Wafer dislocation rewinding device
By designing a wafer dislocation and reversing device including moving blocks, fixed blocks, jam seats, center plates and push frames, the problem of inconvenience in disassembly and assembly of existing devices is solved, and jam seats and wafers are realized The rapid disassembly and misalign the film improves work efficiency.
Patent Information
- Application Number
- CN202420387221.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-02-29
- Publication Date
- 2025-02-11
- Estimated Expiration
- 2034-02-28
AI Technical Summary
The existing wafer dislocation and reversing device is inconvenient for quick disassembly and assembly of the jammed seat, and the wafer disassembly and assembly on the jammed seat is inconvenient, which affects the working efficiency of the device.
A wafer dislocation reversal device is designed, including a workbench, a moving block, a fixed block, a jam base, a central plate and a push rack. Through the design of moving blocks and fixed blocks, the clamp seat and central plate can be quickly moved to the mounting position by leveraging the elastic members, so as to facilitate rapid disassembly and assembly and replacement of wafers on the clamp seat. The combination of push rack and push block facilitates the misalignment of the wafer.
It realizes rapid disassembly and assembly of the jam seat and convenient dislocation of wafers, which improves the working efficiency of the device and reduces the complexity of operation.
Smart Images
Figure CN222462885U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of semiconductor chip production, and more specifically, particularly relates to a wafer misalignment flipping device. Background Art
[0002] In the field of semiconductor chip manufacturing, in order to reduce the contamination of wafers by external pollution sources, wafers are usually placed in wafer plugs. Since there are many wafer production and manufacturing process flows and many types of equipment are used, different equipment manufacturers design different plug positioning devices on their equipment, and generally use their own dedicated plugs for production operations. Therefore, during the wafer production process, it is necessary to continuously transfer wafers between different plugs. When using existing similar wafer offset flipping devices, the device is not convenient for quick disassembly and assembly of the plug seat, and it is inconvenient to disassemble and replace the wafer on the plug seat, which easily affects the working efficiency of the device. Utility Model Content
[0003] In order to solve the above technical problems, the utility model provides a wafer offset flipping device to solve the problem that existing similar devices are not convenient for quick disassembly and assembly of the plug seat, and the wafer on the plug seat is inconvenient to disassemble and replace, which easily affects the working efficiency of the device.
[0004] The wafer dislocation flipping device of the utility model is achieved by the following specific technical means:
[0005] A wafer misalignment flipping device comprises a workbench;
[0006] The left end of the workbench is provided with a group of positioning grooves, and two groups of moving blocks are slidably installed on the left end of the workbench, and a group of fixed blocks are respectively fixedly installed on both sides of the moving block, two groups of plug seats are clamped and installed on the positioning grooves at the left end of the workbench, and a group of center plates are clamped and installed between the two groups of plug seats, and a group of pushing racks are slidably installed on the right end of the workbench, and a group of pushing blocks are fixedly connected to the inner ends of the pushing racks, and a group of fixing grooves are respectively provided at the front and rear ends of the plug seats, a group of pushing grooves are vertically provided on the plug seats, and a group of connecting grooves are vertically provided on the center plate, and the pushing blocks at the inner ends of the pushing racks are respectively slidably installed on the pushing grooves of the plug seats and the connecting grooves of the center plates, the inner ends of the fixed blocks are italic structures, and the fixed blocks on both sides of the moving block are respectively plugged and installed on the fixed grooves of the plug seats.
[0007] In at least some embodiments, two groups of connecting rods at the left end of the workbench are respectively sleeved with a group of second elastic members, and the inner ends of the second elastic members are in contact with the outer end surface of the guide seat on the moving block.
[0008] In at least some embodiments, two sets of mounting grooves are respectively opened at both ends of the center plate, two sets of connecting blocks are respectively fixedly installed at both ends of the inner side of the plug seat, and the connecting blocks at both ends of the inner side of the plug seat are respectively plugged and installed on the mounting grooves at both ends of the center plate.
[0009] In at least some embodiments, two groups of guide rods are fixedly installed on the right end of the workbench, and a group of side ear plates are fixedly installed on both ends of the push frame. A group of sliding holes are opened on the side ear plates, and the sliding holes of the side ear plates at both ends of the push frame are respectively slidably installed on the guide rods at the right end of the workbench.
