Pulse type driving power supply of 222nm KrCl excimer lamp

Abstract

The utility model discloses a pulse-type driving power supply of a 222nm KrCl excimer lamp, which is characterized in that after alternating current and direct current power supply passes through a rectifier filter, the rectifier filter is electrically connected through a primary boosting assembly to provide stable direct current secondary high voltage to be stored in an energy storage capacitor, and the stable direct current secondary high voltage is used as a secondary boosting energy source of the excimer lamp; according to the pulse type driving power supply, nanosecond pulse signals are adopted, and most of energy can be converted into 222nm UVC high-energy irradiation output, so that the working efficiency of the power supply and the lamp tube is greatly improved, peak energy output up to 10KW is realized, and the application field and prospect of the KrCl excimer lamp tube are obviously widened. Through pulse current monitoring, quantitative calculation and over-current protection of pulse current and power are successfully realized, impact on a switching device is effectively reduced through nanosecond response, and stability and reliability of a high-voltage circuit are remarkably improved. Therefore, economic loss caused by circuit breakdown due to abnormity of the power supply device in a high-voltage environment is greatly reduced.

Description

Technical Field

[0001] The utility model belongs to the technical field of pulse drive power supplies, and in particular relates to a pulse drive power supply for a 222nm KrCl excimer lamp. Background Art

[0002] 222nm KrCl excimer lamp is a special light source that uses excimer gas to produce short-term chemical bonding and emit ultraviolet light with a wavelength of 222nm in the excited state. This light source can be widely used in sterilization, water treatment, air purification, microelectronics manufacturing and other fields. At present, the 222nm KrCl excimer lamp driver generally uses a continuous wave power supply to drive the KrCl excimer lamp to emit light. A continuous wave driver is a power supply system with a continuous output voltage or current waveform. Unlike a pulse driver, a continuous wave driver provides stable DC or AC power without a pulse interval in time. Continuous wave drivers are widely used in daily life and industry, such as household appliances, communication equipment, and LED lighting. They are suitable for long-term stable power output and generally cannot achieve the peak power output of a pulsed power supply. Compared with pulse power supply, the design and implementation of continuous wave driving power supply is relatively simple, and generally does not require complex circuits and pulse control strategies. The continuous wave power supply is used to drive the 222nm KrCl excimer lamp. The driving power supply generally adopts a continuous wave power supply technology with a single boost. The disadvantages are low energy conversion efficiency, unsatisfactory luminous efficiency, and low irradiation energy. The continuous wave driving power supply will also cause the transformer and lamp to generate too much heat, and the temperature of the power supply and lamp is difficult to control. Utility Model Content

[0003] The purpose of the utility model is to provide a pulsed driving power supply for a 222nm KrCl excimer lamp to solve the problems raised in the above background technology.

[0004] To achieve the above object, the utility model provides the following technical solution: a pulsed driving power supply for a 222nm KrCl excimer lamp, comprising:

[0005] A rectifier filter, the rectifier filter is powered by AC and DC, and the rectifier filter is electrically connected through a primary boost component to provide a stable DC sub-high voltage to be stored in an energy storage capacitor, and the energy storage capacitor is electrically connected through a secondary boost component to a KrCl excimer lamp tube for converting the DC sub-high voltage into a high-frequency pulse high voltage for driving;

[0006] Single-chip computer quantitative control, the single-chip computer quantitative control input is electrically connected to a current monitoring circuit A and a current monitoring circuit B for monitoring the primary boost current device and the secondary boost current, the current monitoring circuit A is electrically connected to a PMW modulation circuit for adjusting the primary boost power to stabilize the voltage of the energy storage capacitor, and the output end of the current monitoring circuit B is connected to a pulse signal modulation circuit for reducing the peak current impact on the switching device.

[0007] Preferably, the primary boost component includes a primary boost converter and a primary boost high-frequency transformer, the electrical input point of the primary boost converter is connected to the rectifier filter, and one end of the primary boost converter is electrically connected to the primary boost high-frequency transformer, the AC or DC power supply is rectified and filtered and then used as the input of the primary boost converter, and the primary boost converter converts the input voltage into a high-frequency DC voltage.

