Vacuum gauge filtering and buffering device

Abstract

The utility model discloses a vacuum gauge filtering and buffering device, which is used for connecting a vacuum gauge and vacuum equipment and comprises a connecting pipe used for being connected with the vacuum equipment and provided with a first connecting part; the filtering mechanism comprises a mounting base, a channel is formed in the mounting base, a filtering assembly is mounted in the channel, a third connecting part used for being connected with the second connecting part of the vacuum gauge is arranged at one end of the mounting base, and a fourth connecting part used for being connected with the first connecting part of the connecting pipe is arranged at the end, away from the vacuum gauge, of the mounting base; the first connecting mechanism is connected between the second connecting part and the third connecting part, so that the mounting seat is fixedly connected with the vacuum gauge; and the second connecting mechanism is connected between the fourth connecting part and the first connecting part, so that the mounting seat is fixedly connected with the connecting pipe. The utility model provides a vacuum gauge filtering buffer device which is stable in connection and can filter volatile matters.

Description

Technical Field

[0001] The utility model relates to the field of vacuum gauges, in particular to a vacuum gauge filtering buffer device. Background Art

[0002] Vacuum gauges play a vital role in industry and scientific research, especially in processes such as vacuum coating, vacuum smelting, vacuum heat treatment and vacuum drying, where they provide accurate vacuum measurement. However, these devices face some challenges in practical use.

[0003] The main problem is that the measuring end of the vacuum gauge is easily contaminated by the atmosphere or volatiles in the vacuum chamber, which can lead to deviations in the measurement results, manifested as inaccurate values ​​and unstable readings. In addition, the performance of the vacuum gauge tube will gradually deteriorate during long-term use due to various factors such as ambient gases, temperature fluctuations and mechanical vibrations. The inside of the gauge tube may be contaminated by volatiles such as oil vapor and water vapor, further reducing the measurement accuracy.

[0004] To address these issues, traditional vacuum gauge maintenance strategies typically include regular calibration and cleaning, which not only requires professional operation but also increases maintenance costs and time. Utility Model Content

[0005] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, the utility model provides a vacuum gauge filtering buffer device which has a stable connection and can filter volatiles.

[0006] According to the vacuum gauge filtering buffer device of the first aspect of the present invention, which is used to connect a vacuum gauge and a vacuum device, it includes: a connecting pipe, which is used to connect to the vacuum device, and the connecting pipe is provided with a first connecting portion; a filtering mechanism, including a mounting seat, a channel is provided in the mounting seat, and a filtering assembly is installed in the channel, one end of the mounting seat is provided with a third connecting portion for connecting to the second connecting portion of the vacuum gauge, and the end of the mounting seat away from the vacuum gauge is provided with a fourth connecting portion for connecting to the first connecting portion of the connecting pipe; a first connecting mechanism, the first connecting mechanism is connected between the second connecting portion and the third connecting portion to connect the mounting seat to the vacuum gauge; a second connecting mechanism, the second connecting mechanism is connected between the fourth connecting portion and the first connecting portion to connect the mounting seat to the connecting pipe.

[0007] When the above structure is adopted, the second connection part is connected to the third connection part through the first connection mechanism, so that the mounting seat is fixed to the vacuum gauge, and the fourth connection part is connected to the first connection part through the second connection mechanism, so that the mounting seat connecting pipe is fixed, and the other end of the connecting pipe is connected to the vacuum equipment, and a vacuum channel is formed between the filter mechanism, the vacuum gauge, the connecting pipe and the vacuum equipment. The filter mechanism is arranged before the vacuum gauge, so that the volatiles in the vacuum channel are condensed and filtered at the filter assembly, and the volatiles in the entire vacuum environment are reduced, and the volatiles will not accumulate on the vacuum gauge, affecting the accuracy of the vacuum gauge measurement. At the same time, the first connection mechanism and the second connection mechanism of the device can be disassembled, which is convenient for cleaning the volatiles accumulated in the filter mechanism and the connecting pipe, so that the filter mechanism and the connecting pipe can be reused, thereby extending the service life of the connecting pipe and the filter mechanism.

