Heating power supply system and equipment cavity with heating function

Abstract

The utility model provides a heating power supply system and an equipment cavity with a heating function. The heating power supply system is used for supplying power to a plurality of heating units in an equipment cavity and comprises a support, a current input component, a plurality of insulating sleeves and a conducting rod, the insulating sleeves are arranged in the support side by side and nested with one another, a power supply interface is arranged in the conducting rod, and the insulating sleeves wrap the part, except the power supply interface, of the conducting rod. The power supply interface comprises a crimping female head arranged in the conducting rod, the crimping female head comprises a closed end and a telescopic opening end, the closed end is in interference fit with a corresponding opening in the conducting rod, and the heating unit is electrically connected with a crimping male head through a connecting wire. And the power supply of the heating unit is realized through the combination of the crimping male head and the crimping female head. According to the utility model, the power supply requirements of large current and larger heat for heating of the equipment cavity can be met, and the requirements of the equipment cavity for improving the silicon wafer accommodating capacity, the unit productivity and the cost competitiveness can be met.

Description

Technical Field

[0001] The utility model relates to the field of solar cell manufacturing, in particular to a heating power supply system and an equipment cavity with a heating function. Background Art

[0002] Thin-film / crystalline silicon heterojunction solar cells (hereinafter referred to as heterojunction solar cells, also known as HIT or SHJ solar cells) belong to the third generation of high-efficiency solar cell technology. It combines the advantages of first-generation crystalline silicon and second-generation silicon thin film, and has the characteristics of high conversion efficiency and low temperature coefficient. In particular, the conversion efficiency of double-sided heterojunction solar cells can reach more than 26%, and has broad market prospects.

[0003] Vacuum coating equipment such as plasma enhanced chemical vapor deposition (PECVD) equipment and physical vapor deposition (PVD) equipment will be used in the manufacturing process of heterojunction solar cells to form amorphous silicon / microcrystalline silicon layers and transparent conductive layers TCO respectively. As the demand for cost reduction of solar cells continues to increase, the core equipment for preparing solar cell thin films, PECVD equipment or PVD equipment, is required to continuously increase its unit capacity, that is, the equipment cavity can accommodate more silicon wafers for simultaneous film formation, so as to meet the cost reduction requirements of the overall production line.

[0004] When the equipment cavity accommodates more silicon wafers at the same time, more heat needs to be provided to heat the silicon wafers to ensure that the silicon wafers can reach a stable process temperature. The heating system can achieve this requirement by adding heating units, or by increasing the power to provide more heat. However, no matter which method is used, the input and output currents of the equipment will inevitably increase significantly. The conventional power supply system with two connectors on both sides that connect the power supply line and the heating unit wiring can no longer meet the power supply needs of the significant increase in current and heat.

[0005] Therefore, how to provide a heating power supply system and a device cavity with heating function to meet the power supply requirements of large current and greater heat for heating the device cavity, and to adapt to the needs of the device cavity to improve the silicon wafer accommodation capacity, unit production capacity and cost competitiveness has become a technical problem that needs to be urgently solved in the industry. Utility Model Content

[0006] In view of the above-mentioned problems in the prior art, the utility model proposes a heating power supply system for supplying power to multiple heating units in an equipment cavity, which includes a bracket, a current input component, a plurality of insulating sleeves arranged in parallel and nested in the bracket, and a conductive rod, the power supply interface is arranged in the conductive rod, the insulating sleeve covers the portion of the conductive rod except the power supply interface, the power supply interface includes a crimping female head arranged in the conductive rod, the crimping female head includes a closed end and a telescopic open end, the closed end is interference fit with the corresponding opening in the conductive rod, the heating unit is electrically connected to the crimping male head through a connecting wire, and the power supply to the heating unit is achieved through the combination of the crimping male head and the crimping female head.

[0007] In one embodiment, the insulating sleeve is a ceramic sleeve or a tetrafluoroethylene sleeve.

[0008] In one embodiment, each conductive rod includes a plurality of power supply interfaces arranged in parallel, and the power supply interfaces on adjacent conductive rods are staggered with each other.

[0009] In one embodiment, the current input component includes a first feeding plug connected to the power supply cable and a base, the base includes an insulating seat and a jack socket arranged in the insulating seat for inserting the first feeding plug, and an insert block electrically connected to the jack socket, a second feeding plug is arranged at the end of the insert block, and the conductive rod includes a screw hole matching the second feeding plug and is fixed to the base through the combination of the second feeding plug and the screw hole of the conductive rod.

