Nitrogen recycling device for ultrapure water tank

Abstract

The utility model relates to the technical field of ultrapure water storage devices, in particular to an ultrapure water tank nitrogen recycling device which comprises a bottom plate, an ultrapure water tank body, a nitrogen storage tank and a pressure swing adsorption nitrogen making machine are fixedly arranged at the top end of the bottom plate, and a liquid inlet pipe and a liquid outlet pipe are fixedly arranged on the lower portion of the ultrapure water tank body. An air inlet pipe is fixedly arranged on the upper portion of the side, away from the nitrogen storage box, of the ultrapure water box body, a first air outlet pipe is fixedly arranged on the upper portion of the other side of the ultrapure water box body, and the other end of the first air outlet pipe is fixedly connected with the top end of the nitrogen storage box; the upper portion of one side of the nitrogen storage box is fixedly connected with the gas inlet end of the pressure swing adsorption nitrogen making machine through a second gas outlet pipe, and the output end of the pressure swing adsorption nitrogen making machine is fixedly connected with a third gas outlet pipe. Meanwhile, the situation that the ultrapure water storage effect is affected due to the fact that the nitrogen concentration is reduced can be effectively avoided, and therefore the practicability of the device is effectively improved.

Description

Technical Field

[0001] The utility model relates to an ultrapure water tank nitrogen circulation utilization device, belonging to the technical field of ultrapure water storage devices. Background Art

[0002] Ultrapure water nitrogen sealed tank is a device used to store ultrapure water. Ultrapure water is water that has been strictly treated and filtered. It contains almost no dissolved solids, such as salts, minerals, microorganisms and organic matter. Therefore, the quality of ultrapure water is very high. It is often used in high-tech fields such as semiconductor manufacturing, optical component production, biomedicine, etc. Ultrapure water requires nitrogen when stored.

[0003] According to the announcement number CN219524966U, a nitrogen recycling device for an ultrapure water tank is disclosed, which is arranged on the ultrapure water tank, and a mounting frame is arranged on the ultrapure water tank, and a flexible nitrogen holding chamber is arranged on the mounting frame, and the nitrogen holding chamber is connected to the ultrapure water tank through a pipeline 4, and a nitrogen supply valve air inlet and exhaust port are arranged on the ultrapure water tank, and the nitrogen holding chamber is a retractable air bag. The utility model is beneficial in that a flexible nitrogen holding chamber is arranged, and the ultrapure water tank is automatically replenished with air according to the water level in the ultrapure water tank, so as to realize the recycling of nitrogen, greatly save the amount of high-purity nitrogen, reduce the waste of nitrogen, and at the same time reduce the management cost and the floor space. Although the above device can realize the recycling of nitrogen, the nitrogen concentration will decrease after long-term use. At this time, continuing to use it will affect the storage effect of ultrapure water. Utility Model Content

[0004] The purpose of the utility model is to provide an ultrapure water tank nitrogen recycling device. The utility model can facilitate the mobile transportation of the device, and can effectively avoid the situation where the ultrapure water storage effect is affected by the reduction of nitrogen concentration, thereby effectively improving the practicability of the device to solve the problems raised in the above background technology.

[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0006] A nitrogen recycling device for an ultrapure water tank comprises a bottom plate, an ultrapure water tank body, a nitrogen storage tank and a pressure swing adsorption nitrogen making machine are fixedly provided on the top of the bottom plate, a liquid inlet pipe and a liquid outlet pipe are fixedly provided on the lower part of the ultrapure water tank body, an air inlet pipe is fixedly provided on the upper part of one side of the ultrapure water tank body away from the nitrogen storage tank, an air outlet pipe 1 is fixedly provided on the upper part of the other side of the ultrapure water tank body, the other end of the air outlet pipe 1 is fixedly connected to the top of the nitrogen storage tank, an upper part of one side of the nitrogen storage tank and the air inlet end of the pressure swing adsorption nitrogen making machine are fixedly connected through an air outlet pipe 2, an output end of the pressure swing adsorption nitrogen making machine is fixedly connected with an air outlet pipe 3, the other end of the air outlet pipe 3 is fixedly connected to the air inlet pipe, a pressure gauge and an exhaust pipe are fixedly provided on the top of the ultrapure water tank body, a nitrogen concentration sensor is fixedly provided on the upper inner wall of one side of the nitrogen storage tank, and a piston is slidably provided on the upper inner wall of the nitrogen storage tank.

[0007] Furthermore, rollers are fixedly provided at the four corners of the bottom end of the base plate.