[0010] In at least some embodiments, two groups of guide rods at the right end of the workbench are respectively sleeved with a group of first elastic members, and the right ends of the first elastic members are in contact with the left end surface of the upper ear plate of the push frame.
[0011] In at least some embodiments, two groups of connecting rods are fixedly installed on the left end of the workbench, a group of guide seats are fixedly installed on the moving block, a group of sliding holes are opened on the guide seats, and the sliding holes opened on the guide seats are respectively slidably installed on the connecting rods at the left end of the workbench.
[0012] Compared with the prior art, the wafer misalignment flipping device of the utility model has the following beneficial effects:
[0013] 1. The setting of the moving block is conducive to respectively plugging and installing the connecting blocks at both ends of the inner side of the plug seat on the installation grooves at both ends of the center plate, and the two groups of plug seats and the center plate are plugged into the positioning groove at the left end of the workbench. The inner end of the fixed block is an italic structure. The fixed block and the moving block move outward. When the two groups of plug seats and the center plate move to the installation position, the moving block moves inward under the action of the second elastic member on the connecting rod. The fixed blocks on both sides of the moving block are respectively plugged and installed on the fixed grooves of the plug seat, so that the plug seat and the center plate of the device make it easy for the device to quickly disassemble and replace the wafers on the plug seat.
[0014] The push frame is set up to facilitate pushing the push frame inward. The push blocks at the inner end of the push frame are slidably installed on the push groove of the plug seat and the connecting groove of the center plate respectively. The push blocks drive the wafer on the right end plug seat to move to the left end plug seat, so that the device can easily reverse the wafer. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] Figure 1 It is a front axial view schematic diagram of the utility model.
[0016] Figure 2 It is a schematic diagram of disassembly and assembly of the plug seat of the utility model.
[0017] Figure 3 It is a schematic diagram of disassembly and assembly of the center plate of the utility model.
[0018] Figure 4 It is a schematic diagram of disassembly and assembly of the moving block of the utility model.
[0019] Figure 5 It is a cross-sectional schematic diagram of the plug seat of the utility model.
[0020] In the figure, the corresponding relationship between the component names and the figure numbers is as follows:
[0021] 1. Workbench; 101. Guide rod; 1011. First elastic member; 102. Positioning groove; 103. Moving block; 1031. Guide seat; 1032. Fixed block; 104. Connecting rod; 1041. Second elastic member; 2. Plug seat; 201. Fixed groove; 202. Connecting block; 203. Pushing groove; 3. Pushing frame; 301. Pushing block; 302. Side ear plate; 4. Center plate; 401. Connecting groove; 402. Mounting groove. DETAILED DESCRIPTION
[0022] The implementation of the utility model is further described in detail below in conjunction with the drawings and examples.
[0023] As attached Figure 1 To Attachment Figure 5 As shown:
[0024] Embodiment 1: The utility model provides a wafer misalignment flipping device, comprising a workbench 1;
[0025] A group of positioning grooves 102 are provided at the left end of the workbench 1, two groups of moving blocks 103 are slidably installed at the left end of the workbench 1, and a group of fixed blocks 1032 are fixedly installed on both sides of the moving blocks 103, two groups of plug seats 2 are clamped and installed on the positioning grooves 102 at the left end of the workbench 1, and a group of center plates 4 are clamped and installed between the two groups of plug seats 2, and a group of push racks 3 are slidably installed at the right end of the workbench 1, and a group of push blocks 301 are fixedly connected to the inner end of the push rack 3, and the plug seats 2 are clamped and installed. A group of fixing grooves 201 are respectively opened at the front and rear ends, a group of pushing grooves 203 are vertically opened on the plug seat 2, a group of connecting grooves 401 are vertically opened on the center plate 4, and the pushing blocks 301 at the inner ends of the pushing frame 3 are slidably installed on the pushing grooves 203 of the plug seat 2 and the connecting grooves 401 of the center plate 4, the inner ends of the fixed blocks 1032 are italic structures, and the fixed blocks 1032 on both sides of the moving block 103 are respectively plugged and installed on the fixed grooves 201 of the plug seat 2.
