole 21 is slightly larger than the diameter of the valve stem 5, for example, the diameter of the through hole 21 is 1.01 to 1.05 times the diameter of the valve stem, and one end of the valve stem 5 passes through the through hole 21 to the outside of the end cover 2 , the valve stem 5 can move up and down reciprocatingly along the axial direction of the valve body 1; a bellows 6 is provided in the valve cavity 10, and the bellows 6 is sleeved on the outer periphery of the valve stem 5, one end (i.e. the upper end) of the bellows 6 is sealed and fixed to the end cover 2, and the other end (i.e. the lower end) is sealed and fixed to the outer periphery of the valve stem 5; a first screw hole 22 is opened on the side of the end cover 2, and a screw connection 7 is screwed into the first screw hole 22 and abuts against the valve stem 5 to fix the valve stem 5, and the screw connection 7 can specifically be a screw, a bolt, a screw, etc.; the end of the valve body 1 away from the end cover is used to connect with the vacuum connector 8 of the external device, and a sealing plug 81 (i.e. a sealing plug) is provided in the vacuum connector 8, and the vacuum connector 8 is adapted to the valve body 1, and the vacuum connector 8 and the valve body 1 are both cylindrical; the end of the valve stem 5 away from the end cover 2 (i.e. the lower end of the valve stem 5) is provided with a screw connection portion 51 screwed to the sealing plug 81 of the vacuum connector, and the sealing plug 81 can be accommodated in the valve cavity 10.

[0047] The method of using the vacuum interface device of the present invention is as follows: first, connect the vacuum connector 8 of the external device to the end of the valve body 1 away from the end cover, and at the same time, remove the first clamp 3. At this time, the end cover 2 and the valve body 1 are in a free state. Since the diameter of the through hole 21 is slightly larger than the diameter of the valve stem 5, the valve stem 5 can rotate. The screw connection portion 51 is rotated downward and screwed to the sealing plug 81 through the rotation of the valve stem 5. Then, the end cover 2 and the valve body 1 are fixedly connected by using the first clamp 3. Then, an external force is used to move the valve stem 5 upward. The upward movement of the valve stem 5 drives the sealing plug 81 to separate from the vacuum connector 8 of the external device and move upward and enter the valve cavity 10. The valve stem 5 continues to move upward and drives the sealing plug 81 to move to the top of the vacuum tube 4. At this time, the screw connection 7 is screwed into the first screw hole 22 and the screw connection 7 is tightly abutted against the outer periphery of the valve stem 5, so that the valve stem 5 is fixed. At this time, the vacuum connector 8 of the external device and the vacuum The vacuum tube 4 is connected, and the vacuum tube 4 is connected to the vacuum pump, and the vacuum pump is used to perform vacuum operation on the external device; after the vacuum is completed, the threaded connector 7 is loosened, and the valve stem 5 is pushed downward, the valve stem 5 drives the sealing plug 81 to move downward and seal the vacuum joint 8 of the external device, and then the first clamp 3 is removed, and the valve stem 5 is rotated to separate the threaded portion 51 from the sealing plug 81, so as to realize the disassembly of the vacuum interface device; in the vacuum interface device of the utility model, during the axial movement of the valve stem 5, the bellows 6 can follow the extension and contraction, and the leakage between the valve stem 5 and the valve body 1 can be avoided during vacuum, so as to achieve the effect of constant sealing, and the vacuum extraction can achieve the ability of ultra-high vacuum, which reduces the potential possibility of accidents such as vacuum leakage during operation; at the same time, the valve stem 5 is fixed and limited by the threaded connector 7 to prevent the bellows 6 from being deformed and damaged due to the rotation of the valve stem 5 during the vacuum operation. The commonly used axial sealing tooling is only used for about fifty times before it wears out, resulting in leakage during vacuuming and requiring replacement of a new O-ring; however, the utility model uses a bellows for sealing, which can be used back and forth 100,000 times without leakage, and ensures that the interior of the valve body 1 is clean and pollution-free, with a longer service life.

