Heat exchange device and single crystal furnace

Abstract

The utility model discloses a heat exchange device and a single crystal furnace, and relates to the technical field of monocrystalline silicon production and manufacturing. The heat exchange device comprises a shell and a heat exchange unit, the shell is provided with a first containing cavity, the heat exchange unit comprises a first heat exchange part and a second heat exchange part, the first heat exchange part and the second heat exchange part are both arranged in the first containing cavity, and the first heat exchange part and the second heat exchange part are symmetrically arranged. According to the single crystal furnace, the heat exchange effect in the single crystal furnace can be more uniform, the defect that a single crystal silicon rod is not uniform in the single crystal growth process is overcome, defect-free growth of the single crystal silicon rod is facilitated, and the production quality of the single crystal silicon rod is further improved.

Description

Technical Field

[0001] The present application relates to the technical field of single crystal silicon production and manufacturing, and in particular to a heat exchange device and a single crystal furnace. Background Art

[0002] The Czochralski method is the most commonly used method for producing single crystal silicon. The growth rate of single crystal silicon is greatly affected by the longitudinal temperature gradient of the crystal near the crystallization interface. The greater the temperature gradient of the crystal near the crystallization interface, the faster the single crystal silicon grows. Since silicon needs to release a large amount of latent heat of crystallization when it transforms from liquid to solid, increasing the longitudinal temperature gradient of the crystal near the crystallization interface is a fast and effective way to dissipate heat. A thermal field with appropriate temperature distribution can not only make the single crystal grow smoothly, but also the quality of the grown single crystal is high. If the temperature distribution of the thermal field is not very reasonable, various defects are likely to occur in the process of growing single crystals, affecting the quality of single crystal growth. In severe cases, crystal metamorphosis may occur, and single crystals cannot be grown.

[0003] In the prior art, in order to obtain a better cooling temperature gradient for the crystal rod during the growth process of single crystal silicon, a water-cooled heat exchanger is usually set in the thermal field. However, in the prior art, the water-cooled heat exchanger has only one cooling water inlet, one cooling water outlet, and one cooling water channel. After the cooling water enters the water inlet, it starts to exchange heat with the furnace. In the process of the cooling water flowing toward the water outlet, the cooling water temperature gradually increases, resulting in a decreasing cooling effect, which causes a certain deviation of the thermal field in the single crystal furnace, causing local thermal shock to the crystal rod, thereby forming uneven defects in the crystal rod during the crystal pulling process, which is not conducive to defect-free growth of the crystal rod. Utility Model Content

[0004] In view of this, the purpose of the present application is to provide a heat exchange device and a single crystal furnace, aiming to solve the technical problems in the prior art.

[0005] To achieve the above objectives, the technical solutions adopted in this application are as follows:

[0006] In a first aspect, an embodiment of the present application provides a heat exchange device, comprising:

[0007] A housing having a first cavity;

[0008] A heat exchange unit, the heat exchange unit includes a first heat exchange part and a second heat exchange part, the first heat exchange part and the second heat exchange part are both arranged in the first cavity, and the first heat exchange part and the second heat exchange part are symmetrically arranged.

[0009] In one embodiment of the first aspect, the housing further has a second cavity, and the housing further comprises:

[0010] A first cylinder, wherein the first cylinder is disposed between the first cavity and the second cavity, and the first cylinder encloses the second cavity;

[0011] The second cylinder is arranged on a side of the first cylinder close to the first cavity. The second cylinder and the first cylinder together enclose the first cavity. The first cavity is located between the first cylinder and the second cylinder.

[0012] In one embodiment of the first aspect, the first heat exchange portion includes a first channel and a third channel, and the third channel is arranged on one side of the first channel along the axis of the first cylinder.

[0013] In one embodiment of the first aspect, a flow direction of the first heat exchange medium in the first channel is opposite to a flow direction of the second heat exchange medium in the third channel.

[0014] In one embodiment of the first aspect, the second heat exchange portion includes a second channel and a fourth channel, the second channel is symmetrically arranged with respect to the first channel, the fourth channel is arranged on one side of the second channel along the axis of the first cylinder, and the fourth channel is symmetrically arranged with respect to the third channel.

[0015] In one embodiment of the first aspect, a flow direction of the first heat exchange medium in the second channel is opposite to a flow direction of the second heat exchange medium in the fourth channel.

[0016] In one embodiment of the first aspect, the first channel, the second channel, the third channel and the fourth channel are all arranged in the first cavity in a serpentine shape.

[0017] In one embodiment of the first aspect, the housing has a first medium inlet and a first medium outlet:

[0018] The first medium inlet is arranged at one end of the first cylinder, one end of the first channel is communicated with the first medium inlet, and one end of the second channel close to the first medium inlet is communicated with the first medium inlet, and the first medium inlet is used to introduce the first heat exchange medium into the first channel and the second channel respectively;

[0019] The first medium outlet is arranged at one end of the first cylinder close to the first medium inlet, the end of the first channel away from the first medium inlet is communicated with the first medium outlet, the end of the second channel away from the first medium inlet is communicated with the first medium outlet, the first medium outlet and the first medium inlet are symmetrically arranged relative to the axis of the first cylinder, and the first medium outlet is used to make the first heat exchange medium flow out of the first channel and the second channel respectively.

