Wafer processing flower basket with adjusting mechanism

Abstract

The utility model discloses a wafer processing flower basket with an adjusting mechanism, which comprises two symmetrically arranged mounting plates, the inner side surfaces of the mounting plates are equidistantly provided with limiting clamping grooves, a first connecting plate is arranged at the top between the two mounting plates, and a handle is arranged in the middle of the edge of one side of the top end surface of the first connecting plate. Second connecting plates are symmetrically arranged at the bottom between the two mounting plates; according to the utility model, through the designed adjusting assembly, the distance between the two mounting plates can be conveniently adjusted, the structure is simple, the operation is convenient and fast, the flower basket can be used for storing wafers with different sizes, the applicability is improved, and the practical effect is better; through the designed cleaning assembly, workers can regularly clean the interior of the limiting clamping groove conveniently, operation is simple and easy, dust cannot be accumulated in the limiting clamping groove, the situation that the surface of a wafer is stained with dust is avoided, and practicability is good.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer processing equipment, in particular to a flower basket for wafer processing with an adjusting mechanism. Background Art

[0002] Wafer refers to the silicon wafer used to make silicon semiconductor circuits. Its original material is silicon. High-purity polycrystalline silicon is dissolved and doped with silicon crystal seeds, and then slowly pulled out to form cylindrical single crystal silicon. After grinding, polishing and slicing, the silicon crystal rod forms a silicon wafer, that is, a wafer. Wafer is an important semiconductor. After the wafer is processed, a special carrier will be used to protect it. The flower basket is a common wafer carrier. A Chinese patent discloses a flower basket compatible with multi-size wafer processing (Announcement No. CN219457547U). The patent has already elaborated on the flower basket in detail, so it will not be repeated here. However, when the existing flower basket for wafer processing is used, the first connecting plate and the second connecting plate are fixedly connected to the mounting plate, and the distance between the two mounting plates cannot be adjusted later, so that the flower basket can only carry wafers of the same size. There are limitations when using it, and there is a certain room for improvement. Utility Model Content

[0003] The utility model aims to provide a flower basket for wafer processing with an adjustment mechanism to solve the problems raised in the above-mentioned background technology.

[0004] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a flower basket for wafer processing with an adjustment mechanism, comprising two symmetrically arranged mounting plates, the inner surfaces of the mounting plates being provided with limit slots at equal distances, a first connecting plate being arranged on the top between the two mounting plates, a handle being installed on the middle of one edge of the top end surface of the first connecting plate, a second connecting plate being symmetrically arranged on the bottom between the two mounting plates, and an adjustment assembly being arranged at the connection between the first connecting plate and the second connecting plate and the mounting plates.

[0005] The adjusting component includes a first through groove symmetrically opened at the top of the side surface of the mounting plate, two ends of the first connecting plate are limitedly engaged into the first through groove, and the bottom of the side surface of the mounting plate is symmetrically opened with a second through groove for the two ends of the second connecting plate to be engaged, the inner surfaces of the first through groove and the second through groove are fixed with limiting plates, the top end surface of the first connecting plate and the bottom end surfaces of the two second connecting plates are equidistantly opened with connecting grooves for the limiting plates to be limitedly engaged, the top end surface and the bottom end surface of the mounting plate are both opened with fixing grooves, the fixing grooves are opened with mounting screw holes, the mounting screw holes are screwed into the inside of the mounting screw holes, and one end surface of the limiting bolt is pressed and fitted with the surface of the limiting plate.

[0006] As a further preferred embodiment of the present technical solution, the cross-section of the limiting piece is an isosceles trapezoid, and the limiting piece is made of metal.

[0007] As a further preferred embodiment of the present technical solution, the width of the opening of the fixing groove is greater than the diameter of the top end surface of the limiting bolt, and the top end surface of the limiting bolt is not higher than the horizontal plane at the opening of the fixing groove.