[0008] According to some embodiments of the utility model, the filter assembly includes a first filter element and a second filter element that are spaced apart, and the side walls at both ends of the channel are respectively provided with positioning grooves, and the first filter element and the second filter element are arranged in the corresponding positioning grooves through positioning pieces.

[0009] According to some embodiments of the utility model, the first connecting mechanism includes a hinged first left connecting member and a first right connecting member, the first left connecting member and the first right connecting member can be opened or closed with each other, and when the first left connecting member and the first right connecting member are in a closed state, a first clamping opening can be formed to clamp the second connecting part and the third connecting part, the first left connecting member and the first right connecting member are provided with a first accommodating groove that can accommodate the second connecting part and the third connecting part, and a first locking component that can lock the first left connecting member and the first right connecting member in a closed state is provided between the first left connecting member and the first right connecting member.

[0010] According to some embodiments of the utility model, a first inclined surface capable of pressing one side of the second connecting part and the third connecting part is provided in the first receiving groove of the first left connecting member, and a second inclined surface capable of pressing the other side of the second connecting part and the third connecting part is provided in the first receiving groove of the first right connecting member.

[0011] According to some embodiments of the utility model, the first locking component includes a first rotating rod rotatably connected to the first right connecting member, the first left connecting member is provided with a first accommodating groove capable of accommodating the first rotating rod, the first rotating rod is connected to a first nut capable of rotating relative to the first rotating rod, and when the first left connecting member and the first right connecting member are in a closed state and the first rotating rod is located in the first accommodating groove, the first nut is rotated to abut against the first left connecting member so that the first left connecting member and the first right connecting member abut against each other and are locked.

[0012] According to some embodiments of the utility model, the second connecting mechanism includes a hinged second left connecting member and a second right connecting member, and the second left connecting member and the second right connecting member can be opened or closed with each other, and when the second left connecting member and the second right connecting member are in a closed state, a second clamping opening for clamping the fourth connecting part and the first connecting part can be formed, and the second left connecting member and the second right connecting member are also provided with a second accommodating groove capable of accommodating the fourth connecting part and the first connecting part, and a second locking component capable of locking the second left connecting member and the second right connecting member in a closed state is provided between the second left connecting member and the second right connecting member.

[0013] According to some embodiments of the utility model, the second accommodating groove of the second left connecting member is provided with a third inclined surface capable of pressing the fourth connecting part and one side of the first connecting part, and the first accommodating groove of the second right connecting member is provided with a fourth inclined surface capable of pressing the second connecting part and the other side of the third connecting part.

[0014] According to some embodiments of the utility model, the second locking component includes a second rotating rod rotatably connected to the second right connecting member, the second left connecting member is provided with a second accommodating groove capable of accommodating the second rotating rod, the second rotating rod is connected to a second nut capable of rotating relative to the second rotating rod, and when the second left connecting member and the second right connecting member are in a closed state and the second rotating rod is located in the second accommodating groove, the second nut abuts against the second left connecting member so that the second left connecting member and the second right connecting member abut against each other and are locked.

[0015] According to some embodiments of the present utility model, the connecting pipe is further provided with a buffer section.

[0016] According to some embodiments of the utility model, a seal is provided between the vacuum gauge and the mounting seat and between the mounting seat and the connecting pipe, and the seal includes a sealing ring with a flow channel, and the sealing ring is provided with an annular step that can extend into the first connecting part, the second connecting part, the third connecting part and the fourth connecting part during installation.