[0020] In one embodiment of the first aspect, the housing further comprises a second medium inlet and a second medium outlet:

[0021] The second medium inlet is arranged at one end of the second cylinder close to the first medium outlet, the second medium inlet is arranged adjacent to the first medium outlet, one end of the third channel is communicated with the second medium inlet, and one end of the fourth channel close to the second medium inlet is communicated with the second medium inlet, and the second medium inlet is used to introduce the second heat exchange medium into the third channel and the fourth channel respectively;

[0022] The second medium outlet is arranged at one end of the second cylinder close to the first medium inlet, the second medium outlet is arranged adjacent to the first medium inlet, the second medium outlet and the second medium inlet are symmetrically arranged relative to the axis of the second cylinder, one end of the third channel away from the second medium inlet is communicated with the second medium outlet, one end of the fourth channel away from the second medium inlet is communicated with the second medium outlet, and the second medium outlet is used to make the second heat exchange medium flow out of the third channel and the fourth channel respectively.

[0023] In one of the embodiments of the first aspect, the heat exchange device also includes a control component, which is connected to the heat exchange unit, and the control component is used to detect and control the flow rate and temperature of the first heat exchange medium entering the heat exchange unit, and detect and control the flow rate and temperature of the second heat exchange medium entering the heat exchange unit.

[0024] In a second aspect, an embodiment of the present application provides a single crystal furnace, comprising the heat exchange device in any one of the above embodiments.

[0025] Compared with the prior art, the beneficial effects of the present application are as follows: the present application proposes a heat exchange device and a single crystal furnace. The heat exchange device includes a shell and a heat exchange unit, the shell has a first cavity, the heat exchange unit includes a first heat exchange part and a second heat exchange part, the first heat exchange part and the second heat exchange part are both arranged in the first cavity, and the first heat exchange part and the second heat exchange part are symmetrically arranged. The present application performs heat exchange with the single crystal furnace through the first heat exchange part and the second heat exchange part respectively, and the first heat exchange part and the second heat exchange part are symmetrically arranged, so that the heat exchange effect in the single crystal furnace is more uniform, thereby preventing the uneven defects of the single crystal silicon rod during the growth of the single crystal. The heat exchange device of the present application is conducive to the defect-free growth of the single crystal silicon rod, and further improves the growth quality of the single crystal silicon rod. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0027] Figure 1 A schematic diagram of the structure of the heat exchange device in the present application from one perspective is shown;

[0028] Figure 2 Another perspective structural schematic diagram of the heat exchange device in the present application is shown;

[0029] Figure 3 Another perspective structural schematic diagram of the heat exchange device in the present application is shown;

[0030] Figure 4 A partial structural schematic diagram of the heat exchange device in the present application is shown;

[0031] Figure 5 Another partial structural schematic diagram of the heat exchange device in the present application is shown;

[0032] Figure 6 The schematic diagram of the structure of the single crystal furnace in this application is shown;

[0033] Figure 7 The schematic diagram of the structure of the heat exchange device in the present application is shown;

[0034] Figure 8 Another structural schematic diagram of the heat exchange device in the present application is shown;

[0035] Fig. 9 Another structural schematic diagram of the heat exchange device in the present application is shown.

[0036] Description of main component symbols:

[0037] 100-heat exchange device; 110-housing; 111-first cylinder; 112-second cylinder; 113-first chamber; 114-second chamber; 115-first medium inlet; 116-first medium outlet; 117-second medium inlet; 118-second medium outlet; 119-bottom plate; 120-heat exchange unit; 121-first heat exchange part; 1211-first channel; 1211a-first port; 1211b-second 2nd port; 1212-3rd channel; 1212a-5th port; 1212b-6th port; 122-2nd heat exchange part; 1221-2nd channel; 1221a-3rd port; 1221b-4th port; 1222-4th channel; 1222a-7th port; 1222b-8th port; 101-monocrystalline silicon rod; 130-control component; 131-1st filter; 132-1st control part; 13 21-first electromagnetic flowmeter; 1322-first thermometer; 1323-second electromagnetic flowmeter; 1324-second thermometer; 133-second filter; 134-second control unit; 1341-third electromagnetic flowmeter; 1342-third thermometer; 1343-fourth electromagnetic flowmeter; 1344-fourth thermometer; 135-third filter; 136-third control unit; 1361-fifth electromagnetic flowmeter; 1362-fifth thermometer; 1363-sixth electromagnetic flowmeter; 1364-sixth thermometer; 137-fourth filter; 138-fourth control unit; 1381-seventh electromagnetic flowmeter; 1382-seventh thermometer; 1383-eighth electromagnetic flowmeter; 1384-eighth thermometer; 139-first temperature difference monitor; 1391-second temperature difference monitor; 1392-third temperature difference monitor; 1393-fourth temperature difference monitor. DETAILED DESCRIPTION

[0038] The embodiments of the present application are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be understood as limiting the present application.

[0039] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0040] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0041] In this application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0042] In the present application, unless otherwise clearly specified and limited, a first feature being “above” or “below” a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being “above”, “above”, and “above” a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being “below”, “below”, and “below” a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0043] like Figure 1 , Figure 2 and Figure 4 As shown, an embodiment of the present application provides a heat exchange device 100. The heat exchange device 100 includes a housing 110 and a heat exchange unit 120.

[0044] Specifically, Figure 6As shown, the heat exchange device 100 in this embodiment is installed in the main furnace chamber of a single crystal furnace, for example.