[0008] Furthermore, cylinders are fixedly provided at the four corners of the top of the bottom plate, the output ends of the cylinders extend to the bottom of the bottom plate and are fixedly connected to a base, and a plurality of through grooves matching the rollers are symmetrically arranged in an array at the top of the base.

[0009] Furthermore, a sealing ring is fixedly embedded around the outer wall of the piston.

[0010] Furthermore, a fixing plate is fixedly provided on the middle inner wall of the nitrogen storage box, a motor is fixedly provided on the bottom end of the bottom plate, a screw is fixedly connected to the output end of the motor, the top end of the screw extends into the nitrogen storage box and is rotatably connected to the bottom end of the fixing plate, a slider is threadedly sleeved on the screw, a plurality of support rods are fixedly provided in a symmetrical array at the top end of the slider, the top ends of the support rods all extend above the fixing plate and are fixedly connected to the bottom end of the piston.

[0011] Furthermore, the sliding block is slidably connected to the nitrogen storage box, and a threaded sleeve matching the screw rod is fixedly embedded through the sliding block.

[0012] Furthermore, a controller is fixedly provided on the front side of the nitrogen storage box, the nitrogen concentration sensor is electrically connected to the input end of the controller, and the cylinder and the motor are both electrically connected to the output end of the controller.

[0013] The beneficial effects of the utility model are:

[0014] The utility model is provided with a nitrogen storage box and a pressure swing adsorption nitrogen generator. When in use, when the ultrapure water tank body is replenished with water, the nitrogen in the ultrapure water tank body will enter the nitrogen storage box through the air outlet pipe 1, and at the same time, the motor drives the screw to rotate, so that the screw drives the slider to move in the nitrogen storage box, and the slider drives the piston to move downward through the support rod. At this time, the nitrogen concentration in the nitrogen storage box is sensed by the nitrogen concentration sensor. When the nitrogen concentration is qualified, the piston squeezes the nitrogen, so that the nitrogen enters the ultrapure water tank body through the air outlet pipe 1 for continuous use. When the nitrogen concentration is unqualified, the piston squeezes the nitrogen. The piston squeezes the nitrogen, so that the nitrogen enters the pressure swing adsorption nitrogen generator through the air outlet pipe 2. The nitrogen with increased concentration can enter the air inlet pipe through the air outlet pipe 3, and then enter the ultrapure water tank body for continued use. The rollers are provided to facilitate the movement of the device, and the base is pushed downward by the cylinder to separate the rollers from the ground. At this time, the stability of the device when placed can be improved. The utility model can facilitate the movement and transportation of the device, and can effectively avoid the situation where the ultrapure water storage effect is affected by the reduction of nitrogen concentration, thereby effectively improving the practicability of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. They are used to explain the present invention together with the specific embodiments of the present invention and do not constitute a limitation to the present invention.

[0016] Figure 1 This is a front view of an ultrapure water tank nitrogen recycling device of the utility model;

[0017] Figure 2 This is a schematic diagram of the overall structure of an ultrapure water tank nitrogen recycling device of the utility model;

[0018] Figure 3 It is a top view of a nitrogen storage tank and a slider of an ultrapure water tank nitrogen recycling device of the utility model;

[0019] Figure 4 The utility model is a kind of ultrapure water tank nitrogen recycling device Figure 2 The enlarged view of point A in the middle;

[0020] Numbers in the figure: 1, bottom plate; 2, ultrapure water tank body; 3, nitrogen storage tank; 4, pressure swing adsorption nitrogen generator; 5, liquid inlet pipe; 6, liquid outlet pipe; 7, air inlet pipe; 8, air outlet pipe one; 9, air outlet pipe two; 10, air outlet pipe three; 11, pressure gauge; 12, exhaust pipe; 13, nitrogen concentration sensor; 14, piston; 15, roller; 16, cylinder; 17, base; 18, sealing ring; 19, fixing plate; 20, motor; 21, screw; 22, slider; 23, support rod; 24, controller. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0022] Example 1 Please refer to Figure 1-Figure 4 , the utility model provides a technical solution:

