Illumination device
By introducing a mirror group and a light concentrating module into the lighting device, the problem of light loss is solved, and the light utilization rate and density uniformity are improved.
Patent Information
- Application Number
- CN202420401921.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-01
- Publication Date
- 2025-02-28
- Estimated Expiration
- 2034-03-01
AI Technical Summary
The existing lighting devices have problems with light loss, resulting in low light utilization.
A lighting device is designed, including a light transmitting plate, a mirror group and a light concentrating module. Light rays pass through the reflection of the mirror group, the concentration of the light-concentrating module and reach the surface of the object to be illuminated through the light-transmitting window, thereby reducing light loss.
By reducing light loss, light utilization is improved and the uniformity of light density is improved.
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Abstract
Description
Technical Field
[0001] The present application relates to the technical field of semiconductor chip production, and in particular to a lighting device. Background Art
[0002] In the semiconductor chip production process, in order to facilitate the subsequent wafer cutting and other processes, before the chip is diced, the wafer is pre-adhered to a film and the outer edge of the film is fixed to a frame to fix the wafer with the film; after the dicing process is completed, the film is irradiated with ultraviolet light to cure and harden the film to reduce the viscosity of the film, so as to facilitate the smooth production of the subsequent packaging process.
[0003] However, the existing lighting devices have the problem of light loss. Therefore, providing a lighting device that can reduce light loss and improve light utilization is a technical problem that needs to be solved urgently. Summary of the invention
[0004] The technical problem to be solved by the present application is to provide a lighting device to reduce light loss and improve light utilization.
[0005] In order to solve the above-mentioned problems, the present application provides an illumination device for illuminating an object to be illuminated which is placed on a stage; the illumination device comprises: a light-transmitting plate located above the stage, the light-transmitting plate having a light-transmitting window; a reflector group located above the light-transmitting plate; a focusing module arranged between the reflector group and the light-transmitting plate; and at least one light source for emitting light, the light being reflected by the reflector group, focused by the focusing module and transmitted through the light-transmitting window in sequence to reach the surface of the object to be illuminated.
[0006] In some embodiments, the light-transmitting plate is a transparent quartz plate having a light-transmitting window.
[0007] In some embodiments, the reflector group includes: at least one first reflector, the first reflector having an arc-shaped reflective surface bent toward the light-transmitting plate, the light source is arranged on the side of the arc-shaped reflective surface facing the light-transmitting plate, and the light is reflected for the first time by the arc-shaped reflective surface of the first reflector; and a second reflector whose upper surface is parallel to the lower surface, and the light that has been reflected for the first time is reflected for the second time by the second reflector.
[0008] In some embodiments, the reflector group includes a plurality of evenly distributed first reflectors, and a light source is disposed on a side of a curved reflective surface of each of the first reflectors that faces the light-transmitting plate.
[0009] In some embodiments, the reflector group includes two first reflectors symmetrically arranged along a symmetry axis perpendicular to the light-transmitting plate, and a light source is arranged on the side of the curved reflective surface of each first reflector facing the light-transmitting plate; the illumination device also includes a rotating module, which can drive the two first reflectors to rotate along the symmetry axis.
[0010] In some embodiments, the focusing module is a convex lens, and the convex lens is disposed close to the lower surface of the second reflector.
[0011] In some embodiments, the lighting device further includes a telescopic bracket, wherein the telescopic bracket is connected to the light focusing module to drive the light focusing module to move.
[0012] In some embodiments, the lighting device further includes a cooling module, and the cooling module is used to cool the light source.
[0013] In some embodiments, the lighting device further includes a retaining seat, and the retaining seat is used to fix the first reflector.
[0014] In some embodiments, the light emitted by the light source is ultraviolet light.
[0015] The above technical solution, by setting a focusing module between the reflector group and the light-transmitting plate, focuses the light reflected by the reflector group in a fixed direction and irradiates it onto the light-transmitting plate, thereby reducing the loss of light between the reflector group and the light-transmitting plate, improving the light utilization rate and the uniformity of the light density.
[0016] It should be understood that the above general description and the detailed description below are exemplary and explanatory only and cannot limit the present application. The techniques, methods and devices known to ordinary technicians in the relevant field may not be discussed in detail, but where appropriate, the techniques, methods and devices should be considered as part of the authorization specification. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments of the present application will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.
[0018] Figure 1 is a schematic diagram of a lighting device in one embodiment of the present application;
[0019] Figure 2 It is a schematic diagram of a partial structure of a lighting device in one embodiment of the present application. DETAILED DESCRIPTION
[0020] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of this application.
[0021] In order to solve the problem of low light utilization rate caused by light loss in the prior art, an embodiment of the present application provides a lighting device.
