Heat dissipation device and single crystal furnace system

Abstract

The utility model discloses a heat dissipation device and a single crystal furnace system. The heat dissipation device comprises a base, a driving assembly and an airflow stirrer, and the airflow stirrer is at least partially arranged in a single crystal furnace; wherein the airflow stirrer is movably connected to the base; the driving assembly is arranged on the base, the driving assembly is connected with the airflow stirrer, and the driving assembly is used for driving the airflow stirrer to do lifting motion. The cooling speed of the single crystal furnace can be increased, the blowing-out time of the single crystal furnace is shortened, and the production efficiency of the single crystal furnace is improved.

Description

Technical Field

[0001] The present application belongs to the field of photovoltaic technology, and specifically relates to a heat dissipation device and a single crystal furnace system. Background Art

[0002] In the photovoltaic industry, after the single crystal furnace is pulled, it needs to be shut down for a period of time to cool down. The furnace can only be dismantled when the temperature inside the furnace drops below the oxidation temperature of the thermal field components. However, at present, the shutdown time of the single crystal furnace is too long during the cooling process, which seriously affects the production efficiency of the single crystal furnace. Utility Model Content

[0003] In view of the above problems, a heat dissipation device and a single crystal furnace system are provided to overcome the above problems or at least partially solve the above problems.

[0004] In order to solve the above problems, in the first aspect, the embodiment of the utility model proposes a heat dissipation device, including: a base, a driving assembly and an air flow agitator, wherein the air flow agitator is at least partially arranged in the single crystal furnace; wherein,

[0005] The air flow agitator is connected to the base;

[0006] The driving assembly is arranged on the base, the driving assembly is connected to the air flow agitator, and the driving assembly is used to drive the air flow agitator to move up and down.

[0007] Optionally, the air flow agitator comprises a second driving member, a rotating shaft and an impeller;

[0008] The impeller is connected to one end of the rotating shaft;

[0009] The second driving member is connected to an end of the rotating shaft away from the impeller, and the second driving member is used to drive the impeller to rotate through the rotating shaft to stir the airflow;

[0010] One end of the rotating shaft away from the impeller is connected to the driving assembly.

[0011] Optionally, the impeller comprises a plurality of blades;

[0012] The plurality of blades are arranged along the circumference of the rotating shaft, and there is a gap between two adjacent blades;

[0013] One end of the blade is fixedly connected to the rotating shaft, and the other end of the blade extends away from the rotating shaft.

[0014] Optionally, the heat dissipation device further includes a support member;

[0015] The support member is arranged above the air flow agitator, the support member is connected to the driving assembly, and the driving assembly drives the support member to move up and down.

[0016] Optionally, the driving assembly includes a first driving member and a transmission member;

[0017] The first driving member is connected to the transmission member and is used to drive the transmission member to move;

[0018] The transmission member is fixedly connected to the air flow agitator and the support member respectively to drive the air flow agitator and the support member to move.

[0019] Optionally, the transmission member includes a lead screw and a first connecting plate;

[0020] The first connecting plate is threadedly connected to the lead screw; the lead screw is connected to the first driving member, and the lead screw is rotatably connected to the base;

[0021] The first connecting plate is fixedly connected to the air flow agitator and the supporting member respectively.

[0022] Optionally, a sliding block and a protrusion are provided on a side of the first connecting plate opposite to the base, and a sliding rail is provided on the base;

[0023] The sliding block is slidably connected to the sliding rail, and the protrusion is threadedly connected to the lead screw.

[0024] Optionally, the heat dissipation device further comprises a second connecting plate and a connecting member, the second connecting plate is provided with a first through hole, and the air flow agitator comprises an impeller, a rotating shaft and a telescopic tube;

[0025] The telescopic tube is sleeved outside the rotating shaft, one end of the telescopic tube is connected to the first connecting plate, and the other end is connected to the second connecting plate;

[0026] The impeller is disposed between the support member and the second connecting plate, and is used to stir the airflow;

[0027] One end of the connection is connected to the support member, and the other end passes through the first penetration hole and the telescopic tube in sequence and is connected to the first connecting plate.

[0028] Optionally, the number of the connecting members includes two, and the two connecting members are respectively connected to two ends of the supporting member;

[0029] The connecting member is passed through the telescopic tube, and two ends of the connecting member are respectively connected to the supporting member and the first connecting plate.

[0030] Optionally, the connecting member includes a first connecting segment, a second connecting segment and a third connecting segment connected in sequence, the second connecting segment intersects with the first connecting segment and the third connecting segment respectively, the first connecting segment and the second connecting segment are arranged between the support member and the second connecting plate, and an end of the third connecting segment away from the second connecting segment passes through the first penetration hole and the telescopic tube in sequence.

[0031] Optionally, the first connecting plate includes a vertical portion and a horizontal portion that are connected to each other; the slider is provided on the side of the vertical portion facing the base; a protrusion is provided on the side of the vertical portion facing the base, and the protrusion is threadedly connected to the lead screw; one end of the horizontal portion away from the vertical portion is fixedly connected to the airflow agitator and the support member respectively.

[0032] In a second aspect, a single crystal furnace system is also disclosed, including a single crystal furnace and the above-mentioned heat dissipation device;

[0033] The air flow agitator of the heat dissipation device is at least partially disposed in the single crystal furnace, and is used to agitate the air flow in the single crystal furnace.

[0034] Optionally, the single crystal furnace system comprises a heat preservation tube arranged in the single crystal furnace, a heat preservation felt plate is arranged at the bottom of the single crystal furnace, and the outer diameter of the heat preservation felt plate is larger than the inner diameter of the heat preservation tube and smaller than the outer diameter of the heat preservation tube;

[0035] The driving component in the heat dissipation device drives the heat preservation tube to move up and down. When the driving component drives the heat preservation tube to move away from the heat preservation felt plate, a gap is formed between the heat preservation tube and the heat preservation felt plate.