[0023] A nitrogen recycling device for an ultrapure water tank comprises a bottom plate 1, an ultrapure water tank body 2, a nitrogen storage tank 3 and a pressure swing adsorption nitrogen generator 4 are fixedly provided on the top of the bottom plate 1, a liquid inlet pipe 5 and a liquid outlet pipe 6 are fixedly provided on the lower part of the ultrapure water tank body 2, an air inlet pipe 7 is fixedly provided on the upper part of one side of the ultrapure water tank body 2 away from the nitrogen storage tank 3, an air outlet pipe 8 is fixedly provided on the upper part of the other side of the ultrapure water tank body 2, and the other end of the air outlet pipe 8 is fixedly connected to the top of the nitrogen storage tank 3, and the An upper portion of one side of the nitrogen storage box 3 is fixedly connected to the air inlet end of the pressure swing adsorption nitrogen generator 4 via an air outlet pipe 2 9, an output end of the pressure swing adsorption nitrogen generator 4 is fixedly connected to an air outlet pipe 3 10, the other end of the air outlet pipe 3 10 is fixedly connected to the air inlet pipe 7, a pressure gauge 11 and an exhaust pipe 12 are fixedly provided at the top of the ultrapure water tank body 2, a nitrogen concentration sensor 13 is fixedly provided on the upper inner wall of one side of the nitrogen storage box 3, and a piston 14 is slidably provided on the upper inner wall of the nitrogen storage box 3.

[0024] Specifically, Figure 1-Figure 4 As shown, rollers 15 are fixedly provided at the four corners of the bottom end of the base plate 1, and cylinders 16 are fixedly provided at the four corners of the top end of the base plate 1. The output ends of the cylinders 16 extend to the bottom of the base plate 1 and are fixedly connected to a base 17. A plurality of through grooves matching the rollers 15 are symmetrically arranged in an array at the top end of the base 17. The rollers 15 are provided to facilitate the movement of the device. The base 17 is pushed downward by the cylinders 16, so that the rollers 15 are separated from the ground, and the stability of the device when placed can be improved.

[0025] Specifically, Figure 1-Figure 4As shown, a fixing plate 19 is fixedly provided on the middle inner wall of the nitrogen storage box 3, a motor 20 is fixedly provided at the bottom end of the bottom plate 1, a screw rod 21 is fixedly connected to the output end of the motor 20, the top end of the screw rod 21 extends into the nitrogen storage box 3 and is rotatably connected to the bottom end of the fixing plate 19, a slider 22 is threadedly sleeved on the screw rod 21, a plurality of support rods 23 are symmetrically fixedly provided at the top end of the slider 22 in an array, the top ends of the support rods 23 all extend to the top of the fixing plate 19 and are fixedly connected to the bottom end of the piston 14, the slider 22 is slidably connected to the nitrogen storage box 3, a threaded sleeve matching the screw rod 21 is fixedly embedded through the slider 22, a controller 24 is fixedly provided on the front side of the nitrogen storage box 3, the nitrogen concentration sensor 13 and the controller 24 are connected The input end is electrically connected, and the cylinder 16 and the motor 20 are electrically connected to the output end of the controller 24. The nitrogen concentration in the nitrogen storage tank 3 is sensed by the nitrogen concentration sensor 13, and the motor 20 drives the screw 21 to rotate, so that the screw 21 drives the slider 22 to move in the nitrogen storage tank 3, and the slider 22 will drive the piston 14 to move up and down through the support rod 23. When the nitrogen concentration is qualified, the nitrogen is squeezed by the piston 14 at this time, so that the nitrogen enters the ultrapure water tank body 2 through the air outlet pipe 1 8 for continued use. When the nitrogen concentration is unqualified, the nitrogen is squeezed by the piston 14 at this time, so that the nitrogen enters the pressure swing adsorption nitrogen generator 4 through the air outlet pipe 2 9. The nitrogen with increased concentration can enter the air inlet pipe 7 through the air outlet pipe 3 10, and then enter the ultrapure water tank body 2 for continued use.

[0026] Example 2 Please refer to Figure 1-Figure 4 The difference between this embodiment and the first embodiment is that a sealing ring 18 is fixedly embedded around the outer wall of the piston 14. By providing the sealing ring 18, the sealing performance between the piston 14 and the nitrogen storage box 3 can be improved.