[0022] See below Figure 1 , which is a schematic diagram of a lighting device in one embodiment of the present application. Figure 1 As shown, the illumination device of this embodiment is used to illuminate the object 61 to be illuminated placed on the stage 11; specifically, the illumination device of this embodiment includes: the stage 11, the light-transmitting plate 21, the reflector group 31, the focusing module 41 and the light source 51. The light-transmitting plate 21 is located above the stage 11, and the light-transmitting plate 21 has a light-transmitting window (the size of the light-transmitting window is larger than the size of the object 61 to be illuminated); the reflector group 31 is located above the light-transmitting plate 21; the focusing module 41 is arranged between the reflector group 31 and the light-transmitting plate 21; the light source 51 is used to emit light, and the light is reflected by the reflector group 31, focused by the focusing module 41 and transmitted by the light-transmitting plate 21 in sequence to reach the surface of the object 61 to be illuminated.
[0023] In this embodiment, the object to be illuminated 61 is a wafer, the light emitted by the light source 51 is ultraviolet light, the wafer is pre-adhered to an adhesive film, and the illumination device is used in the debonding process of the wafer to reduce the adhesive strength of the adhesive film so that the chip formed after cutting the wafer can be easily peeled off from the adhesive film. In other embodiments, the illumination device can also be used in the debonding process of glass and ceramic cutting processes, and further, the illumination device is also suitable for debonding optical lenses, integrated circuit boards, glass filters, etc.
[0024] In some embodiments, the light-transmitting plate 21 may be a transparent quartz plate with a light-transmitting window. By adopting a transparent quartz plate with the characteristics of high temperature resistance, corrosion resistance, good thermal stability, and good light transmission performance, and having a transparent quartz light-transmitting window whose size is larger than the size of the object to be illuminated 61, the light refracted by the focusing module 41 can be selected and irradiated to the surface of the object to be illuminated 61. The light-transmitting plate 21 can be fixedly arranged or movably arranged between the focusing module 41 and the object to be illuminated 61, so as to select and irradiate the light refracted by the focusing module 41 to the surface of the object to be illuminated 61.
[0025] In some embodiments, the reflector group 31 includes: at least one first reflector, the first reflector having an arc-shaped reflective surface bent toward the light-transmitting plate, the light source is arranged on the side of the arc-shaped reflective surface facing the light-transmitting plate, and the light is reflected for the first time by the arc-shaped reflective surface of the first reflector; and a second reflector whose upper surface is parallel to the lower surface, and the light that has been reflected for the first time is reflected for the second time by the second reflector.
[0026] Specifically, in this embodiment, the reflector group 31 includes: two first reflectors 311 and a second reflector 312. The two first reflectors 311 are arranged on a side of the light source 51 away from the second reflector 312, and the two first reflectors 311 are symmetrically arranged along a symmetry axis 310 perpendicular to the light-transmitting plate 21, so as to reflect the light emitted by the light source 51 to the second reflector 312. Each of the first reflectors 311 has an arc-shaped reflective surface 3110 curved toward the light-transmitting plate 21, and the light source 51 is arranged on a side of the arc-shaped reflective surface 3110 facing the light-transmitting plate 21, so as to reflect the light emitted by the light source 51 through the arc-shaped reflective surface 3110 for the first time and reflect it to the second reflector 312. The upper surface of the second reflector 312 is parallel to the lower surface, and the light after the first reflection is reflected for the second time through the second reflector 312. The illumination device further includes a rotating module (not shown), which can drive the two first reflectors 311 to rotate along the symmetry axis 310, so that the light can omnidirectionally illuminate the object to be illuminated 61. In other embodiments, the reflector group 31 may include a plurality of first reflectors evenly distributed, and a light source is disposed on a side of the arc-shaped reflective surface of each first reflector facing the light-transmitting plate, so that the light can omnidirectionally illuminate the object to be illuminated 61.
[0027] In some embodiments, the first reflector 311 may be a cold mirror, and the second reflector 312 may be a cold filter; the first reflector 311 may be made of a metal oxide film coated on glass, which can obtain high-intensity ultraviolet energy, and the second reflector 312 is glass coated with a multi-layer metal film, which can cut off infrared and visible light and allow ultraviolet light to pass through, so as to suppress the temperature rise of the object to be illuminated 61.
[0028] In this embodiment, the focusing module 41 is a convex lens, and the convex lens is arranged near the lower surface of the second reflector 312. The convex lens can focus the light emitted by the light source 51 into an aperture, so that the light emitted by the light source 51 is irradiated to the light-transmitting plate 21 in a fixed direction, thereby reducing the loss of light between the second reflector 312 and the light-transmitting plate 21, improving the light utilization rate and improving the uniformity of light density.
[0029] In some embodiments, the illumination device further includes a telescopic bracket (not shown), which is connected to the light focusing module 41 to drive the light focusing module 41 to move. The telescopic bracket can be driven by a motor to move the light focusing module 41 up and down between the second reflector 312 and the light-transmitting plate 21 to adjust the light density of the light emitted by the light source 51 reaching the light-transmitting plate 21, and further adjust the light intensity reaching the object to be illuminated 61 to control the degree of debonding of the object to be illuminated 61.
[0030] In some embodiments, a heater (not shown) is disposed on the stage 11 for heating the object to be illuminated 61 to accelerate the gelatinization speed of the object to be illuminated 61 .
