Pollutant particle detection counter in semiconductor industry

Abstract

The utility model provides a pollutant particle detection counter in the semiconductor industry, which is applied to a waste liquid pipeline and a waste gas pipeline for pollutant discharge, and comprises a first monitoring branch pipe and a second monitoring branch pipe, the two ends of the first monitoring branch pipe are communicated with the waste liquid pipeline, and the two ends of the second monitoring branch pipe are communicated with the waste gas pipeline. The detection unit arranged on the first monitoring branch pipe is used for monitoring liquid fluid, the two ends of the second monitoring branch pipe are both communicated with the waste gas pipeline, and the detection unit arranged on the second monitoring branch pipe is used for monitoring gas fluid. According to the utility model, particles of fluid in the liquid pipeline and the gas pipeline can be filtered and monitored, data can be transmitted to a user, and the user can process the data after obtaining the data, so that the liquid pipeline and the gas pipeline are effectively prevented from being accumulated and blocked, the safety of equipment is improved, and the national emission standard can be met; and then discharging is carried out.

Description

Technical Field

[0001] The utility model relates to the technical field of pollution monitoring, in particular to a pollutant particle detection counter for the semiconductor industry. Background Art

[0002] In the semiconductor process, a variety of special gases, a large amount of acids, alkalis and other chemicals, as well as organic solvents and volatile liquids are needed. These gases and chemicals will produce waste gas when used in different processes of semiconductor manufacturing. If these waste gases are not well treated by waste gas treatment equipment and are discharged, it will cause serious problems, which will not only affect people's health, deteriorate the atmospheric environment, cause environmental pollution and other public hazards, but will also become an important source of AMC pollution in semiconductor manufacturing.

[0003] The main pollutants are: "waste gas and waste water". Waste gas is generally divided into acidic waste gas, alkaline waste gas, organic waste gas, arsenic waste gas and general waste gas. The particles contained in the waste gas often include: fluoride, volatile organic compounds, PFCs; the pollutant particles in the waste water often include: total cadmium, total chromium, hexavalent chromium and other elements. Due to the characteristics of the gas, crystallization or dust accumulation in the pipeline often causes pipeline blockage and gas leakage. In severe cases, it may even cause an explosion, endangering the work safety of on-site workers. Liquid pipelines may also accumulate and block due to excessive particles, causing safety hazards. Therefore, it is necessary to monitor the particles in the liquid pipeline and gas pipeline. Utility Model Content

[0004] The utility model aims to provide a pollutant particle detection counter for the semiconductor industry, which can monitor the discharged gas and liquid.

[0005] To achieve the above-mentioned purpose, the utility model proposes the following technical solution: a semiconductor industry pollutant particle detection counter, applied to a waste liquid pipeline (1) and a waste gas pipeline (2) for pollutant discharge, comprising:

[0006] a first monitoring branch pipe (3), both ends of which are in communication with the waste liquid pipeline (1); a first filtering module (5) is provided on the first monitoring branch pipe (3), the first filtering module (5) is used to filter impurities; a first pressure regulating module (6) is provided on the first monitoring branch pipe (3), the first pressure regulating module (6) is used to regulate the pressure of the first monitoring branch pipe (3); a first temperature control module (7) is provided on the first monitoring branch pipe (3), the first temperature control module (7) is used to regulate the temperature of the fluid in the first monitoring branch pipe (3); a liquid particle sensor (8) is provided on the first monitoring branch pipe (3), the liquid particle sensor (8) is capable of monitoring the fluid material in the pipeline, and completes the monitoring of the material through the pulse changes and pulse numbers generated by particles in different materials; the liquid particle sensor (8) is connected to a first data acquisition processing module (9), the first data acquisition processing module (9) is used to collect data from the liquid particle sensor (8) and transmit it to the PC (15);

[0007] A second monitoring branch pipe (4), both ends of which are in communication with the exhaust gas pipeline (2); a second filter module (10) is provided on the second monitoring branch pipe (4), and the second filter module (10) is used to filter impurities; a second pressure regulating module (11) is provided on the second monitoring branch pipe (4), and the second pressure regulating module (11) is used to regulate the pressure of the second monitoring branch pipe (4); a second temperature control module (12) is provided on the second monitoring branch pipe (4), and the second temperature control module (12) is used to regulate the temperature of the fluid in the second monitoring branch pipe (4); a gas particle sensor (13) is provided on the second monitoring branch pipe (4), and the gas particle sensor (13) can monitor the fluid material in the pipeline, and complete the monitoring of the material through the pulse changes and pulse numbers generated by particles in different materials; the gas particle sensor (13) is connected to a second data acquisition and processing module (14), and the second data acquisition and processing module (14) is used to collect data from the gas particle sensor (13) and transmit it to the PC (15).

