Supporting mechanism and boat pushing device

Abstract

The utility model relates to the technical field of photovoltaic cell manufacturing, and provides a supporting mechanism, a boat pushing device and a supporting mechanism, which are characterized in that the supporting mechanism can be suitable for supporting the bottom of a boat pushing tray, and the supporting mechanism comprises a supporting rod and a rotary driving piece; one end of the supporting rod in the length direction forms a supporting end for supporting the bottom of the boat pushing tray, and the other opposite end is connected with the output end of the rotary driving part; the rotary driving piece can drive the supporting rod to rotate around a first rotating axis, and the first rotating axis is perpendicular to the length direction of the supporting rod; according to the arrangement, when the supporting rod falls down, the occupied space in the height direction is extremely small, the lower-layer space is basically not affected, the layer height can be effectively compressed in multi-layer equipment, and therefore the layer number can be increased, and the productivity can be improved.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaic cell manufacturing, in particular to a supporting mechanism and a boat pushing device. Background Art

[0002] In the ALD coating deposition equipment, the aluminum boat loaded with silicon wafers is placed on the tray of the push boat mechanism, and is sent into the chamber for processing as the push boat moves forward. At the boat exit position and during the boat entry and exit process, a support mechanism with rollers needs to be set at the bottom of the tray to ensure the horizontal movement of the tray and the push boat on it, and when the outer furnace door is about to close, the mechanism needs to be able to avoid interference with the bottom of the outer furnace door.

[0003] In the related art, the mechanism moves up and down under the drive of a cylinder to achieve the purpose of support.

[0004] However, in multi-layer equipment, this structure will greatly encroach on the lower layer space, resulting in low layer height utilization, limited number of layers of multi-layer equipment, and difficulty in further increasing production capacity. Utility Model Content

[0005] The utility model provides a supporting mechanism and a boat pushing device, which are used to solve the defects in the prior art that the supporting mechanism occupies the lower space, resulting in low layer height utilization, limited number of layers of multi-layer equipment, and difficulty in further improving production capacity. The utility model has the advantages of extremely small space occupation in the height direction, and can effectively compress the layer height in the multi-layer equipment, thereby increasing the number of layers and improving production capacity.

[0006] The utility model provides a support mechanism, which can be applied to the bottom support of a push boat tray, and the support mechanism includes:

[0007] Support rods and rotary drive members;

[0008] One end of the support rod along the length direction is formed as a support end for supporting the bottom of the boat pusher tray, and the other opposite end is connected to the output end of the rotary drive member;

[0009] The rotary drive member can drive the support rod to rotate around a first rotation axis, and the first rotation axis is perpendicular to the length direction of the support rod.

[0010] A support mechanism provided by the utility model also includes a self-locking structure for keeping the support rod at a predetermined rotation angle.

[0011] According to a support mechanism provided by the utility model, the rotary drive member includes a turntable, and the turntable can rotate around a second rotation axis;

[0012] The support rod is fixedly connected to the rotating disk, the axis of the support rod is orthogonal to the second rotating axis, and the connection point between the support rod and the rotating disk is misaligned with respect to the second rotating axis;

[0013] The self-locking structure includes a support seat and a connecting rod; the connecting rod is rotatably connected to the support seat, and the end of the connecting rod is fixedly connected to the support rod, and the rotating shaft of the connecting rod is coaxial with the second rotating axis.

[0014] According to a support mechanism provided by the utility model, at least two support rods are arranged along the length direction of the connecting rod, and a plurality of the support rods are connected into a whole through the connecting rod.

[0015] According to a support mechanism provided by the utility model, the rotary drive members are provided with two groups, and the two groups of rotary drive members are respectively connected through a self-locking structure and support rods located at both ends of the connecting rod.

[0016] According to a supporting mechanism provided by the utility model, the supporting rod and the rotating disk are detachably fixedly connected via a first connecting member, and the connecting rod and the supporting rod are detachably connected via a second connecting member.

[0017] According to a supporting mechanism provided by the utility model, the second connecting member includes:

[0018] A connecting block, fixedly connected to the end of the connecting rod, wherein the connecting block is nested in the outer periphery of the supporting rod;

[0019] A jack screw is threadedly connected to the connection block, and an end of the jack screw abuts against a portion of the support rod embedded in the connection block.