[0036] Optionally, the bottom of the single crystal furnace is provided with a second penetration hole for penetrating at least part of the airflow agitator.

[0037] Optionally, the support member of the heat dissipation device abuts against the bottom of the insulation tube, the support member is used to support the insulation tube and drive the insulation tube to move up and down, and the air flow agitator of the heat dissipation device is used to stir the air flow in the single crystal furnace.

[0038] Optionally, a step is provided at the edge of the thermal insulation felt board; when the thermal insulation tube approaches the thermal insulation felt board, it abuts against the step.

[0039] Optionally, the thermal insulation felt board includes a first sub-felt board and a second sub-felt board;

[0040] The first sub-felt plate is arranged between the second sub-felt plate and the furnace bottom plate;

[0041] The outer diameter of the first sub-mat is smaller than the outer diameter of the second sub-mat, and the first sub-mat and the second sub-mat are combined to form the step.

[0042] Optionally, when the support member drives the heat-insulating tube to descend, the inner wall of the heat-insulating tube fits with the outer wall of the first sub-felt board, and the bottom wall of the heat-insulating tube fits with the top wall of the second sub-felt board.

[0043] Optionally, a reinforcing plate is provided at the bottom of the heat-insulating cylinder, the reinforcing plate is used to support the heat-insulating cylinder, and a side of the reinforcing plate away from the heat-insulating cylinder abuts against the supporting member;

[0044] The inner diameter of the reinforcing plate is equal to the outer diameter of the heat-insulating tube, and the outer diameter of the reinforcing plate is greater than or equal to the outer diameter of the heat-insulating tube.

[0045] The utility model embodiment includes the following advantages:

[0046] In an embodiment of the utility model, the driving component can drive the air flow agitator to rotate, so that the air flow agitator can stir the air flow, accelerate the exchange of cold and hot air flows, speed up the cooling speed of the single crystal furnace, and shorten the shutdown time of the single crystal furnace.

[0047] In an embodiment of the utility model, the driving assembly can drive the support member and the air flow agitator to move up and down. In this way, during the shutdown and cooling process of the single crystal furnace, the driving assembly can be used to drive the support member and the air flow agitator to rise, so that the support member can drive the insulation tube to rise, which can destroy the insulation measures in the single crystal furnace, so that a gap is generated between the insulation tube and the bottom of the single crystal furnace, which is beneficial to heat dissipation. Moreover, the air flow agitator rises, so that the air flow agitator can stir the airflow at the gap, accelerate the exchange of cold and hot airflows, speed up the cooling speed of the single crystal furnace, shorten the shutdown time of the single crystal furnace, and improve the production efficiency of the single crystal furnace.

[0048] During the crystal pulling process of the single crystal furnace, the driving assembly can also be used to drive the support member and the air flow agitator to descend, so that the support member drives the insulation tube to descend, and the insulation tube is restored to its original position, so that the insulation tube abuts the bottom of the single crystal furnace, effectively ensuring the thermal field environment during the crystal pulling process.

[0049] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0050] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0051] Figure 1 It is a structural schematic diagram of a heat dissipation device in an embodiment of the utility model;

[0052] Figure 2 It is a structural schematic diagram of another heat dissipation device in an embodiment of the utility model;

[0053] Figure 3 This is a structural schematic diagram of a single crystal furnace system in an embodiment of the utility model;

[0054] Figure 4 It is a structural schematic diagram of another single crystal furnace system in an embodiment of the utility model.

[0055] Reference numerals:

[0056] 100-heat dissipation device, 1-base, 11-slide rail, 2-driving assembly, 21-first driving member, 22-transmission member, 221-screw, 222-first connecting plate, 2221-horizontal portion, 2222-vertical portion, 3-air flow agitator, 31-second driving member, 32-rotating shaft, 33-impeller, 331-blade, 34-telescopic tube, 4-support member, 51-second connecting plate, 511 - first through hole, 52 - connecting piece, 521 - first connecting section, 522 - second connecting section, 523 - third connecting section, 53 - reinforcing rib, 200 - insulation tube, 201 - upper insulation tube, 202 - middle insulation tube, 203 - lower insulation tube, 300 - single crystal furnace, 301 - furnace body, 302 - furnace bottom plate, 303 - insulation felt board, 400 - reinforcing plate, 500 - heater, 600 - crucible. DETAILED DESCRIPTION

[0057] The embodiments of the utility model will be described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the utility model, and cannot be understood as limiting the utility model. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of this application.

[0058] The term "first" or "second" in the specification and claims of this application may include one or more of the features explicitly or implicitly. In the description of this utility model, unless otherwise specified, "multiple" means two or more. In addition, "and / or" in the specification and claims means at least one of the connected objects, and the character " / " generally means that the objects connected before and after are in an "or" relationship.

[0059] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0060] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0061] Combine the following Figure 1 - Figure 4 The heat dissipation device and the single crystal furnace system described in the embodiment of the utility model are described. The heat dissipation device described in the embodiment of the utility model can be used to cool the single crystal furnace 300, such as Figure 3 and Figure 4 As shown, the single crystal furnace 300 may include a furnace body 301 and an insulation tube 200, a crucible 600, a heater 500, etc. arranged in the furnace body 301; the heater 500 may be arranged around the crucible 600 to heat the silicon material in the crucible 600; the insulation tube 200 may play a role in heat insulation, and the insulation tube 200 may be covered outside the heater 500 and the crucible 600 to provide a thermal field environment for the crucible 600; the bottom of the insulation tube 200 may abut against the furnace bottom plate 302 of the single crystal furnace, so as to prevent the heat in the thermal field environment from being lost from the position where the insulation tube 200 abuts against the furnace bottom plate 302.