[0031] In some embodiments, the illumination device further comprises a power module (not shown), which is connected to the light source 51 to adjust the light emitted by the light source. The power module can be a frequency converter power supply having the characteristics of light weight, small size, and continuous adjustment of light quantity.
[0032] See below Figure 2, which is a schematic diagram of a partial structure of an illumination device in an embodiment of the present application. In this embodiment, the light source 51 is mounted on a lamp holder 71, and the illumination device further includes a cooling module 81, and the cooling module 81 is used to cool the light source 51. In this embodiment, the cooling module 81 is disposed on the top of the first reflector 311 to avoid thermal deformation of the first reflector 311, and further avoid damage to the first reflector 311 resulting in a shortened life. In this embodiment, the cooling module 81 adopts a sleeve installed on the top of the first reflector 311, and the first reflector 311 is cooled by circulating cooling water in the sleeve. In other embodiments, the cooling module 81 can also cool the first reflector 311 by an air cooling method of exhausting or blowing air to the first reflector 311.
[0033] In this embodiment, the two first reflectors 311 are symmetrically arranged along the symmetry axis 310, and an angle θ is formed between a plane 3112 where the openings of the two first reflectors 311 are located and a bottom surface 710 of the lamp holder 71 facing the light-transmitting plate 21. That is, the two first reflectors 311 are inclined relative to the plane where the second reflector 312 is located, so that the light emitted by the light source 51 can be better reflected to the second reflector 312, and the light can irradiate the object to be illuminated 61 in all directions.
[0034] In this embodiment, the illumination device further includes a retaining seat 91 , and the retaining seat 91 is used to fix the first reflector 311 .
[0035] The above technical solution, by setting a focusing module 41 between the reflector group 31 and the light-transmitting plate 21, focuses the light reflected by the reflector group 31 (specifically, the light after the first reflection by the first reflector 311 and the second reflection by the second reflector 312) in a fixed direction and irradiates it onto the light-transmitting plate 21, thereby reducing the loss of light between the second reflector 312 and the light-transmitting plate 21, improving the light utilization rate and improving the uniformity of light density.
[0036] It should be noted that, in this article, relational terms such as "first" and "second" are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the sentence "also includes a..." does not exclude the existence of other identical elements in the process, method, article or device including the element.
[0037] Each embodiment in this specification is described in a related manner, and the same or similar parts between the embodiments can be referenced to each other, and each embodiment focuses on the differences from other embodiments.
[0038] The above is only a preferred embodiment of the present application and is not intended to limit the protection scope of the present application. It should be noted that ordinary technicians in this technical field can make several improvements and modifications without departing from the principles of the present application, and these improvements and modifications should also be regarded as the protection scope of the present application.
Claims
1. An illumination device for illuminating an object to be illuminated placed on a stage; characterized in that: The lighting device comprises: A light-transmitting plate, located above the stage, and having a light-transmitting window; A reflector group, located above the light-transmitting plate; A focusing module, disposed between the reflector group and the light-transmitting plate; At least one light source is used to emit light, and the light is reflected by the reflector group, focused by the focusing module, and transmitted by the light-transmitting window in sequence to reach the surface of the object to be illuminated.
2. The lighting device according to claim 1, characterized in that: The light-transmitting plate is a transparent quartz plate with a light-transmitting window.
3. The lighting device according to claim 1, characterized in that: The reflector assembly comprises: At least one first reflector, the first reflector having an arc-shaped reflective surface curved toward the light-transmitting plate, the light source being arranged on a side of the arc-shaped reflective surface facing the light-transmitting plate, and the light is reflected for the first time by the arc-shaped reflective surface of the first reflector; and a second reflector with an upper surface parallel to a lower surface, wherein the light that has been reflected for the first time is reflected for the second time by the second reflector.
4. The lighting device according to claim 3, characterized in that: The reflector group includes a plurality of evenly distributed first reflectors, and a light source is disposed on a side of a curved reflective surface of each of the first reflectors that faces the light-transmitting plate.
5. The lighting device according to claim 3, characterized in that: The reflector group comprises two first reflectors symmetrically arranged along a symmetry axis perpendicular to the light-transmitting plate, and a light source is arranged on a side of the arc-shaped reflective surface of each first reflector facing the light-transmitting plate; The illumination device further comprises a rotation module, and the rotation module can drive the two first reflectors to rotate along the symmetry axis.
6. The lighting device according to claim 3, characterized in that: The focusing module is a convex lens, and the convex lens is arranged close to the lower surface of the second reflector.
7. The lighting device according to claim 1, characterized in that: The illumination device further comprises a telescopic bracket, wherein the telescopic bracket is connected to the light focusing module to drive the light focusing module to move.
8. The lighting device according to claim 1, characterized in that: The lighting device further comprises a cooling module, and the cooling module is used to cool the light source.
9. The lighting device according to claim 3, characterized in that: The illumination device further comprises a retaining seat, and the retaining seat is used for fixing the first reflector.
10. The lighting device according to claim 1, characterized in that: The light emitted by the light source is ultraviolet light.