[0010] In one embodiment, the base includes a first jack socket and a second jack socket, a first plug block and a second plug block electrically connected to the first jack socket and the second jack socket, respectively, and the first plug block and the second plug block are respectively provided with a second feeding plug matching the conductive rod screw hole of the conductive rod.

[0011] In one embodiment, the current input component includes two first feeding plugs connected to the power supply cable, an insulating member covering the first feeding plugs, and a supporting fixture for accommodating the insulating member to pass through and fix it outside the cavity.

[0012] In one embodiment, second feeding plugs matching the conductive rod screw holes of the conductive rod are respectively provided on both sides of the first plug block and the second plug block, and the current input component is located in the middle of the power supply unit.

[0013] In one embodiment, a second feeding plug matching the conductive rod screw hole of the conductive rod is respectively provided on one side of the first plug block and the second plug block, and the current input component is located on one side of the power supply unit.

[0014] In one embodiment, the bracket includes a first half bracket and a second half bracket which are spliced ​​together and each includes a plurality of semicircular grooves matching the insulating sleeve. The insulating sleeve and the conductive rod are arranged in a cylindrical groove formed by the semicircular grooves of the first half bracket and the second half bracket. The bracket is fixed on the equipment frame.

[0015] In one embodiment, the current input by the current input component is alternating current or direct current, and the input voltage range is 0-380V.

[0016] The utility model also provides an equipment cavity with a heating function, which comprises a cavity, a plurality of heating units located in the cavity, and a heating power supply system for supplying power to the heating units, wherein the heating power supply system is a heating power supply system as described in any one of the above items.

[0017] In one embodiment, the equipment chamber with heating function is a preheating chamber arranged in or before a plasma enhanced chemical vapor deposition (PECVD) device.

[0018] Compared with the heating power supply system in the prior art which adopts two-joint connectors for connecting the power supply line and the heating unit wiring on both sides respectively, the heating power supply system of the utility model is used to supply power to multiple heating units in the equipment cavity, and comprises a bracket, a current input component, a plurality of insulating sleeves arranged in parallel and nested in the bracket, and a conductive rod, the power supply interface is arranged in the conductive rod, the insulating sleeve covers the portion of the conductive rod except the power supply interface, and is characterized in that the power supply interface comprises a crimping female head arranged in the conductive rod, the crimping female head comprises a closed end and a telescopic open end, the closed end is interference fit with the corresponding opening in the conductive rod, the heating unit is electrically connected to the crimping male head through a connecting wire, and the power supply to the heating unit is realized by the combination of the crimping male head and the crimping female head.

[0019] The utility model can meet the power supply requirements of large current and greater heat for heating the equipment cavity, and can adapt to the needs of the equipment cavity to improve the silicon wafer accommodating capacity, unit production capacity and cost competitiveness. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The above features and advantages of the present invention can be better understood after reading the detailed description of the embodiments of the present disclosure in conjunction with the following drawings. In the drawings, the components are not necessarily drawn to scale, and components with similar related properties or features may have the same or similar reference numerals.

[0021] Figure 1 It is a schematic diagram of the composition structure of multiple heating power supply system embodiments of the present utility model.

[0022] Figure 2 for Figure 1Schematic diagram of the local composition structure of a single heating power supply system.

[0023] Figure 3 for Figure 1 A schematic diagram of the partial composition structure of an embodiment of the heating power supply system in FIG.

[0024] Figure 4 For along Figure 3 Schematic diagram of the cross-sectional structure formed by cutting along the cutting line AA in FIG.

[0025] Figure 5 for Figure 4 Schematic diagram of the cutaway and exploded structure of the power supply interface 13 in FIG.

[0026] Figure 6 for Figure 5 Schematic diagram of the composition structure of the crimping female connector 130.

[0027] Figure 7 for Figure 2 Schematic diagram of the exploded structure of the current input component 14 and the connected conductive rod. DETAILED DESCRIPTION

[0028] The present invention is described in detail below in conjunction with the accompanying drawings and specific embodiments, so as to more clearly understand the purpose, characteristics and advantages of the present invention. It should be understood that the various aspects described below in conjunction with the accompanying drawings and specific embodiments are merely exemplary and should not be construed as limiting the scope of protection of the present invention in any way. Unless the context clearly indicates otherwise, the singular forms "one" and "the" include plural referents. The words "first", "second" and similar terms used in this specification and the claims do not indicate any order, quantity or importance, but are only used to distinguish different components.

