Heating and cooling platform

Abstract

The utility model relates to the technical field of semiconductor part processing, and discloses a heating and cooling platform which comprises a top plate, a bottom plate and fixing glue, the top plate is provided with a first transmission groove, the side wall of the top plate is provided with a water injection port and a water outlet which are communicated with the first transmission groove, and the water inlet end of a water cooling machine is communicated with the water injection port. The bottom plate is provided with a second conveying groove, the bottom plate is connected to the top plate in a sealed mode, the first conveying groove and the second conveying groove are in butt joint to form a conveying channel where cold water / hot water circulates, a to-be-machined part is placed on the top plate, and the to-be-machined part and the top plate are bonded and fixed after being solidified through fixing glue or separated after being melted. According to the heating and cooling platform, the special-shaped workpiece to be machined is fixed to the top plate for subsequent machining operation by heating, melting, cooling and solidifying the fixed glue, the deformation position of the product to be machined can be found through heating and cooling, the deformation condition of the workpiece to be machined is pre-judged in advance, and the flatness of the formed product is effectively guaranteed.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor parts processing, in particular to a heating and cooling platform. Background Art

[0002] At present, during the processing and manufacturing of special-shaped semiconductor products [such as products made of AL6061 (aluminum) and SUS304 (stainless steel)], thin-walled flat structure products are prone to distortion and deformation, and it is difficult to meet the requirements of the drawings after deformation; in addition, special-shaped products are difficult to clamp, and the forces generated by clamping methods such as pressure plate clamping and side top clamping will cause the products to deform to varying degrees.

[0003] Therefore, it is urgent to design a heating and cooling platform to improve the above problems. Utility Model Content

[0004] The utility model aims to provide a heating and cooling platform to solve the technical problems that the thin-walled planar structure of special-shaped semiconductor products is easy to be distorted and deformed, and it is difficult to meet the requirements of the drawings after deformation; and the clamping of special-shaped products is difficult.

[0005] To achieve this purpose, the utility model adopts the following technical solutions:

[0006] The heating and cooling platform is detachably mounted on the CNC machine tool. The heating and cooling platform includes:

[0007] A top plate, wherein the end surface of the top plate is provided with a first transmission groove, the first transmission groove is arranged around and distributed at various places of the end surface of the top plate, the side wall of the top plate is provided with a water injection port and a water outlet connected with the first transmission groove, the water inlet end of the water cooler is connected with the water injection port, and the water outlet end is connected with the water outlet;

[0008] A bottom plate, wherein a second transmission groove is formed on an end surface of the bottom plate facing the top plate, the first transmission groove and the second transmission groove are arranged in the same direction, the bottom plate is sealed and connected to the end surface of the top plate having the first transmission groove, the first transmission groove and the second transmission groove are connected to each other to form a transmission channel for circulating cold water / hot water; and

[0009] The fixing glue is used to place the workpiece on the top plate, and the workpiece and the top plate are bonded and fixed after being solidified by the fixing glue or separated after being melted.

[0010] As a preferred solution for the heating and cooling platform, a sealing strip is provided between the top plate and the bottom plate, and the sealing strip is provided along the edges of the first transmission groove and the second transmission groove.

[0011] As a preferred solution for the heating and cooling platform, a first fixing member connected to the top plate with a side having the first transmission groove is provided on the bottom plate, and the first fixing member is embedded inside the bottom plate and the top plate.

[0012] As a preferred solution of the heating and cooling platform, the heating and cooling platform further comprises:

[0013] A mounting plate is provided with a second fixing member connected to the base plate.

[0014] As a preferred solution for the heating and cooling platform, a plurality of water inlets and a plurality of water outlets are provided.

[0015] As a preferred solution for the heating and cooling platform, the first transmission trough and the second transmission trough are provided with starting ends corresponding to the number of the water injection ports and the water outlets.

[0016] As a preferred solution for the heating and cooling platform, installation grooves are provided on opposite sides of the heating and cooling platform adjacent to the water injection port.

[0017] As a preferred solution for the heating and cooling platform, the length between the opposite sides of the bottom plate is smaller than the length between the opposite sides of the top plate and smaller than the length between the opposite sides of the mounting plate to form the mounting groove.

[0018] As a preferred solution of the heating and cooling platform, the top plate and the mounting plate are made of aluminum material.

[0019] As a preferred solution for the heating and cooling platform, the bottom plate is made of antistatic material.