[0045] In addition, if Figure 4 As shown, the heat exchange unit 120 includes a first heat exchange portion 121 and a second heat exchange portion 122 , the first heat exchange portion 121 and the second heat exchange portion 122 are both arranged in the first cavity 113 , and the first heat exchange portion 121 and the second heat exchange portion 122 are symmetrically arranged.

[0046] Among them, this embodiment uses the heat exchange unit 120 to cool the single crystal furnace, and uses the first heat exchange part 121 and the second heat exchange part 122 symmetrically arranged in the first cavity 113 to jointly exchange heat in the single crystal furnace, so that the heat exchange effect in the single crystal furnace is more uniform, which is beneficial to improving the production quality of single crystal silicon rods 101.

[0047] In the related art, a water-cooled heat exchanger usually has only one cooling water inlet, one cooling water outlet and one cooling water channel. After the cooling water enters the water inlet, it begins to exchange heat with the furnace. In the process of the cooling water flowing toward the water outlet, the cooling water temperature gradually increases, resulting in a decreasing cooling effect, so that the temperature of the cooling water near the water outlet is always higher than the temperature of the cooling water near the water inlet. The cooling effect near the water inlet is better, and the cooling effect near the water outlet is poor, which leads to a certain deviation of the thermal field in the single crystal furnace, causing local thermal shock to the crystal rod, thereby forming uneven defects in the crystal rod during the crystal pulling process, which is not conducive to defect-free growth of the crystal rod and affects the quality of crystal rod growth.

[0048] In this embodiment, the heat exchange device 100 includes a shell 110 and a heat exchange unit 120, wherein the heat exchange unit 120 includes a first heat exchange part 121 and a second heat exchange part 122. In this embodiment, the first heat exchange part 121 and the second heat exchange part 122 respectively perform heat exchange with the single crystal furnace, and the first heat exchange part 121 and the second heat exchange part are symmetrically arranged, so that the heat exchange effect in the single crystal furnace is more uniform, thereby avoiding the uneven growth of the single crystal silicon rod 101 during the single crystal growth process. The heat exchange device 100 of the present application is conducive to the defect-free growth of the single crystal silicon rod 101, and further improves the growth quality of the single crystal silicon rod 101.

[0049] Alternatively, if Figure 2 As shown, the shell 110 also has a second cavity 114, and the second cavity 114 is used to accommodate the single crystal silicon rod 101 placed in the main furnace chamber of the single crystal furnace.

[0050] Alternatively, if Figure 2 and Figure 3 As shown, the housing 110 further includes a first cylinder 111 and a second cylinder 112 .

[0051] The first cylinder 111 is disposed between the first cavity 113 and the second cavity 114 . The first cylinder 111 naturally encloses and forms the second cavity 114 . The first cavity 113 is located on a side of the first cylinder 111 away from the second cavity 114 .

[0052] Specifically, the second cylinder 112 is disposed on a side of the first cylinder 111 close to the first cavity 113 , and the second cylinder 112 and the first cylinder 111 together naturally form the first cavity 113 , that is, the first cavity 113 is located between the first cylinder 111 and the second cylinder 112 .

[0053] Alternatively, if Figure 2 As shown, the housing 110 further includes a bottom plate 119 , which is disposed at one end of the first cylinder 111 , and the bottom plate 119 is also disposed at one end of the second cylinder 112 .

[0054] The bottom plate 119 is connected to one end of the first cylinder 111 close to the bottom plate 119 , and one end of the second cylinder 112 close to the bottom plate 119 is connected to the bottom plate 119 , and the connection method is, for example, welding.

[0055] It should be noted that the first cylinder 111, the second cylinder 112 and the bottom plate 119 together naturally form the first cavity 113, and the bottom plate 119 can provide a certain supporting force for the first heat exchange part 121 and the second heat exchange part 122 in the first cavity 113, further preventing the first heat exchange part 121 and the second heat exchange part 122 from falling off the shell 110.

[0056] Alternatively, if Figure 4 and Figure 5 As shown, the first heat exchange portion 121 includes a first channel 1211 and a third channel 1212 , and the third channel 1212 is arranged on one side of the first channel 1211 along the axis of the first cylinder 111 .

[0057] Specifically, the third channel 1212 is arranged on a side of the first channel 1211 close to the bottom plate 119 , and the first channel 1211 is closely adjacent to the third channel 1212 , and the flow direction of the first heat exchange medium in the first channel 1211 is opposite to the flow direction of the second heat exchange medium in the third channel 1212 .

[0058] Among them, the first channel 1211 and the third channel 1212 realize heat exchange in the single crystal furnace respectively, so that the thermal fields in the vicinity of the first channel 1211 and the third channel 1212 compensate each other, thereby improving the heat exchange effect in the single crystal furnace to be more uniform.

[0059] Alternatively, if Figure 4 and Figure 5 As shown, the second heat exchange portion 122 includes a second channel 1221 and a fourth channel 1222 .

[0060] The second channel 1221 is symmetrically arranged with respect to the first channel 1211 .

[0061] The fourth channel 1222 is disposed on one side of the second channel 1221 along the axis of the first cylinder 111. Specifically, the fourth channel 1222 is disposed on one side of the second channel 1221 close to the bottom plate 119. In this embodiment, the fourth channel 1222 is symmetrically disposed with the third channel 1212.

