Horizontal adjusting device for manipulator actuator

Abstract

The utility model provides a horizontal adjusting device for a manipulator actuator, which relates to the field of semiconductor instruments, is used for leveling the manipulator actuator and comprises a first mounting plate. The mounting outer cover is mounted on the first mounting plate; the second mounting plate is arranged on one side of the first mounting plate and is used for placing a manipulator actuator; and the multiple adjusting parts are installed on the first installation plate and make contact with the multiple matching parts of the second installation plate correspondingly, and the adjusting parts can drive the matching parts to move in the direction away from and close to the first installation plate. The utility model mainly has the following beneficial effects: the inclined state of the second mounting plate can be adjusted, so that the horizontal state of the second mounting plate can be conveniently adjusted to a set state.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor equipment, in particular to a level adjustment device for a manipulator actuator. Background Art

[0002] Wafer refers to the silicon wafer used to make silicon semiconductor circuits. Its raw material is silicon. As the feature size of semiconductors becomes smaller and smaller, its processing technology becomes more and more complicated, and the processing and measurement equipment becomes more and more advanced, the precision requirements for wafer processing are becoming more and more stringent. Wafer grabbing requires special mechanical equipment, such as a manipulator. Existing manipulators include actuators.

[0003] At present, the actuator of the robot needs to be placed horizontally on the mounting plate during installation, but the existing actuator and mounting plate adopt a split structure, that is, they need to be produced and prepared separately, and then assembled. However, errors or misoperations may occur during the production and preparation process and the assembly process, resulting in the actuator being difficult to reach the set horizontal state, and it is also inconvenient to adjust the horizontal state of the actuator. Utility Model Content

[0004] The utility model aims to provide a level adjustment device for a manipulator actuator, so as to adjust the level state of the manipulator actuator.

[0005] An embodiment of the utility model provides a horizontal adjustment device for a robot actuator, which is used for leveling the robot actuator, including a first mounting plate; a mounting cover, which is mounted on the first mounting plate; a second mounting plate, which is arranged on one side of the first mounting plate and is used to place the robot actuator; and multiple adjustment parts, which are mounted on the first mounting plate and respectively contact with multiple matching parts of the second mounting plate, and the adjustment parts can drive the matching parts to move in a direction away from and close to the first mounting plate.

[0006] Preferably, the adjustment portion comprises a threaded adjustment member, which passes through the first mounting plate by means of threaded engagement, and one end of the threaded adjustment member abuts against the second mounting plate.

[0007] Preferably, the adjustment portion further comprises a locking member, and the locking member can lock the second mounting plate on the end of the threaded adjustment member.

[0008] Preferably, the locking member includes a tightening screw, the threaded rod of the tightening screw passes through the threaded adjusting member with a gap along the axial direction of the threaded adjusting member and cooperates with the thread of the second mounting plate, and the nut of the tightening screw abuts against the other end of the threaded adjusting member.

[0009] Preferably, the threaded adjusting member includes an external hexagonal portion arranged at one end of the threaded adjusting member.

[0010] Preferably, the second mounting plate is provided with a threaded hole or a threaded groove which matches with the thread on the top end of the tightening screw.

[0011] Preferably, a locking nut is provided on the outer side of the threaded adjustment member via a threaded sleeve.

[0012] Preferably, the number of the adjustment parts is three, and the three adjustment parts are distributed in a triangular shape on the first mounting plate.

[0013] Preferably, the length of the screw rod on the tightening screw is longer than the length of the threaded adjusting member.