[0008] Preferably, one end of the PMW modulation circuit is electrically connected to a primary boost converter, and the PMW modulation circuit is electrically connected to a single-chip microcomputer quantization control, and the PMW modulation circuit is electrically connected to a current monitoring circuit A, and the primary boost power is effectively adjusted through closed-loop control to ensure the voltage stability of the energy storage capacitor.

[0009] Preferably, the current monitoring circuit A is electrically connected to a primary step-up high-frequency transformer, and the current monitoring circuit A is electrically connected to a single-chip microcomputer quantitative control to analyze and grasp the power supply working state and working time, switching frequency and abnormal conditions.

[0010] Preferably, the secondary boost component includes a secondary boost converter and a secondary boost high-frequency transformer. The secondary boost high-frequency transformer is electrically connected to the secondary boost converter, and the secondary boost converter is electrically connected to the KrCl excimer lamp tube. The secondary boost converter is electrically connected to the energy storage capacitor. The transformer peak current is monitored in real time through a current transformer, the pulse signal is adjusted in real time through closed-loop control, and the pulse signal is promptly shut down in an overcurrent condition.

[0011] Preferably, the pulse signal modulation circuit is electrically connected to the secondary boost converter and the single-chip microcomputer quantitative control, and the pulse signal modulation circuit is electrically connected to the current monitoring circuit B, and the current monitoring circuit B is electrically connected to the secondary boost high-frequency transformer and the single-chip microcomputer quantitative control, which can realize real-time control of the circuit and intelligent analysis and remote control of the driving power supply.

[0012] Compared with the prior art, the technical effects and advantages of the utility model are as follows: the pulsed driving power supply of the 222nm KrCl excimer lamp,

[0013] By using a pulsed power supply to drive the 222nm KrCl excimer lamp, the copper loss and iron loss of the step-up transformer are effectively reduced through the step-up voltage step-up method, the conversion efficiency of the conversion circuit is effectively improved, and the overheating problem of the power supply and transformer is solved;

[0014] The single cycle luminescence time of KrCl excimer lamp is only hundreds of nanoseconds, and the continuous wave driving circuit can only output continuous high voltage. A single high voltage cycle is generally more than 10us, resulting in only a very short time to drive the lamp to emit light during the entire driving process, so that most of the energy is converted into heat of the lamp;

[0015] The pulsed driving power supply realized by the utility model adopts nanosecond pulse signals to ensure that most of the energy can be converted into 222nm UVC high-energy irradiation output, thereby greatly improving the working efficiency of the power supply and the lamp tube, achieving a peak energy output of 10KW, and broadening the application field and prospects of KrCl excimer lamp tubes;

[0016] The utility model successfully realizes the quantitative calculation of pulse power and overcurrent protection through pulse current monitoring, effectively reduces the impact on switching devices through nanosecond response, and significantly improves the stability and reliability of high-voltage circuits, thereby reducing the economic losses caused by circuit breakdown due to abnormal power supply devices in high-voltage environments;

[0017] The utility model quantifies pulse power through a single-chip microcomputer, analyzes and grasps the working status and working time of the power supply, the switching frequency and abnormal conditions, and can realize real-time control of the circuit. The data calculated by the single-chip microcomputer can be transmitted to the Internet of Things platform and mobile phone APP through communication protocols such as WIFI or Bluetooth, thereby realizing intelligent analysis and remote control of the driving power supply, effectively improving the user experience. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a block diagram of the pulse drive power supply of the utility model.

[0019] In the figure: 1. Rectifier filter; 2. Energy storage capacitor; 3. KrCl excimer lamp; 4. Single chip microcomputer quantitative control; 5. Current monitoring circuit A; 6. Current monitoring circuit B; 7. PMW modulation circuit; 8. Pulse signal modulation circuit; 9. Primary boost converter; 10. Primary boost high frequency transformer; 11. Secondary boost converter; 12. Secondary boost high frequency transformer. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0021] See also Figure 1 The utility model provides a technical solution: a pulsed driving power supply for a 222nm KrCl excimer lamp, comprising:

[0022] A rectifier filter 1, wherein the rectifier filter 1 is powered by AC and DC, and the rectifier filter 1 is electrically connected through a primary boost component to provide a stable DC secondary high voltage to be stored in an energy storage capacitor 2, which is used as a secondary boost energy source for the excimer lamp. The energy storage capacitor 2 is converted into a high-frequency pulse high voltage for driving a KrCl excimer lamp tube 3 through a secondary boost component;