[0062] Optionally, the second channel 1221 is disposed closely adjacent to the fourth channel 1222 , and a flow direction of the first heat exchange medium in the second channel 1221 is opposite to a flow direction of the second heat exchange medium in the fourth channel 1222 .

[0063] In this embodiment, the second channel 1221 and the fourth channel 1222 respectively realize heat exchange in the single crystal furnace, so that the thermal fields in the vicinity of the first channel 1211 and the third channel 1212 compensate each other, thereby improving the heat exchange effect in the single crystal furnace to be more uniform.

[0064] Among them, this embodiment cools the single crystal furnace together through the first channel 1211, the second channel 1221, the third channel 1212 and the fourth channel 1222, and the flow direction of the first heat exchange medium in the first channel 1211 is opposite to the flow direction of the second heat exchange medium in the third channel 1212, and the flow direction of the first heat exchange medium in the second channel 1221 is opposite to the flow direction of the second heat exchange medium in the fourth channel 1222, thereby reducing the difference in cooling medium temperature at both ends of the first channel 1211, both ends of the second channel 1221, both ends of the third channel 1212 and both ends of the fourth channel, thereby reducing the thermal field offset in the furnace.

[0065] In this embodiment, the thermal fields in the vicinity of the first channel 1211 and the third channel 1212 compensate each other, and the thermal fields in the vicinity of the second channel 1221 and the fourth channel 1222 compensate each other, thereby making the heat exchange effect in the single crystal furnace more uniform, further preventing the uneven defects of the single crystal silicon rod 101 during the single crystal growth process. The heat exchange device 100 in this embodiment is conducive to the defect-free growth of the single crystal silicon rod 101.

[0066] Optionally, the first channel 1211, the second channel 1221, the third channel 1212 and the fourth channel 1222 are all arranged in a serpentine shape in the first cavity 113, that is, for example, arranged in a "bow" shape in the first cavity 113. This method can make greater use of the first cavity 113, further improving the cooling effect of the heat exchange device 100 in this embodiment.

[0067] Alternatively, if Figure 4 and Figure 5 As shown, the first channel 1211 has a first port 1211a and a second port 1211b, the first port 1211a is disposed at one end of the first channel 1211, and the second port 1211b is disposed at an end of the first channel 1211 away from the first port 1211a.

[0068] The second channel 1221 has a third port 1221 a and a fourth port 1221 b . The third port 1221 a is disposed at one end of the second channel 1221 close to the first port 1211 a , and the third port 1221 a is adjacent to the first port 1211 a .

[0069] In addition, the fourth port 1221 b is disposed at an end of the second channel 1221 away from the third port 1221 a , and the fourth port 1221 b is adjacent to the second port 1211 b .

[0070] Alternatively, if Figure 4 and Figure 5 As shown, the third channel 1212 has a fifth port 1212a and a sixth port 1212b, the fifth port 1212a is arranged at one end of the third channel 1212, and the fifth port 1212a is located on a side of the first port 1211a close to the bottom plate 119, and the sixth port 1212b is arranged at an end of the third channel 1212 away from the fifth port 1212a, and the sixth port 1212b is located on a side of the second port 1211b close to the bottom plate 119.

[0071] Alternatively, if Figure 4 and Figure 5As shown, the fourth channel 1222 has a seventh port 1222a and an eighth port 1222b.

[0072] Specifically, the seventh port 1222 a is disposed at one end of the fourth channel 1222 , and the seventh channel is located at a side of the third port 1221 a close to the bottom plate 119 .

[0073] In addition, the eighth port 1222 b is disposed at an end of the fourth channel 1222 away from the seventh channel, and the eighth port 1222 b is located at a side of the fourth port 1221 b close to the bottom plate 119 .

[0074] Alternatively, if Figure 2 and Figure 3 As shown, the housing 110 has a first medium inlet 115 and a first medium outlet 116 .

[0075] Specifically, the first medium inlet 115 is disposed at one end of the first cylinder 111. In this embodiment, the first medium inlet 115 is located at one end of the first cylinder 111 away from the bottom plate 119.

[0076] One end of the first channel 1211 is in communication with the first medium inlet 115 , and one end of the second channel 1221 close to the first medium inlet 115 is in communication with the first medium inlet 115 . Specifically, the first port 1211a is in communication with the first medium inlet 115 , and the third port 1221a is in communication with the first medium inlet 115 .

[0077] It should be noted that, in this embodiment, the first heat exchange medium is introduced into the first channel 1211 and the second channel 1221 respectively through the first medium inlet 115 .

[0078] Specifically, when the first heat exchange medium is introduced into the first medium inlet 115 , the first heat exchange medium in the first medium inlet 115 is divided into two parts and enters the first channel 1211 through the first port 1211a and the second channel 1221 through the second port 1211b .

[0079] In addition, the first medium outlet 116 is disposed at an end of the first cylinder 111 close to the first medium inlet 115 , that is, the first medium outlet 116 is disposed at an end of the first cylinder 111 away from the bottom plate 119 , and the first medium outlet 116 and the first medium inlet 115 are symmetrically disposed relative to the axis of the first cylinder 111 .

[0080] The plane where the line connecting the first medium inlet 115 and the first medium outlet 116 and the axis of the first cylinder 111 are located is, for example, set as a first plane, and the first channel 1211 and the second channel 1221 are symmetrically arranged relative to the first plane.