[0062] In some optional embodiments of the present invention, the heat dissipation device may specifically include: a base 1, a driving component 2 and an air flow agitator 3, wherein the air flow agitator 3 is at least partially arranged in the single crystal furnace 300; wherein the air flow agitator 3 is movably connected to the base 1; the driving component 2 is arranged on the base 1, and the driving component 2 is connected to the air flow agitator 3, and the driving component 2 is used to drive the air flow agitator 3 to move up and down, so that the air flow agitator 3 can stir the airflow, accelerate the exchange of cold and hot airflows, speed up the cooling speed of the single crystal furnace 300, and shorten the shutdown time of the single crystal furnace 300.

[0063] Optionally, the air flow agitator 3 includes a second driving member 31, a rotating shaft 32 and an impeller 33; the impeller 33 is connected to one end of the rotating shaft 32; the second driving member 31 is connected to the end of the rotating shaft 32 away from the impeller 33, and the second driving member 31 is used to drive the impeller 33 to rotate through the rotating shaft 32 to stir the air flow; the end of the rotating shaft 32 away from the impeller 33 is connected to the driving component 2.

[0064] In the embodiment of the utility model, the second driving member 31 can drive the impeller 33 to rotate through the rotating shaft 32, so that the impeller 33 can stir the airflow, accelerate the speed of the gas flow, and thus accelerate the speed of the heat exchange. The end of the rotating shaft 32 away from the impeller 33 is connected to the driving component 2, so that the driving component 2 can drive the impeller 33 to move up and down through the rotating shaft 32.

[0065] Specifically, the second driving member 31 may be a motor or a cylinder.

[0066] Specifically, one end of the rotating shaft 32 may be connected to the second driving member 31 , and the other end may be connected to the impeller 33 , so that the rotating shaft 32 can transmit the driving force of the second driving member 31 to the impeller 33 .

[0067] Specifically, the impeller 33 may be fixedly connected to the rotating shaft 32 so that the impeller 33 rotates synchronously with the rotating shaft 32 , and during the rotation of the impeller 33 , the gas flow may be driven.

[0068] Specifically, the second driving member 31 is connected to the first connecting plate 222 , so that the first connecting plate 222 can support the second driving member 31 .

[0069] Optionally, the impeller 33 includes a plurality of blades 331 ; the plurality of blades 331 are arranged along the circumference of the rotating shaft 32 , and a gap exists between two adjacent blades 331 ; one end of the blade 331 is fixedly connected to the rotating shaft 32 , and the other end extends away from the rotating shaft 32 .

[0070] In the embodiment of the utility model, a plurality of blades 331 are arranged along the circumference of the rotating shaft 32, and there is a gap between two adjacent blades 331. In this way, when the rotating shaft 32 drives the blades 331 to rotate, it is convenient for the blades 331 to drive the gas flow, thereby accelerating the heat exchange.

[0071] Specifically, the number of blades 331 can be set according to actual needs, and the embodiment of the utility model does not specifically limit this.

[0072] In this embodiment, after the furnace is shut down for cooling, gas can continue to be introduced into the furnace, and the driving component 2 can drive the air flow agitator to rotate, so that the air flow agitator can stir the air flow and accelerate the exchange of cold and hot air flows, thereby speeding up the cooling speed of the single crystal furnace 300 and shortening the shutdown time of the single crystal furnace 300.

[0073] Further, refer to Figure 1 and Figure 2 As shown, the heat dissipation device also includes a support member 4; at least a portion of the support member 4 is arranged above the air flow agitator 3, and the support member 4 is connected to the driving component 2, and the driving component 2 drives the support member 4 to move up and down, wherein the support member 4 can be used to support the insulation cylinder 200 in the single crystal furnace 300.

[0074] Specifically, the support member 4 and the air flow agitator 3 are both movably connected to the base 1; the driving component 2 is arranged on the base 1, and the driving component 2 is respectively connected to the support member 4 and the air flow agitator 3, and the driving component 2 is used to drive the support member 4 and the air flow agitator 3 to move up and down.

[0075] In the embodiment of the utility model, during the cooling process of the single crystal furnace, the driving assembly 2 can be used to drive the support 4 and the air flow agitator 3 to rise, so that the support 4 can drive the insulation tube 200 to rise, destroy the insulation measures in the single crystal furnace 300, and generate a gap between the insulation tube 200 and the furnace bottom plate 302, which is conducive to heat dissipation. The air flow agitator 3 rises, and the air flow agitator 3 can stir the airflow at the gap to accelerate the exchange of cold and hot airflows, which can speed up the cooling speed of the single crystal furnace, shorten the shutdown time of the single crystal furnace, and improve the production efficiency of the single crystal furnace. During the crystal pulling process of the single crystal furnace, the driving assembly 2 can also be used to drive the support 4 and the air flow agitator 3 to descend, so that the support 4 drives the insulation tube 200 to descend, and the insulation tube 200 is restored to its original position, so that the insulation tube 200 abuts against the furnace bottom plate 302, effectively ensuring the thermal field environment during the crystal pulling process.

[0076] In the embodiment of the utility model, the base 1 is the main structure of the heat dissipation device, and is used to install and support the driving component 2, the air flow agitator 3 and the support member 4, etc.

[0077] Specifically, the driving assembly 2 is disposed on the base 1 , and the driving assembly 2 is respectively connected to the air flow agitator 3 and the support member 4 , so as to provide driving force to the air flow agitator 3 and the support member 4 .

[0078] Specifically, the air flow agitator 3 and the support member 4 can be movably connected to the base 1 , and driven by the driving component 2 , the air flow agitator 3 and the support member 4 can perform lifting movements relative to the base 1 .