[0017] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0019] Figure 1 This is one of the schematic diagrams of the vacuum gauge filter buffer device according to an embodiment of the utility model;

[0020] Figure 2 This is a second schematic diagram of the vacuum gauge filter buffer device according to an embodiment of the present utility model;

[0021] Figure 3 This is an exploded view of the vacuum gauge filter buffer device of an embodiment of the utility model;

[0022] Figure 4 A cross-sectional view of a vacuum gauge filter buffer device according to an embodiment of the utility model;

[0023] Figure 5 A schematic diagram of a first connecting assembly of a vacuum gauge filter buffer device according to an embodiment of the utility model;

[0024] Figure 6 An exploded view of a first connecting assembly of a vacuum gauge filter buffer device according to an embodiment of the utility model;

[0025] Figure 7 A schematic diagram of a second connecting assembly of a vacuum gauge filter buffer device according to an embodiment of the utility model;

[0026] Figure 8 An exploded view of a second connecting assembly of a vacuum gauge filter buffer device according to an embodiment of the present utility model;

[0027] Fig. 9 One of the schematic diagrams of the sealing member of the vacuum gauge filter buffer device according to an embodiment of the utility model;

[0028] Fig.10 This is the second schematic diagram of the sealing component of the vacuum gauge filter buffer device according to an embodiment of the present utility model.

[0029] Reference numerals:

[0030] Vacuum gauge 100;

[0031] Connecting pipe 200, first connecting portion 210, buffer section 220;

[0032] Filter mechanism 300, mounting seat 310, channel 311, positioning groove 3111, filter assembly 312, first filter element 3121, second filter element 3122, third connection part 313, fourth connection part 314, positioning member 315;

[0033] The first connecting mechanism 400, the first left connecting member 410, the first inclined surface 411, the first right connecting member 420, the second inclined surface 421, the first clamping opening 430, the first receiving groove 440, the first locking member 450, the first rotating rod 451, the first receiving groove 452, the first nut 453, the first paddle 4531, the first left connecting member 410, the first boss 461, and the second boss 462;

[0034] The second connecting mechanism 500, the second left connecting member 510, the third inclined surface 511, the second right connecting member 520, the fourth inclined surface 521, the second clamping opening 530, the second receiving groove 540, the second locking member 550, the second rotating rod 551, the second receiving groove 552, the second nut 553, the second paddle 5531, the second connecting block 560, the third boss 561, and the fourth boss 562;

[0035] Sealing element 600 , sealing ring 610 , and annular step 620 . DETAILED DESCRIPTION

[0036] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0037] In the description of the present invention, it should be understood that descriptions involving orientation, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0038] In the description of the utility model, if there is a description of first and second, it is only for the purpose of distinguishing the technical features, and cannot be understood as indicating or implying the relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0039] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0040] like Figure 1 , Figure 2 and Figure 3 As shown, according to the vacuum gauge filter buffer device of the first embodiment of the utility model, the device filters the volatiles passing through the communication passage through the filter mechanism 300. The vacuum gauge filter buffer device includes a connecting pipe 200, a filter mechanism 300, a first connecting mechanism 400 and a second connecting mechanism 500.

[0041] Reference Figure 3As shown, in some embodiments of the utility model, the vacuum gauge filtering buffer device includes a connecting pipe 200 connected to the vacuum equipment, the connecting pipe 200 is provided with a first connecting part 210, the filtering mechanism 300 includes a mounting seat 310, a channel 311 is provided in the mounting seat 310, a filtering assembly 312 is installed in the channel 311, one end of the mounting seat 310 is provided with a third connecting part 313 for connecting to the second connecting part 110 of the vacuum gauge 100, and the end of the mounting seat 310 away from the vacuum gauge 100 is provided with a fourth connecting part 314 for connecting to the first connecting part 210 of the connecting pipe 200, the first connecting mechanism 400 is connected between the second connecting part 110 and the third connecting part 313 to connect the mounting seat 310 to the vacuum gauge 100, and the second connecting mechanism 500 is connected between the fourth connecting part 314 and the first connecting part 210 to connect the mounting seat 310 to the connecting pipe 200.

