Silicon wafer bearing basket and cleaning tank

Abstract

The utility model relates to the technical field of silicon wafer processing, in particular to a silicon wafer bearing flower basket and a rinse tank, the silicon wafer bearing flower basket comprises a flower basket body, the flower basket body comprises two end plates which are oppositely arranged, and a movable top rod and a bottom rod which are connected with the two end plates; a plurality of pressing teeth are arranged on the movable top rod and the bottom rod, gaps between the adjacent pressing teeth are paired up and down to form silicon wafer placing positions, the movable top rod drives the pressing teeth to move up and down so as to adjust the positions of the silicon wafers in the gaps, the pressing teeth are arranged on the movable top rod and the bottom rod of the flower basket body, and the positions of the silicon wafers in the gaps are adjusted through the tooth gaps corresponding to the pressing teeth. The silicon wafers can be accurately placed in the flower basket, mutual contact between the silicon wafers is avoided, damage to the silicon wafers is reduced, the silicon wafers are guaranteed to make contact with liquid medicine more evenly in the processing process by adjusting the position of the movable ejector rod, and the cleaning effect is optimized.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer processing, in particular to a silicon wafer carrying basket and a cleaning tank. Background Art

[0002] Solar cells need to be cleaned and texturized during the manufacturing process. Cleaning refers to the removal of impurities on the surface of silicon wafers, while texturizing is the formation of tiny texture structures on the surface of silicon wafers by chemical or mechanical means to enhance light absorption; during the cleaning and texturizing process, silicon wafers are usually placed in special baskets. As a carrying tool, the basket can load multiple silicon wafers at one time. The basket uses spaced pressing teeth to form installation gaps between adjacent pressing teeth. The current gap structure of the pressing teeth is too large, which will cause the silicon wafer to be attached and deformed, and then cause the silicon wafer surface to be uneven; while the gap is too small, it may limit the full contact between the liquid and the silicon wafer, affecting the surface quality of the silicon wafer and reducing the grade of the silicon wafer. Both of these situations will affect the silicon wafer's absorption and reflection of light and reduce the photoelectric conversion efficiency of solar cells.

[0003] Therefore, in order to solve the technical problems of rework and rewashing caused by patch and silicon wafer damage during silicon wafer cleaning and texturing due to low flexibility and non-adjustability of the gap of the pressing teeth in the overall design of the flower basket, a silicon wafer carrying flower basket is needed. Utility Model Content

[0004] In order to solve the technical problems mentioned in the background technology, the utility model provides a silicon wafer carrying basket and a cleaning tank:

[0005] In a first aspect, the utility model provides a silicon wafer carrying basket comprising:

[0006] The flower basket body comprises two end plates arranged opposite to each other, and a movable top rod and a bottom rod connecting the two end plates;

[0007] The movable top rod and the bottom rod are both provided with a plurality of pressing teeth, and the gaps between adjacent pressing teeth and the upper and lower pairs form silicon wafer placement positions. The movable top rod drives the pressing teeth to move up and down to adjust the position of the silicon wafer in the gap.

[0008] Furthermore, the pressing teeth are in at least two levels of conical shape;

[0009] The conical taper at the tooth root increases gradually toward the conical taper at the tooth tip to form at least two levels of gap opening.

[0010] Furthermore, each of the end plates is provided with a movable through hole, and the movable top rod horizontally passes through the movable through holes of the two end plates in sequence and laterally penetrates the flower basket body; and

[0011] The inner diameter of the movable through hole is larger than the diameter of the movable push rod, so that the movable push rod can move in the movable through hole to drive the pressing teeth to move.

[0012] Furthermore, the length of the movable top rod is greater than the length of the flower basket body, and the movable top rod extends outwards at two end plates.

[0013] Furthermore, each of the end plates is provided with at least one upper through hole for connecting a pressure rod;

[0014] The movable through hole is arranged on the side of the upper through hole so that the pressure rod connected to the upper through hole is level with the movable top rod that lifts the top in the movable through hole.

[0015] Furthermore, at least two bottom bars are provided, and the end plate is provided with lower through holes matching the bottom bars to place silicon wafers.