[0048] In some embodiments, the vacuum tube 4 is tilted on the side of the valve body 1, and the angle between the vacuum tube 1 and the valve body 1 is 30-60 degrees. Specifically, the angle between the axis of the vacuum tube 4 and the axis of the valve body 1 is 30-60 degrees; Figure 1 As shown, when the angle between the vacuum tube 4 and the valve body 1 is 90°, the gas flow resistance is large during vacuuming, and the vacuuming effect is poor; Figure 4 As shown, the angle between the vacuum tube 1 and the valve body 1 is set to R, and R is 30-60 degrees. When vacuuming, the gas resistance is small, and the gas in the external equipment can be extracted in time, thereby improving production efficiency.

[0049] In some embodiments, a flange 41 is provided on one end of the vacuum tube 4 close to the valve body, and a vacuum detector is installed on the flange.

[0050] Specifically, the flange is a KF25 vacuum flange, and the vacuum detector can monitor the vacuum degree of the external device in real time when the vacuum is pumped. The vacuum detector is specifically a regulator; existing tooling, such as Figure 1 As shown, since there is no location for installing a vacuum gauge, the gauge can only be installed on the vacuum hose to monitor the vacuum degree. Since the location where the gauge is installed on the vacuum hose is 2 to 3 meters away from the external device, the vacuum degree monitored in this way is not real. By installing a vacuum detector (such as a gauge) on the flange, the vacuum degree of the external device can be accurately monitored.

[0051] In some embodiments, a second clamp 82 is provided at the end of the valve body 1 away from the end cover 2, and the second clamp 82 is used to detachably connect the end of the valve body to the vacuum joint 8. At the same time, a second seal 83 is provided at the end of the valve body 1 away from the end cover 2 and the vacuum joint 8. The second seal 83 can specifically be a sealing ring, and the second seal 83 is used to seal the end of the valve body 1 away from the end cover 2 and the vacuum joint 8. Specifically, a second seal 83 is provided at the connection between the end of the valve body 1 away from the end cover 2 and the vacuum joint 8, and then the second clamp 82 is used to fix the end of the valve body 1 away from the end cover 2 and the vacuum joint 8, so as to achieve a sealed connection between the end of the valve body 1 away from the end cover 2 and the vacuum joint 8.

[0052] In some embodiments, a first sealing member 30 is further provided at the connection between the end cover 2 and the valve body 1. The first sealing member 30 seals the end cover 2 and the valve body 1. The first sealing member 30 may be a sealing ring. Specifically, the first sealing member 30 is first provided at the connection between the end cover 2 and the valve body 1, and then the end cover 2 and the valve body 1 are fixed by using the first clamp 3, so as to realize a sealed connection between the end cover 2 and the valve body 1.

[0053] In some embodiments, the valve stem 5 includes a rod body 52 and a valve cover 53. The rod body 52 is located in the valve cavity 10, and the valve cover 53 is located outside the end cover 2. One end of the rod body 52 passes through the through hole 21 and is connected to the valve cover 53. The bellows 6 is sleeved on the outer periphery of the rod body 52. ​​A threaded portion 51 is provided at the end of the rod body 52 away from the end cover 2. The threaded member 7 is threadedly connected to the first screw hole 22 and abuts against the rod body 52 to fix the valve stem 5. When in use, the valve cover 53 can be held by hand to push the rod body 52 to move back and forth axially.

[0054] In some embodiments, the rod body 52 is in the shape of a cuboid, the valve cover 53 is in the shape of a cylinder, the cross-section of the through hole 21 is rectangular, and the diameter of the valve cover 53 is larger than the diameter of the through hole 21. Since the diameter of the valve cover 53 is larger than the diameter of the through hole 21, the valve cover 53 can move downward without passing through the end cover 2. Moreover, since the rod body 52 is in the shape of a cuboid rather than a cylinder, the bellows 6 can be further prevented from being deformed and damaged due to the rotation of the valve stem 5 during the vacuum operation.

[0055] Further, preferably, the cross section of the rod body 52 is a square, the cross section of the through hole 21 is also a square, and the rod body 52 and the valve cover 53 are both made of stainless steel.