[0042] When the above structure is adopted, the second connecting part 110 and the third connecting part 313 are connected by the first connecting mechanism 400, so that the mounting seat 310 and the vacuum gauge 100 are fixed, and the fourth connecting part 314 and the first connecting part 210 are connected by the second connecting mechanism 500, so that the mounting seat 310 and the connecting pipe 200 are fixed, and the other end of the connecting pipe 200 is connected to the vacuum equipment, and the filtering mechanism 300, the vacuum gauge 100, the connecting pipe 200 and the vacuum equipment are interconnected and form a vacuum environment after vacuuming. The filtering mechanism 300 is arranged before the vacuum gauge 100, so that the volatiles in the vacuum environment are condensed and filtered at the filtering mechanism 300, and the volatiles will not accumulate on the vacuum gauge 100 to affect the measurement accuracy of the vacuum gauge 100. At the same time, the first connecting mechanism 400 and the second connecting mechanism 500 of the device can be disassembled to facilitate cleaning of volatile substances accumulated in the filter mechanism 300 and the connecting pipe 200, so that the filter mechanism 300 and the connecting pipe 200 can be reused, thereby extending the service life of the connecting pipe 200 and the filter mechanism 300.

[0043] When the above structure is adopted, the volatiles passing through the filter assembly 312 are condensed and accumulated on the filter assembly 312, so that the gas or particle volatiles such as oil vapor and water vapor in the vacuum environment are reduced, thereby making the measurement effect of the vacuum gauge 100 better. The filter assembly 312 can be cleaned to remove the accumulated volatiles, thereby extending the service life of the filter mechanism 300.

[0044] It is conceivable that the first connecting mechanism 400 and the second connecting mechanism 500 are connecting heads.

[0045] It is conceivable that the filter component 312 is an activated carbon mesh or the like.

[0046] Reference Figure 4As shown, in some embodiments of the utility model, the filter assembly 312 includes a first filter element 3121 and a second filter element 3122 arranged at intervals, and the side walls at both ends of the channel 311 are respectively provided with positioning grooves 3111, and the first filter element 3121 and the second filter element 3122 are arranged in the corresponding positioning grooves 3111 through positioning members 315. The first filter element 3121 and the second filter element 3122 are arranged up and down, double filtering, and the filtering effect is better. The setting of the positioning groove 3111 is also convenient for installing and positioning the first filter element 3121 and the second filter element 3122. The positioning member 315 is an elastic retaining ring, and the positioning member 315 is used to fix the first filter element 3121 and the second filter element 3122 in the mounting seat 310. At the same time, the positioning member 315 can also be removed from the mounting seat 310, so that the first filter element 3121 and the second filter element 3122 can be removed for cleaning and repeated use.

[0047] It is conceivable that the first filter element 3121 and the second filter element 3122 are connected to the mounting base 310 by threaded connection.

[0048] Reference Figure 4 As shown, in some embodiments of the present invention, the first filter element 3121 and the second filter element 3122 have pores, and the pore range is set between 1μm and 140μm. The first filter element 3121 and the second filter element 3122 can be adapted according to different external environments and are more widely used.

[0049] Reference Figure 4 As shown, in some embodiments of the present invention, the first filter element 3121 and the second filter element 3122 are PE filter elements. When volatiles of 0.5 μm to 1 μm pass through the first filter element 3121 and the second filter element 3122, some of them will be filtered through. When a thin layer of filter membrane is gradually formed on the first filter element 3121 and the second filter element 3122, the volatiles of 0.5 μm to 1 μm can be filtered out, and the filtering effect is better. Even under high temperature and high pressure, the performance is stable. The first filter element 3121 and the second filter element 3122 can be cleaned, recycled, and reused, thereby extending the service life of the filter mechanism 300.