[0016] Furthermore, the flower basket body is provided with a side pressure rod along the length direction, and the side pressure rod is provided with pressure teeth to limit the silicon wafer laterally.

[0017] Furthermore, at least one grabbing hook is provided on the end plate to lift the flower basket.

[0018] In a second aspect, the utility model provides a cleaning tank, comprising:

[0019] A liquid medicine tank, in which a number of flower basket support bars are arranged;

[0020] The aforementioned silicon wafer carrying flower basket is placed on the flower basket support bar.

[0021] Furthermore, a top column is provided on the flower basket support bar, and the top column is connected to a movable top rod so that the movable top rod can move upward.

[0022] The beneficial effect of the utility model is that, by arranging pressing teeth on the movable top rod and the bottom rod of the flower basket body, the tooth gaps corresponding to the pressing teeth can ensure the precise placement of the silicon wafers in the flower basket, avoid mutual contact between the silicon wafers, reduce damage to the silicon wafers, and by adjusting the position of the movable top rod, ensure that the silicon wafers contact the liquid medicine more evenly during the treatment process, optimize the cleaning effect, and improve the flexibility and adjustability of the flower basket design so that it can adapt to silicon wafers of different sizes and specifications.

[0023] Other features and advantages of the utility model will be described in the following description, and partly become apparent from the description, or understood by practicing the utility model. The purpose and other advantages of the utility model are realized and obtained by the structures particularly pointed out in the description and the drawings.

[0024] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, preferred embodiments are given below and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0026] Figure 1 A schematic diagram showing the structure of a silicon wafer carrying flower basket involved in some embodiments is shown;

[0027] Figure 2 A partial enlarged view of a silicon wafer carrying flower basket involved in some embodiments is shown;

[0028] Figure 3 A plan view of an end plate according to some embodiments is shown;

[0029] Figure 4 A first state diagram of the pressing teeth involved in some embodiments is shown;

[0030] Figure 5 A second state diagram of the pressing teeth involved in some embodiments is shown;

[0031] Figure 6 A schematic structural diagram of a cleaning tank involved in some embodiments is shown;

[0032] In the figure:

[0033] 100 flower basket body, 110 end plate, 120 movable top rod, 140 bottom rod, 130 pressure teeth, 150 side pressure rod, 160 hook;

[0034] 101 silicon wafer, 131 gap, 111 active through hole, 112 upper through hole, 113 lower through hole;

[0035] 200 medicine liquid tank, 201 top column, 202 flower basket support bar. DETAILED DESCRIPTION

[0036] In order to make the purpose, technical solution and advantages of the embodiments of the present utility model clearer, the technical solution of the present utility model will be clearly and completely described below in conjunction with the accompanying drawings.

[0037] In order to facilitate understanding of the relevant technologies of this application, the relevant technical features in this application are now explained. In the process of cleaning and texturing of photovoltaic cells, the silicon wafer carrying basket is usually used in conjunction with an automated manipulator and a conveying system. The manipulator grabs and places a certain number of silicon wafers in the basket in the texturing cleaning tank for immersion and cleaning with liquid medicine. The silicon wafer placement position formed by the gaps between several pressing teeth in this application is used to separate a number of silicon wafers to ensure that the silicon wafers do not overlap, and the gaps between the pressing teeth allow the liquid medicine or cleaning liquid to flow between the silicon wafers to ensure that each part of the silicon wafer can be fully cleaned. In actual production, if the gap is large, effective limiting cannot be performed, and the silicon wafer may be greatly deformed under the action of the liquid medicine (cleaning liquid). If the gap is small, it is easy to produce patches.

[0038] In order to solve the above technical problems, Figures 1 to 3 As shown, at least one embodiment provides a silicon wafer carrying basket, including a basket body 100, wherein the basket body 100 includes two oppositely arranged end plates 110, and a movable top rod 120 and a bottom rod 140 connecting the two end plates 110; the movable top rod 120 and the bottom rod 140 are each provided with a plurality of pressing teeth 130, and gaps 131 between adjacent pressing teeth 130 are formed in pairs up and down to form a silicon wafer placement position, and the movable top rod 120 drives the pressing teeth 130 to move up and down to adjust the position of the silicon wafer 101 in the gap 131, which helps to achieve uniform surface treatment during the texturing process.

