Liquid leakage monitoring device of etching device

Abstract

The utility model discloses a liquid leakage monitoring device of an etching device, which comprises a first clamp and a monitoring mechanism, the lower end of the first clamp is connected with a second clamp, the lower end of the second clamp is provided with the monitoring mechanism, and the symmetrical position of the central axis of the second clamp is connected with a fixing plate. If liquid leakage occurs, the leaked liquid moves along a groove in the second clamp, meanwhile, the leaked liquid in the groove flows into a box body connected with a channel through the channel, and a protective layer arranged in the box body protects the box body from being corroded, so that the leaked liquid is collected; according to the product, the pump and the pipeline are designed, so that a worker pumps out liquid in the box body, then the pump is started, the liquid in the box body is pumped out through the pipeline connected with the pump, the pumped liquid is conveyed to a designated treatment area through the connecting pipe, and therefore non-contact cleaning of leaked liquid is achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of equipment monitoring, in particular to a liquid leakage monitoring device for an etching device. Background Art

[0002] In many industrial fields, such as semiconductor manufacturing, chemical industry, electronic manufacturing, etc., the use of etching equipment is a common process step. Etching equipment is mainly used to remove one or more layers of thin film on the surface of the material to achieve specific processing, manufacturing or surface treatment goals. However, etching liquids are usually toxic, corrosive or other dangerous chemicals. These chemicals may pose potential risks to the health and safety of workers, especially when liquid leakage occurs. Liquid leakage may not only cause environmental pollution, but also cause fire, explosion or other accidents. In order to reduce these potential risks, leakage monitoring devices came into being, so an etching device leakage monitoring device appeared.

[0003] According to the search of China Utility Model Publication No.: CN215951137U, a leakage monitoring device is disclosed. Compared with the prior art, the beneficial effects of the utility model are as follows: 1. The utility model is used in conjunction with a clamp assembly, a fastening assembly, a temperature and humidity sensor, a control switch and an alarm. The clamp assembly is installed at the connecting flange of the chemical liquid conveying pipeline; by providing a liquid sensor and a temperature and humidity sensor, it is convenient for the device to monitor in real time whether the connecting pipe flange is corroded, damaged or leaking; when the device detects an abnormal situation, it is convenient to remotely remind the intelligent terminal monitoring personnel through the Internet of Things in a timely manner, and the alarm is used to find the location of the device for maintenance; 2. By providing a collection assembly, the insulating oil leaked from the chemical liquid conveying pipeline can be collected, and a liquid level sensor is installed in the collection tank. When the insulating oil accumulates to more than the semicircular baffle, a signal will be sent, so that the user can understand the status of the chemical liquid conveying pipeline in time and quickly make corresponding treatment, avoid unnecessary safety accidents, reduce manual inspections, save manpower and material resources, and the equipment is simple, reliable and easy to use.

[0004] However, when implementing the above technical solution, the following problems exist: the device cannot collect the leaked liquid in a centralized manner, the leaked liquid cannot be effectively captured and gathered, and diffuses and leaks to other areas within the equipment, increasing the difficulty of cleaning after the leak; the device lacks a suitable cleaning mechanism, the leaked liquid is corrosive, and manual cleaning requires direct contact with the leaked material, increasing the danger of the cleaning process. Utility Model Content

[0005] The utility model aims to provide a leakage monitoring device for an etching device to solve the problems raised in the above-mentioned background technology.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a liquid leakage monitoring device for an etching device, comprising a first clamp and a monitoring mechanism, wherein the lower end of the first clamp is connected to a second clamp, the lower end of the second clamp is provided with a monitoring mechanism, and a fixing plate is connected to the symmetrical part of the central axis of the second clamp.

[0007] Preferably, four groups of the fixing plates are provided, the interior of the fixing plates is connected with screws, and the screws are provided in two groups.

[0008] Preferably, a protection pad is adhered to the upper end of the fixing plate, and two groups of the protection pads are provided, and the material of the protection pads is rubber.

