Device for measuring boundary dimension of monocrystalline silicon round rod

Abstract

The utility model relates to the technical field of monocrystalline silicon measurement, and discloses a monocrystalline silicon round rod boundary dimension measuring device, which comprises a rack, a supporting plate and a supporting assembly, the supporting assembly comprises supporting rods, carrier rollers and a sliding block, the top surface of the supporting plate is provided with two supporting rods, one side of each supporting rod is rotatably connected with the same carrier roller, and the sliding block is arranged on the supporting plate. Same sliding blocks are arranged at the bottoms of the supporting rods, the supporting rods are elastically connected with the sliding blocks, the sliding blocks can slide along the supporting plate, lead screws are arranged on the wall face of the supporting plate and used for driving the sliding blocks to move, the sliding blocks are stirred to slide in the sliding grooves through rotation of the lead screws, the distance between the two supporting rods is adjusted, and then the distance between the two carrier rollers is adjusted. The silicon rod limiting device can be flexibly adjusted according to the diameter of a silicon rod, the limiting adaptability to the silicon rods with different diameters is better, the application range is wider, the tangent point position of the silicon rod and the carrier rollers and the shielded position of the silicon rod can be adjusted by adjusting the distance between the two carrier rollers, and then data detection is achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal silicon measurement, in particular to a single crystal silicon round rod external dimension measuring device. Background Art

[0002] The inspection of single crystal silicon rods is an important step in inspecting the quality of single crystal silicon rods. The inspection contents mainly include weight inspection, diameter inspection, length inspection, slope inspection, conductivity type, resistivity, and appearance inspection. In the prior art, electronic equipment is used in conjunction with sensors to achieve multiple inspections.

[0003] The prior art discloses a device for measuring the length and slope of a single crystal silicon rod automatic detection line (publication number: CN207231406U), which includes a support frame, a centering and slope measurement component, and a length measurement component; the centering and slope measurement component moves the single crystal silicon rod to the center of the width position of the device, and uses a tilt sensor to measure the slope of the end face of the single crystal silicon rod while centering, and then the length measurement component measures the length of the crystal rod through laser irradiation.

[0004] In the prior art, the silicon rod is supported by two columnar rollers, the silicon rod is tangent to the rollers, and the position of the rollers is fixed. Therefore, the position of the tangent point between the silicon rod and the rollers is relatively fixed, and it is difficult to adjust the position of the tangent point to adjust the position of the silicon rod to be detected. At the same time, the fixed position rollers have certain restrictions on the size of the silicon rod. If it is too large or too small, it will be affected by the fixed spacing of the rollers. The limitation is large and there is a certain room for optimization.

[0005] Therefore, we propose a device for measuring the dimensions of a single crystal silicon round rod. Utility Model Content

[0006] The utility model mainly solves the technical problem that the fixation of the silicon rod is relatively limited and it is difficult to adjust the fixation position of the silicon rod, and provides a device for measuring the external dimensions of a single crystal silicon round rod.

[0007] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme, a device for measuring the external dimensions of a single crystal silicon round rod, comprising:

[0008] A frame structure having supporting legs, a supporting plate fixedly mounted on one side of the frame, a conveyor belt mounted on one side of the supporting plate, a truss mounted on the top of the frame, and a detection assembly mounted on the output end of the truss;

[0009] A support plate is slidably connected to the support plate and is used to push the silicon rods through the transmission of the conveyor belt;

[0010] A support assembly is arranged on the top of a support plate and is used to support silicon rods. The support assembly includes a support rod, a roller and a sliding block. Two support rods are arranged on the top surface of the support plate. One side of each support rod is rotatably connected to the same roller. The two rollers jointly support the silicon rod. The bottom of each support rod is provided with the same sliding block. The support rod is elastically connected to the sliding block. The sliding block can slide along the support plate. A screw is provided on the wall surface of the support plate to drive the sliding block to move. The two support rods can be brought closer to each other to adjust the spacing between the rollers.

[0011] As a preferred embodiment of the present invention, the sliding block forms a trapezoidal block structure, and two sliding grooves are provided on the top surface of the support plate. The sliding block is adapted to the sliding grooves and is slidably connected with the sliding grooves.