[0027] Working principle of the utility model: when in use, after the device is moved to a suitable position, the cylinder 16 pushes the base 17 to move downward, so that the roller 15 is separated from the ground, and the stability of the device when placed can be improved. When in use, the air inlet pipe 7 is connected to the output end of the nitrogen making device, so that the nitrogen can enter the ultrapure water tank body 2 through the air inlet pipe 7. When the ultrapure water tank body 2 is replenished with water, the nitrogen in the ultrapure water tank body 2 will enter the nitrogen storage tank 3 through the air outlet pipe 8. At the same time, the motor 20 drives the screw 21 to rotate, so that the screw 21 drives the slider 22 to move in the nitrogen storage tank 3, and the slider 22 will pass through the support rod 23 drives the piston 14 to move downward, and the nitrogen concentration sensor 13 senses the nitrogen concentration in the nitrogen storage tank 3. When the nitrogen concentration is qualified, the piston 14 squeezes the nitrogen, so that the nitrogen enters the ultrapure water tank body 2 through the outlet pipe 1 8 for continued use. When the nitrogen concentration is unqualified, the piston 14 squeezes the nitrogen, so that the nitrogen enters the pressure swing adsorption nitrogen generator 4 through the outlet pipe 2 9. The nitrogen with increased concentration can enter the inlet pipe 7 through the outlet pipe 3 10, and then enter the ultrapure water tank body 2 for continued use. By setting the sealing ring 18, the sealing between the piston 14 and the nitrogen storage tank 3 can be improved.

[0028] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An ultrapure water tank nitrogen recycling device, comprising a bottom plate (1), characterized in that: An ultrapure water tank body (2), a nitrogen storage tank (3) and a pressure swing adsorption nitrogen generator (4) are fixedly provided at the top of the bottom plate (1); a liquid inlet pipe (5) and a liquid outlet pipe (6) are fixedly provided at the bottom of the ultrapure water tank body (2); an air inlet pipe (7) is fixedly provided at the upper part of one side of the ultrapure water tank body (2) away from the nitrogen storage tank (3); an air outlet pipe (8) is fixedly provided at the upper part of the other side of the ultrapure water tank body (2); the other end of the air outlet pipe (8) is fixedly connected to the top of the nitrogen storage tank (3); and the upper part of one side of the nitrogen storage tank (3) is fixedly provided with a liquid inlet pipe (5) and a liquid outlet pipe (6). The upper end of the ultrapure water tank body (2) is fixedly connected to the air inlet end of the pressure swing adsorption nitrogen generator (4) via an air outlet pipe (9); the output end of the pressure swing adsorption nitrogen generator (4) is fixedly connected to an air outlet pipe (10); the other end of the air outlet pipe (10) is fixedly connected to the air inlet pipe (7); a pressure gauge (11) and an exhaust pipe (12) are fixedly provided at the top of the ultrapure water tank body (2); a nitrogen concentration sensor (13) is fixedly provided on the upper inner wall of one side of the nitrogen storage box (3); and a piston (14) is slidably provided on the upper inner wall of the nitrogen storage box (3).

2. The ultrapure water tank nitrogen recycling device according to claim 1, characterized in that: Rollers (15) are fixedly provided at the four corners of the bottom end of the bottom plate (1).

3. The ultrapure water tank nitrogen recycling device according to claim 2, characterized in that: Cylinders (16) are fixedly provided at the four corners of the top of the bottom plate (1), and the output ends of the cylinders (16) extend to the bottom of the bottom plate (1) and are fixedly connected to a base (17), and a plurality of through grooves matching the rollers (15) are symmetrically arranged through the top of the base (17).

4. The ultrapure water tank nitrogen recycling device according to claim 1, characterized in that: A sealing ring (18) is fixedly embedded around the outer wall of the piston (14).

5. The ultrapure water tank nitrogen recycling device according to claim 3, characterized in that: A fixing plate (19) is fixedly provided on the inner wall of the middle part of the nitrogen storage box (3), a motor (20) is fixedly provided at the bottom end of the bottom plate (1), a screw rod (21) is fixedly connected to the output end of the motor (20), the top end of the screw rod (21) extends into the nitrogen storage box (3) and is rotatably connected to the bottom end of the fixing plate (19), a slider (22) is threadedly sleeved on the screw rod (21), a plurality of support rods (23) are fixedly provided in a symmetrical array at the top end of the slider (22), the top ends of the support rods (23) all extend above the fixing plate (19) and are fixedly connected to the bottom end of the piston (14).

6. The ultrapure water tank nitrogen recycling device according to claim 5, characterized in that: The sliding block (22) is slidably connected to the nitrogen storage box (3), and a threaded sleeve matching the screw rod (21) is fixedly embedded through the sliding block (22).

7. The ultrapure water tank nitrogen recycling device according to claim 6, characterized in that: A controller (24) is fixedly provided on the front side of the nitrogen storage box (3); the nitrogen concentration sensor (13) is electrically connected to an input end of the controller (24); and the cylinder (16) and the motor (20) are both electrically connected to an output end of the controller (24).

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