[0079] Specifically, the support member 4 can be disposed above the air flow agitator 3, and the support member 4 can be used to support the heat preservation cylinder. The support member 4 can be a support plate or a support rod.

[0080] Furthermore, when the heat dissipation device 100 is installed in the single crystal furnace 300, when the single crystal furnace 300 is stopped for cooling, the support member 4 can first lift the insulation tube 200 to generate a gap between the bottom of the insulation tube 200 and the furnace bottom plate 302, so that the inside and outside of the insulation tube 200 are connected, and the heat in the thermal field environment can flow out from the gap, and the airflow agitator 3 can rise to the gap, and the airflow agitator 3 can stir the airflow to accelerate the gas flow. The heat in the thermal field environment can flow from the gap to the water-cooled wall of the furnace body 301, which can accelerate the heat exchange and improve the cooling rate of the single crystal furnace.

[0081] Specifically, when crystal pulling is required, the air flow agitator 3 and the support 4 can both be lowered, so that the insulation tube 200 can return to its original position, and the insulation tube 200 can abut against the furnace bottom plate 302, so that the insulation tube 200 can play a heat insulating role, effectively ensuring the thermal field environment inside the insulation tube 200 and improving the crystal pulling efficiency.

[0082] Specifically, the air flow agitator 3 and the support member 4 can move independently, or can move synchronously, etc., and can be specifically configured according to actual needs, and the embodiment of the utility model does not make specific limitations on this.

[0083] Specifically, the heights to which the air flow agitator 3 and the support member 4 are lifted and lowered can be set according to actual needs, and the embodiment of the utility model does not specifically limit this.

[0084] Optionally, the driving assembly 2 may include a first driving member 21 and a transmission member 22; the first driving member 21 may be connected to the transmission member 22 to drive the transmission member 22 to move; the transmission member 22 may be fixedly connected to the air flow agitator 3 and the support member 4 respectively to drive the air flow agitator 3 and the support member 4 to move.

[0085] In the embodiment of the utility model, the driving component 2 can drive the air flow agitator 3 and the support member 4 to move through the transmission member 22. When the support member 4 lifts the insulation cylinder 200, it can ensure that the air flow agitator 3 rises to a position relative to the gap between the insulation cylinder 200 and the furnace bottom plate 302, thereby improving the cooling effect of the single crystal furnace.

[0086] Specifically, Figure 4As shown, when the support member 4 lifts the insulation cylinder 200 upward, a gap is generated between the insulation cylinder 200 and the furnace bottom plate 302 of the single crystal furnace 300, and the air flow agitator 3 can rise to a height corresponding to the gap, so that the air flow agitator 3 can stir the air flow there, so that the heat radiated by the heater 500 and the crucible 600 can flow along the gap to the water-cooled wall of the single crystal furnace 300, and a stable forced convection heat exchange can be formed in the furnace body 301 of the single crystal furnace, which can greatly accelerate the cooling speed of the single crystal furnace 300, thereby shortening the furnace stop time and improving the utilization efficiency of the single crystal furnace 300.

[0087] Specifically, the first driving member 21 may be a motor or a cylinder.

[0088] Optionally, the transmission member 22 is fixedly connected to the air flow agitator 3 and the support member 4 respectively, so that the transmission member 22 can drive the air flow agitator 3 and the support member 4 to move synchronously.

[0089] Optionally, the transmission member 22 may include a screw 221 and a first connecting plate 222; the first connecting plate 222 may be threadedly connected to the screw 221, the screw 221 may be connected to the first driving member 21, and the screw is rotatably connected to the base 1; the first connecting plate 222 is fixedly connected to the airflow agitator 3 and the support member 4 respectively.

[0090] In the embodiment of the utility model, the first driving member 21 can drive the lead screw 221 to rotate, the lead screw 221 rotation can drive the first connecting plate 222 to move up and down, and the first connecting plate 222 can drive the air flow agitator 3 and the support member 4 to move up and down synchronously. In the embodiment of the utility model, the lifting movement can be achieved by the lead screw 221 transmission, and the implementation method is relatively simple and convenient.

[0091] Optionally, a slider and a protrusion may be provided on the side of the first connecting plate 222 opposite to the base 1 , and a slide rail 11 may be provided on the base 1 ; the slider is slidably connected to the slide rail, and the protrusion is threadedly connected to the lead screw 221 .

[0092] In the embodiment of the utility model, the reliability and stability of the lifting movement of the first connecting plate 222 relative to the base 1 can be further ensured by the cooperation between the slider and the slide rail 11 .

[0093] Specifically, the slide rail 11 can be arranged on the base 1 in the vertical direction, so that the slider can rise or fall along the slide rail 11, and then the first connecting plate 222 can be lifted and lowered relative to the base 1. Since the first connecting plate 222 is fixedly connected to the air flow agitator 3 and the support member 4 respectively, the first connecting plate 222 can drive the air flow agitator 3 and the support member 4 to rise and fall synchronously.

[0094] Optionally, the first connecting plate 222 may include a vertical portion 2222 and a horizontal portion 2221 that are connected to each other; a sliding block may be provided on the side of the vertical portion 2222 facing the base 1; a protrusion may be provided on the side of the vertical portion 2222 facing the base 1, and the protrusion is threadedly connected to the screw 221; the end of the horizontal portion 2221 away from the vertical portion 2222 may be fixedly connected to the airflow agitator 3 and the support 4 respectively.

[0095] In the embodiment of the utility model, the lead screw 221 can drive the protrusion to rise and fall, and the protrusion can drive the vertical part 2222 to rise and fall together. The slider and the slide rail 11 cooperate to limit the lifting trajectory of the vertical part 2222, so as to improve the reliability of the lifting of the first connecting plate 222 relative to the base 1. The vertical part 2222 can drive the horizontal part 2221 to rise and fall, and the horizontal part 2221 can drive the air flow agitator 3 and the support member 4 to rise and fall, thereby realizing the reliability of the synchronous movement of the air flow agitator 3 and the support member 4.