[0008] Furthermore, in the present invention, the first filter module (5) is a filter element, and the first pressure regulating module (6) is a liquid pressure regulating valve.

[0009] Furthermore, in the present invention, the first temperature control module (7) comprises a heating component (701) and a refrigeration component (702), and the heating component (701) and the refrigeration component are installed on the monitoring pipe (703).

[0010] Furthermore, in the present invention, the first data acquisition processing module (9) and the second data acquisition processing module (14) both include a control board, an A / D data acquisition unit, a filter and a wireless transmission unit. The A / D data acquisition unit collects electrical signals from the liquid particle sensor (8) and the gas particle sensor (13), and then performs low-pass filtering through the filter to remove high-frequency interference, and transmits the data to a PC (15) through the wireless transmission unit.

[0011] Beneficial effects: The technical solution of this application has the following technical effects:

[0012] The utility model can filter and monitor the particles of the fluid in the liquid pipeline and the gas pipeline, and transmit the data to the user. After the user obtains the data, he can process it, which effectively prevents the accumulation and blockage of the liquid pipeline and the gas pipeline, increases the safety of the equipment, and also helps to ensure that the national emission standards are met before emission is implemented.

[0013] It should be appreciated that all combinations of the foregoing concepts, as well as additional concepts described in greater detail below, may be considered part of the inventive subject matter of the present disclosure, provided such concepts are not mutually inconsistent.

[0014] The foregoing and other aspects, embodiments and features of the present invention can be more fully understood from the following description in conjunction with the accompanying drawings. Other additional aspects of the present invention, such as the features and / or beneficial effects of the exemplary embodiments, will be apparent from the following description or learned from the practice of the specific embodiments according to the teachings of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The accompanying drawings are not intended to be drawn to scale. In the accompanying drawings, each identical or nearly identical component shown in various figures may be represented by the same reference numeral. For the sake of clarity, not every component is labeled in each figure. Now, embodiments of various aspects of the utility model will be described by way of example and with reference to the accompanying drawings, in which:

[0016] Figure 1 It is a schematic diagram of the structure of the utility model.

[0017] Figure 2 This is a schematic diagram of the application of the first temperature control module of the utility model.

[0018] Figure 3 This is the data transmission principle diagram of the utility model.

[0019] In the figure, the meaning of each figure mark is as follows: 1. waste liquid pipeline; 2. waste gas pipeline; 3. first monitoring branch; 4. second monitoring branch; 5. first filter module; 6. first pressure regulating module; 7. first temperature control module; 8. liquid particle sensor; 9. first data acquisition and processing module; 10. second filter module; 11. second pressure regulating module; 12. second temperature control module; 13. gas particle sensor; 14. second data acquisition and processing module; 15. PC. DETAILED DESCRIPTION

[0020] In order to better understand the technical content of the utility model, specific embodiments are cited and described as follows in conjunction with the accompanying drawings. In this disclosure, various aspects of the utility model are described with reference to the accompanying drawings, and many illustrative embodiments are shown in the accompanying drawings. The embodiments of the present disclosure are not necessarily defined to include all aspects of the utility model. It should be understood that the various concepts and embodiments introduced above, as well as those described in more detail below, can be implemented in any of many ways, because the concepts and embodiments disclosed in the utility model are not limited to any implementation method. In addition, some aspects disclosed in the utility model can be used alone, or used in any appropriate combination with other aspects disclosed in the utility model.