[0020] According to a supporting mechanism provided by the utility model, the rotary drive component further includes a rotary cylinder, and the turntable is fixedly connected to the output end of the rotary cylinder.

[0021] According to a support mechanism provided by the utility model, a rolling piece is connected to the support end of the support rod.

[0022] According to a supporting mechanism provided by the utility model, the first connecting member includes a bolt.

[0023] According to a support mechanism provided by the utility model, the connecting rod is connected to the support seat through a bearing.

[0024] A supporting mechanism provided by the utility model also includes a fixing seat fixedly connected to the rotating driving member.

[0025] According to a supporting mechanism provided by the utility model, the rolling element includes a universal ball bearing.

[0026] The utility model also provides a boat pushing device, comprising any one of the supporting mechanisms described above.

[0027] The support mechanism and boat pushing device provided by the utility model fix the entire support mechanism on the bottom plate of the boat pushing base. When the boat pushing tray needs support, the rotating driving member drives the support rod to rotate around the first rotating axis. Since the first rotating axis is perpendicular to the length direction of the support rod, the support end can be lifted up when the support rod rotates to support the bottom of the boat pushing tray; when it is necessary to avoid the space at the bottom of the outer furnace door, the rotating driving member drives the support rod to rotate around the first rotating axis, and the support rod falls to a flat state; with such an arrangement, the support rod occupies very little space in the height direction when falling, and basically does not affect the lower space. In multi-layer equipment, the layer height can be effectively compressed, thereby increasing the number of layers and improving production capacity. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the technical solutions in the present invention or the prior art, a brief introduction will be given below to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0029] Figure 1 It is a structural schematic diagram of a support mechanism provided by an embodiment of the utility model;

[0030] Figure 2 It is a structural schematic diagram of the connection between the rotary drive member, the self-locking structure and the support rod provided by the embodiment of the utility model;

[0031] Figure 3 It is a structural schematic diagram of the connection between the support rod and the connecting rod provided by an embodiment of the utility model.

[0032] Reference numerals:

[0033] 1. Support rod; 10. Rolling member; 2. Rotating drive member; 20. Turntable; 21. Rotating cylinder; 3. Self-locking structure; 30. Support seat; 300. Bearing; 31. Connecting rod; 4. First connecting member; 5. Second connecting member; 50. Connecting block; 51. Top screw; 6. Fixed seat. DETAILED DESCRIPTION

[0034] In order to make the purpose, technical solution and advantages of the utility model clearer, the technical solution of the utility model will be described clearly and completely in conjunction with the drawings in the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0035] In order to facilitate the understanding of the support mechanism and the boat pusher device provided by the utility model, its application background is first explained. In the ALD coating deposition equipment, an aluminum boat loaded with silicon wafers is placed on the tray of the boat pusher mechanism and is sent into the cavity with the feeding movement of the boat pusher mechanism. At the boat exit position and during the movement in and out of the boat, a support mechanism needs to be set at the bottom of the tray to ensure the horizontal movement of the boat pusher on the tray machine.

[0036] In the related art, the mechanism generally moves up and down under the drive of a cylinder to achieve the purpose of support and avoid interference with the bottom of the outer furnace door.

[0037] However, in multi-layer equipment, the up and down lifting support mechanism will seriously encroach on the lower space when the support rod falls, resulting in low floor height utilization, limited number of floors of multi-layer equipment, and difficulty in further increasing production capacity.

[0038] Based on the above problems, the utility model provides a support mechanism and a boat pushing device, which have the advantages of extremely small space occupancy in the height direction and basically no impact on the lower space. In multi-layer equipment, the layer height can be effectively compressed, thereby increasing the number of layers and improving production capacity.

[0039] Combine the following Figures 1 to 3 The invention describes a supporting mechanism and a boat pushing device.

[0040] Reference Figure 1 A support mechanism can be used for the bottom support of a boat push tray, and the support mechanism includes a support rod 1 and a rotating drive member 2; wherein, one end of the support rod 1 along the length direction is formed as a support end for supporting the bottom of the boat push tray, and the other opposite end is connected to the output end of the rotating drive member 2; the rotating drive member 2 can drive the support rod 1 to rotate around a first rotation axis, and the first rotation axis is perpendicular to the length direction of the support rod 1.