[0020] Beneficial effects of the utility model:

[0021] The utility model provides a heating and cooling platform, which forms a transmission channel for cold water or hot water by sealingly connecting a top plate and a bottom plate, connecting a first transmission groove on the top plate and a second transmission groove on the bottom plate, and connecting a water inlet of a water cooler to a water inlet on the top plate, and a water outlet of the water cooler to a water outlet on the top plate. The workpiece to be processed is placed on the top plate, and the water cooler is adjusted to a state of transmitting hot water, and the hot water is transmitted to the transmission channel through the water inlet, so that the temperature of the surface of the top plate can reach 90°C, and the temperature of the workpiece to be processed on the platform can reach about 80°C, and then a fixing glue is applied around the workpiece to be processed, and then the water cooler is adjusted to a state of transmitting cold water, the surface temperature of the top plate is reduced, and the fixing glue is cooled and solidified when cold, so that the workpiece to be processed is fixed on the top plate, and then CNC processing is performed, so that the special-shaped workpiece to be processed can be clamped.

[0022] In addition, after heating the stainless steel and aluminum thin-walled flat plate workpieces, the workpieces will warp to varying degrees and return to their initial state after cooling. In response to this phenomenon, the deformed parts of the workpieces in their natural state are marked, and the deformed parts are subsequently processed and improved. This can predict the deformation of the workpieces in advance and effectively ensure the flatness of the formed products. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a structural schematic diagram of a heating and cooling platform provided in an embodiment of the utility model;

[0024] Figure 2 The explosion of the heating and cooling platform provided by the embodiment of the utility model Figure 1 ;

[0025] Figure 3 The explosion of the heating and cooling platform provided by the embodiment of the utility model Figure 2 .

[0026] In the figure:

[0027] 1. Top plate; 11. First transmission trough; 12. Water inlet; 13. Water outlet;

[0028] 2. Bottom plate; 21. Second transmission slot;

[0029] 3. Mounting plate;

[0030] 4. Mounting slot; 41. Connection slot;

[0031] 5. Sealing strip. DETAILED DESCRIPTION

[0032] The present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only the parts related to the present invention, rather than all structures, are shown in the accompanying drawings.

[0033] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0034] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0035] In the description of this embodiment, the terms "upper", "lower", "right", etc., are based on the directions or positions shown in the drawings, and are only for the convenience of description and simplified operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0036] At present, in the process of processing and manufacturing special-shaped semiconductor products [such as products made of AL6061 (aluminum) and SUS304 (stainless steel) materials], the hardness and rigidity of stainless steel thin-walled products and aluminum thin-walled products at room temperature are very high, and plastic processing is very difficult. Products with thin-walled planar structures are prone to distortion and deformation, and it is difficult to meet the requirements of the drawings after deformation. In addition, special-shaped products are difficult to clamp, and the forces generated by clamping methods such as pressure plate clamping and side top clamping will cause the products to deform to varying degrees.

[0037] In order to solve the above problems, combined Figure 1-Figure 3 As shown, this embodiment provides a heating and cooling platform, which can be detachably mounted on a CNC machine tool (not shown in the figure), which is conducive to the installation and maintenance of the heating and cooling platform, and is convenient for replacing heating and cooling platforms of different models to adapt to different sizes and types of workpieces to be processed, and has good versatility. Since the specific structure of the CNC machine tool is the prior art, this embodiment will not be described in detail.

[0038] Specifically, the heating and cooling platform includes a top plate 1 and a bottom plate 2. A first transmission groove 11 is provided on the end surface of the top plate 1. The first transmission groove 11 is distributed around various places on the end surface of the top plate 1. A water inlet 12 and a water outlet 13 connected to the first transmission groove 11 are provided on the side wall of the top plate 1. The water inlet end of the water cooler is connected to the water inlet 12, and the water outlet end of the water cooler is connected to the water outlet 13. A second transmission groove 21 is provided on the end surface of the bottom plate 2 facing the top plate 1. The first transmission groove 11 and the second transmission groove 21 are distributed in the same direction. The bottom plate 2 is sealed and connected to the end surface of the top plate 1 having the first transmission groove 11. The first transmission groove 11 and the second transmission groove 21 are connected to each other to form a transmission channel for circulating cold water or hot water.

[0039] It can be understood that by sealing the top plate 1 and the bottom plate 2, the first transmission groove 11 on the top plate 1 and the second transmission groove 21 on the bottom plate 2 are connected, the water inlet end of the water cooler is connected to the water injection port 12 on the top plate 1, and the water outlet end of the water cooler is connected to the water outlet 13 on the top plate 1, the workpiece to be processed is placed on the top plate 1, and the water cooler is adjusted to a state of transmitting hot water, and the hot water is transmitted to the transmission channel through the water injection port 12, and the heat of the hot water is transferred to the top plate 1. The temperature of the surface of the top plate 1 can reach 90°C, and the temperature of the workpiece to be processed on the platform can reach about 80°C, which is 80°C in this embodiment, and can also be 70°C, 75°C, 85°C, etc. in other embodiments, so that the heated workpiece to be processed is convenient for subsequent processing, and thin-walled products can be easily flattened. Among them, the specific structure and working principle of the water cooler, as well as the connection structure of the water cooler with the water injection port 12 and the water outlet 13 are all prior art, so they are not further described here.