[0008] As a further preferred embodiment of the present technical solution, a cleaning assembly is provided at the edge of the inner surface of the mounting plate, and the cleaning assembly includes a fixing plate arranged at the edge of the inner surface of the mounting plate, and fixing bosses are fixed at equal distances on the inner surface of the fixing plate, and the fixing bosses are limitedly engaged to the inner side of the limiting slot, and the outer cover of the fixing bosses is provided with a sponge cover, and the surface of the sponge cover is fitly connected to the inner surface of the limiting slot.

[0009] As a further preferred embodiment of the technical solution, limiting magnetic blocks are symmetrically installed at the bottom of both ends of the mounting plate, and the two ends of the fixing plate are limitedly engaged with the limiting magnetic blocks.

[0010] As a further preferred embodiment of the present technical solution, a double-sided adhesive tape is provided on one end surface of the sponge cover, and the one end surface of the sponge cover is bonded and connected to the surface of the fixing plate.

[0011] As a further preferred embodiment of the present technical solution, the longitudinal section of the limiting magnetic block is "L"-shaped, and the fixing plate is made of metal.

[0012] The utility model provides a flower basket for wafer processing with an adjustment mechanism, which has the following beneficial effects:

[0013] 1. The utility model is convenient for adjusting the distance between the two mounting plates through the designed adjustment component. The structure is simple and the operation is convenient and quick, so that the flower basket can be used to store wafers of different sizes, the applicability is improved, and the practical effect is better.

[0014] 2. The cleaning component designed in the utility model is convenient for workers to clean the inside of the limit card slot regularly. It is simple and easy to operate, so that dust will not accumulate inside the limit card slot, avoiding the surface of the wafer from being contaminated with dust, and has good practicality. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0016] Figure 2 This is a schematic diagram of the installation structure of the adjustment component and the cleaning component in the utility model;

[0017] Figure 3 for Figure 2 A magnified schematic diagram of the middle A area;

[0018] Figure 4 for Figure 2 A magnified schematic diagram of the middle B area;

[0019] In the figure: 1. Mounting plate; 2. Limiting slot; 3. First connecting plate; 4. Second connecting plate; 5. Handle; 6. First through slot; 7. Second through slot; 8. Fixing plate; 9. Connecting slot; 10. Limiting plate; 11. Limiting bolt; 12. Fixing groove; 13. Mounting screw hole; 14. Fixing boss; 15. Sponge cover; 16. Limiting magnetic block. DETAILED DESCRIPTION

[0020] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the accompanying drawings in the embodiments of the present invention.

[0021] The utility model provides a technical solution: Figure 1 , Figure 2 and Figure 3 As shown, in the present embodiment, a flower basket for wafer processing with an adjustment mechanism comprises two symmetrically arranged mounting plates 1, the inner surfaces of the mounting plates 1 are provided with limit slots 2 at equal distances, a first connecting plate 3 is provided at the top between the two mounting plates 1, a handle 5 is installed at the middle of one edge of the top surface of the first connecting plate 3, a second connecting plate 4 is symmetrically arranged at the bottom between the two mounting plates 1, an adjustment component is provided at the connection between the first connecting plate 3, the second connecting plate 4 and the mounting plates 1, the adjustment component comprises a first through slot 6 symmetrically arranged at the top of the side surface of the mounting plates 1, the two ends of the first connecting plate 3 are limitedly engaged with the inside of the first through slot 6, the bottom of the side surface of the mounting plate 1 is symmetrically provided with second through slots 7 for engaging the two ends of the second connecting plate 4, the inner surfaces of the first through slot 6 and the second through slot 7 are both fixed with limit plates 10, and the limit plates 10 The cross section is an isosceles trapezoid, and the limiting plate 10 is made of metal. The top end surface of the first connecting plate 3 and the bottom end surfaces of the two second connecting plates 4 are evenly spaced to provide connecting grooves 9 for the limiting plate 10 to limit and engage. The top end surface and the bottom end surface of the mounting plate 1 are both provided with fixing grooves 12, and the interior of the fixing groove 12 is provided with mounting screw holes 13, and the interior of the mounting screw holes 13 is screwed into the limiting bolts 11, and one end surface of the limiting bolt 11 is pressed and fitted with the surface of the limiting plate 10, and the opening width of the fixing groove 12 is greater than the top end surface diameter of the limiting bolt 11, and the top end surface of the limiting bolt 11 is not higher than the horizontal plane of the opening of the fixing groove 12, which is convenient for workers to adjust the distance between the two mounting plates 1, has a simple structure, and is convenient and quick to operate, which is convenient for workers to place wafers of different sizes on the inner side of the flower basket, thereby improving applicability and having a better practical effect.