[0041] In a specific application scenario, the entire support mechanism is fixed on the bottom plate of the push boat base. When the push boat tray needs support, the rotating drive member 2 drives the support rod 1 to rotate around the first rotation axis. Since the first rotation axis is perpendicular to the length direction of the support rod 1, the support end can be lifted when the support rod 1 rotates to support the bottom of the push boat tray; when it is necessary to avoid the space at the bottom of the outer furnace door, the rotating drive member 2 drives the support rod 1 to rotate around the first rotation axis, and the support rod 1 falls to a flat state; with this arrangement, the support rod 1 occupies very little space in the height direction when falling, and basically does not affect the lower space. In multi-layer equipment, the layer height can be effectively compressed, thereby increasing the number of layers and improving production capacity.

[0042] In some embodiments of the utility model, based on different working principles and power sources, the rotating drive component 2 has multiple options, such as electric, pneumatic or hydraulic drive. The specific one can be selected according to actual needs and application scenarios, as long as it can meet the required rotational drive requirements.

[0043] However, no matter what structure or principle of the rotating drive member 2 is adopted, in a complex and changeable production environment, it is difficult to avoid the problem of sudden power supply interruption, such as a sudden supply of compressed air or electricity. At this time, under the action of gravity, the support rod 1 may rotate and descend around the first rotation axis, which will not only fail to provide support, but may also cause the pallet supported on the support rod 1 to fall.

[0044] In order to solve the above problems, the support mechanism also includes a self-locking structure 3 for keeping the support rod 1 at a predetermined rotation angle. In actual applications, when the boat pusher tray needs to be supported, the rotary drive member 2 drives the support rod 1 to rotate around the first rotation axis to lift the support end, and the self-locking structure 3 can keep the support rod 1 at a predetermined rotation angle, that is, the support rod 1 can only be driven to rotate by the rotary drive member 2, and the rotary drive member 2 cannot be driven to rotate in the reverse direction by the support rod 1. In this way, even if there is a problem of sudden interruption of energy supply, the support rod 1 will not fall, and can still play a supporting effect, and reliability is guaranteed.

[0045] Based on different working principles, the self-locking structure 3 has a variety of optional structures or forms. In a specific embodiment of the present invention, refer to Figure 1 and Figure 2The rotating driving member 2 includes a turntable 20, which can rotate around a second rotation axis; the support rod 1 is fixedly connected to the turntable 20, the axis of the support rod 1 is orthogonal to the second rotation axis, and the connection point between the support rod 1 and the turntable 20 is offset relative to the second rotation axis; the self-locking structure 3 includes a support seat 30 and a connecting rod 31, wherein the support seat 30 is suitable for fixed connection with the boat pusher base; the connecting rod 31 is rotatably connected to the support seat 30, and the end of the connecting rod 31 is fixedly connected to the support rod 1, and the rotating shaft of the connecting rod 31 is coaxial with the second rotation axis, so that the first rotation axis is coaxial with the second rotation axis.

[0046] With such arrangement, when the turntable 20 rotates around the second rotation axis, the connection point between the support rod 1 and the turntable 20 will be driven to rotate. Since the axis of the support rod 1 is orthogonal to the second rotation axis and the connection point is misaligned with the second rotation axis, the center of the rotation trajectory of the connection point can always be located on the second rotation axis, that is, the first rotation axis and the second rotation axis are coaxial; the rotation axis of the connecting rod 31 is coaxial with the second rotation axis, so that the rotation axis of the connecting rod 31, the first rotation axis and the second rotation axis can be made coaxial; when the energy supply is suddenly interrupted, the connecting rod 31 tends to fall due to gravity, and the rotation axis formed by the connecting rod 31 falling due to its own weight is not coaxial with the rotation axis of the connecting rod 31 and the second rotation axis at the position of the connection point. At this time, the connecting rod 31 can limit the support rod 1 and prevent the connecting rod 31 from rotating, that is, the support rod 1 can only be driven to rotate by the rotating drive member 2, and the rotating drive member 2 cannot be driven to rotate by the support rod 1 in the opposite direction, thereby forming a self-locking, and the reliability of the support mechanism is guaranteed.