[0096] Specifically, the angle between the horizontal portion 2221 and the vertical portion 2222 can be close to 90°, or the angle between the horizontal portion 2221 and the vertical portion 2222 can be equal to 90°, so that the horizontal portion 2221 and the vertical portion 2222 are perpendicular, which can improve the convenience of connecting the first connecting plate 222 with the screw 221, the airflow agitator 3 and the support member 4 respectively.

[0097] Optionally, the heat dissipation device 100 may also include an impeller 33, a second connecting plate 51 and a connecting member 52, the second connecting plate 51 is provided with a first through hole 511, and the air flow agitator 3 may include a telescopic tube 34; the telescopic tube 34 can be sleeved outside the rotating shaft 32, one end of the telescopic tube 34 can be connected to the first connecting plate 222, and the other end can be connected to the second connecting plate 51; the impeller 33 can be arranged between the support member 4 and the second connecting plate 51, for stirring the air flow; one end of the connecting member 52 can be connected to the support member 4, and the other end can pass through the first through hole 511 and the telescopic tube 34 in sequence and be connected to the first connecting plate 222.

[0098] In the embodiment of the utility model, the telescopic tube 34 can be sleeved outside the rotating shaft 32, so that the telescopic tube 34 can protect the rotating shaft 32. One end of the connecting member 52 is connected to the support member 4, and the other end passes through the first penetration hole 511 and the telescopic tube 34 in sequence and is connected to the first connecting plate 222, so that the telescopic tube 34 can also protect the support member 4.

[0099] Specifically, the telescopic tube 34 is arranged between the first connecting plate 222 and the second connecting plate 51, and the second connecting plate 51 can limit the telescopic tube 34, so that when the first connecting plate 222 drives the rotating shaft 32 to rise, the telescopic tube 34 can be compressed; when the first connecting plate 222 drives the rotating shaft 32 to descend, the telescopic tube 34 can be stretched.

[0100] Specifically, the telescopic tube 34 may be a bellows that can produce telescopic deformation.

[0101] Specifically, the impeller 33 and the support member 4 can be arranged inside the furnace body 301, and the base 1, the first connecting plate 222, the second connecting plate 51 and the telescopic tube 34 can be arranged outside the furnace body 301; the second connecting plate 51 can be arranged at the bottom of the single crystal furnace 300, and the second connecting plate 51 can abut against the outer wall of the furnace body 301; the first connecting plate 222 rises, the telescopic tube 34 can be compressed, the connecting member 52 drives the support member 4 to rise, and the rotating shaft 32 drives the impeller 33 to rise; the first connecting plate 222 descends, the telescopic tube 34 can extend, the connecting member 52 drives the support member 4 to descend, and the rotating shaft 32 drives the impeller 33 to descend.

[0102] Specifically, one end of the connecting member 52 is connected to the supporting member 4 , and the other end can be connected to the first connecting plate 222 . The connecting member 52 can connect and support the supporting member 4 .

[0103] Specifically, the number of the connecting members 52 can be one or at least two, etc., and the number of the connecting members 52 can be adaptively selected according to the number, size and shape of the supporting members 4.

[0104] Optionally, the number of the connecting members 52 may include two, and the two connecting members 52 may be respectively connected to two ends of the supporting member 4 , so as to facilitate the supporting member 4 to be erected above the airflow agitator 3 .

[0105] Alternatively, if Figure 1 and Figure 2 As shown, the connecting member 52 may include a first connecting segment 521, a second connecting segment 522 and a third connecting segment 523 connected in sequence, the second connecting segment 522 intersects with the first connecting segment 521 and the third connecting segment 523 respectively, the first connecting segment 521 and the second connecting segment 522 are arranged between the support member 4 and the second connecting plate 51, and one end of the third connecting segment 523 away from the second connecting segment 522 passes through the first penetration hole 511 and the telescopic tube 34 in sequence to be connected to the first connecting plate 222.

[0106] In the embodiment of the utility model, the first connecting section 521, the second connecting section 522 and the third connecting section 523 are connected in sequence, and the second connecting section 522 intersects with the first connecting section 521 and the third connecting section 523 respectively, so that the connecting member 52 can form two bends, which can improve the convenience of the connecting member 52 to cooperate with the support member 4, the telescopic tube 34 and the first connecting plate 222 respectively.

[0107] Specifically, the angle between the second connecting segment 522 and the first connecting segment 521 may approach 90° or be equal to 90°, and the angle between the second connecting segment 522 and the third connecting segment 523 may approach 90° or be equal to 90°.

[0108] Specifically, a reinforcing rib 53 may be provided at a connection between the second connecting segment 522 and the first connecting segment 521 , and a reinforcing rib 53 may be provided at a connection between the second connecting segment 522 and the third connecting segment 523 , so as to further improve the structural strength of the connecting member 52 .

[0109] The heat dissipation device described in the embodiment of the utility model has at least the following advantages:

[0110] In an embodiment of the utility model, the driving component can drive the air flow agitator to rotate, so that the air flow agitator can stir the air flow, accelerate the exchange of cold and hot air flows, speed up the cooling speed of the single crystal furnace, and shorten the shutdown time of the single crystal furnace.

[0111] Furthermore, an embodiment of the utility model also discloses a single crystal furnace system, including a single crystal furnace 300 and the above-mentioned heat dissipation device 100; the air flow agitator 3 of the heat dissipation device 100 is at least partially arranged in the single crystal furnace 300, and is used to stir the air flow in the single crystal furnace 300, which can accelerate the exchange of cold and hot air flows, and can speed up the cooling speed of the single crystal furnace 300, and shorten the shutdown time of the single crystal furnace 300.