[0029] The utility model discloses a heating power supply system, which is used for supplying power to a plurality of heating units in an equipment cavity. The system comprises a bracket, a current input component, a plurality of insulating sleeves arranged in parallel in the bracket and nested with each other, and a conductive rod, wherein a power supply interface is arranged in the conductive rod, the insulating sleeve covers a portion of the conductive rod except the power supply interface, the power supply interface comprises a crimping female head arranged in the conductive rod, the crimping female head comprises a closed end and a telescopic open end, the closed end is interference fit with a corresponding opening in the conductive rod, the heating unit is electrically connected to the crimping male head through a connecting wire, and power supply to the heating unit is achieved through the combination of the crimping male head and the crimping female head.

[0030] The insulating sleeve is a ceramic sleeve or a tetrafluoroethylene sleeve, and each conductive rod includes a plurality of power supply interfaces arranged in parallel, and the power supply interfaces on adjacent conductive rods are staggered with each other. The current input component includes a first feeding plug connected to the power supply cable and a base, the base includes an insulating seat and a jack socket arranged in the insulating seat suitable for inserting the first feeding plug, and a plug block electrically connected to the jack socket, and a second feeding plug is arranged at the end of the plug block, and the conductive rod includes a screw hole matching the second feeding plug and is fixed to the base through the combination of the second feeding plug and the conductive rod screw hole. The base includes a first jack socket and a second jack socket, a first plug block and a second plug block electrically connected to the first jack socket and the second jack socket, respectively, and the first plug block and the second plug block are respectively provided with a second feeding plug matching the conductive rod screw hole of the conductive rod. The current input component includes two first feeding plugs connected to the power supply cable, an insulating member covering the first feeding plug, and a supporting fixing member for accommodating the insulating member to pass through and fix it outside the cavity. The first plug block and the second plug block are respectively provided with second feed plugs matching the conductive rod screw holes of the conductive rod on both sides, and the current input component is located in the middle of the power supply unit; or the first plug block and the second plug block are respectively provided with second feed plugs matching the conductive rod screw holes of the conductive rod on one side, and the current input component is located on one side of the power supply unit. The bracket includes a first half bracket and a second half bracket which are spliced ​​and combined with each other and each include a plurality of semicircular grooves matching the insulating sleeve, the insulating sleeve and the conductive rod are arranged in a cylindrical groove formed by the semicircular grooves of the first half bracket and the second half bracket, and the bracket is fixed on the equipment frame. The current input by the current input component is AC or DC, and the input voltage range is 0-380V.

[0031] See also Figures 1 to 6 , Figure 1 It is a schematic diagram of the composition structure of multiple heating power supply system embodiments of the utility model, Figure 2 for Figure 1 Schematic diagram of the composition structure of a single heating power supply system, Figure 3 for Figure 1 A schematic diagram of a partial structure of a heating power supply system embodiment, Figure 4 For along Figure 3 The schematic diagram of the cross-sectional structure formed by the cutting line AA in the figure. Figure 5 for Figure 4 A schematic diagram of the cutaway and exploded structure of the power supply interface 13 in FIG. Figure 6 for Figure 5 Schematic diagram of the composition structure of the crimping female connector 130.

[0032] like Figures 1 to 6As shown, multiple heating power supply systems of the utility model are used to supply power to multiple heating units (not shown) in the equipment cavity. The heating power supply system 1 includes a bracket 10, a current input component 11, a plurality of insulating sleeves 12 and a conductive rod 13 arranged in parallel and nested in the bracket, and a power supply interface 14 is arranged in the conductive rod 13, and the insulating sleeve 12 covers the conductive rod 13 except the power supply interface 14. The power supply interface 14 includes a crimping female head 140 arranged in the conductive rod 13, and the crimping female head 140 includes a closed end 1400 and a telescopic open end 1402. The closed end 1400 is interference fit with the corresponding opening in the conductive rod 13. The heating unit is electrically connected to the crimping male head 32 through a connecting wire 30, and the power supply to the heating unit is realized by the combination of the crimping male head 32 and the crimping female head 140.

[0033] The heating unit in the utility model can be a single-head heating rod, a double-head armored heating wire, a PTC heating sheet (sheet group), a mica heating sheet, a silicone heating plate, a heating belt, a heating membrane, and other various heating methods or devices currently used or to be used in the industry in the future.

[0034] The current input by the current input component 11 is AC or DC, and the input voltage range is 0-380V, more specifically, 110V, 220V or 380V AC. The insulating sleeve 12 is a ceramic sleeve or a tetrafluoroethylene sleeve, and each conductive rod 13 includes a plurality of power supply interfaces 14 arranged in parallel, and the power supply interfaces 14 on adjacent conductive rods 13 are staggered with each other, so that the heating unit can be conveniently inserted in the adjacent conductive rods 13.