[0047] Of course, the self-locking structure 3 includes but is not limited to the structures or forms listed above, and other principles, structures or forms of self-locking structures 3 are applicable as long as they can self-lock the rotation angle of the support rod 1.

[0048] In actual work, since the boat pushing device has a certain width, in order to ensure the stability of the boat pushing tray support, it is necessary to support the boat pushing tray on both sides along the width direction. In this way, two or more support rods 1 may be required to support the boat pushing tray. There are many feasible solutions to the above technical problems.

[0049] In one solution, a set of the above-mentioned support mechanisms can be respectively arranged on both sides of the boat pusher in the width direction, and the two sets of support mechanisms are driven and controlled separately, so as to achieve support for both sides of the pallet in the width direction. However, such an arrangement may be more complicated in structure and logic control.

[0050] In another embodiment, at least two support rods 1 are arranged along the length direction of the connecting rod 31 , and the multiple support rods 1 are connected into a whole through the connecting rod 31 .

[0051] In a specific embodiment of the utility model, multiple support rods 1 can be arranged on the connecting rod 31 of the above-mentioned support mechanism, driven by a set of rotating driving members 2, and self-locked by a set of self-locking structures 3. Although such arrangement can simplify the structure, the operating burden of the rotating driving member 2, the connecting rod 31 and the self-locking structure 3 is relatively large, and the working stability is difficult to ensure.

[0052] In another specific embodiment of the present invention, referring to Figure 1 , two groups of rotary drive members 2 are provided, and the two groups of rotary drive members 2 are respectively connected to the support rods 1 at both ends of the connecting rod 31 through the self-locking structure 3. In this way, the two groups of rotary drive members 2 are synchronously operated to jointly drive the support rods 1 on both sides, and the two groups of self-locking structures 3 are used to achieve self-locking, thereby reducing the operating burden of the rotary drive members 2, the connecting rod 31 and the self-locking structure 3, and ensuring the stability of the mechanism.

[0053] In order to facilitate the assembly and disassembly of the support rod 1, refer to Figure 2 and Figure 3 The support rod 1 and the rotating disk 20 are detachably fixedly connected through the first connecting member 4, and the connecting rod 31 and the support rod 1 are detachably fixedly connected through the second connecting member 5. Such an arrangement can facilitate the assembly and disassembly of the components on the supporting mechanism.

[0054] In a specific embodiment of the utility model, the first connecting member 4 is a bolt; the second connecting member 5 includes a connecting block 50 and a top screw 51; wherein the connecting block 50 is fixedly connected to the end of the connecting rod 31, and the connecting block 50 is nested in the outer periphery of the support rod 1; the top screw 51 is threadedly connected to the connecting block 50, and the end of the top screw 51 abuts against the part of the support rod 1 nested in the connecting block 50. When disassembling the support rod 1, the bolt is unscrewed, and then the top screw 51 is loosened, and the connecting rod 31 can be pulled out axially; when assembling, the support rod 1 is passed through the connecting block 50 and connected to the turntable 20 by bolts, and then the top screw 51 is tightened to complete the assembly.

[0055] Of course, the first connecting member 4 and the second connecting member 5 include but are not limited to the structures listed above. The first connecting member 4 and the second connecting member 5 of other structures or forms can be used as long as they can achieve a detachable and fixed connection between the support rod 1, the connecting rod 31 and the turntable 20.

[0056] In a specific embodiment of the present invention, the connecting rod 31 is rotatably connected to the supporting seat 30 via a bearing 300 , so that the smoothness and stability of the rotation of the connecting rod 31 can be improved.

[0057] In a specific embodiment of the utility model, the rotary drive member 2 also includes a rotary cylinder 21, and the turntable 20 is fixedly connected to the output flange of the rotary cylinder 21. Compared with other forms of rotary drive elements, the rotary cylinder 21 can reduce the space occupied as much as possible.

[0058] In a specific embodiment of the present invention, a fixing seat 6 is fixedly connected to the rotating cylinder 21 so as to facilitate the fixed connection between the rotating cylinder 21 and the base of the boat pushing device.

[0059] In a specific embodiment of the utility model, the supporting end of the support rod 1 is connected to a rolling member 10, which can convert the friction between the supporting end and the ground of the boat push tray into rolling friction, thereby reducing frictional resistance, improving the smoothness and stability of the boat push tray movement, and reducing wear.