[0056] In some embodiments, reference Figure 7 As shown, the first clamp 3 includes:

[0057] First half clamp 31;

[0058] A second half clamp 32, one end of which is hinged to one end of the first half clamp 31;

[0059] A fixing block 33 is provided at the other end of the second half clamp 32 and the other end of the first half clamp 31. A second screw hole is provided on the fixing block 33. A screw rod 34 is screwed into the second screw hole to fix the first half clamp 31 and the second half clamp 32 and form a clamp chamber 35. The clamp chamber 35 is used to fix the end cover 2 and the valve body 1.

[0060] In the specific above embodiment, the second half clamp 32 and the first half clamp 31 are hinged at one end and fixedly connected at the other end by a screw 34. When in use, the second half clamp 32 and the first half clamp 31 are rotated so that the first half clamp 31 and the second half clamp 32 are enclosed to form a clamp chamber 35, and the clamp chamber 35 encloses the end cover 2 and the valve body 1, and then the first half clamp 31 and the second half clamp 32 are fixed by the screw 34, thereby fixing the end cover 2 and the valve body 1; similarly, the second clamp 82 can also adopt the same structure as the first clamp 3.

[0061] In some embodiments, the bellows 6 is a metal bellows.

[0062] In some embodiments, the angle between the vacuum tube 4 and the valve body 1 is 45°.

[0063] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A vacuum interface device, characterized in that: include: A valve body, wherein a valve cavity is provided therein, an end face of the valve body is provided with an end cover, the end cover is detachably connected to the valve body via a first clamp, and a vacuum tube communicating with the valve cavity is provided on the side of the valve body; A valve stem is located in the valve cavity. A through hole is provided at the end cover corresponding to the valve stem. The diameter of the through hole is larger than the diameter of the valve stem. One end of the valve stem passes through the through hole to the outside of the end cover. The valve stem can reciprocate along the axis of the valve body. A bellows, which is located in the valve cavity and sleeved on the outer periphery of the valve stem, one end of the bellows is sealed and fixed to the end cover, and the other end is sealed and fixed to the outer periphery of the valve stem; A first screw hole is provided on the side of the end cover, and a screw connection piece is screwed into the first screw hole and abuts against the valve stem to fix the valve stem; The end of the valve body away from the end cover is used to connect to the vacuum joint of an external device, and the end of the valve stem away from the end cover is provided with a threaded portion threadedly connected to the sealing plug of the vacuum joint, and the sealing plug can be accommodated in the valve cavity.

2. The vacuum interface device according to claim 1, characterized in that: The vacuum tube is arranged obliquely on the side of the valve body, and the angle between the vacuum tube and the valve body is 30-60 degrees.

3. The vacuum interface device according to claim 1, characterized in that: A flange is provided on one end of the vacuum tube close to the valve body, and a vacuum degree detector is installed on the flange.

4. The vacuum interface device according to claim 1, characterized in that: A second clamp is provided at the end of the valve body away from the end cover, and the second clamp is used to detachably connect the end of the valve body to the vacuum joint.

5. The vacuum interface device according to claim 1, characterized in that: A first sealing member is also provided at the connection between the end cover and the valve body to seal the end cover and the valve body.

6. The vacuum interface device according to any one of claims 1 to 5, characterized in that: The valve stem includes a rod body and a valve cover, the rod body is located in the valve cavity, the valve cover is located outside the end cover, one end of the rod body passes through the through hole and is connected to the valve cover, the bellows is sleeved on the outer periphery of the rod body, and a threaded portion is provided on the end of the rod body away from the end cover.

7. The vacuum interface device according to claim 6, characterized in that: The rod body is in a rectangular parallelepiped shape, the valve cover is in a cylindrical shape, the cross-section of the through hole is rectangular, and the diameter of the valve cover is greater than the diameter of the through hole.

8. The vacuum interface device according to claim 1, characterized in that: The first clamp comprises: First half of the clamp; A second half clamp, one end of which is hinged to one end of the first half clamp; The other end of the second half clamp and the other end of the first half clamp are both provided with a fixing block, and the fixing block is provided with a second screw hole. A screw is screwed into the second screw hole to fix the first half clamp and the second half clamp and form a clamp chamber, and the clamp chamber is used to fix the end cover to the valve body.

9. The vacuum interface device according to claim 1, characterized in that: The bellows is a metal bellows.

10. The vacuum interface device according to claim 2, characterized in that: The angle between the vacuum tube and the valve body is 45°.

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