[0009] Preferably, a groove is provided inside the second fixture, and liquid leakage monitors are connected symmetrically to the central axis of the groove, and two groups of liquid leakage monitors are provided.

[0010] Preferably, the upper end of the groove is connected to a channel, the lower end of the channel is connected to a box, and the left end of the box is threadedly connected to an alarm.

[0011] Preferably, a protective layer is provided inside the box body, the material of the protective layer is anti-corrosion paint, and the left end of the protective layer is threadedly connected to a liquid level sensor.

[0012] Preferably, the upper end of the box body is threadedly connected to a connecting plate, the lower end of the connecting plate is connected to a pipeline, the upper end of the connecting plate is connected to a pump, and the right end of the box body is connected to an alarm.

[0013] Compared with the prior art, the beneficial effects of the utility model are:

[0014] This product is designed with a groove and a box. If leakage occurs, the leaked liquid will move along the groove inside the second fixture, and the leaked liquid in the groove will flow into the box connected to the channel through the channel. The protective layer set inside the box will protect the box from corrosion, thereby realizing the collection of leaked liquid;

[0015] This product is designed with a pump and a pipe, so that the staff can extract the liquid inside the box, then start the pump to extract the liquid in the box through the pipe connected to it, and then transfer the extracted liquid to the designated treatment area through the connecting pipe, thereby achieving contactless cleaning of the leaked liquid. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the overall front structure of the utility model;

[0017] Figure 2 It is a schematic diagram of the matching structure of the second clamp and the groove of the utility model;

[0018] Figure 3 This is a schematic diagram of the internal structure of the box of the utility model;

[0019] Figure 4 This is a schematic diagram of the pump and pipeline matching structure of the utility model;

[0020] In the figure: 1. first clamp; 2. second clamp; 3. monitoring mechanism; 301. fixing plate; 302. screw; 303. protection pad; 304. groove; 305. leakage monitor; 306. channel; 307. box; 308. alarm; 309. protective layer; 310. liquid level sensor; 311. connecting plate; 312. pipeline; 313. pump; 314. alarm. DETAILED DESCRIPTION

[0021] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further described below in conjunction with specific implementation methods.

[0022] In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "front end", "rear end", "two ends", "one end", "the other end" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0023] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "provided with", "connected", etc. should be understood in a broad sense. For example, "connected" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0024] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0025] See also Figure 1-4The utility model provides an embodiment: a leakage monitoring device for an etching device, comprising a first clamp 1 and a monitoring mechanism 3, the lower end of the first clamp 1 is connected to a second clamp 2, the lower end of the second clamp 2 is provided with a monitoring mechanism 3, and a fixing plate 301 is connected to the symmetrical part of the central axis of the second clamp 2.

[0026] Specifically, four groups of fixing plates 301 are provided, and screws 302 are connected inside the fixing plates 301 . Two groups of screws 302 are provided, so as to facilitate fixing the first clamp 1 and the second clamp 2 by means of the screws 302 .

[0027] Specifically, a protection pad 303 is adhered to the upper end of the fixing plate 301 . Two groups of the protection pads 303 are provided. The material of the protection pads 303 is rubber, which is convenient for increasing the friction between the first clamp 1 and the second clamp 2 to avoid loosening.

[0028] Specifically, a groove 304 is provided inside the second fixture 2, and a leakage monitor 305 is connected symmetrically to the central axis of the groove 304. Two groups of leakage monitors 305 are provided to facilitate monitoring of leakage and provide a collection channel 306 for leakage.

[0029] Specifically, the upper end of the groove 304 is connected to the channel 306 , the lower end of the channel 306 is connected to the box 307 , and the left end of the box 307 is threadedly connected to the alarm 308 , which can collect the liquid in the groove 304 through the channel 306 .