[0012] As a preferred embodiment of the utility model, a through hole is formed on the wall surface of the sliding block, a thread sleeve is fixedly installed in the through hole, the threaded rod is threadedly connected to the thread sleeve, and the end of the threaded rod is rotatably connected to the support plate.

[0013] As a preferred embodiment of the present invention, the support rod forms a U-shaped rod structure, and the two ends of the roller are rotatably connected to the two side walls of the support rod respectively.

[0014] As a preferred embodiment of the utility model, the support assembly also includes an adjustment block and a limiting channel. The limiting channel is opened on the top of the sliding block, the adjustment block is located in the limiting channel, the support rod is fixedly connected to the adjustment block, and an elastic member is provided in the limiting channel for pushing the adjustment block.

[0015] As a preferred embodiment of the present invention, the adjusting block forms a block structure adapted to the limiting channel, the adjusting block is slidably connected to the limiting channel, and the top of the adjusting block is fixedly connected to the bottom end of the support rod.

[0016] As a preferred embodiment of the present invention, the length of the adjusting block is smaller than the length of the limiting channel, and the same elastic members are arranged on both sides of the adjusting block, and the elastic members include springs but are not limited to springs. Beneficial Effects

[0017] The utility model provides a device for measuring the external dimensions of a single crystal silicon round rod. It has the following beneficial effects:

[0018] 1. A device for measuring the external dimensions of a single crystal silicon round rod, by rotating a lead screw to move a sliding block in a slide groove, adjusts the spacing between two support rods, and then adjusts the spacing between two rollers. It can be flexibly adjusted according to the diameter of the silicon rod, has better limit adaptability for silicon rods of different diameters, and has a wider range of applications. At the same time, by adjusting the spacing between the two rollers, it is possible to adjust the tangent point position of the silicon rod and the roller, and adjust the position where the silicon rod is blocked, and then use it for data detection.

[0019] 2. A device for measuring the external dimensions of a single crystal silicon round rod. When a silicon rod falls between two rollers, the gravity of the silicon rod will push the two rollers to drive the support rod to move in the opposite direction. The support rod drives the adjustment block to slide in the limiting channel and squeeze the elastic part to deform. The horizontal sliding of the roller can buffer the impact of the silicon rod falling on the roller, which has the function of protecting the silicon rod. Two sliding blocks are symmetrically arranged at the bottom of each support rod, and the same adjustment block is arranged on the top of each sliding block, so that the support rod can be tilted at a certain angle on the top of the support plate. The two ends of the two support rods are adjusted separately, so that the two rollers can be distributed in an inner eight or outer eight, and can be used to limit tapered silicon rods. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is one of the overall three-dimensional diagrams of the utility model;

[0021] Figure 2 It is the second overall three-dimensional structure of the utility model;

[0022] Figure 3 This is a schematic diagram of the support assembly for mounting the pallet of the utility model;

[0023] Figure 4 This is a schematic diagram of the installation of the support rod and the sliding block of the utility model;

[0024] Figure 5 This is a schematic diagram of the installation of the adjusting block and the sliding block of the utility model.

[0025] Legend: 10, frame; 11, support plate; 12, support rod; 13, roller; 20, sliding block; 21, adjusting block; 22, limit channel. DETAILED DESCRIPTION

[0026] A device for measuring the external dimensions of a single crystal silicon round rod, such as Figure 1 and Figure 2 As shown, including:

[0027] The frame 10 has a frame structure of supporting legs, a supporting plate is fixedly installed on one side of the frame 10, a conveyor belt is installed on one side of the supporting plate, a truss is installed on the top of the frame 10, and a detection component is installed on the output end of the truss, wherein the detection component includes a tilt sensor and a laser ranging sensor. Specifically, the truss is a three-axis truss, which is used to push the detection component in the horizontal, longitudinal and vertical directions. The tilt sensor and the laser ranging sensor are existing well-known technologies, which are disclosed in detail in (Publication No.: CN207231406U), and will not be repeated here;

[0028] like Figure 2 and Figure 3As shown, the support plate 11 is slidably connected with the support plate and is used to push the silicon rods through the transmission of the conveyor belt. The support plate 11 is a rectangular plate structure. A guide rail is fixedly installed on the top of the support plate. The support plate 11 is slidably connected with the guide rail. The wall surface of the conveyor belt is provided with a tooth opening. The bottom surface of the support plate 11 is provided with teeth. The teeth are rectangular and mesh with the tooth opening. The conveyor belt pushes the support plate 11 to slide linearly along the guide rail for loading and discharging.