[0040] The heating and cooling platform of this embodiment, after heating the stainless steel and aluminum thin-walled flat plate workpieces to be processed, the workpieces to be processed will warp to varying degrees, and will return to their initial state after cooling. In response to this phenomenon, the deformed parts of the workpieces to be processed in a natural state are marked, and the deformed parts are subsequently processed and improved. The deformation of the workpieces to be processed can be predicted in advance, and the flatness of the formed products (shape error in positioning error) can be effectively guaranteed.

[0041] It should be noted that flatness refers to the deviation of the macroscopic concave and convex height of the substrate from the ideal plane, and the tolerance zone is the area between two parallel planes with a distance of tolerance value t. Flatness belongs to the shape error in the behavior error. The flatness tolerance of the product of this embodiment can be guaranteed to be 0.02MM, the processing is stable, and the tolerance requirements of semiconductor products are met.

[0042] Furthermore, if Figure 1As shown, the heating and cooling platform also includes a fixing glue (not shown in the figure), and the workpiece to be processed is placed on the top plate 1. The workpiece to be processed and the top plate 1 are fixed by adhesion after solidification or separated after melting through the fixing glue. When it is necessary to clamp the workpiece to be processed, adjust the water cooler to the state of transmitting hot water, the temperature of the surface of the top plate 1 increases, place the workpiece to be processed on the surface of the top plate 1, and apply the fixing glue around the workpiece to be processed. At this time, the fixing glue is heated to a melted state, and then adjust the water cooler to the state of transmitting cold water, the surface temperature of the top plate 1 decreases, and the fixing glue is cooled and solidified when cold, so that the workpiece to be processed is fixed on the top plate 1, and then CNC processing is performed, so that the special-shaped workpiece to be processed can be clamped, the fixing firmness is good, the operation is simple, and the yield rate is high.

[0043] Among them, in order to make the heating and cooling heat transfer faster, such as Figure 2 and Figure 3 As shown, the first transfer groove 11 and the second transfer groove 21 are in a circular shape, an S shape, or a symmetrical pattern distributed at various locations of the top plate 1 and the bottom plate 2. The shape and size of the corresponding first transfer groove 11 and the second transfer groove 21 are specifically designed according to the needs to control the heating and cooling speeds, and this embodiment does not make any specific limitations on this.

[0044] In addition, in order to reduce heat loss, an insulation board (not shown in the figure) is arranged on the side of the top plate 1 or the end surface of the bottom plate 2 facing away from the top plate 1 and the side of the bottom plate 2. The material of the insulation board can be polyurethane foam material, polystyrene board, porous material or polyurethane rigid foam material, etc. This embodiment does not make any specific limitations on this.

[0045] Preferably, if Figure 2 As shown, a sealing strip 5 is provided between the top plate 1 and the bottom plate 2, and the sealing strip 5 is provided along the edge of the first transmission groove 11 and the second transmission groove 21. A first fixing member connected to the top plate 1 with the first transmission groove 11 is provided on the bottom plate 2, and the first fixing member is embedded in the bottom plate 2 and the top plate 1. The specific sealing strip 5 is a rubber strip, and the rubber has a good sealing effect and high sealing tightness. The first fixing member is a screw, and the screw thread is passed through the bottom plate 2 and is threadedly connected to the top plate 1. The head of the screw is embedded in the bottom plate 2, and the rod of the screw does not pass through the top plate 1, ensuring that the surface of the top plate 1 is flat and complete, and the screw structure is simple, the connection is firm and easy to prepare.

[0046] In order to facilitate installation and removal, Figure 1 and Figure 2As shown in the figure, the heating and cooling platform further includes a mounting plate 3. The mounting plate 3 is detachably connected to the side of the bottom plate 2背离 the top plate 1. A second fixing member for connecting the bottom plate 2 is provided on the mounting plate 3. The second fixing member is also a screw. The screw is threaded through the mounting plate 3 and threadedly connected to the bottom plate 2. The head of the screw is embedded in the mounting plate 3, and the rod portion of the screw does not pass through the bottom plate 2, ensuring that the installation of the mounting plate 3 does not affect the installation of the bottom plate 2 and the top plate 1. Specifically, the shapes of the top plate 1, the bottom plate 2, and the mounting plate 3 are all rectangular. Mounting grooves 4 are provided on opposite sides of the heating and cooling platform. The length between opposite sides of the bottom plate 2 is less than the length between opposite sides of the top plate 1 and less than the length between opposite sides of the mounting plate 3 to form the above-mentioned mounting grooves 4. Specifically, refer to Figure 2 , at the mounting grooves 4, the top plate 1 and the bottom plate 2 are provided with connecting grooves 41 having a cross-section in the shape of an "L". Refer to Figure 1 , the cross-section of the overall mounting groove 4 of the heating and cooling platform is in the shape of a "匚". Through sliding insertion and bolt cooperation with the numerical control machine tool, the structure is simple and the installation and disassembly are convenient.