[0035] like Figure 4 As shown, the bracket 10 includes a first half bracket 100 and a second half bracket 102 which are spliced ​​together and each includes a plurality of semicircular grooves matching the insulating sleeve 12. The insulating sleeve 12 and the conductive rod 13 are arranged in a cylindrical groove formed by the semicircular grooves of the first half bracket 100 and the second half bracket 102. The bracket 10 is fixed on the equipment frame 2. The first half bracket 100 and the second half bracket 102 are provided with bracket screw holes, and the first half bracket 100 and the second half bracket 102 are fixedly connected by screws or bolts 104 matching the bracket screw holes.

[0036] See also Figure 7 , which is Figure 2 Schematic diagram of the exploded structure of the current input component 11 and the connected conductive rod 13. Figure 7As shown, the current input component 11 includes a first feeding plug 110 connected to the power supply cable 4, a supporting fixture 112 and a base 114, the base 114 includes an insulating seat 1140 and a jack socket 1141 arranged in the insulating seat 1140 suitable for inserting the first feeding plug 110, and an insert block 1142 electrically connected to the jack socket 1141, a second feeding plug 1143 is arranged at the end of the insert block 1142, a cover plate 1144 covers the socket 1141 and the insert block 1142, and the conductive rod 13 includes a conductive rod screw hole 130 matching the second feeding plug 1143 and is fixed to the base 114 through the combination of the second feeding plug 1143 and the conductive rod screw hole 130. The first feeding plug 110 is connected to the cable connector 40 of the power supply cable 4.

[0037] like Figure 7 As shown, the base 114 includes a first jack socket 1141 and a second jack socket 1146, a first plug block 1142 and a second plug block (not shown) electrically connected to the first jack socket 1141 and the second jack socket 1146, respectively, and the first plug block 1142 and the second plug block are respectively provided with a second feeding plug 1143 matching the conductive rod screw hole 130 of the conductive rod 13.

[0038] like Figure 7 As shown, the current input component 11 includes two first feeding plugs 110 connected to the power supply cable 4 and an insulating member 1100 covering the first feeding plugs 110, and the supporting fixing member 112 includes a middle supporting member 1120 for accommodating the insulating member 1100 passing through and a fixing member 1122 for fixing the current input component 11 outside the cavity.

[0039] exist Figure 7 In the illustrated embodiment, second feeding plugs 1143 matching the conductive rod screw holes 130 of the conductive rod 13 are respectively provided on both sides of the first plug block 1142 and the second plug block, and the current input component 11 can be located in the middle of the power supply unit.

[0040] In other embodiments, the first plug block 1142 and the second plug block are respectively provided with a second feeding plug 1143 matching the conductive rod screw hole 130 of the conductive rod 13 on one side, and the first plug block 1142 and the second plug block are respectively provided with a second feeding plug 1143 matching the conductive rod screw hole 130 of the conductive rod 13 on one side, and the current input component 11 is located on one side of the power supply unit 1.

[0041] Figures 1 to 4When the heating power supply system 1 shown is in operation, first, the cable connector 40 of the power supply cable 4 is connected and fixed to the first feeding plug 110, and the first feeding plug 110 is inserted into the first jack socket 1141 and the second jack socket 1146 of the base 114, and then the supporting fixing member 112 is fixed to the outer side wall of the cavity, and then the conductive rod 13 coated with the insulating sleeve 12 on the outside is arranged side by side in the semicircular grooves of the two second half brackets 102 and the conductive rod screw hole 130 of the conductive rod 13 is connected to the second feeding plug 1143, and then the first half bracket 100 and the second half bracket 102 are assembled and fixed by screws or bolts 104. Then, the crimping male head 32 on the connecting wire 30 connected to the heating unit is inserted into the telescopic opening end 1402 of the crimping female head 140 of the power supply interface 14. Because the closed end 1400 of the crimping female head 140 has an interference fit with the corresponding opening in the conductive rod 13, the crimping female head 140 can remain fixed when the crimping male head 32 is plugged in and out, thereby realizing power supply to the heating unit.

[0042] The utility model also provides a device cavity with a heating function, which comprises a cavity, a plurality of heating units located in the cavity, and a heating power supply system for supplying power to the heating units. The heating power supply system is as follows Figures 1 to 4 The heating power supply system shown.

[0043] The equipment chamber with heating function is a preheating chamber arranged in or before a plasma enhanced chemical vapor deposition (PECVD) device.