[0050] Reference Figures 5 and 6As shown, in some embodiments of the present utility model, the first connecting mechanism 400 includes a hinged first left connecting member 410 and a first right connecting member 420, the first left connecting member 410 and the first right connecting member 420 can be opened or closed with each other, and when the first left connecting member 410 and the first right connecting member 420 are in a closed state, a first clamping opening 430 for clamping the second connecting portion 110 and the third connecting portion 313 can be formed, the first left connecting member 410 and the first right connecting member 420 are provided with a first accommodating groove 440 capable of accommodating the second connecting portion 110 and the third connecting portion 313, and a first locking component 450 capable of locking the first left connecting member 410 and the first right connecting member 420 in a closed state is provided between the first left connecting member 410 and the first right connecting member 420. Both the first left connecting member 410 and the first right connecting member 420 are connecting clips. With the above structure, when the first connecting mechanism 400 needs to be disassembled, the first locking component 450 is unlocked, and then the first left connecting member 410 and the first right connecting member 420 are rotated. The first left connecting member 410 and the first right connecting member 420 are rotated to expand the first clamping opening 430. At this time, the first accommodating groove 440 is also separated from the mounting seat 310 and the vacuum gauge 100, and the first connecting mechanism 400 can be removed, and the mounting seat 310 can be separated from the vacuum gauge 100.

[0051] It is conceivable that the first locking component 450 is a screw-nut assembly or a snap-fit ​​assembly, etc.

[0052] Specifically, a first inclined surface 411 capable of pressing one side of the second connection part 110 and the third connection part 313 is provided in the first receiving groove 440 of the first left connection member 410, and a second inclined surface 421 capable of pressing the other side of the second connection part 110 and the third connection part 313 is provided in the first receiving groove 440 of the first right connection member 420. When the first connection mechanism 400 is in a clamped state, the first inclined surface 411 and the second inclined surface 421 are pressed against the mounting seat 310 and the vacuum gauge 100, and the mounting seat 310 and the vacuum gauge 100 are close to each other, and the connection between the mounting seat 310 and the vacuum gauge 100 is more stable.

[0053] Reference Figures 5 and 6 As shown, in some embodiments of the present invention, the first left connecting member 410 and the first right connecting member 420 are arranged in a semicircular arc, so as to facilitate the fitting and clamping of the mounting seat 310 and the vacuum gauge 100 .

[0054] It is conceivable that the first left connecting member 410 and the first right connecting member 420 are elliptical or square in shape.

[0055] Reference Figures 5 and 6As shown, in some embodiments of the present invention, the first locking component 450 includes a first rotating rod 451 rotatably connected to the first right connecting member 420, the first left connecting member 410 is provided with a first accommodating groove 452 capable of accommodating the first rotating rod 451, and the first rotating rod 451 is connected to a first nut 453 capable of rotating relative thereto. When the first left connecting member 410 and the first right connecting member 420 are in a closed state and the first rotating rod 451 is located in the first accommodating groove 452, the first nut 453 is rotated to abut against the first left connecting member 410, so that the first left connecting member 410 and the first right connecting member 420 abut against each other and are locked. When the first left connecting member 410 and the first right connecting member 420 are in a closed state, rotate the first rotating rod 451 so that the first rotating rod 451 is located in the first accommodating groove 452, and then rotate the first nut 453 so that the first nut 453 gradually abuts against the first left connecting member 410, so that the first left connecting member 410 and the first right connecting member 420 abut against each other and are locked.

[0056] Reference Figures 5 and 6 As shown, in some embodiments of the present invention, the first nut 453 is provided with a first paddle 4531 capable of being turned, so as to facilitate the rotation of the first nut 453 .

[0057] Reference Figures 5 and 6 As shown, in some embodiments of the utility model, a first connection block 460 is connected between the first left connection member 410 and the first right connection member 420, and a first convex column 461 and a second convex column 462 are arranged at intervals on the first connection block 460. The rotating end of the first left connection member 410 is rotatably connected to the first convex column 461, and the rotating end of the first right connection member 420 is rotatably connected to the second convex column 462. The first convex column 461 and the second convex column 462 are arranged at intervals so that the first left connection member 410 and the first right connection member 420 will not interfere with each other when they are closed, so that the first left connection member 410 and the first right connection member 420 are clamped more firmly.