[0039] like Figure 4 and Figure 5 As shown, in order to adjust the position of the pressing tooth 130 in the gap 131 by the movable push rod 120, the pressing tooth 130 is in at least two levels of taper, wherein the taper at the root of the tooth gradually increases toward the taper at the tip of the tooth, so as to form at least two levels of gap 131 opening. Figure 4 As shown in the first state diagram of the pressing teeth during the cleaning process, when the flower basket is placed in the cleaning tank for immersion and cleaning with liquid medicine, the movable top rod 120 moves upward to adjust the pressing teeth 130 so that the silicon wafer is in a larger gap, so that the liquid medicine can contact the silicon wafer more evenly. When the flower basket needs to be moved, Figure 5 As shown in the first state diagram of the pressing teeth, the movable top rod 120 moves downward to adjust the pressing teeth 130 so that the silicon wafer is in a smaller gap, thereby limiting the position of the silicon wafer, and the movement of the placement basket causes deformation of the silicon wafer.

[0040] In some embodiments, the movable push rod 120 is configured to be movable up and down, and its upward movement makes the silicon wafer in a position with a larger gap 131, and its downward movement makes the silicon wafer in a position with a smaller gap 131; each of the end plates 110 is provided with a movable through hole 111, and the movable push rod 120 horizontally passes through the movable through holes 111 of the two end plates 110 in sequence and horizontally penetrates the flower basket body 100; and the inner diameter of the movable through hole 111 is larger than the diameter of the movable push rod 120, so that the movable push rod 120 moves in the movable through hole 111 to drive the pressing teeth 130 to move. By moving the movable push rod 120 up and down, the position of the silicon wafer in the gap 131 can be accurately controlled, and by adjusting the gap 131, the loss or dislocation of the silicon wafer during transportation can be reduced, and it is ensured that the silicon wafer is fully in contact with the liquid during cleaning and texturing.

[0041] In some embodiments, the length of the movable top rod 120 is greater than the length of the flower basket body 100, and the movable top rod 120 extends outward from the two end plates 110. By controlling the extended portion of the movable top rod 120 on both sides of the end plate 110, the extended portion can be placed in the liquid medicine tank, so that the movable top rod 120 can move in the movable through hole 111.

[0042] In some embodiments, in order to effectively limit the position of the silicon wafer, a plurality of pressure rods are provided on the upper and lower sides thereof to keep the silicon wafer stable in the basket; on the one hand, the top of the silicon wafer is limited, two pressure rods are provided on both sides of the movable top rod 120, and each of the end plates 110 is provided with at least one upper through hole 112 to connect the pressure rod; the movable through hole 111 is provided on the side of the upper through hole 112, so that the pressure rod connected to the upper through hole 112 is level with the movable top rod 120 that lifts the top in the movable through hole 111. On the other hand, the bottom of the silicon wafer is limited, at least two bottom rods 140 are provided, and the end plate 110 is provided with a lower through hole 113 matching each bottom rod 140 to place the silicon wafer.

[0043] In some embodiments, the basket body 100 is further provided with a side pressure rod 150 along the length direction, and the side pressure rod 150 is provided with a pressure tooth 130 to perform lateral positioning of the silicon wafer 101. The lateral positioning provided by the side pressure rod 150 can increase the stability of the silicon wafer in the basket, avoid mutual collision between silicon wafers, reduce the risk of silicon wafer damage, and reduce displacement or vibration during transportation and cleaning.

[0044] In some embodiments, the flower basket body is controlled by an external robot to take or place the flower basket in the medicine tank, and at least one grabbing hook 160 is provided on the end plate 110 to lift the flower basket.

[0045] like Figure 6As shown, at least one embodiment provides a cleaning tank for cleaning and texturing flower baskets, the cleaning tank comprising: a liquid medicine tank 200, in which a plurality of flower basket support bars 202 are arranged; the flower basket support bars 202 are configured according to the size of the liquid medicine tank 200 to place a plurality of silicon wafer carrying flower baskets, wherein at least two flower basket support bars 202 can place a silicon wafer carrying flower basket.