[0023] The single-chip computer quantitative control 4 adopts an AD high-speed sampling chip to collect and quantify the primary boost and secondary boost currents in real time. The single-chip computer quantitative control 4 input is electrically connected to a current monitoring circuit A5 and a current monitoring circuit B6 for monitoring the primary boost current and the secondary boost current. The current monitoring circuit A5 is electrically connected to a PMW modulation circuit 7 for adjusting the primary boost power to stabilize the voltage of the energy storage capacitor 2. The output end of the current monitoring circuit B6 is connected to a pulse signal modulation circuit 8 for reducing the peak current impact on the switching device.

[0024] The primary boost component includes a primary boost converter 9 and a primary boost high-frequency transformer 10, the electrical input point of the primary boost converter 9 is connected to the rectifier filter 1, and one end of the primary boost converter 9 is electrically connected to the primary boost high-frequency transformer 10, one end of the PMW modulation circuit 7 is electrically connected to the primary boost converter 9, and the PMW modulation circuit 7 is electrically connected to the single-chip computer quantization control 4, the PMW modulation circuit 7 is electrically connected to the current monitoring circuit A5, the current monitoring circuit A5 is electrically connected to the primary boost high-frequency transformer 10, and the current monitoring circuit A5 is electrically connected to the single-chip computer quantization control 4, so that the heat generation of the transformer and the lamp tube is low, and the thermal effect of the lamp tube is very ideal, thereby broadening the application field of KrCl excimer lamps, and through boosting and pulse current monitoring, the quantitative calculation and overcurrent protection of pulse power are successfully realized, and the impact on switching devices is effectively reduced, thereby significantly improving the stability and reliability of the circuit, and at the same time, it can not only be applied to wide-voltage AC drive power supplies, but also achieves ideal results in the application of DC low-voltage drive power supplies.

[0025] The secondary boost component includes a secondary boost converter 11 and a secondary boost high-frequency transformer 12. The secondary boost high-frequency transformer 12 is electrically connected to the secondary boost converter 11, and the secondary boost converter 11 is electrically connected to the KrCl excimer lamp tube 3. The secondary boost converter 11 is electrically connected to the energy storage capacitor 2. The pulse signal modulation circuit 8 is electrically controlled and connected to the secondary boost converter 11 and the single-chip computer quantization control 4, and the pulse signal modulation circuit 8 is electrically connected to the current monitoring circuit B6. The current monitoring circuit B6 is electrically controlled and connected to the secondary boost high-frequency transformer 12 and the single-chip computer quantization control 4. The 222nm KrCl excimer lamp is successfully driven by the secondary boost method, which effectively improves the driving efficiency of the driving power supply; the peak pulse energy output by the lamp tube can reach more than 10KW, and the irradiation intensity and irradiation energy are significantly improved, achieving ideal results in practical applications.

[0026] A pulsed drive power supply is a power supply system that uses pulse signals to control output voltage and current. It is very important in many industrial and scientific research applications. Pulsed drive power supplies achieve high-power pulse output by controlling the width, amplitude and frequency of the signal, and are suitable for applications that require instantaneous high energy input. Compared with continuous wave power supplies, pulsed drive power supplies can achieve extremely high peak power while keeping the average power low, which helps to improve energy efficiency and reduce thermal effects. The design of pulsed drive power supplies involves complex circuits and control strategies. Due to the high pulse peak power, the performance of the circuit's switching devices and transformer design pose a high challenge. At the same time, in order to ensure the stability and efficiency of the output, the circuit control strategy has become a key factor in the design of pulsed drive power supplies.

[0027] Specifically, when using, first a boost process: Figure 1 As shown, the AC or DC power supply is used as the input of the primary boost converter 9 after passing through the rectifier filter 1. The primary boost converter 9 converts the input voltage into a high-frequency AC voltage, and stores it into the energy storage capacitor 2 as a DC sub-high voltage after rectification and filtering. In the primary boost process, the current of the primary boost converter 9 is monitored by the current monitoring circuit A5, and the PMW modulation circuit 7 is adjusted in real time. The primary boost power is effectively adjusted through closed-loop control and the voltage stability of the energy storage capacitor 2 is ensured.