[0060] Specifically, the rolling element 10 may adopt a universal ball bearing 300 .

[0061] It should be noted that, in the absence of conflict, the features in the embodiments of the present invention can be combined with each other.

[0062] The boat pushing device provided by the present invention is described below. The boat pushing device described below and the supporting mechanism described above can be referred to each other.

[0063] A boat pushing device comprises the above-mentioned supporting mechanism for supporting the bottom of a boat pushing tray.

[0064] The novelty of the utility model is that by fixing the entire supporting mechanism on the bottom plate of the push boat base, when the push boat tray needs support, the rotating driving member 2 drives the supporting rod 1 to rotate around the first rotating axis. Since the first rotating axis is perpendicular to the length direction of the supporting rod 1, the supporting end can be lifted up when the supporting rod 1 rotates to support the bottom of the push boat tray; when it is necessary to avoid the space at the bottom of the outer furnace door, the rotating driving member 2 drives the supporting rod 1 to rotate around the first rotating axis, and the supporting rod 1 falls to a flat state; with such an arrangement, the support rod 1 occupies very little space in the height direction when falling, and basically does not affect the lower space. In multi-layer equipment, the layer height can be effectively compressed, thereby increasing the number of layers and improving production capacity.

[0065] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the utility model.

Claims

1. A support mechanism, characterized in that: The invention can be applied to the bottom support of a push boat tray, and the support mechanism comprises: a support rod (1) and a rotating driving member (2); One end of the support rod (1) along the length direction is formed as a support end for supporting the bottom of the boat pusher tray, and the other opposite end is connected to the output end of the rotary drive member (2); The rotary drive member (2) is capable of driving the support rod (1) to rotate around a first rotation axis, wherein the first rotation axis is perpendicular to the length direction of the support rod (1).

2. The support mechanism according to claim 1, characterized in that: It also comprises a self-locking structure (3) for keeping the support rod (1) at a predetermined rotation angle.

3. The support mechanism according to claim 2, characterized in that: The rotary drive member (2) comprises a rotating disk (20), and the rotating disk (20) is capable of rotating around a second rotation axis; The support rod (1) is fixedly connected to the rotating disk (20), the axis of the support rod (1) is orthogonal to the second rotating axis, and the connection point between the support rod (1) and the rotating disk (20) is offset relative to the second rotating axis; The self-locking structure (3) comprises a support seat (30) and a connecting rod (31); the connecting rod (31) is rotatably connected to the support seat (30), and the end of the connecting rod (31) is fixedly connected to the support rod (1), and the rotating shaft of the connecting rod (31) is coaxial with the second rotating axis.

4. The support mechanism according to claim 3, characterized in that: At least two of the support rods (1) are arranged along the length direction of the connecting rod (31), and a plurality of the support rods (1) are connected into a whole via the connecting rod (31).

5. The support mechanism according to claim 4, characterized in that: The rotary drive members (2) are provided in two groups, and the two groups of rotary drive members (2) are respectively connected via a self-locking structure (3) and support rods (1) located at both ends of the connecting rod (31).

6. The support mechanism according to claim 3, characterized in that: The support rod (1) and the rotating disk (20) are detachably fixedly connected via a first connecting member (4), and the connecting rod (31) and the support rod (1) are detachably connected via a second connecting member (5).

7. The support mechanism according to claim 6, characterized in that: The second connecting member (5) comprises: A connecting block (50) is fixedly connected to the end of the connecting rod (31), and the connecting block (50) is nested in the outer periphery of the supporting rod (1); a top screw (51) is threadedly connected to the connecting block (50), and the end of the top screw (51) abuts against the portion of the supporting rod (1) nested in the connecting block (50).

8. The support mechanism according to claim 3, characterized in that: The rotary drive member (2) further comprises a rotary cylinder (21), and the rotary disk (20) is fixedly connected to the output end of the rotary cylinder (21).

9. The support mechanism according to any one of claims 1 to 8, characterized in that: The supporting end of the support rod (1) is connected to a rolling element (10).

10. A boat pushing device, characterized in that: Comprising the supporting mechanism as described in any one of claims 1-9.

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