[0081] Specifically, one end of the first channel 1211 away from the first medium inlet 115 is in communication with the first medium outlet 116, that is, the second port 1211b is in communication with the first medium outlet 116. And one end of the second channel 1221 away from the first medium inlet 115 is in communication with the first medium outlet 116, that is, the fourth port 1221b is in communication with the first medium outlet 116.

[0082] In this embodiment, the first medium outlet 116 is used to allow the first heat exchange medium to flow out of the first channel 1211 and the second channel 1221 respectively.

[0083] Specifically, the first heat exchange medium that has completed heat exchange in the first channel 1211 flows out from the second port 1211b of the first channel 1211 to the first medium outlet 116, and the first heat exchange medium that has completed heat exchange in the second channel 1221 flows out from the fourth port 1221b of the second channel 1221 to the first medium outlet 116.

[0084] Furthermore, the first heat exchange medium that has completed heat exchange in the first channel 1211 and the first heat exchange medium that has completed heat exchange in the second channel 1221 both flow from the first medium outlet 116 to the outside of the single crystal furnace, so that the first heat exchange medium with suitable temperature can be circulated into the first channel 1211 and the second channel 1221, further improving the cooling effect of the heat exchange device 100 of this embodiment.

[0085] Alternatively, if Figure 2 and Figure 3 As shown, the housing 110 further has a second medium inlet 117 and a second medium outlet 118 .

[0086] Specifically, the second medium inlet 117 is disposed at one end of the second cylinder 112 close to the first medium outlet 116 , and the second medium inlet 117 is disposed adjacent to the first medium outlet 116 . The second medium inlet 117 is located on a side of the first medium outlet 116 away from the first medium inlet 115 .

[0087] One end of the third channel 1212 is in communication with the second medium inlet 117 , and one end of the fourth channel 1222 close to the second medium inlet 117 is in communication with the second medium inlet 117 . Specifically, the fifth port 1212a and the seventh port 1222a are both in communication with the second medium inlet 117 .

[0088] It should be noted that, in this embodiment, the second heat exchange medium is introduced into the third channel 1212 and the fourth channel 1222 respectively through the second medium inlet 117 .

[0089] Specifically, when the second heat exchange medium is introduced into the second medium inlet 117 , the second heat exchange medium in the second medium inlet 117 is divided into two and enters the third channel 1212 through the fifth port 1212a and the fourth channel 1222 through the seventh port 1222a .

[0090] In addition, the second medium outlet 118 is arranged at one end of the second cylinder 112 close to the first medium inlet 115, the second medium outlet 118 is arranged adjacent to the first medium inlet 115, and the second medium outlet 118 is located on the side of the first medium inlet 115 away from the first medium outlet 116, and the second medium outlet 118 and the second medium inlet 117 are symmetrically arranged relative to the axis of the second cylinder 112.

[0091] The third channel 1212 and the fourth channel 1222 are symmetrically arranged relative to the first plane.

[0092] Specifically, one end of the third channel 1212 away from the second medium inlet 117 is in communication with the second medium outlet 118, that is, the sixth port 1212b is in communication with the second medium outlet 118. And one end of the fourth channel 1222 away from the second medium inlet 117 is in communication with the second medium outlet 118, and the eighth port 1222b is in communication with the second medium outlet 118.

[0093] In this embodiment, the second medium outlet 118 is used to allow the second heat exchange medium to flow out of the third channel 1212 and the fourth channel 1222 respectively.

[0094] Specifically, the second heat exchange medium that has completed heat exchange in the third channel 1212 flows out from the sixth port 1212b of the third channel 1212 to the second medium outlet 118, and the second heat exchange medium that has completed heat exchange in the fourth channel 1222 flows out from the eighth port 1222b of the fourth channel 1222 to the second medium outlet 118.

[0095] Furthermore, the second heat exchange medium that has completed heat exchange in the third channel 1212 and the second heat exchange medium that has completed heat exchange in the fourth channel 1222 both flow from the second medium outlet 118 to the outside of the single crystal furnace, so that the second heat exchange medium with suitable temperature can be circulated into the third channel 1212 and the fourth channel 1222, further improving the cooling effect of the heat exchange device 100 of this embodiment.

[0096] It should be noted that the first heat exchange medium and the second heat exchange medium in this embodiment may be the same or different, and both the first heat exchange medium and the second heat exchange medium may be gas or liquid.

[0097] When the first heat exchange medium and the second heat exchange medium are the same, both the first heat exchange medium and the second heat exchange medium are, for example, cooling water.

[0098] When the first heat exchange medium is different from the second heat exchange medium, the first heat exchange medium is, for example, a glycerin-type coolant, and the second heat exchange medium is, for example, helium.

[0099] Alternatively, if Figure 7 As shown, the heat exchange device 100 also includes a control component 130, which is connected to the heat exchange unit 120, and the control component 130 is used to detect and control the flow rate and temperature of the first heat exchange medium entering the heat exchange unit 120, and detect and control the flow rate and temperature of the second heat exchange medium entering the heat exchange unit 120.

[0100] Specifically, Figure 8 As shown, the control assembly 130 includes a first filter 131 and a first control part 132, one end of the first control part 132 is connected to the first filter 131. And one end of the first control part 132 away from the first filter 131 penetrates into the first medium inlet 115 and is respectively connected to the first channel 1211 and the second channel 1221.