[0030] Specifically, a protective layer 309 is provided inside the box 307. The material of the protective layer 309 is anti-corrosion paint. The left end of the protective layer 309 is threadedly connected with a liquid level sensor 310, which can collect the leaked liquid into the box 307 for easy cleaning.

[0031] Specifically, the upper end of the box body 307 is threadedly connected to a connecting plate 311, the lower end of the connecting plate 311 is connected to a pipe 312, the upper end of the connecting plate 311 is connected to a pump 313, and the right end of the box body 307 is connected to an alarm 314, which can clean up the leaked liquid to avoid direct contact with the leaked liquid and cause danger.

[0032] Working principle: When using this device, first fix the first clamp 1 and the second clamp 2 to the interface where the leakage state is to be monitored, and fix the fixed plate 301 connected thereto with screws 302. The protective pad 303 will clamp the first clamp 1 and the second clamp 2 tightly and prevent them from loosening. If leakage occurs, the leaked liquid will move along the groove 304 inside the second clamp 2. At the same time, when the leakage monitor 305 detects the leakage, the alarm 308 will be activated to send out an alarm signal, and remote control The alarm is sounded, and the leaked liquid in the groove 304 will flow into the box 307 connected to the channel 306 through the channel 306. The protective layer 309 arranged inside the box 307 will protect the box 307 from corrosion. When the liquid level sensor 310 detects the liquid in the box 307, the alarm 314 is started, and the alarm 314 sends out an alarm signal, so that the staff can extract the liquid in the box 307, and then start the pump 313 to extract the liquid in the box 307 through the pipe 312 connected thereto.

[0033] The above is only an embodiment of the utility model, and the common sense such as the known specific structure and characteristics in the scheme is not described too much here. For those skilled in the art, it is obvious that the utility model is not limited to the details of the above exemplary embodiments, and the utility model can be implemented in other specific forms without departing from the spirit or basic features of the utility model. Therefore, no matter from which point of view, the embodiments should be regarded as exemplary and non-restrictive. The scope of the utility model is limited by the attached claims rather than the above description, and it is intended to include all changes within the meaning and scope of the equivalent elements of the claims in the utility model. Any figure mark in the claims should not be regarded as limiting the claims involved.

Claims

1. A leakage monitoring device for an etching device, comprising a first fixture (1) and a monitoring mechanism (3), characterized in that: The lower end of the first clamp (1) is connected to the second clamp (2), and the lower end of the second clamp (2) is provided with a monitoring mechanism (3). The second clamp (2) is symmetrically connected to a fixing plate (301) at the center axis thereof. A groove (304) is provided inside the second clamp (2), and a liquid leakage monitor (305) is symmetrically connected to the center axis of the groove (304). Two groups of liquid leakage monitors (305) are provided. The upper end of the groove (304) is connected to a channel (306), and the lower end of the channel (306) is connected to a box (307). The left end of the box (307) is threadedly connected to an alarm (308).

2. The device for monitoring liquid leakage of an etching device according to claim 1, characterized in that: The fixing plates (301) are provided in four groups, the interior of the fixing plates (301) is connected with screws (302), and the screws (302) are provided in two groups.

3. The device for monitoring liquid leakage of an etching device according to claim 1, characterized in that: A protection pad (303) is adhered to the upper end of the fixing plate (301), and two groups of the protection pads (303) are provided. The material of the protection pads (303) is rubber.

4. The device for monitoring liquid leakage of an etching device according to claim 1, characterized in that: A protective layer (309) is provided inside the box body (307), and the material of the protective layer (309) is anti-corrosion paint. The left end of the protective layer (309) is threadedly connected to a liquid level sensor (310).

5. The device for monitoring liquid leakage of an etching device according to claim 1, characterized in that: The upper end of the box body (307) is threadedly connected to a connecting plate (311), the lower end of the connecting plate (311) is connected to a pipeline (312), the upper end of the connecting plate (311) is connected to a pump (313), and the right end of the box body (307) is connected to an alarm (314).

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