Storage tool for wafer box cleaning bracket

Abstract

The storage tool for the wafer box cleaning bracket comprises a three-dimensional frame, a plurality of storage layers are sequentially arranged on the three-dimensional frame from bottom to top, the storage layer at the bottommost end is higher than the ground, and a storage structure which is higher than the ground for storage and guarantees cleaning and cleanliness is formed. Each storage layer comprises a rolling storage part, and different storage layers correspond to storage of different types of film boxes, so that a universal layer classification storage structure is formed.

Description

Technical Field

[0001] The utility model relates to semiconductor preparation technology and use equipment, in particular to a chip box cleaning bracket storage tool. Background Art

[0002] In the field of silicon wafer preparation technology, since the types of wafer boxes loaded by the corresponding products are different, and the wafer box cleaning carriers and wafer box cleaning brackets corresponding to different wafer boxes have different structures, when determining which wafer box needs to be cleaned, it is necessary to load the corresponding wafer box carrier and wafer box cleaning bracket. Therefore, at this stage, a wafer box cleaning machine is equipped with multiple sets of wafer box cleaning brackets; and the wafer boxes have high requirements for cleanliness. In this case, the carriers that cannot be uploaded to the equipment need to be placed on the ground, which can neither effectively utilize the on-site space nor guarantee the particle situation of the cleaning wafer boxes.

[0003] Therefore, it is necessary to provide a film box cleaning bracket storage tool to solve the above problems. Utility Model Content

[0004] The utility model aims to provide a large film box cleaning bracket storage tool.

[0005] The technical solution is as follows:

[0006] A film box cleaning bracket storage tool comprises a three-dimensional frame, on which a plurality of storage layers are arranged in sequence from bottom to top, and the bottom storage layer is higher than the ground, forming a storage structure that is higher than the ground and ensures cleaning and cleanliness;

[0007] Each storage layer includes a rolling storage part, and different storage layers are corresponding to the storage of film boxes of different types, forming a universal layer classification storage structure.

[0008] Furthermore, each storage layer is correspondingly provided with storage model information.

[0009] Furthermore, the rolling storage portion is composed of a plurality of rolling bodies that are evenly arranged.

[0010] Furthermore, the rolling body is a roller.

[0011] Furthermore, the roller is coated with a protective coating.

[0012] Furthermore, casters are arranged at the bottom of the three-dimensional frame.

[0013] Furthermore, a film box entrance is provided on the three-dimensional frame corresponding to each storage layer.

[0014] Furthermore, the three-dimensional frame is also provided with side guard bars corresponding to each storage layer, which are used as guardrails to prevent the film boxes from slipping out.

[0015] Furthermore, the number of storage layers is at least 4.

[0016] Compared with the prior art, the utility model can realize the layer classification storage of film boxes of multiple specifications, and reduce the waste of production resources caused by the setting of multiple storage racks. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a structural schematic diagram of the utility model. DETAILED DESCRIPTION

[0018] Example:

[0019] See also Figure 1 This embodiment shows a film box cleaning bracket storage tool, including a three-dimensional frame 1, on which a plurality of storage layers 2 are arranged in sequence from bottom to top, and the bottom storage layer 2 is higher than the ground, forming a storage structure that is higher than the ground and ensures cleaning and cleanliness;

[0020] Each storage layer 2 includes a rolling storage portion 21, and different storage layers 2 are corresponding to the storage of film boxes of different types, forming a universal layer classification storage structure.

[0021] Each storage layer 2 is correspondingly provided with storage model information.

[0022] The rolling storage portion 21 is composed of a plurality of rolling bodies 20 that are evenly arranged.

[0023] The rolling element 20 is a roller.

[0024] The rollers are coated with a protective coating.

[0025] Casters 3 are provided at the bottom of the three-dimensional frame 1 .

[0026] A film box entrance 4 is provided on the three-dimensional frame 1 corresponding to each storage layer.

[0027] The three-dimensional frame 1 is also provided with side guard bars 5 corresponding to each storage layer, which are used as guardrails to prevent the film boxes from slipping out.

[0028] The number of storage layers 2 is at least 4.

[0029] Compared with the prior art, the utility model can realize the layer classification storage of film boxes of multiple specifications, and reduce the waste of production resources caused by the setting of multiple storage racks.

[0030] The above are only some embodiments of the present invention. For those skilled in the art, several modifications and improvements can be made without departing from the inventive concept of the present invention, which all belong to the protection scope of the present invention.

Claims

1. A film box cleaning bracket storage tool, characterized in that: It comprises a three-dimensional frame, on which a plurality of storage layers are arranged in sequence from bottom to top, and the storage layer at the bottom is higher than the ground, forming a storage structure that is higher than the ground and ensures cleaning and cleanliness; Each storage layer includes a rolling storage part, and different storage layers correspond to the storage of different types of film boxes, forming a universal layer classification storage structure; Each storage layer is labeled with storage model information; The rolling storage part is composed of a number of rolling bodies arranged evenly; The rolling element is a roller; A film box entrance is provided on the three-dimensional rack corresponding to each storage layer; The three-dimensional frame is also provided with side guard bars corresponding to each storage layer, which are used as guardrails to prevent the film boxes from slipping out.

2. A film box cleaning bracket storage tool according to claim 1, characterized in that: The rollers are coated with a protective coating.

3. A film box cleaning bracket storage tool according to claim 1 or 2, characterized in that: Casters are arranged at the bottom of the three-dimensional frame.

4. A film box cleaning bracket storage tool according to claim 1, characterized in that: The number of storage layers is at least 4.

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