[0058] Reference Figures 7 and 8As shown, in some embodiments of the present utility model, the second connecting mechanism 500 includes a hinged second left connecting member 510 and a second right connecting member 520, the second left connecting member 510 and the second right connecting member 520 can be opened or closed with each other, and when the second left connecting member 510 and the second right connecting member 520 are in a closed state, a second clamping opening 530 for clamping the fourth connecting portion 314 and the first connecting portion 210 can be formed, and the second left connecting member 510 and the second right connecting member 520 are also provided with a second accommodating groove 540 capable of accommodating the fourth connecting portion 314 and the first connecting portion 210, and a second locking component 550 capable of locking the second left connecting member 510 and the second right connecting member 520 in a closed state is provided between the second left connecting member 510 and the second right connecting member 520. Both the second left connecting member 510 and the second right connecting member 520 are connecting clips. With the above structure, when the second connecting mechanism 500 needs to be disassembled, the second locking component 550 is unlocked, and then the second left connecting member 510 and the second right connecting member 520 are rotated. The second left connecting member 510 and the second right connecting member 520 are rotated to expand the second clamping opening 530. At this time, the second accommodating groove 540 is also separated from the mounting seat 310 and the connecting pipe 200, and the second connecting mechanism 500 can be removed, and the mounting seat 310 can be separated from the connecting pipe 200.

[0059] It is conceivable that the second locking component 550 is a screw-nut assembly or a snap-fit ​​assembly, etc.

[0060] Reference Figures 7 and 8 As shown, in some embodiments of the present invention, the second left connecting member 510 and the second right connecting member 520 are arranged in a semicircular arc. It is conceivable that the second left connecting member 510 and the second right connecting member 520 are elliptical or square.

[0061] Specifically, a third inclined surface 511 capable of pressing the fourth connection part 314 and one side of the first connection part 210 is provided in the second receiving groove 540 of the second left connection member 510, and a fourth inclined surface 521 capable of pressing the second connection part 110 and the other side of the third connection part 313 is provided in the first receiving groove 440 of the second right connection member 520. When the second connection mechanism 500 is in a clamped state, the third inclined surface 511 and the fourth inclined surface 521 abut against the fourth connection part 314 and the first connection part 210, and the fourth connection part 314 and the first connection part 210 are close to each other, so that the connection between the mounting seat 310 and the vacuum gauge 100 is more stable.

[0062] Reference Figures 7 and 8As shown, in some embodiments of the present invention, the second locking component 550 includes a second rotating rod 551 rotatably connected to the second right connecting member 520, the second left connecting member 510 is provided with a second accommodating groove 552 capable of accommodating the second rotating rod 551, and the second rotating rod 551 is connected to a second nut 553 capable of rotating relative to it. When the second left connecting member 510 and the second right connecting member 520 are in a closed state and the second rotating rod 551 is located in the second accommodating groove 552, the second nut 553 abuts against the second left connecting member 510, so that the second left connecting member 510 and the second right connecting member 520 abut against each other and are locked. When the second left connecting member 510 and the second right connecting member 520 are in a closed state, rotate the second rotating rod 551 so that the second rotating rod 551 is located in the second accommodating groove 552, and then rotate the second nut 553 so that the second nut 553 gradually abuts against the second left connecting member 510, so that the free end of the second left connecting member 510 and the free end of the second right connecting member 520 abut against each other and are locked.

[0063] Reference Figures 7 and 8 As shown, in some embodiments of the present invention, the second nut 553 is provided with a second paddle 5531 that can be used as a knob to facilitate the rotation of the second nut 553 .

[0064] Reference Figures 7 and 8 As shown, in some embodiments of the utility model, a second connection block 560 is connected between the second left connection member 510 and the second right connection member 520, and a third convex column 561 and a fourth convex column 562 are arranged at intervals on the second connection block 560. The rotation end of the second left connection member 510 is rotatably connected to the third convex column 561, and the rotation end of the second right connection member 520 is rotatably connected to the fourth convex column 562. The third convex column 561 and the fourth convex column 562 are arranged at intervals so that the second left connection member 510 and the second right connection member 520 will not interfere with each other when they are closed, so that the second left connection member 510 and the second right connection member 520 are clamped more firmly.