[0021] Example 1

[0022] like Figure 1-2 As shown, a pollutant particle detection counter for the semiconductor industry is applied to a waste liquid pipeline 1 and an exhaust gas pipeline 2 for pollutant discharge. The pollutant particle detection counter includes a first monitoring branch pipe 3 and a second monitoring branch pipe 4. Both ends of the first monitoring branch pipe 3 are connected to the waste liquid pipeline 1. The filtering and detection unit provided in the first monitoring branch pipe 3 is used to monitor the liquid fluid. Both ends of the second monitoring branch pipe 4 are connected to the exhaust gas pipeline 2. The filtering and detection unit provided in the second monitoring branch pipe 4 is used to monitor the gas fluid.

[0023] Specifically, a first filter module 5 is provided on the first monitoring branch pipe 3. The first filter module 5 is a filter element. The filter element can be provided with multiple filter elements as needed. The multiple filter elements are used to filter out particles larger than 100.0um to ensure that subsequent emissions meet the standards. A first pressure regulating module 6 is provided on the first monitoring branch pipe 3. The first pressure regulating module 6 is a liquid pressure regulating valve. The user can also set a flow valve behind the liquid pressure regulating valve as needed to control the pressure and flow. The first pressure regulating module 6 is used to adjust the pressure of the first monitoring branch pipe 3. A first temperature control module 7 is provided on the first monitoring branch pipe 3. The first temperature control module 7 includes a heating component 701 and a refrigeration component 702. The heating component 701 and the control component 703 are provided on the first monitoring branch pipe 3. The cold component is installed on the monitoring pipeline 703. The heating component 701 in this embodiment can use a pipeline heating sleeve, and the refrigeration component 702 can use a semiconductor refrigerator and other equipment for refrigeration and cooling. The first temperature control module 7 is used to adjust the temperature of the fluid in the first monitoring branch pipe 3. The first monitoring branch pipe 3 is provided with a liquid particle sensor 8. The liquid particle sensor 8 can monitor the fluid material in the pipeline and complete the monitoring of the material through the pulse changes and pulse numbers generated by particles in different materials. The liquid particle sensor 8 is connected to the first data acquisition processing module 9, and the first data acquisition processing module 9 is used to collect data from the liquid particle sensor 8 and transmit it to the PC 15;

[0024] The second monitoring branch pipe 4 is provided with a second filter module 10, and the second filter module 10 can be a capsule filter, which is used to filter impurities in the gas, that is, the second filter module 10 is used for filtering, and the second monitoring branch pipe 4 is provided with a second pressure regulating module 11, and the second pressure regulating module 11 is a liquid pressure regulating valve. The user can also set a flow valve behind the liquid pressure regulating valve as needed to control the pressure and flow. The second pressure regulating module 11 is used to adjust the pressure of the second monitoring branch pipe 4, and the second monitoring branch pipe 4 is provided with a second temperature control module 12, and the second temperature control module 12 also includes a heating component 701 and a refrigeration component 702, and the heating component 701 and the refrigeration component are installed on the monitoring branch pipe 4. On the pipeline 703, the heating component 701 in this embodiment can select a pipeline heating sleeve, and the refrigeration component 702 can select a semiconductor refrigerator and other equipment. The second temperature control module 12 is used to adjust the fluid temperature in the second monitoring branch pipe 4. The second monitoring branch pipe 4 is provided with a gas particle sensor 13. The gas particle sensor 13 can monitor the fluid material in the pipeline and complete the monitoring of the material through the pulse changes and pulse numbers generated by particles in different materials. The gas particle sensor 13 is connected to the second data acquisition and processing module 14, and the second data acquisition and processing module 14 is used to collect data from the gas particle sensor 13 and transmit it to the PC 15.

[0025] The first data acquisition processing module 9 and the second data acquisition processing module 14 both include a control board, an A / D data acquisition unit, a filter and a wireless transmission unit. The A / D data acquisition unit collects the electrical signals of the liquid particle sensor 8 and the gas particle sensor 13, and then performs low-pass filtering through the filter to remove high-frequency interference, and transmits the data to the PC 15 through the wireless transmission unit.

[0026] When in use, the liquid in the waste liquid pipeline 1 flows into the first monitoring branch pipe 3, is filtered and detected by the first monitoring branch pipe 3, and then discharged into the waste liquid pipeline 1. The gas in the waste gas pipeline 2 flows into the second monitoring branch pipe 4, and the filtering and monitoring process is the same.

