Transparent material defect detection device
By designing a transparent material defect detection device including a light source, an optical module, a projection screen and an image acquisition member, the problem of the inability to detect subtle defects in the prior art is solved, and high-precision detection of transparent material is achieved.
Patent Information
- Application Number
- CN202420942140.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-30
- Publication Date
- 2025-02-18
- Estimated Expiration
- 2034-04-30
AI Technical Summary
The prior art cannot detect subtle defects on the surface of transparent materials, resulting in low detection accuracy.
A transparent material defect detection device is designed, including a support platform, a light source, an optical module, a projection screen and an image acquisition component. The light emitted by the light source is optimized by the optical module and illuminates on the material, and a projection pattern is formed on the projection screen. The image collector collects and analyzes the projection pattern to detect defects.
By analyzing the projection pattern of the material, subtle defects on the material can be detected, improving the detection accuracy of transparent materials, and avoiding the camera overexposure caused by excessive light.
Smart Images
Figure CN222506187U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of defect detection, in particular to a transparent material defect detection device. Background Art
[0002] At present, surface defects of transparent materials (such as glass, semiconductor wafers, etc.) are mostly detected by direct observation using 2D optical imaging. The specific detection principle is: incident light is projected onto the surface of the material through a light source, and the reflected light from the surface of the material is received by a camera and scanned into an image to obtain map information of surface defects of the material.
[0003] Since direct observation of transmission optics can only form image contrast by blocking the incident light on the surface of large particle defects, the contrast of subtle surface defects will be reduced when passing through the camera module lens, resulting in the inability of existing detection methods to detect subtle defects on the material surface, and its detection accuracy is low. Utility Model Content
[0004] The utility model aims to provide a transparent material defect detection device to solve the technical problem that the prior art cannot detect minute defects on the surface of the material and has low detection accuracy.
[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:
[0006] A transparent material defect detection device comprises a support platform, a light source, an optical module, a projection screen and an image acquisition component, wherein:
[0007] The supporting platform is used to carry the material to be tested;
[0008] The optical module is arranged at the light-emitting end of the light source and is used to optimize the light;
[0009] The light emitted by the light source is irradiated onto the material through the optical module, and forms a projection pattern on the projection screen;
[0010] The image acquisition component is arranged opposite to the projection screen and is used for acquiring the projection image on the projection screen.
[0011] Furthermore, it also includes a polarizer, which is arranged between the light source and the supporting platform;
[0012] And / or, it also includes a polarizer, which is arranged between the image acquisition component and the projection screen.
[0013] Furthermore, a clamping assembly for fixing the material is provided on the supporting platform.
[0014] Furthermore, the clamping assembly comprises a plurality of clamping jaws for clamping materials, and an elastic pad is arranged between each of the clamping jaws and the material.
[0015] Furthermore, the light source is a surface light source;
[0016] The light source is arranged opposite to the supporting platform, and the light source and the projection screen are arranged at opposite ends of the supporting platform respectively.
[0017] Furthermore, the optical module includes a telecentric lens group.
[0018] Furthermore, the light source is a point light source.
[0019] Furthermore, the optical module includes a light homogenizing sheet.
[0020] Furthermore, the light emitted by the light source forms an acute angle with the material.
[0021] Furthermore, the angle between the light emitted by the light source and the material ranges from 30° to 60°.
[0022] Beneficial effects of the utility model:
[0023] The utility model provides a transparent material defect detection device, comprising a support platform, a light source, an optical module, a projection screen and an image acquisition component, wherein: the support platform is used to carry the material to be detected; the optical module is arranged at the light-emitting end of the light source, and is used to optimize the light; the light emitted by the light source is irradiated onto the material through the optical module, and forms a projection pattern on the projection screen; the image acquisition component is arranged relative to the projection screen, and is used to acquire the projection pattern on the projection screen.
[0024] This application adopts a detection method of analyzing the projection pattern of the material, avoiding the problem of overexposure of the camera orientation caused by too strong light; and the optical module can optimize the passing light to form a clear projection pattern on the projection screen; by identifying and analyzing the projection pattern, it can detect subtle defects on the material, thereby improving the detection accuracy of transparent materials. BRIEF DESCRIPTION OF THE DRAWINGS
[0025] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.
[0026] Figure 1 This is a schematic diagram of the structure of a transparent material defect detection device provided in Example 1 of the utility model;
[0027] Figure 2 A schematic diagram of the structure of a support platform in a transparent material defect detection device provided in Embodiment 1 of the utility model;
[0028] Figure 3 This is a schematic diagram of the structure of a transparent material defect detection device provided in Example 2 of the utility model.
[0029] icon:
[0030] 100-materials;
[0031] 1-support platform; 11-clamping claw; 12-elastic pad; 13-carrying plate; 2-light source; 3-optical module; 4-projection screen; 5-image acquisition component; 6-polarizer; 7-analyzer. DETAILED DESCRIPTION
[0032] The technical solution of the utility model will be clearly and completely described below in conjunction with the embodiments. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0033] It should be noted that in the description of the present invention, the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.