[0046] In some embodiments, when the robot places the flower basket in the medicine tank, the movable top rod 120 moves upward; when the robot lifts the flower basket away, the movable top rod 120 moves downward; a top column 201 is provided on the flower basket support bar, and the top column 201 is connected to the movable top rod 120 to enable the movable top rod 120 to move upward.

[0047] In summary, the utility model arranges pressing teeth on the movable top rod and the bottom rod of the flower basket body. The tooth gaps corresponding to the pressing teeth can ensure the precise placement of the silicon wafers in the flower basket, avoid mutual contact between the silicon wafers, reduce damage to the silicon wafers, and by adjusting the position of the movable top rod, ensure that the silicon wafers are more evenly in contact with the liquid medicine during the treatment process, optimize the cleaning effect, and improve the flexibility and adjustability of the flower basket design so that it can adapt to silicon wafers of different sizes and specifications.

[0048] In the description of the embodiments of the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0049] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0050] In the several embodiments provided in this application, it should be understood that the disclosed systems, devices and methods can be implemented in other ways. The device embodiments described above are merely schematic. For example, the division of the units is only a logical function division. There may be other division methods in actual implementation. For example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. With the above-mentioned ideal embodiments of the utility model as inspiration, through the above-mentioned description, relevant staff can make various changes and modifications without departing from the scope of the technical idea of ​​the utility model. The technical scope of the utility model is not limited to the contents of the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A silicon wafer carrying basket, characterized in that: include: A flower basket body (100) comprising two end plates (110) arranged opposite to each other, and a movable top rod (120) and a bottom rod (140) connecting the two end plates (110); The movable top rod (120) and the bottom rod (140) are both provided with a plurality of pressing teeth (130), and gaps (131) between adjacent pressing teeth (130) form silicon wafer placement positions in pairs. The movable top rod (120) drives the pressing teeth (130) to move up and down to adjust the position of the silicon wafer (101) in the gap (131).

2. The silicon wafer carrying basket according to claim 1, characterized in that: The pressing teeth (130) are in at least two-stage conical shapes; in The conical taper at the tooth root increases gradually toward the conical taper at the tooth tip to form at least two levels of gap (131) openings.

3. The silicon wafer carrying basket according to claim 1, characterized in that: Each of the end plates (110) is provided with a movable through hole (111), and the movable top rod (120) horizontally passes through the movable through holes (111) of the two end plates (110) in sequence and laterally penetrates the flower basket body (100); and The inner diameter of the movable through hole (111) is greater than the diameter of the movable push rod (120), so that the movable push rod (120) moves in the movable through hole (111) to drive the pressing tooth (130) to move.

4. The silicon wafer carrying basket according to claim 3, characterized in that: The length of the movable top rod (120) is greater than the length of the flower basket body (100), and the movable top rod (120) extends outwards from the two end plates (110).

5. The silicon wafer carrying basket according to claim 3, characterized in that: Each of the end plates (110) is provided with at least one upper through hole (112) for connecting a pressure rod; The movable through hole (111) is arranged on the side of the upper through hole (112) so that the pressure rod connected to the upper through hole (112) is level with the movable top rod (120) that lifts the top in the movable through hole (111).

6. The silicon wafer carrying basket according to claim 1, characterized in that: At least two bottom bars (140) are provided, and the end plate (110) is provided with lower through holes (113) matching the bottom bars (140) for placing silicon wafers.

7. The silicon wafer carrying basket according to claim 1, characterized in that: The flower basket body (100) is further provided with a side pressure rod (150) along the length direction, and the side pressure rod (150) is provided with a pressure tooth (130) to limit the silicon wafer (101) in the lateral direction.

8. The silicon wafer carrying basket according to claim 1, characterized in that: At least one grabbing hook (160) is provided on the end plate (110) to lift the flower basket.

9. A cleaning tank, characterized in that: include: A liquid medicine tank (200) having a plurality of flower basket support bars (202) disposed therein; The silicon wafer supporting flower basket according to any one of claims 1 to 8 is placed on the flower basket support bar (202).

10. The cleaning tank according to claim 9, characterized in that: A top column (201) is provided on the flower basket support bar, and the top column (201) is connected to the movable top rod (120) so that the movable top rod (120) can move upward.

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