[0112] Specifically, the single crystal furnace system may further include an insulation tube 200, and an insulation felt board 303 may be provided at the bottom of the single crystal furnace 300; the insulation felt board 303 may be laid on the furnace bottom plate 302, and the outer diameter of the insulation felt board 303 may be larger than the inner diameter of the insulation tube 200, and smaller than the outer diameter of the insulation tube 200; the insulation tube 200 may be arranged in the single crystal furnace 300, and the driving component 2 of the heat dissipation device 100 may drive the insulation tube 200 to move up and down, and when the driving component 2 drives the insulation tube 200 away from the insulation felt board 303, there is a gap between the insulation tube 200 and the insulation felt board 303.

[0113] In the embodiment of the utility model, by utilizing the gap between the insulation tube 200 and the insulation felt plate 303, the air flow agitator 3 can be accelerated to dissipate the heat in the insulation tube 200, further accelerating the exchange of cold and hot air flows, thereby accelerating the cooling speed of the single crystal furnace 300 and shortening the shutdown time of the single crystal furnace 300.

[0114] As an embodiment, the air flow agitator 3 of the heat dissipation device 100 is at least partially located in the single crystal furnace 300. The air flow agitator 3 is movably connected to the base 1; the driving component 2 is disposed on the base 1, the driving component 2 is connected to the air flow agitator 3, and the driving component 2 is used to drive the air flow agitator 3 to move up and down.

[0115] Optionally, the air flow agitator 3 includes a second driving member 31, a rotating shaft 32 and an impeller 33; the impeller 33 is connected to one end of the rotating shaft 32; the second driving member 31 is connected to the end of the rotating shaft 32 away from the impeller 33, and the second driving member 31 is used to drive the impeller 33 to rotate through the rotating shaft 32 to stir the air flow; the end of the rotating shaft 32 away from the impeller 33 is connected to the driving component 2.

[0116] Optionally, the impeller 33 includes a plurality of blades 331 ; the plurality of blades 331 are arranged along the circumference of the rotating shaft 32 , and a gap exists between two adjacent blades 331 ; one end of the blade 331 is fixedly connected to the rotating shaft 32 , and the other end extends away from the rotating shaft 32 .

[0117] In this embodiment, the impeller 33 of the air flow agitator 3 is located in the single crystal furnace 300, and a gap for accommodating the impeller is provided in the single crystal furnace. The driving component drives the impeller to rotate to stir the air flow. Alternatively, the driving component 2 of the heat dissipation device 100 can drive the insulation cylinder 200 to move up and down, and the driving component 2 drives the insulation cylinder 200 away from the insulation felt board 303. There is a gap between the insulation cylinder 200 and the insulation felt board 303. The impeller 33 rotates, driving the gas to flow quickly, which can quickly reduce the temperature in the insulation cylinder 200, thereby accelerating the cooling speed of the single crystal furnace 300 and shortening the shutdown time of the single crystal furnace 300.

[0118] In another preferred embodiment, the heat dissipation device 100 also includes a support member 4, which is arranged above the air flow agitator 3, and the support member 4 is connected to the driving component 2, and the driving component 2 drives the support member 4 to move up and down, wherein the support member 4 is used to support the insulation tube 200.

[0119] Specifically, the support member 4 of the heat dissipation device 100 can abut against the bottom of the insulation tube 200 , and the support member 4 is used to support the insulation tube 200 and drive the insulation tube 200 to move up and down. The air flow agitator 3 of the heat dissipation device 100 is used to stir the air flow in the single crystal furnace 300 .

[0120] In the embodiment of the utility model, the support member 4 can drive the insulation tube 200 to rise, so that a gap is generated between the bottom of the insulation tube 200 and the furnace bottom plate 302, so as to destroy the insulation measures in the single crystal furnace 300, so that the heat in the thermal field environment can leak outward, and the air flow agitator 3 can stir the air flow in the single crystal furnace 300, which can speed up the speed of cold and heat exchange, thereby shortening the cooling time of the single crystal furnace 300. The support member 4 and the air flow agitator 3 can be lowered, so that the insulation tube 200 can return to its original position, and the bottom of the insulation tube 200 abuts against the furnace bottom plate 302, which can also play a role in heat insulation for the thermal field environment, ensuring the efficiency and quality of crystal pulling.

[0121] Optionally, the single crystal furnace system also includes a crucible 600 and a heater 500, which are arranged in the insulation tube 200. When the heater 500 heats the crucible 600, the bottom of the insulation tube 200 abuts against the furnace bottom plate 302, so that the temperature inside the insulation tube 200 is higher, and the interior of the insulation tube 200 can form a thermal field environment suitable for crystal pulling.

[0122] Specifically, during the process of stopping the furnace for crystal pulling, the vacuum pipeline valve of the single crystal furnace 300 can be closed, and the inert gas can continue to be passed into the single crystal furnace 300. After the gas pressure in the single crystal furnace 300 reaches 0.6-1atm (the value of 1 standard atmospheric pressure), the ventilation is stopped. In this way, under the action of the air flow agitator 3, a continuous air flow circulation can be formed in the single crystal furnace 300. When the gas passes through the heater 500 and the crucible 600, the gas can be heated. When the gas flows to the water-cooled wall on the furnace body 301, the gas releases heat to the water-cooled wall of the furnace body 301, thereby forming a stable forced convection heat exchange in the single crystal furnace 300. In the embodiment of the utility model, radiation heat exchange can be combined with forced convection heat exchange, which can greatly accelerate the cooling speed of the single crystal furnace 300, shorten the shutdown time of the single crystal furnace 300, and improve the use efficiency of the single crystal furnace 300.