[0022] like Figure 2 and Figure 4 The cleaning component is shown in Figure 1, which comprises a fixing plate 8 arranged at the edge of the inner surface of the fixing plate 1, and a fixing boss 14 is fixed at equal distances on the inner surface of the fixing plate 8, and the fixing boss 14 is limitedly engaged to the inner side of the limiting card slot 2, and a sponge sleeve 15 is provided on the outer sleeve of the fixing boss 14, and a double-sided tape is provided on one end surface of the sponge sleeve 15, and one end surface of the sponge sleeve 15 is bonded and connected to the surface of the fixing plate 8, and the surface of the sponge sleeve 15 is fitted and connected to the inner surface of the limiting card slot 2. The bottom and bottom of both ends of the mounting plate 1 are symmetrically installed with limiting magnetic blocks 16, and the two ends of the fixing plate 8 are limitedly engaged with the limiting magnetic blocks 16, and the longitudinal section of the limiting magnetic block 16 is "L"-shaped. The fixing plate 8 is made of metal material, which is convenient for workers to regularly clean the inside of the limiting card slot 2, so that there will be no dust accumulation inside the limiting card slot 2, and the surface of the wafer is prevented from being contaminated with dust, the functionality is improved, and the practicality is good.

[0023] The utility model provides a flower basket for wafer processing with an adjustment mechanism, and the specific working principle is as follows: when the distance between the two mounting plates 1 needs to be adjusted, the limiting bolt 11 is first rotated to make one end of the limiting bolt 11 move toward the inside of the mounting screw hole 13, at this time, one end of the limiting bolt 11 will lose connection with the inner surface of the limiting plate 10, until one end of the limiting bolt 11 is rotated to the inside of the mounting screw hole 13, and then the two mounting plates 1 can be pushed to move, so that the end of the first connecting plate 3 and the end of the two second connecting plates 4 can respectively pass through the first through groove 6 and the second through groove 7, and at the same time, the limiting plate 10 will be deformed under compression until the distance between the two mounting plates 1 is adjusted appropriately, the limiting plate 10 will be limitedly engaged to the inside of the corresponding connecting slot 9, and then the limiting bolt 11 is rotated again, so that one end of the limiting bolt 11 is pressed and fitted with the surface of the limiting plate 10, the structure is simple, and the operation is convenient and quick, which is convenient for workers to adjust Wafers of the same size are placed on the inner side of the flower basket, which improves applicability and has a better practical effect. When installing the cleaning component in the early stage of the utility model, the sponge sleeve 15 is first pushed one by one to move to the outside of the fixed boss 14 on one side of the fixed plate 8, so that the sponge sleeve 15 can be sleeved on the outside of the fixed boss 14, and one end of the fixed boss 14 will be bonded and connected to the inner surface of the fixed plate 8, and then the fixed plate 8 is pushed to move to the edge of the inner surface of the mounting plate 1, so that the fixed boss 14 and the sponge sleeve 15 can be The limit card is engaged to the inner side of the limit card slot 2. At this time, the surface of the sponge cover 15 will be fitted and connected with the inner surface of the limit card slot 2, and then the fixing plate 8 is pushed to move on the inner surface of the mounting plate 1, so that the fixing plate 8 can be limit-engaged with the limit magnetic block 16 at the end of the mounting plate 1. When the workers need to clean the inside of the limit card slot 2 later, they only need to pull the fixing plate 8 so that the fixing plate 8 drives the sponge cover 15 to clean the inside of the limit card slot 2 through the fixing boss 14. It is simple and easy to operate and has good practicality.