[0026] like Figure 3 and Figure 4As shown, two groups of connecting rods 104 are fixedly installed on the left end of the workbench 1, and a group of guide seats 1031 are fixedly installed on the moving block 103. A group of sliding holes are opened on the guide seats 1031, and the sliding holes opened on the guide seats 1031 are slidably installed on the connecting rods 104 at the left end of the workbench 1, and two groups of mounting grooves 402 are opened at both ends of the center plate 4. Two groups of connecting blocks 202 are fixedly installed at both ends of the inner side of the plug seat 2, and the connecting blocks 202 at both ends of the inner side of the plug seat 2 are respectively plugged and installed on the mounting grooves 402 at both ends of the center plate 4. The two groups of connecting rods 104 at the left end of the workbench 1 are respectively sleeved and installed with a group of second elastic members 1041, and the inner ends of the second elastic members 1041 are in contact with the outer end surfaces of the guide seats 1031 on the moving block 103; specifically, the guide seats 10 The sliding holes opened on 31 are respectively slidably installed on the connecting rod 104 at the left end of the workbench 1, and the connecting blocks 202 at the two ends of the inner side of the plug seat 2 are respectively plugged and installed on the installation grooves 402 at the two ends of the center plate 4. The two groups of plug seats 2 and the center plate 4 are plugged into the positioning groove 102 at the left end of the workbench 1, and the inner end of the fixed block 1032 is an italic structure. The fixed block 1032 and the moving block 103 move outward. When the two groups of plug seats 2 and the center plate 4 move to the installation position, under the action of the second elastic member 1041 on the connecting rod 104, the moving block 103 moves inward, and the fixed blocks 1032 on both sides of the moving block 103 are respectively plugged and installed on the fixed grooves 201 of the plug seat 2, so that the plug seat 2 and the center plate 4 of the device can be easily disassembled and replaced on the wafer on the plug seat 2.
[0027] Embodiment 2: On the basis of embodiment 1, two sets of guide rods 101 are fixedly installed on the right end of the workbench 1, and a set of side ear plates 302 are fixedly installed at both ends of the push frame 3. A set of sliding holes are opened on the side ear plates 302, and the sliding holes of the side ear plates 302 at both ends of the push frame 3 are slidably installed on the guide rods 101 at the right end of the workbench 1, and the two sets of guide rods 101 at the right end of the workbench 1 are respectively sleeved and installed with a set of first elastic members 1011, and the first elastic members 1011 are The right end is in contact with the left end surface of the side ear plate 302 on the push rack 3; specifically, the sliding holes of the side ear plates 302 at both ends of the push rack 3 are respectively slidably installed on the guide rod 101 at the right end of the workbench 1, pushing the push rack 3 inward, and the push block 301 at the inner end of the push rack 3 is respectively slidably installed on the push groove 203 of the plug seat 2 and the connecting groove 401 of the center plate 4, and the push block 301 drives the wafer on the right end plug seat 2 to move to the left end plug seat 2, so that the device can facilitate the wafer misalignment flipping.
[0028] The specific usage and function of this embodiment are as follows:
[0029] When the utility model is in use, the sliding holes opened on the guide seat 1031 are respectively slidably installed on the connecting rod 104 at the left end of the workbench 1, and the connecting blocks 202 at the inner ends of the plug seat 2 are respectively plugged and installed on the mounting grooves 402 at the two ends of the center plate 4. The two groups of plug seats 2 and the center plate 4 are clamped on the positioning groove 102 at the left end of the workbench 1. The inner end of the fixed block 1032 is an italic structure. The fixed block 1032 and the moving block 103 move outward. When the two groups of plug seats 2 and the center plate 4 move to the installation position, under the action of the second elastic member 1041 on the connecting rod 104, the moving block 103 moves inward, and the moving block 10 The fixing blocks 1032 on both sides of the push frame 3 are respectively inserted and installed on the fixing grooves 201 of the plug seat 2, so that the plug seat 2 and the center plate 4 of the device are connected, so that the device is convenient for quickly disassembling and replacing the wafers on the plug seat 2; the sliding holes of the side ear plates 302 at both ends of the push frame 3 are respectively slidably installed on the guide rod 101 at the right end of the workbench 1, and the push frame 3 is pushed inward. The push block 301 at the inner end of the push frame 3 is respectively slidably installed on the push groove 203 of the plug seat 2 and the connecting groove 401 of the center plate 4, and the push block 301 drives the wafer on the right end plug seat 2 to move to the left end plug seat 2, so that the device is convenient for wafer misalignment flipping.