[0101] Alternatively, if Fig. 9 As shown, the first control unit 132 includes a first electromagnetic flowmeter 1321 , a second electromagnetic flowmeter 1323 , a first thermometer 1322 and a second thermometer 1324 .

[0102] Among them, one end of the first electromagnetic flowmeter 1321 is connected to the first filter 131, the end of the first electromagnetic flowmeter 1321 away from the first filter 131 is connected to the first thermometer 1322, and the end of the first thermometer 1322 away from the first electromagnetic flowmeter 1321 is connected to the first channel 1211, and the connection methods are, for example, pipeline connections.

[0103] Specifically, the first electromagnetic flowmeter 1321 is used to control the flow rate of the first heat exchange medium entering the first channel 1211 , and the first thermometer 1322 is used to detect the temperature of the first heat exchange medium entering the first channel 1211 .

[0104] In addition, one end of the second electromagnetic flowmeter 1323 is connected to the first filter 131, one end of the second electromagnetic flowmeter 1323 away from the first filter 131 is connected to the second thermometer 1324, and one end of the second thermometer 1324 away from the second electromagnetic flowmeter 1323 is connected to the second channel 1221, and the connection methods are, for example, pipeline connections.

[0105] Specifically, the second electromagnetic flowmeter 1323 is used to control the flow rate of the first heat exchange medium entering the second channel 1221 , and the second thermometer 1324 is used to detect the temperature of the first heat exchange medium entering the second channel 1221 .

[0106] Specifically, Figure 8 As shown, the control assembly 130 includes a second filter 133 and a second control part 134, one end of the second control part 134 is connected to the second filter 133. And one end of the second control part 134 away from the second filter 133 penetrates into the second medium inlet 117 and is respectively connected to the third channel 1212 and the fourth channel 1222.

[0107] Alternatively, if Fig. 9 As shown, the second control unit 134 includes a third electromagnetic flowmeter 1341 , a fourth electromagnetic flowmeter 1343 , a third thermometer 1342 and a fourth thermometer 1344 .

[0108] Among them, one end of the third electromagnetic flowmeter 1341 is connected to the second filter 133, the end of the third electromagnetic flowmeter 1341 away from the second filter 133 is connected to the third thermometer 1342, and the end of the third thermometer 1342 away from the third electromagnetic flowmeter 1341 is connected to the third channel 1212, and the connection method is, for example, pipeline connection.

[0109] Specifically, the third electromagnetic flowmeter 1341 is used to control the flow rate of the second heat exchange medium entering the third channel 1212 , and the third thermometer 1342 is used to detect the temperature of the second heat exchange medium entering the third channel 1212 .

[0110] In addition, one end of the fourth electromagnetic flowmeter 1343 is connected to the second filter 133, one end of the fourth electromagnetic flowmeter 1343 away from the second filter 133 is connected to the fourth thermometer 1344, and one end of the fourth thermometer 1344 away from the fourth electromagnetic flowmeter 1343 is connected to the fourth channel 1222, and the connection methods are, for example, pipeline connections.

[0111] Specifically, the fourth electromagnetic flowmeter 1343 is used to control the flow rate of the second heat exchange medium entering the fourth channel 1222 , and the fourth thermometer 1344 is used to detect the temperature of the second heat exchange medium entering the fourth channel 1222 .

[0112] Specifically, Figure 8 As shown, the control assembly 130 includes a third filter 135 and a third control unit 136, one end of the third control unit 136 is connected to the third filter 135. And one end of the third control unit 136 away from the third filter 135 penetrates into the first medium outlet 116 and is respectively connected to the first channel 1211 and the second channel 1221.

[0113] Alternatively, if Fig. 9 As shown, the third control unit 136 includes a fifth electromagnetic flowmeter 1361 , a sixth electromagnetic flowmeter 1363 , a fifth thermometer 1362 and a sixth thermometer 1364 .

[0114] Among them, one end of the fifth electromagnetic flowmeter 1361 is connected to the third filter 135, the end of the fifth electromagnetic flowmeter 1361 away from the third filter 135 is connected to the fifth thermometer 1362, and the end of the fifth thermometer 1362 away from the fifth electromagnetic flowmeter 1361 is connected to the first channel 1211, and the connection method is, for example, pipeline connection.

[0115] Specifically, the fifth electromagnetic flowmeter 1361 is used to control the flow rate of the first heat exchange medium entering the first channel 1211 , and the fifth thermometer 1362 is used to detect the temperature of the first heat exchange medium entering the first channel 1211 .

[0116] In addition, one end of the sixth electromagnetic flowmeter 1363 is connected to the third filter 135, one end of the sixth electromagnetic flowmeter 1363 away from the third filter 135 is connected to the sixth thermometer 1364, and one end of the sixth thermometer 1364 away from the sixth electromagnetic flowmeter 1363 is connected to the second channel 1221, and the connection methods are, for example, pipeline connections.

[0117] Specifically, the sixth electromagnetic flowmeter 1363 is used to control the flow rate of the first heat exchange medium entering the second channel 1221 , and the sixth thermometer 1364 is used to detect the temperature of the first heat exchange medium entering the second channel 1221 .