[0024] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A flower basket for wafer processing with an adjustment mechanism, comprising two symmetrically arranged mounting plates (1), the inner surfaces of the mounting plates (1) being provided with limit slots (2) at equal distances, a first connecting plate (3) being arranged at the top between the two mounting plates (1), a handle (5) being arranged at the middle of one side edge of the top end surface of the first connecting plate (3), and a second connecting plate (4) being symmetrically arranged at the bottom between the two mounting plates (1), characterized in that: An adjustment component is provided at the connection between the first connecting plate (3) and the second connecting plate (4) and the mounting plate (1); The adjustment component comprises a first through groove (6) symmetrically opened at the top of the side surface of the mounting plate (1), the two ends of the first connecting plate (3) are limitedly engaged in the first through groove (6), the bottom of the side surface of the mounting plate (1) is symmetrically opened with a second through groove (7) for the two ends of the second connecting plate (4) to be engaged, the inner surfaces of the first through groove (6) and the second through groove (7) are both fixed with a limiting plate (10), the top end surface of the first connecting plate (3) and the bottom end surfaces of the two second connecting plates (4) are evenly spaced to form connecting grooves (9) for the limiting plate (10) to be limitedly engaged, the top end surface and the bottom end surface of the mounting plate (1) are both opened with a fixing groove (12), the inside of the fixing groove (12) is opened with a mounting screw hole (13), the inside of the mounting screw hole (13) is screwed with a limiting bolt (11), and one end surface of the limiting bolt (11) is pressed and fitted with the surface of the limiting plate (10).

2. The wafer processing flower basket with an adjustment mechanism according to claim 1, characterized in that: The cross section of the limiting piece (10) is in the shape of an isosceles trapezoid, and the limiting piece (10) is made of metal.

3. The wafer processing flower basket with an adjustment mechanism according to claim 1, characterized in that: The width of the opening of the fixing groove (12) is greater than the diameter of the top end surface of the limiting bolt (11), and the top end surface of the limiting bolt (11) is not higher than the horizontal plane at which the opening of the fixing groove (12) is located.

4. The wafer processing flower basket with an adjustment mechanism according to claim 1, characterized in that: A cleaning assembly is provided at the edge of the inner surface of the mounting plate (1), and the cleaning assembly comprises a fixing plate (8) provided at the edge of the inner surface of the mounting plate (1), fixing bosses (14) are fixed at equal distances on the inner surface of the fixing plate (8), the fixing bosses (14) are limitedly engaged to the inner side of the limiting slot (2), the outer cover of the fixing boss (14) is provided with a sponge cover (15), and the surface of the sponge cover (15) is in close contact with the inner surface of the limiting slot (2).

5. The wafer processing flower basket with an adjustment mechanism according to claim 4, characterized in that: Limiting magnetic blocks (16) are symmetrically mounted on the bottoms of both ends of the mounting plate (1), and the two ends of the fixing plate (8) are limit-engaged with the limiting magnetic blocks (16).

6. The wafer processing flower basket with an adjustment mechanism according to claim 4, characterized in that: One end surface of the sponge sleeve (15) is provided with a double-sided adhesive tape, and one end surface of the sponge sleeve (15) is bonded and connected to the surface of the fixing plate (8).

7. The wafer processing flower basket with an adjustment mechanism according to claim 5, characterized in that: The longitudinal section of the limiting magnetic block (16) is L-shaped, and the fixing plate (8) is made of metal.

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