[0029] like Figure 3 and Figure 4 As shown, a support assembly is arranged on the top of a support plate 11 and is used to support silicon rods. The support assembly includes a support rod 12, a roller 13 and a sliding block 20. Two support rods 12 are arranged on the top surface of the support plate 11. One side of each support rod 12 is rotatably connected to the same roller 13. The two rollers 13 jointly support the silicon rod. The bottom of each support rod 12 is provided with the same sliding block 20. The support rod 12 is elastically connected to the sliding block 20. The sliding block 20 can slide along the support plate 11. A screw is arranged on the wall surface of the support plate 11 to drive the sliding block 20 to move. The two support rods 12 can approach each other to adjust the spacing between the rollers 13. The sliding block 20 forms a trapezoidal block structure. Two slide grooves are provided on the top surface of the support plate 11. The sliding block 20 is adapted to the slide grooves and is slidably connected to the slide grooves. A through hole is provided on the wall surface of the sliding block 20. A threaded sleeve is fixedly installed in the through hole. The screw is threadedly connected to the threaded sleeve. The support plate 11 is rotatably connected to the support rod 12, and the support rod 12 forms a U-shaped rod body structure. The two ends of the roller 13 are rotatably connected to the two side walls of the support rod 12 respectively. Specifically, the roller 13 is a cylindrical structure, and the end of the roller 13 is provided with an integral cylindrical protrusion. The side wall of the support rod 12 is fixedly installed with a shaft sleeve, and the protrusion is rotatably connected to the shaft sleeve. The screw rod is a bidirectional screw rod, and a motor can be installed on the wall of the support plate 11 to drive the screw rod to rotate, or the screw rod can be manually rotated. The sliding block 20 is driven to slide in the slide groove by rotating the screw rod to adjust the spacing between the two support rods 12, and then the spacing between the two rollers 13 can be adjusted, and can be flexibly adjusted according to the diameter of the silicon rod. It has better limit adaptability for silicon rods of different diameters and a wider range of applications. At the same time, by adjusting the spacing between the two rollers 13, the tangent point position of the silicon rod and the roller 13 can be adjusted, and the position where the silicon rod is blocked can be adjusted, and then used for data detection.

[0030] like Figure 4 and Figure 5As shown, the support assembly also includes an adjusting block 21 and a limiting channel 22. The limiting channel 22 is provided on the top of the sliding block 20. The adjusting block 21 is located in the limiting channel 22. The support rod 12 is fixedly connected to the adjusting block 21. An elastic member is provided in the limiting channel 22 for pushing the adjusting block 21. The adjusting block 21 forms a block structure adapted to the limiting channel 22. The adjusting block 21 is slidably connected to the limiting channel 22. The top of the adjusting block 21 is fixedly connected to the bottom end of the support rod 12. The length of the adjusting block 21 is less than the length of the limiting channel 22. The same elastic members are provided on both sides of the adjusting block 21. The elastic members include but are not limited to springs. By providing the adjusting block 21, the adjusting block 21 is supported by the elastic member. The elastic member includes but is not limited to a spring. When the silicon rod falls between the two rollers 13, The gravity of the silicon rod will push the two rollers 13 to drive the support rod 12 to move in the opposite direction. The support rod 12 drives the adjusting block 21 to slide in the limiting channel 22 and squeeze the elastic member to deform. The elastic member takes a spring as an example. The two ends of the spring are fixedly connected to the adjusting block 21 and the inner wall of the sliding block 20 respectively. The horizontal sliding of the roller 13 can buffer the impact of the silicon rod falling on the roller 13, which has the function of protecting the silicon rod. Two sliding blocks 20 are symmetrically arranged at the bottom of each support rod 12, and the same adjusting block 21 is arranged on the top of each sliding block 20, so that the support rod 12 can be tilted at a certain angle on the top of the support plate 11. The two ends of the two support rods 12 are adjusted separately, so that the two rollers 13 can be distributed in an inner eight or outer eight, which can be used to limit the tapered silicon rods.