[0047] In addition, the top plate 1 and the mounting plate 3 are made of aluminum material. The density of aluminum is about one-third of that of traditional steel. The overall weight is relatively light, but the strength can be comparable to that of steel, and it has excellent thermal conductivity and a small thermal expansion coefficient, which can greatly improve the heat dissipation efficiency. The bottom plate 2 is made of anti-static material, such as PVC, aluminum alloy, or all-steel, etc. It has excellent and lasting anti-static effect, smooth and beautiful surface, good alkali resistance, wear resistance, pressure resistance, impact resistance, and moisture resistance.

[0048] Preferably, as shown in Figure 1 and Figure 3 , a plurality of water injection ports 12 and water outlet ports 13 are provided. In this embodiment, two water injection ports 12 and two water outlet ports 13 are provided, which can transport hot water or cold water to the transmission channel faster. The first transmission groove 11 and the second transmission groove 21 are provided with starting ends corresponding to the number of the water injection ports 12 and the water outlet ports 13 to form two groups of symmetrically flowing transmission channels, and the transmission efficiency is better. In other embodiments, the number of the water injection ports 12 and the water outlet ports 13 can also be one, three, four, or more. The specific number can be set according to requirements, and this embodiment does not limit this.

[0049] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, rather than limiting the implementation manners of the present invention. For those of ordinary skill in the art, various obvious changes, re-adjustments, and substitutions can be made without departing from the protection scope of the present invention. It is not necessary and impossible to enumerate all the implementation manners here. Any modifications, equivalent substitutions, and improvements made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. A heating and cooling platform, detachably mounted on a CNC machine tool, characterized in that: The heating and cooling platform comprises: A top plate (1), wherein a first transmission groove (11) is provided on an end surface of the top plate (1), the first transmission groove (11) is arranged around and distributed at various locations on the end surface of the top plate (1), a water injection port (12) and a water outlet (13) connected to the first transmission groove (11) are provided on a side wall of the top plate (1), the water inlet end of the water cooler is connected to the water injection port (12), and the water outlet end is connected to the water outlet (13); A bottom plate (2), wherein a second transmission groove (21) is provided on an end surface of the bottom plate (2) facing the top plate (1), the first transmission groove (11) and the second transmission groove (21) are arranged in the same direction, the bottom plate (2) is sealedly connected to the end surface of the top plate (1) having the first transmission groove (11), the first transmission groove (11) and the second transmission groove (21) are connected to each other to form a transmission channel for circulating cold water / hot water; and The fixing glue is used to place the workpiece to be processed on the top plate (1), and the workpiece to be processed and the top plate (1) are bonded and fixed after the fixing glue is solidified or separated after melting.

2. The heating and cooling platform according to claim 1, characterized in that: A sealing strip (5) is provided between the top plate (1) and the bottom plate (2), and the sealing strip (5) is provided along the edges of the first transmission groove (11) and the second transmission groove (21).

3. The heating and cooling platform according to claim 1, characterized in that: The bottom plate (2) is provided with a first fixing member connected to a side of the top plate (1) having the first transmission groove (11), and the first fixing member is embedded inside the bottom plate (2) and the top plate (1).

4. The heating and cooling platform according to claim 3, characterized in that: The heating and cooling platform also includes: A mounting plate (3), wherein a second fixing member connected to the base plate (2) is provided on the mounting plate (3).

5. The heating and cooling platform according to claim 1, characterized in that: The water inlet (12) and the water outlet (13) are both provided in plurality.

6. The heating and cooling platform according to claim 5, characterized in that: The first transmission trough (11) and the second transmission trough (21) are provided with starting ends corresponding to the number of the water injection ports (12) and the water outlet ports (13).

7. The heating and cooling platform according to claim 4, characterized in that: Mounting grooves (4) are provided on opposite sides of the heating and cooling platform adjacent to the water injection port (12).

8. The heating and cooling platform according to claim 7, characterized in that: The length between the opposite sides of the bottom plate (2) is smaller than the length between the opposite sides of the top plate (1) and smaller than the length between the opposite sides of the mounting plate (3), so as to form the mounting groove (4).

9. The heating and cooling platform according to claim 4, characterized in that: The top plate (1) and the mounting plate (3) are made of aluminum material.

10. The heating and cooling platform according to any one of claims 1 to 8, characterized in that: The bottom plate (2) is made of antistatic material.

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