[0034] It should be noted that in the description of the present invention, the terms "connection" and "installation" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected or connected through an intermediate medium; it can be a mechanical connection or an electrical connection. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0035] Embodiment 1
[0036] In the existing method of inspecting the transparent material 100 by observing the reflected or diffused light of the light source, the reflected light is easy to cause interference, and the diffused light is too weak, so only defects at specific angles can be observed, and subtle defects cannot be detected.
[0037] Based on this, the first embodiment of the present invention provides a transparent material defect detection device, referring to Figure 1 The device comprises a supporting platform 1, a light source 2, an optical module 3, a projection screen 4 and an image acquisition component 5, wherein:
[0038] The supporting platform 1 is used to carry the material 100 to be inspected;
[0039] The optical module 3 is arranged at the light-emitting end of the light source 2 to optimize the light;
[0040] The light emitted by the light source 2 is irradiated onto the material 100 through the optical module 3 and forms a projection pattern on the projection screen 4;
[0041] The image acquisition component 5 is arranged opposite to the projection screen 4 and is used for acquiring the projection image on the projection screen 4 .
[0042] The above-mentioned device is used to detect defects in transparent materials 100, and its operating principle is: the light emitted by the light source 2 is irradiated onto the material 100 through the optical module 3, and a projection pattern is formed on the projection screen 4. When the transmitted light passes through the defects on the material 100, it will affect the imaging of the original transmitted light, and finally be superimposed and presented on the projection screen 4; the optical module 3 can optimize the passing light and improve the clarity of the projection pattern; the image acquisition component 5 can be a camera, which can capture the projection pattern on the projection screen 4. By analyzing the image captured by the image acquisition component 5, it can be detected whether there are defects on the surface of the material.
[0043] The present application adopts a detection method of analyzing the projection pattern of the material 100, thereby avoiding the problem of overexposure of the camera orientation caused by too strong light; and the optical module 3 can optimize the passing light, thereby forming a clear projection pattern on the projection screen 4; by identifying and analyzing the projection pattern, it is possible to detect subtle defects on the material 100, thereby improving the detection accuracy of the transparent material 100.
[0044] In this embodiment, the light source 2 is a surface light source; the light source 2 is arranged opposite to the supporting platform 1, and the light source 2 and the projection screen 4 are arranged at opposite ends of the supporting platform 1, respectively.
[0045] Furthermore, the optical module 3 includes a telecentric lens group. Specifically, the light source 2, the telecentric lens group, the support platform 1, the projection screen 4 and the image acquisition component 5 are arranged in sequence along the direction of the light emitted by the light source 2. When working, the light emitted by the surface light source vertically penetrates the material 100 on the support platform 1 through the telecentric lens group to form a projection light, and the projection light is directly imaged on the projection screen 4; the image acquisition component 5 captures the projection pattern on the projection screen 4, and the defect detection result on the material 100 is obtained by analyzing the image captured by the image acquisition component 5.
[0046] Continue to refer to Figure 1 , the defect detection device further includes a polarizer 6, which is arranged between the light source 2 and the supporting platform 1;
[0047] And / or, it also includes a polarizer 7, which is arranged between the image acquisition component 5 and the projection screen 4.
[0048] In the above structure, the light emitted by the light source 2 becomes linear polarized light with a vibration direction consistent with the polarization direction of the polarizer 6 after passing through the polarizer 6. The analyzer 7 is used to allow light with a specific vibration direction to pass through. Specifically, when the vibration direction of the linear polarized light formed by the polarizer 6 is parallel to the vibration direction of the analyzer 7, it can pass through completely; if it is not parallel or perpendicular, it can pass through partially or not at all. The polarizer 6 and the analyzer 7 can screen the light, thereby strengthening the defects on the material 100, which is convenient for subsequent identification and analysis.
[0049] In this embodiment, the light source 2, the optical module 3, the polarizer 6, the supporting platform 1, the projection screen 4, the analyzer 7 and the image acquisition component 5 are arranged in sequence.
[0050] Reference Figure 2 A clamping assembly for fixing the material 100 is provided on the support platform 1. The clamping assembly is used to limit the position of the material 100 to prevent the material 100 from shifting during the detection process and affecting the detection result.
[0051] Specifically, the support platform 1 includes a supporting plate 13, and the clamping assembly is installed on the supporting plate 13; the clamping assembly includes a plurality of clamping jaws 11 for clamping the material 100, and the plurality of clamping jaws 11 are arranged around the periphery of the material 100 on the supporting plate 13 for centering the material 100.
[0052] In this embodiment, the supporting plate 13 includes two supporting parts arranged at intervals, and a clamping claw 11 is respectively installed at both ends of each supporting part; the outer edge of the material 100 is overlapped on the two supporting parts; the four clamping claws 11 respectively clamp and fix the four positions around the material 100, thereby fixing the material 100 on the supporting platform 1.
[0053] In other embodiments, the material 100 may be suspended and fixed by a plurality of clamps 11 to prevent the support plate 13 from obstructing the passage of light, thereby enabling defect detection at the edge of the material 100 .