[0123] Specifically, the heat dissipation device 100 is disposed at the bottom of the single crystal furnace 300. Figure 3 As shown, a situation in which the number of heat dissipation devices 100 is two is illustrated. The two heat dissipation devices 100 are arranged on both sides of the single crystal furnace 300. The number of heat dissipation devices 100 can be set according to actual needs, and the embodiment of the utility model does not make specific limitations on this.

[0124] Specifically, a second penetration hole may be provided on the furnace bottom plate 302 of the single crystal furnace 300 , and the second penetration hole may be used to penetrate the rotating shaft 32 and the connecting member 52 .

[0125] Specifically, the insulation tube 200 may include an upper insulation tube 201 and a lower insulation tube 203 , or the insulation tube 200 may also include an upper insulation tube 201 , a middle insulation tube 202 and a lower insulation tube 203 , and the bottom of the lower insulation tube 203 may abut against the support member 4 .

[0126] Optionally, the insulation felt board 303 can be laid on the furnace bottom plate 302; the outer diameter of the insulation felt board 303 can be larger than the inner diameter of the insulation tube 200, and smaller than the outer diameter of the insulation tube 200, so as to form a accommodating space for the impeller.

[0127] The support member 4 abuts against the outer periphery of the insulation tube 200. When the support member 4 drives the insulation tube 200 to descend, the inner periphery of the insulation tube 200 abuts against the insulation felt board 303. When the support member 4 drives the insulation tube 200 to rise, there is a gap between the insulation tube 200 and the insulation felt board 303.

[0128] In the embodiment of the utility model, when the support member 4 drives the insulation tube 200 to descend, the inner periphery of the insulation tube 200 abuts against the insulation felt board 303, which can improve the sealing effect between the insulation tube 200 and the insulation felt board 303 and improve the thermal insulation effect on the thermal field environment.

[0129] Specifically, the material of the heat-insulating tube 200 and the material of the heat-insulating felt board 303 can be the same, and both can be heat-insulating felt, which can play a better role in heat insulation.

[0130] Specifically, the outer diameter of the thermal insulation felt plate 303 may be smaller than the outer diameter of the thermal insulation cylinder 200 , so that both the support member 4 and the thermal insulation felt plate 303 may abut against the bottom of the thermal insulation cylinder 200 .

[0131] Optionally, a step is provided at the edge of the insulation felt board 303, and when the insulation tube 200 is close to the insulation felt board 303, the insulation tube 200 abuts against the step to increase the contact area between the insulation tube 200 and the insulation felt board 303 and improve the insulation performance.

[0132] Optionally, a step is formed at the circumferential edge of the thermal insulation felt plate 303 , and when the thermal insulation cylinder 200 approaches the thermal insulation felt plate 303 and abuts against the step, the thermal insulation cylinder 200 contacts two step surfaces of the thermal insulation felt plate 303 .

[0133] Optionally, the insulation felt board 303 may include a first sub-felt board and a second sub-felt board; the first sub-felt board may be arranged between the second sub-felt board and the furnace bottom plate 302; the outer diameter of the first sub-felt board may be smaller than the outer diameter of the second sub-felt board; the first sub-felt board and the second sub-felt board are combined to form the step.

[0134] Specifically, when the support member 4 drives the insulation tube 200 to descend, the inner wall of the insulation tube 200 fits with the outer wall of the first sub-felt plate, and the bottom wall of the insulation tube 200 fits with the top wall of the second sub-felt plate, so that two seals can be formed between the insulation tube 200 and the insulation felt plate 303, which can further improve the sealing of the connection between the insulation tube 200 and the insulation felt plate 303, improve the thermal insulation effect on the thermal field environment, and ensure the crystal pulling effect.

[0135] Specifically, the first sub-felt plate and the second sub-felt plate may be integrally formed, and both the first sub-felt plate and the second sub-felt plate may be circular plate structures, so that the cross-sectional shape of the thermal insulation felt plate 303 may be T-shaped.

[0136] Optionally, a reinforcing plate 400 may be provided at the bottom of the insulation tube 200, and the reinforcing plate 400 may be used to support the insulation tube 200; the inner diameter of the reinforcing plate 400 is equal to the outer diameter of the insulation tube 200, and the outer diameter of the reinforcing plate 400 is greater than or equal to the outer diameter of the insulation tube 200.

[0137] In the embodiment of the utility model, a reinforcing plate 400 is provided at the bottom of the heat preservation tube 200 to further improve the strength of the heat preservation tube 200 , so that the support member 4 can drive the heat preservation tube 200 to move up and down through the reinforcing plate 400 .

[0138] Specifically, the side of the reinforcing plate 400 away from the insulation tube 200 can be abutted against the support member 4, and the reinforcing plate 400 can be an annular structure. The inner diameter of the reinforcing plate 400 is equal to the inner diameter of the insulation tube 200, and the outer diameter of the reinforcing plate 400 is larger than the outer diameter of the insulation tube 200, so that the contact area at the bottom of the reinforcing plate 400 is larger, which is convenient for the reinforcing plate 400 to abut against the support member 4 and the insulation felt board 303 respectively.

[0139] Specifically, the thickness of the reinforcing plate 400 may be smaller than the thickness of the first sub-felt plate, so that the inner wall of the heat preservation cylinder 200 abuts against the outer wall of the first sub-felt plate, effectively ensuring the heat insulation effect on the thermal field environment.

[0140] Specifically, the working state of the single crystal furnace system includes a crystal pulling state and a furnace shutdown state. Figure 3 As shown, the single crystal furnace system is in the crystal pulling state, the first connecting plate 222 descends, and drives the impeller 33 to descend through the rotating shaft 32, drives the support member 4 to descend through the connecting member 52, and the support member 4 drives the insulation tube 200 to descend through the reinforcing plate 400, the inner wall of the reinforcing plate 400 and the inner wall of the insulation tube 200 are both in contact with the outer wall of the first sub-felt plate, and the bottom of the reinforcing plate 400 is in contact with the top wall of the second sub-felt plate, which can play a role in heat insulation of the thermal field environment.