[0065] Reference Figure 2 As shown, in some embodiments of the present invention, the connecting pipe 200 is further provided with a buffer section 220. The buffer section 220 can condense the volatiles passing through the connecting pipe 200.

[0066] It is conceivable that the buffer section 220 is arranged in a U shape.

[0067] Specifically, the buffer section 220 is arranged in a spiral shape. Since the connecting tube 200 is provided with the buffer section 220, the volatiles are changed from linear motion to curved motion, which reduces the speed of the volatiles, and makes the volatiles condense more thoroughly. The condensed volatiles are partially accumulated in the connecting tube 200. The filtering mechanism 300 is arranged behind the connecting tube 200, and cooperates with the connecting tube 200 to perform secondary condensation and filtration, so that the volatiles such as particulate matter in the entire vacuum ring are further reduced, thereby making the vacuum gauge measurement more accurate. The connecting tube 200 can be disassembled from the device, and the volatiles accumulated in the connecting tube 200 can be cleaned, which is convenient for reuse, thereby extending the service life of the buffer tube.

[0068] Reference Figure 3 As shown, in some embodiments of the present invention, a seal 600 is provided between the vacuum gauge 100 and the mounting seat 310 and between the mounting seat 310 and the connecting pipe 200. The seal 600 includes a seal ring 610 having a flow channel 611. The seal ring 610 is provided with an annular step 620 that can extend into the first connecting portion 210, the second connecting portion 110, the third connecting portion 313, and the fourth connecting portion 314 during installation. The provision of the seal 600 makes the sealing of the connecting passage better, and the provision of the annular step 620 facilitates the connection, making the airtightness better.

[0069] Of course, the invention of the present invention is not limited to the above-mentioned implementation modes. Those skilled in the art may make equivalent modifications or substitutions without violating the spirit of the present invention. These equivalent modifications or substitutions are all included in the scope defined by the claims of this application.

Claims

1. A vacuum gauge filtering buffer device, used for connecting a vacuum gauge (100) and a vacuum device, characterized in that: include: A connecting pipe (200), the connecting pipe (200) being used to connect to a vacuum device, the connecting pipe (200) being provided with a first connecting portion (210); A filtering mechanism (300) comprises a mounting seat (310), wherein a channel (311) is provided in the mounting seat (310), a filtering assembly (312) is installed in the channel (311), a third connecting portion (313) for connecting to the second connecting portion (110) of the vacuum gauge (100) is provided at one end of the mounting seat (310), and a fourth connecting portion (314) for connecting to the first connecting portion (210) of the connecting pipe (200) is provided at one end of the mounting seat (310) away from the vacuum gauge (100); a first connecting mechanism (400), the first connecting mechanism (400) being connected between the second connecting portion (110) and the third connecting portion (313) so as to connect and fix the mounting seat (310) and the vacuum gauge (100); A second connecting mechanism (500), wherein the second connecting mechanism (500) is connected between the fourth connecting portion (314) and the first connecting portion (210) so as to connect and fix the mounting seat (310) and the connecting pipe (200).

2. A vacuum gauge filtering buffer device according to claim 1, characterized in that: The filter assembly (312) comprises a first filter element (3121) and a second filter element (3122) which are arranged at intervals, and the side walls at both ends of the channel (311) are respectively provided with positioning grooves (3111), and the first filter element (3121) and the second filter element (3122) are arranged in the corresponding positioning grooves (3111) through a positioning piece (315).