[0054] In this embodiment, an elastic pad 12 is provided between each clamping jaw 11 and the material 100; the provision of the elastic pad 12 can avoid damaging the material 100 on the one hand, and can increase the friction between the clamping jaw 11 and the material 100 on the other hand, further preventing the displacement of the material 100. The shape of the elastic pad 12 is adapted to the shape of the outer edge of the material 100, so that the outer edge of the material 100 can fit tightly with the elastic pad 12.
[0055] Furthermore, each clamping jaw 11 is provided with a fixed long hole. When placing the material 100, one end of the bolt is passed through the fixed long hole and screwed on the bearing plate 13, so that the clamping jaw 11 is installed on the bearing plate 13; the position of each clamping jaw 11 can be adjusted through the fixed long hole, so that the material 100 is clamped between multiple clamping jaws 11, and the centering limit of the material 100 is achieved.
[0056] In the above structure, due to the provision of the fixed long holes, the support platform 1 can be suitable for materials 100 of different sizes.
[0057] In other embodiments, each clamp 11 may be configured to be controlled to move by a driving source such as a cylinder or a motor; a plurality of clamps 11 may be driven by the driving source to move closer or farther synchronously to clamp or release the material 100 together.
[0058] Embodiment 2
[0059] The second embodiment of the present invention provides a transparent material defect detection device, which is different from the device provided in the first embodiment mainly in that the form of the light source 2 is different.
[0060] Reference Figure 3 In this embodiment, the light source 2 is a point light source, and the optical module 3 includes a light homogenizer. When working, the light emitted by the point light source passes through the light homogenizer to form a relatively uniformly distributed light, thereby forming a clear projection image on the projection screen 4.
[0061] Further, the light emitted by the light source 2 forms an acute angle with the material 100. Optionally, the angle between the light emitted by the light source 2 and the material 100 ranges from 30° to 60°, for example, the angle between the light emitted by the light source 2 and the material 100 can be 30°, 40°, 50° or 60°.
[0062] Specifically, the projection screen 4 and the image acquisition component 5 are arranged opposite to each other, and the support platform 1 and the light source 2 are arranged on one side of the projection screen 4 and the image acquisition component 5 to avoid interfering with the shooting of the image acquisition component 5. The light source 2, the optical module 3 (light homogenizer), the polarizer 6, the support platform 1 and the projection screen 4 are arranged in sequence along the direction of the light emitted by the light source 2, so that the light emitted by the light source 2 passes through the optical module 3 (light homogenizer), the polarizer 6 and the material 100 in sequence and is projected onto the projection screen 4.
[0063] Since an acute angle is formed between the incident light and the material 100 , an enlarged projection image of the material 100 can be formed on the projection screen 4 ; accordingly, minute defects on the surface of the material 100 are also magnified, thereby facilitating subsequent identification and analysis of the defects.
[0064] The rest of the structure of this embodiment is the same as that of the first embodiment and will not be described again.
[0065] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, ordinary technicians in this field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not make the essence of the corresponding technical solution deviate from the scope of the technical solution of the embodiments of the utility model.
Claims
1. A transparent material defect detection device, characterized in that: It comprises a supporting platform (1), a light source (2), an optical module (3), a projection screen (4) and an image acquisition component (5), wherein: The support platform (1) is used to carry the material (100) to be tested; The optical module (3) is arranged at the light-emitting end of the light source (2) and is used to optimize the light; The light emitted by the light source (2) is irradiated onto the material (100) through the optical module (3), and forms a projection pattern on the projection screen (4); The image acquisition component (5) is arranged opposite to the projection screen (4) and is used to acquire the projection image on the projection screen (4).
2. The transparent material defect detection device according to claim 1, characterized in that: It also comprises a polarizer (6), wherein the polarizer (6) is arranged between the light source (2) and the supporting platform (1); And / or, it further comprises a polarizer (7), wherein the polarizer (7) is arranged between the image acquisition component (5) and the projection screen (4).
3. The transparent material defect detection device according to claim 1, characterized in that: The support platform (1) is provided with a clamping assembly for fixing the material (100).
4. The transparent material defect detection device according to claim 3, characterized in that: The clamping assembly comprises a plurality of clamping jaws (11) for clamping a material (100), and an elastic pad (12) is arranged between each of the clamping jaws (11) and the material (100).
5. The transparent material defect detection device according to any one of claims 1 to 4, characterized in that: The light source (2) is a surface light source; The light source (2) is arranged opposite to the supporting platform (1), and the light source (2) and the projection screen (4) are respectively arranged at opposite ends of the supporting platform (1).
6. The transparent material defect detection device according to claim 5, characterized in that: The optical module (3) comprises a telecentric lens group.
7. The transparent material defect detection device according to any one of claims 1 to 4, characterized in that: The light source (2) is a point light source.
8. The transparent material defect detection device according to claim 7, characterized in that: The optical module (3) comprises a light homogenizing sheet.
9. The transparent material defect detection device according to claim 7, characterized in that: The light emitted by the light source (2) forms an acute angle with the material (100).
10. The transparent material defect detection device according to claim 9, characterized in that: The angle between the light emitted by the light source (2) and the material (100) is in the range of 30° to 60°.