[0044] The heating power supply system of the utility model is used to supply power to multiple heating units in the equipment cavity, and includes a bracket, a current input component, a plurality of insulating sleeves arranged in parallel and nested in the bracket, and a conductive rod, the power supply interface is arranged in the conductive rod, the insulating sleeve covers the conductive rod except the power supply interface, and is characterized in that the power supply interface includes a crimping female head arranged in the conductive rod, the crimping female head includes a closed end and a telescopic open end, the closed end is interference fit with the corresponding opening in the conductive rod, the heating unit is electrically connected to the crimping male head through a connecting wire, and the power supply to the heating unit is realized by the combination of the crimping male head and the crimping female head. The utility model can meet the power supply requirements of large current and greater heat for heating the equipment cavity, and can adapt to the needs of the equipment cavity to improve the silicon wafer accommodating capacity, unit production capacity and cost competitiveness.

[0045] The above embodiments are provided for persons familiar with the art to implement or use the present invention. Personnel familiar with the art can make various modifications or changes to the above embodiments without departing from the utility model concept of the present invention. Therefore, the protection scope of the present invention is not limited to the above embodiments, but should be the maximum scope of the innovative features mentioned in the claims.

Claims

1. A heating power supply system for supplying power to a plurality of heating units in a device cavity, comprising a bracket, a current input component, a plurality of insulating sleeves arranged in parallel in the bracket and nested with each other, and a conductive rod, wherein a power supply interface is arranged in the conductive rod, and the insulating sleeve covers the portion of the conductive rod except the power supply interface, characterized in that: The power supply interface includes a crimping female head arranged in a conductive rod, the crimping female head includes a closed end and a telescopic open end, the closed end is interference fit with the corresponding opening in the conductive rod, the heating unit is electrically connected to the crimping male head through a connecting wire, and power is supplied to the heating unit through the combination of the crimping male head and the crimping female head.

2. The heating power supply system according to claim 1, characterized in that: The insulating sleeve is a ceramic sleeve or a tetrafluoroethylene sleeve. Each conductive rod includes a plurality of power supply interfaces arranged in parallel, and the power supply interfaces on adjacent conductive rods are staggered with each other.

3. The heating power supply system according to claim 1, characterized in that: The current input component includes a first feeding plug connected to the power supply cable and a base, the base includes an insulating seat and a jack socket arranged in the insulating seat for inserting the first feeding plug, and an insert block electrically connected to the jack socket, a second feeding plug is arranged at the end of the insert block, and the conductive rod includes a screw hole matching the second feeding plug and is fixed to the base through the combination of the second feeding plug and the screw hole of the conductive rod.

4. The heating power supply system according to claim 3, characterized in that: The base includes a first jack socket and a second jack socket, a first plug block and a second plug block electrically connected to the first jack socket and the second jack socket respectively, and the first plug block and the second plug block are respectively provided with a second feeding plug matching the conductive rod screw hole of the conductive rod.

5. The heating power supply system according to claim 4, characterized in that: The current input component comprises two first feeding plugs connected to the power supply cable, an insulating member covering the first feeding plugs, and a supporting fixing member for accommodating the insulating member to pass through and fix it outside the cavity.

6. The heating power supply system according to claim 4, characterized in that: Second feeding plugs matching the conductive rod screw holes of the conductive rod are respectively arranged on both sides of the first plug block and the second plug block, and the current input component is located in the middle of the power supply unit; or second feeding plugs matching the conductive rod screw holes of the conductive rod are respectively arranged on one side of the first plug block and the second plug block, and the current input component is located on one side of the power supply unit.

7. The heating power supply system according to claim 1, characterized in that: The bracket includes a first half bracket and a second half bracket which are spliced ​​together and each includes multiple semicircular grooves matching the insulating sleeve. The insulating sleeve and the conductive rod are arranged in the cylindrical groove formed by the semicircular grooves of the first half bracket and the second half bracket. The bracket is fixed on the equipment frame.

8. The heating power supply system according to claim 1, characterized in that: The current input by the current input component is alternating current or direct current, and the input voltage range is 0-380V.

9. A device cavity with heating function, comprising a cavity, a plurality of heating units located in the cavity, and a heating power supply system for supplying power to the heating units, characterized in that: The heating power supply system is the heating power supply system according to any one of claims 1 to 8.

10. The device chamber with heating function according to claim 9, characterized in that: The equipment chamber with heating function is a preheating chamber arranged in or before a plasma enhanced chemical vapor deposition (PECVD) device.

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