[0031] The working principle of the utility model is as follows: the screw rod rotates to drive the sliding block 20 to slide in the slide groove, thereby adjusting the spacing between the two support rods 12, and then the spacing between the two rollers 13 can be adjusted. When the silicon rod falls between the two rollers 13, the gravity of the silicon rod will push the two rollers 13 to drive the support rod 12 to move in the opposite direction, and the support rod 12 drives the adjusting block 21 to slide in the limiting channel 22 and squeeze the elastic member to deform. Through the horizontal sliding of the roller 13, the impact of the silicon rod falling on the roller 13 can be buffered, and two sliding blocks 20 are symmetrically arranged at the bottom of each support rod 12, and the same adjusting block 21 is arranged on the top of each sliding block 20, so that the support rod 12 can be tilted at a certain angle on the top of the support plate 11. The two ends of the two support rods 12 are adjusted separately, so that the two rollers 13 can be distributed in an inner eight or outer eight, which can be used to limit the silicon rod with a taper.

[0032] The above shows and describes the basic principle and main features of the utility model and the advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments. The above embodiments and descriptions are only for explaining the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, which fall within the scope of the utility model to be protected. The scope of protection of the utility model is defined by the attached claims and their equivalents.

Claims

1. A device for measuring the external dimensions of a single crystal silicon round rod, characterized in that: include: A frame (10) having a frame structure with supporting legs, a supporting plate fixedly mounted on one side of the frame (10), a conveyor belt mounted on one side of the supporting plate, a truss mounted on the top of the frame (10), and a detection assembly mounted on the output end of the truss; A support plate (11) is slidably connected to the support plate and is used to push the silicon rods through the transmission of the conveyor belt; A support assembly is arranged on the top of a support plate (11) and is used to support a silicon rod. The support assembly comprises a support rod (12), a roller (13) and a sliding block (20). Two support rods (12) are arranged on the top surface of the support plate (11). One side of each support rod (12) is rotatably connected to the same roller (13). The two rollers (13) jointly support the silicon rod. The bottom of each support rod (12) is provided with the same sliding block (20). The support rod (12) is elastically connected to the sliding block (20). The sliding block (20) can slide along the support plate (11). A screw is arranged on the wall surface of the support plate (11) for driving the sliding block (20) to move. The two support rods (12) can be moved closer to each other to adjust the spacing between the rollers (13).

2. The device for measuring the external dimensions of a single crystal silicon rod according to claim 1, characterized in that: The sliding block (20) forms a trapezoidal block structure, and two sliding grooves are provided on the top surface of the support plate (11). The sliding block (20) is adapted to the sliding grooves and is slidably connected to the sliding grooves.

3. The device for measuring the external dimensions of a single crystal silicon round rod according to claim 1, characterized in that: A through hole is formed on the wall surface of the sliding block (20), a threaded sleeve is fixedly installed in the through hole, the threaded rod is threadedly connected to the threaded sleeve, and the end of the threaded rod is rotatably connected to the support plate (11).

4. The device for measuring the external dimensions of a single crystal silicon rod according to claim 1, characterized in that: The support rod (12) forms a U-shaped rod body structure, and the two ends of the roller (13) are rotatably connected to the two side walls of the support rod (12) respectively.

5. The device for measuring the external dimensions of a single crystal silicon round rod according to claim 1, characterized in that: The support assembly further comprises an adjusting block (21) and a limiting channel (22); the limiting channel (22) is provided on the top of the sliding block (20); the adjusting block (21) is located in the limiting channel (22); the support rod (12) is fixedly connected to the adjusting block (21); and an elastic member is provided in the limiting channel (22) for pushing the adjusting block (21).

6. The device for measuring the external dimensions of a single crystal silicon round rod according to claim 5, characterized in that: The adjusting block (21) forms a block structure adapted to the limiting channel (22); the adjusting block (21) is slidably connected to the limiting channel (22); and the top of the adjusting block (21) is fixedly connected to the bottom end of the support rod (12).

7. The device for measuring the external dimensions of a single crystal silicon round rod according to claim 5, characterized in that: The length of the adjustment block (21) is smaller than the length of the limiting channel (22), and the same elastic members are arranged on both sides of the adjustment block (21), and the elastic members include springs but are not limited to springs.

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