3. A vacuum gauge filtering buffer device according to claim 1, characterized in that: The first connecting mechanism (400) includes a first left connecting member (410) and a first right connecting member (420) which are hinged. The first left connecting member (410) and the first right connecting member (420) can be opened or closed with each other. When the first left connecting member (410) and the first right connecting member (420) are in a closed state, a first clamping opening (430) for clamping the second connecting portion (110) and the third connecting portion (313) can be formed. The first left connecting member (410) and the first right connecting member (420) are provided with a first accommodating groove (440) capable of accommodating the second connecting portion (110) and the third connecting portion (313). A first locking component (450) capable of locking the first left connecting member (410) and the first right connecting member (420) in a closed state is provided between the first left connecting member (410) and the first right connecting member (420).

4. A vacuum gauge filtering buffer device according to claim 3, characterized in that: A first inclined surface (411) capable of pressing one side of the second connecting portion (110) and the third connecting portion (313) is provided in the first receiving groove (440) of the first left connecting member (410), and a second inclined surface (421) capable of pressing the other side of the second connecting portion (110) and the third connecting portion (313) is provided in the first receiving groove (440) of the first right connecting member (420).

5. A vacuum gauge filtering buffer device according to claim 3, characterized in that: The first locking component (450) includes a first rotating rod (451) rotatably connected to the first right connecting member (420); the first left connecting member (410) is provided with a first receiving groove (452) capable of accommodating the first rotating rod (451); the first rotating rod (451) is connected with a first nut (453) capable of rotating relative thereto; when the first left connecting member (410) and the first right connecting member (420) are in a closed state and the first rotating rod (451) is located in the first receiving groove (452), the first nut (453) is rotated to abut against the first left connecting member (410), so that the first left connecting member (410) and the first right connecting member (420) abut against each other and are locked.

6. A vacuum gauge filtering buffer device according to claim 1, characterized in that: The second connecting mechanism (500) includes a hinged second left connecting member (510) and a second right connecting member (520); the second left connecting member (510) and the second right connecting member (520) can be opened or closed with each other; when the second left connecting member (510) and the second right connecting member (520) are in a closed state, a second clamping opening (530) can be formed for clamping the fourth connecting portion (314) and the first connecting portion (210); the second left connecting member (510) and the second right connecting member (520) are also provided with a second accommodating groove (540) capable of accommodating the fourth connecting portion (314) and the first connecting portion (210); and a second locking component (550) is provided between the second left connecting member (510) and the second right connecting member (520) for locking the two in a closed state.

7. A vacuum gauge filtering buffer device according to claim 6, characterized in that: A third inclined surface (511) capable of pressing the fourth connecting portion (314) and one side of the first connecting portion (210) is provided in the second receiving groove (540) of the second left connecting member (510), and a fourth inclined surface (521) capable of pressing the second connecting portion (110) and the other side of the third connecting portion (313) is provided in the first receiving groove (440) of the second right connecting member (520).

8. A vacuum gauge filtering buffer device according to claim 6, characterized in that: The second locking component (550) includes a second rotating rod (551) rotatably connected to the second right connecting member (520); the second left connecting member (510) is provided with a second receiving groove (552) capable of accommodating the second rotating rod (551); the second rotating rod (551) is connected with a second nut (553) capable of rotating relative to the second rotating rod; when the second left connecting member (510) and the second right connecting member (520) are in a closed state and the second rotating rod (551) is located in the second receiving groove (552), the second nut (553) abuts against the second left connecting member (510) so that the second left connecting member (510) and the second right connecting member (520) abut against each other and are locked.

9. A vacuum gauge filtering buffer device according to claim 1, characterized in that: The connecting pipe (200) is also provided with a buffer section (220).

10. The vacuum gauge filtering buffer device according to claim 1, characterized in that: A seal (600) is provided between the vacuum gauge (100) and the mounting seat (310) and between the mounting seat (310) and the connecting pipe (200), and the seal (600) includes a sealing ring (610) having a flow channel (611), and the sealing ring (610) is provided with an annular step (620) that can extend into the first connecting part (210), the second connecting part (110), the third connecting part (313) and the fourth connecting part (314) during installation.

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