[0141] like Figure 4As shown, the single crystal furnace system is in a shutdown state, the first connecting plate 222 rises, and drives the impeller 33 to rise through the rotating shaft 32, drives the support member 4 to rise through the connecting member 52, and the support member 4 drives the insulation tube 200 to rise through the reinforcing plate 400. There is a height difference between the reinforcing plate 400 and the second sub-felt plate, so that there is a gap between the reinforcing plate 400 and the insulation felt plate 303. The heat in the thermal field environment, that is, the heat radiated by the heater 500 and the crucible 600, can flow from the gap to the water-cooled wall of the furnace body 301, and the impeller 33 can rise to a position opposite to the gap, which can speed up the gas flow speed at the gap, speed up the heat loss to the outside in the thermal field environment, improve the speed of heat exchange, and shorten the cooling time of the single crystal furnace 300.

[0142] The single crystal furnace system described in the embodiment of the utility model has at least the following advantages:

[0143] In an embodiment of the utility model, the driving component can drive the air flow agitator to rotate, so that the air flow agitator can stir the air flow, accelerate the exchange of cold and hot air flows, speed up the cooling speed of the single crystal furnace, and shorten the shutdown time of the single crystal furnace.

[0144] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0145] Although the embodiments of the present invention have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A heat dissipation device, characterized in that: include: A base, a driving assembly and an air flow agitator, wherein the air flow agitator is at least partially disposed in the single crystal furnace; wherein, The air flow agitator is connected to the base; The driving assembly is arranged on the base, the driving assembly is connected to the air flow agitator, and the driving assembly is used to drive the air flow agitator to move up and down.

2. The heat dissipation device according to claim 1, characterized in that: The air flow agitator comprises a second driving member, a rotating shaft and an impeller; The impeller is connected to one end of the rotating shaft; The second driving member is connected to an end of the rotating shaft away from the impeller, and the second driving member is used to drive the impeller to rotate through the rotating shaft to stir the airflow; One end of the rotating shaft away from the impeller is connected to the driving assembly.

3. The heat dissipation device according to claim 2, characterized in that: The impeller includes a plurality of blades; The plurality of blades are arranged along the circumference of the rotating shaft, and there is a gap between two adjacent blades; One end of the blade is fixedly connected to the rotating shaft, and the other end of the blade extends away from the rotating shaft.

4. The heat dissipation device according to claim 1, characterized in that: The heat dissipation device also includes a support member; At least a portion of the support member is disposed above the airflow agitator. The support member is connected to the driving assembly, and the driving assembly drives the support member to move up and down.

5. The heat dissipation device according to claim 4, characterized in that: The driving assembly includes a first driving member and a transmission member; The first driving member is connected to the transmission member and is used to drive the transmission member to move; The transmission member is fixedly connected to the air flow agitator and the support member to drive the air flow agitator and the support member to move.

6. The heat dissipation device according to claim 5, characterized in that: The transmission member includes a lead screw and a first connecting plate; The first connecting plate is threadedly connected to the lead screw; the lead screw is connected to the first driving member, and the lead screw is rotatably connected to the base; The first connecting plate is fixedly connected to the air flow agitator and the supporting member respectively.

7. The heat dissipation device according to claim 6, characterized in that: A sliding block and a protrusion are provided on a side of the first connecting plate opposite to the base, and a sliding rail is provided on the base; The sliding block is slidably connected to the sliding rail, and the protrusion is threadedly connected to the lead screw.

8. The heat dissipation device according to claim 6, characterized in that: The heat dissipation device further comprises a second connecting plate and a connecting member, the second connecting plate is provided with a first through hole, and the air flow agitator comprises an impeller, a rotating shaft and a telescopic tube; The telescopic tube is sleeved outside the rotating shaft, one end of the telescopic tube is connected to the first connecting plate, and the other end is connected to the second connecting plate; The impeller is disposed between the support member and the second connecting plate, and is used to stir the airflow; One end of the connecting member is connected to the supporting member, and the other end passes through the first penetration hole and the telescopic tube in sequence and is connected to the first connecting plate.

9. A single crystal furnace system, characterized in that: It comprises a single crystal furnace and the heat dissipation device according to any one of claims 1 to 8; The air flow agitator of the heat dissipation device is at least partially disposed in the single crystal furnace, and is used to agitate the air flow in the single crystal furnace.

10. The single crystal furnace system according to claim 9, characterized in that: The single crystal furnace system comprises a heat preservation tube arranged in the single crystal furnace, a heat preservation felt plate is arranged at the bottom of the single crystal furnace, and the outer diameter of the heat preservation felt plate is larger than the inner diameter of the heat preservation tube and smaller than the outer diameter of the heat preservation tube; The driving component of the heat dissipation device drives the heat preservation tube to move up and down. When the driving component drives the heat preservation tube to move away from the heat preservation felt board, a gap is formed between the heat preservation tube and the heat preservation felt board.

11. The single crystal furnace system according to claim 10, characterized in that: A step is arranged at the edge of the thermal insulation felt plate; when the thermal insulation tube approaches the thermal insulation felt plate, it abuts against the step.

12. The single crystal furnace system according to claim 10, characterized in that: A reinforcing plate is provided at the bottom of the heat preservation tube, and the reinforcing plate is used to support the heat preservation tube; The inner diameter of the reinforcing plate is smaller than the outer diameter of the heat-insulating cylinder, and the outer diameter of the reinforcing plate is greater than or equal to the outer diameter of the heat-insulating cylinder.

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