[0028] Secondary boost process: The DC sub-high voltage stored in the energy storage capacitor 2 is used as the input of the secondary boost converter 11. The pulse signal modulation circuit 8 controls the width, amplitude and frequency of the secondary boost converter 11 through the signal, and converts the DC sub-high voltage of the energy storage capacitor 2 into high-frequency pulse high voltage through the secondary boost high-frequency transformer 12, thereby driving the KrCl excimer lamp 3. During the secondary boost process, the peak current of the secondary boost high-frequency transformer 12 is monitored in real time through the current monitoring circuit B6, and the pulse signal of the pulse signal modulation circuit 8 is adjusted in real time through closed-loop control. In the case of overcurrent, the pulse signal of the pulse signal modulation circuit 8 is promptly shut down, effectively reducing the impact of the peak current on the switching device, thereby improving the reliability and stability of the circuit.

[0029] The pulse power of 4 can be quantitatively controlled by the single-chip microcomputer, and the working status and working time of the power supply, the switching frequency and abnormal conditions can be analyzed and mastered, and the real-time control of the circuit can be realized. The data calculated by the single-chip microcomputer can be transmitted to the Internet of Things platform and mobile phone APP through communication protocols such as WIFI or Bluetooth, thereby realizing intelligent analysis and remote control of the driving power supply.

[0030] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A pulsed driving power supply for a 222nm KrCl excimer lamp, characterized in that: include: A rectifier filter (1), wherein the rectifier filter (1) is powered by AC and DC, and the rectifier filter (1) is converted into a DC secondary high voltage by a primary boost component and stored in an energy storage capacitor (2), and the energy storage capacitor (2) is converted into a high-frequency pulse high voltage by a secondary boost component for driving a KrCl excimer lamp (3); A single-chip computer quantitative control (4), wherein the single-chip computer quantitative control (4) input is electrically connected to a current monitoring circuit A (5) and a current monitoring circuit B (6) for monitoring a primary boost current and a secondary boost current, wherein the current monitoring circuit A (5) is electrically connected to a PMW modulation circuit (7) for regulating the primary boost power to stabilize the voltage of the energy storage capacitor (2), and the output end of the current monitoring circuit B (6) is connected to a pulse signal modulation circuit (8) for reducing peak current impact on a switching device.

2. The pulsed driving power supply for a 222nm KrCl excimer lamp according to claim 1, characterized in that: The primary boost component comprises a primary boost converter (9) and a primary boost high-frequency transformer (10); an electrical input point of the primary boost converter (9) is connected to the rectifier filter (1), and one end of the primary boost converter (9) is electrically connected to the primary boost high-frequency transformer (10).

3. The pulsed driving power supply for a 222nm KrCl excimer lamp according to claim 2, characterized in that: One end of the PMW modulation circuit (7) is electrically connected to a primary boost converter (9), and the PMW modulation circuit (7) is electrically connected to a single-chip computer quantization control (4), and the PMW modulation circuit (7) is electrically connected to a current monitoring circuit A (5).

4. The pulsed driving power supply for a 222nm KrCl excimer lamp according to claim 3, characterized in that: The current monitoring circuit A (5) is electrically connected to the primary step-up high-frequency transformer (10), and the current monitoring circuit A (5) is electrically connected to the single-chip microcomputer quantization control (4).

5. The pulsed driving power supply for a 222nm KrCl excimer lamp according to claim 1, characterized in that: The secondary boost component comprises a secondary boost converter (11) and a secondary boost high-frequency transformer (12); the secondary boost high-frequency transformer (12) is electrically connected to the secondary boost converter (11); the secondary boost converter (11) is electrically connected to the KrCl excimer lamp tube (3); and the secondary boost converter (11) is electrically connected to the energy storage capacitor (2).

6. The pulsed driving power supply for a 222nm KrCl excimer lamp according to claim 5, characterized in that: The pulse signal modulation circuit (8) is electrically connected to the secondary boost converter (11) and the single chip quantization control (4), and the pulse signal modulation circuit (8) is electrically connected to the current monitoring circuit B (6), and the current monitoring circuit B (6) is electrically connected to the secondary boost high frequency transformer (12) and the single chip quantization control (4).

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