[0027] The filtering and detection unit set on the first monitoring branch pipe 3, the filter element of the first filtering module 5 filters most of the particles in the liquid. Because the pressure of the pipeline is different, the pressure is controlled by the liquid pressure regulating valve of the first pressure regulating module 6, and then the temperature is controlled by the first temperature control module 7 to prevent the temperature from being too low in winter and causing pipeline blockage. Then, the liquid particle sensor 8 is used for detection and the data is transmitted to the first data acquisition and processing module 9, and the first data acquisition and processing module 9 transmits the data to the PC 15.

[0028] The standard parts used in this application document can all be purchased from the market and can be customized according to the description in the specification and drawings. The specific connection methods of each part adopt conventional means such as mature bolts, rivets, welding, etc. in the prior art. The machinery, parts and equipment all adopt conventional models in the prior art. The control method is automatic control through a controller. The control circuit of the controller can be implemented through simple programming by technicians in this field, which is common knowledge in the field. This application is mainly used to protect mechanical devices, so this application no longer explains the control method and circuit connection in detail.

[0029] Although the present invention has been disclosed as above with preferred embodiments, it is not intended to limit the present invention. A person with ordinary knowledge in the technical field to which the present invention belongs may make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention shall be determined by the definition of the claims.

Claims

1. A semiconductor industry pollutant particle detection counter, applied to waste liquid pipelines (1) and waste gas pipelines (2) for pollutant discharge, characterized in that: include: a first monitoring branch pipe (3), both ends of which are in communication with the waste liquid pipeline (1); a first filtering module (5) is provided on the first monitoring branch pipe (3), the first filtering module (5) is used to filter impurities; a first pressure regulating module (6) is provided on the first monitoring branch pipe (3), the first pressure regulating module (6) is used to regulate the pressure of the first monitoring branch pipe (3); a first temperature control module (7) is provided on the first monitoring branch pipe (3), the first temperature control module (7) is used to regulate the temperature of the fluid in the first monitoring branch pipe (3); a liquid particle sensor (8) is provided on the first monitoring branch pipe (3), the liquid particle sensor (8) is capable of monitoring the fluid material in the pipeline, and completes the monitoring of the material through the pulse changes and pulse numbers generated by particles in different materials; the liquid particle sensor (8) is connected to a first data acquisition processing module (9), the first data acquisition processing module (9) is used to collect data from the liquid particle sensor (8) and transmit it to the PC (15); A second monitoring branch pipe (4), both ends of which are in communication with the exhaust gas pipeline (2); a second filter module (10) is provided on the second monitoring branch pipe (4), and the second filter module (10) is used to filter impurities; a second pressure regulating module (11) is provided on the second monitoring branch pipe (4), and the second pressure regulating module (11) is used to regulate the pressure of the second monitoring branch pipe (4); a second temperature control module (12) is provided on the second monitoring branch pipe (4), and the second temperature control module (12) is used to regulate the temperature of the fluid in the second monitoring branch pipe (4); a gas particle sensor (13) is provided on the second monitoring branch pipe (4), and the gas particle sensor (13) can monitor the fluid material in the pipeline, and complete the monitoring of the material through the pulse changes and pulse numbers generated by particles in different materials; the gas particle sensor (13) is connected to a second data acquisition and processing module (14), and the second data acquisition and processing module (14) is used to collect data from the gas particle sensor (13) and transmit it to the PC (15).

2. A semiconductor industry pollutant particle detection counter according to claim 1, characterized in that: The first filter module (5) is a filter element, and the first pressure regulating module (6) is a liquid pressure regulating valve.

3. A semiconductor industry pollutant particle detection counter according to claim 1, characterized in that: The first temperature control module (7) comprises a heating component (701) and a cooling component (702), and the heating component (701) and the cooling component are installed on a monitoring pipeline (703).

4. A semiconductor industry pollutant particle detection counter according to claim 1, characterized in that: The first data acquisition processing module (9) and the second data acquisition processing module (14) both comprise a control board, an A / D data acquisition unit, a filter and a wireless transmission unit. The A / D data acquisition unit acquires electrical signals from the liquid particle sensor (8) and the gas particle sensor (13), performs low-pass filtering through the filter to remove high-frequency interference, and transmits the data to a PC (15) through the wireless transmission unit.

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