[0118] Specifically, Figure 8 As shown, the control assembly 130 includes a fourth filter 137 and a fourth control unit 138, one end of the fourth control unit 138 is connected to the fourth filter 137. And one end of the fourth control unit 138 away from the fourth filter 137 penetrates into the second medium outlet 118 and is respectively connected to the third channel 1212 and the fourth channel 1222.

[0119] Alternatively, if Fig. 9 As shown, the fourth control unit 138 includes a seventh electromagnetic flowmeter 1381 , an eighth electromagnetic flowmeter 1383 , a seventh thermometer 1382 and an eighth thermometer 1384 .

[0120] Among them, one end of the seventh electromagnetic flowmeter 1381 is connected to the fourth filter 137, the end of the seventh electromagnetic flowmeter 1381 away from the fourth filter 137 is connected to the seventh thermometer 1382, and the end of the seventh thermometer 1382 away from the seventh electromagnetic flowmeter 1381 is connected to the third channel 1212, and the connection method is, for example, pipeline connection.

[0121] Specifically, the seventh electromagnetic flowmeter 1381 is used to control the flow rate of the second heat exchange medium entering the third channel 1212 , and the seventh thermometer 1382 is used to detect the temperature of the second heat exchange medium entering the third channel 1212 .

[0122] In addition, one end of the eighth electromagnetic flowmeter 1383 is connected to the fourth filter 137, one end of the eighth electromagnetic flowmeter 1383 away from the fourth filter 137 is connected to the eighth thermometer 1384, and one end of the eighth thermometer 1384 away from the eighth electromagnetic flowmeter 1383 is connected to the fourth channel 1222, and the connection methods are, for example, pipeline connections.

[0123] Specifically, the eighth electromagnetic flowmeter 1383 is used to control the flow rate of the second heat exchange medium entering the fourth channel 1222 , and the eighth thermometer 1384 is used to detect the temperature of the second heat exchange medium entering the fourth channel 1222 .

[0124] Alternatively, if Fig. 9As shown, the control component 130 also includes a first temperature difference monitor 139 , a second temperature difference monitor 1391 , a third temperature difference monitor 1392 and a fourth temperature difference monitor 1393 .

[0125] Specifically, the first temperature difference monitor 139 is connected to the first thermometer 1322 and the fifth thermometer 1362 , and the first temperature difference monitor 139 is used to monitor the difference between the temperatures displayed by the first thermometer 1322 and the fifth thermometer 1362 .

[0126] When the first heat exchange medium of the first channel 1211 flows in from the first medium inlet 115 and flows out from the first medium outlet 116, the result detected by the first temperature difference monitor 139 is that the temperature value displayed by the first thermometer 1322 is lower than the temperature value displayed by the fifth thermometer 1362, which is normal; otherwise, the temperature of the first heat exchange medium entering the first medium inlet 115 needs to be adjusted.

[0127] When the first heat exchange medium of the first channel 1211 flows in from the first medium outlet 116 and flows out from the first medium inlet 115, the result detected by the first temperature difference monitor 139 is that the temperature value displayed by the fifth thermometer 1362 is lower than the temperature value displayed by the first thermometer 1322, which is normal; otherwise, the temperature of the first heat exchange medium entering the first medium outlet 116 needs to be adjusted.

[0128] Specifically, the second temperature difference monitor 1391 is connected to the second thermometer 1324 and the sixth thermometer 1364 , and the second temperature difference monitor 1391 is used to monitor the difference between the temperatures displayed by the second thermometer 1324 and the sixth thermometer 1364 .

[0129] When the first heat exchange medium of the second channel 1221 flows in from the first medium inlet 115 and flows out from the first medium outlet 116, the result detected by the second temperature difference monitor 1391 is that the temperature value displayed by the second thermometer 1324 is lower than the temperature value displayed by the sixth thermometer 1364, which is normal; otherwise, the temperature of the first heat exchange medium entering the first medium inlet 115 needs to be adjusted.

[0130] When the first heat exchange medium of the second channel 1221 flows in from the first medium outlet 116 and flows out from the first medium inlet 115, the result detected by the second temperature difference monitor 1391 is that the temperature value displayed by the sixth thermometer 1364 is lower than the temperature value displayed by the second thermometer 1324, which is normal; otherwise, the temperature of the first heat exchange medium entering the first medium outlet 116 needs to be adjusted.

[0131] Specifically, the third temperature difference monitor 1392 is connected to the third thermometer 1342 and the seventh thermometer 1382 , and the third temperature difference monitor 1392 is used to monitor the difference between the temperatures displayed by the third thermometer 1342 and the seventh thermometer 1382 .

[0132] When the second heat exchange medium of the third channel 1212 flows in from the second medium inlet 117 and flows out from the second medium outlet 118, the result detected by the third temperature difference monitor 1392 is that the temperature value displayed by the third thermometer 1342 is lower than the temperature value displayed by the seventh thermometer 1382, which is normal; otherwise, the temperature of the second heat exchange medium entering the second medium inlet 117 needs to be adjusted.

[0133] When the second heat exchange medium of the third channel 1212 flows in from the second medium outlet 118 and flows out from the second medium inlet 117, the result detected by the third temperature difference monitor 1392 is that the temperature value displayed by the seventh thermometer 1382 is lower than the temperature value displayed by the third thermometer 1342, which is normal; otherwise, the temperature of the second heat exchange medium entering the second medium outlet 118 needs to be adjusted.