[0030] In this article, there are a few points to note:
[0031] 1. The drawings of the embodiments of the present disclosure only involve structures related to the embodiments of the present disclosure, and other structures may refer to general designs.
[0032] In the absence of conflict, the embodiments of the present disclosure and the features therein may be combined with each other to obtain new embodiments.
[0033] The above are only specific embodiments of the present disclosure, but the protection scope of the present disclosure is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present disclosure, which should be included in the protection scope of the present disclosure. Therefore, the protection scope of the present disclosure should be based on the protection scope of the claims.
Claims
1. A wafer offset flipping device, comprising a workbench (1); The left end of the workbench (1) is provided with a group of positioning grooves (102), the left end of the workbench (1) is slidably mounted with two groups of moving blocks (103), and the two sides of the moving blocks (103) are respectively fixedly mounted with a group of fixed blocks (1032), characterized in that: Two groups of plug seats (2) are mounted on the positioning groove (102) at the left end of the workbench (1), and a group of center plates (4) are mounted between the two groups of plug seats (2). A group of push frames (3) are slidably mounted on the right end of the workbench (1), and a group of push blocks (301) are fixedly connected to the inner end of the push frames (3). A group of fixed grooves (201) are respectively opened at the front and rear ends of the plug seats (2), a group of push grooves (203) are vertically opened on the plug seats (2), and a group of connecting grooves (401) are vertically opened on the center plate (4), and the push blocks (301) at the inner ends of the push frames (3) are respectively slidably mounted on the push grooves (203) of the plug seats (2) and the connecting grooves (401) of the center plate (4), and the inner ends of the fixed blocks (1032) are italic structures, and the fixed blocks (1032) on both sides of the movable block (103) are respectively plugged and installed on the fixed grooves (201) of the plug seats (2).
2. The wafer dislocation flipping device according to claim 1, characterized in that: Two groups of connecting rods (104) are fixedly mounted on the left end of the workbench (1), a group of guide seats (1031) are fixedly mounted on the moving block (103), a group of sliding holes are opened on the guide seats (1031), and the sliding holes opened on the guide seats (1031) are respectively slidably mounted on the connecting rods (104) at the left end of the workbench (1).
3. The wafer misalignment flipping device according to claim 1, characterized in that: Two groups of mounting grooves (402) are respectively provided at both ends of the center plate (4), and two groups of connection blocks (202) are respectively fixedly installed at both ends of the inner side of the plug seat (2), and the connection blocks (202) at both ends of the inner side of the plug seat (2) are respectively plugged and installed on the mounting grooves (402) at both ends of the center plate (4).
4. The wafer misalignment flipping device according to claim 1, characterized in that: Two groups of connecting rods (104) at the left end of the workbench (1) are respectively sleeved with a group of second elastic members (1041), and the inner ends of the second elastic members (1041) are in contact with the outer end surface of the guide seat (1031) on the moving block (103).
5. The wafer misalignment flipping device according to claim 1, characterized in that: Two groups of guide rods (101) are fixedly mounted on the right end of the workbench (1), and a group of side ear plates (302) are fixedly mounted on both ends of the push frame (3). A group of sliding holes are opened on the side ear plates (302), and the sliding holes of the side ear plates (302) at both ends of the push frame (3) are respectively slidably mounted on the guide rods (101) at the right end of the workbench (1).
6. The wafer misalignment flipping device according to claim 1, characterized in that: Two groups of guide rods (101) at the right end of the workbench (1) are respectively sleeved with a group of first elastic members (1011), and the right ends of the first elastic members (1011) are in contact with the left end surface of the upper ear plate (302) of the push frame (3).