[0134] Specifically, the fourth temperature difference monitor 1393 is connected to the fourth thermometer 1344 and the eighth thermometer 1384 , and the fourth temperature difference monitor 1393 is used to monitor the difference between the temperatures displayed by the fourth thermometer 1344 and the eighth thermometer 1384 .

[0135] When the second heat exchange medium of the fourth channel 1222 flows in from the second medium inlet 117 and flows out from the second medium outlet 118, the result detected by the fourth temperature difference monitor 1393 is that the temperature value displayed by the fourth thermometer 1344 is lower than the temperature value displayed by the eighth thermometer 1384, which is normal; otherwise, the temperature of the second heat exchange medium entering the second medium inlet 117 needs to be adjusted.

[0136] When the second heat exchange medium of the fourth channel 1222 flows in from the second medium outlet 118 and flows out from the second medium inlet 117, the result detected by the fourth temperature difference monitor 1393 is that the temperature value displayed by the eighth thermometer 1384 is lower than the temperature value displayed by the fourth thermometer 1344, which is normal; otherwise, the temperature of the second heat exchange medium entering the second medium outlet 118 needs to be adjusted.

[0137] like Figure 6 As shown, the single crystal furnace provided in this embodiment has the heat exchange device 100 provided in any of the above embodiments, and thus has all the beneficial effects of the above heat exchange device 100, which will not be described one by one here.

[0138] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0139] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limitations on the present application. Ordinary technicians in this field can change, modify, replace and modify the above embodiments within the scope of the present application.

Claims

1. A heat exchange device, characterized in that: include: A housing having a first cavity; A heat exchange unit, the heat exchange unit includes a first heat exchange part and a second heat exchange part, the first heat exchange part and the second heat exchange part are both arranged in the first cavity, and the first heat exchange part and the second heat exchange part are symmetrically arranged.

2. The heat exchange device according to claim 1, characterized in that: The housing also has a second cavity, and the housing further comprises: A first cylinder, wherein the first cylinder is disposed between the first cavity and the second cavity, and the first cylinder encloses the second cavity; The second cylinder is arranged on a side of the first cylinder close to the first cavity. The second cylinder and the first cylinder together enclose the first cavity. The first cavity is located between the first cylinder and the second cylinder.

3. The heat exchange device according to claim 2, characterized in that: The first heat exchange portion includes a first channel and a third channel, and the third channel is arranged on one side of the first channel along the axis of the first cylinder.

4. The heat exchange device according to claim 3, characterized in that: The flow direction of the first heat exchange medium in the first channel is opposite to the flow direction of the second heat exchange medium in the third channel.

5. The heat exchange device according to claim 3, characterized in that: The second heat exchange portion includes a second channel and a fourth channel, the second channel is symmetrically arranged with respect to the first channel, the fourth channel is arranged at one side of the second channel along the axis of the first cylinder, and the fourth channel is symmetrically arranged with respect to the third channel.

6. The heat exchange device according to claim 5, characterized in that: The flow direction of the first heat exchange medium in the second channel is opposite to the flow direction of the second heat exchange medium in the fourth channel.

7. The heat exchange device according to claim 5, characterized in that: The first channel, the second channel, the third channel and the fourth channel are all arranged in the first cavity in a serpentine shape.

8. The heat exchange device according to claim 5, characterized in that: The housing has a first medium inlet and a first medium outlet: The first medium inlet is arranged at one end of the first cylinder, one end of the first channel is communicated with the first medium inlet, and one end of the second channel close to the first medium inlet is communicated with the first medium inlet, and the first medium inlet is used to introduce the first heat exchange medium into the first channel and the second channel respectively; The first medium outlet is arranged at one end of the first cylinder close to the first medium inlet, the end of the first channel away from the first medium inlet is communicated with the first medium outlet, the end of the second channel away from the first medium inlet is communicated with the first medium outlet, the first medium outlet and the first medium inlet are symmetrically arranged relative to the axis of the first cylinder, and the first medium outlet is used to make the first heat exchange medium flow out of the first channel and the second channel respectively.

9. The heat exchange device according to claim 8, characterized in that: The housing also has a second medium inlet and a second medium outlet: The second medium inlet is arranged at one end of the second cylinder close to the first medium outlet, the second medium inlet is arranged adjacent to the first medium outlet, one end of the third channel is communicated with the second medium inlet, and one end of the fourth channel close to the second medium inlet is communicated with the second medium inlet, and the second medium inlet is used to introduce the second heat exchange medium into the third channel and the fourth channel respectively; The second medium outlet is arranged at one end of the second cylinder close to the first medium inlet, the second medium outlet is arranged adjacent to the first medium inlet, the second medium outlet and the second medium inlet are symmetrically arranged relative to the axis of the second cylinder, one end of the third channel away from the second medium inlet is communicated with the second medium outlet, one end of the fourth channel away from the second medium inlet is communicated with the second medium outlet, and the second medium outlet is used to make the second heat exchange medium flow out of the third channel and the fourth channel respectively.

10. The heat exchange device according to claim 1, characterized in that: The heat exchange device also includes a control component, which is connected to the heat exchange unit and is used to detect and control the flow rate and temperature of the first heat exchange medium entering the heat exchange unit, and detect and control the flow rate and temperature of the second heat exchange medium entering the heat exchange unit.

11. A single crystal furnace, characterized in that: The invention comprises a heat exchange device according to any one of claims 1 to 10.

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