[0014] In summary, the utility model mainly has the following beneficial effects:

[0015] When the horizontal state of the second mounting plate does not meet the set requirements, the corresponding adjustment part can be adjusted according to the tilt state of the second mounting plate to drive the corresponding matching part to move in a direction close to or away from the first mounting plate, thereby adjusting the tilt state of the second mounting plate, thereby facilitating the adjustment of the horizontal state of the second mounting plate to the set state. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the three-dimensional structure of the utility model;

[0017] Figure 2 This is a schematic diagram of the three-dimensional structure of the fixing member of the utility model;

[0018] Reference numerals:

[0019] 1. Install the outer cover; 2. First mounting plate; 3. Second mounting plate; 4. Adjustment part; 41. Threaded adjustment member; 411. External hexagonal part; 42. Tighten the screws; 5. Lock nut; 6. Robot actuator. DETAILED DESCRIPTION

[0020] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model. Unless otherwise defined, the technical terms or scientific terms used herein should be understood by people with general skills in the field to which the utility model belongs. "Including" and similar words used in this article mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

[0021] Please combine Figure 1As shown, a horizontal adjustment device for a robot actuator is used for leveling the robot actuator 6, including a first mounting plate 2; a mounting cover 1, mounted on the first mounting plate 2; a second mounting plate 3, arranged on one side of the first mounting plate 2, for placing the robot actuator 6; a plurality of adjustment parts 4, mounted on the first mounting plate 2, respectively contacting with a plurality of matching parts of the second mounting plate 3, and the adjustment parts 4 can drive the matching parts to move in a direction away from and close to the first mounting plate 2.

[0022] Specifically, when the horizontal state of the second mounting plate does not meet the set requirements, the corresponding adjustment part can be adjusted according to the inclination state of the second mounting plate to drive the corresponding matching part to move in the direction close to or away from the first mounting plate, thereby adjusting the inclination state of the second mounting plate, thereby facilitating the adjustment of the horizontal state of the second mounting plate to the set state. Specifically, the level of the second mounting plate 3 can be gradually adjusted with the help of an existing spirit level or a level ruler. During implementation, the position of the first mounting plate 2 is fixed, and the mounting cover 1 is installed on the outside of the first mounting plate 2.

[0023] Please combine Figure 2 As shown, the threaded adjustment member 41 passes through the first mounting plate 2 by means of threaded fitting, and one end of the threaded adjustment member 41 abuts against the second mounting plate 3 .

[0024] Specifically, since the threaded adjustment member 41 threads through the first mounting plate 2, the threaded adjustment member 41 can be raised or lowered relative to the first mounting plate 2 through rotation, thereby driving the second mounting plate 3 to be raised or lowered and tilted until the second mounting plate 3 is adjusted to a horizontal state.

[0025] Please combine Figure 2 As shown, the adjustment portion 4 also includes a locking piece, which can lock the second mounting plate 3 on the end of the threaded adjustment piece 41; the locking piece includes a tightening screw 42, the threaded rod of the tightening screw 42 passes through the threaded adjustment piece 41 with a gap along the axial direction of the threaded adjustment piece 41, and is threadedly matched with the second mounting plate 3, and the nut of the tightening screw 42 is against the other end of the threaded adjustment piece 41.

[0026] Specifically, when the second mounting plate 3 is adjusted to a horizontal state, the tightening screw 42 is threadedly rotated on the second mounting plate 3, and the tightening screw 42 is gradually moved upward until it is tightened and fixed with the bottom end of the threaded adjustment member 41. At this time, the top end of the tightening screw 42 also pulls and fixes the second mounting plate 3, so that the second mounting plate 3 is firmly fixed on the first mounting plate 2 after being leveled, and the second mounting plate 3 is pushed by the threaded adjustment member 41, which plays a role of pulling and pushing the second mounting plate 3, thereby realizing the fixation of the second mounting plate 3. Due to the existence of the gap, the tightening screw 42 can produce a small tilt inside the threaded adjustment member 41.

[0027] Please combine Figure 2 As shown, the threaded adjusting member 41 includes an outer hexagonal portion 411 disposed at one end of the threaded adjusting member 41 .

[0028] Specifically, it is convenient to use an existing wrench to drive the outer hexagonal portion 411 to rotate, so that the threaded adjusting member 41 can be rotated, making the rotation of the threaded adjusting member 41 more labor-saving.

[0029] As a further specific embodiment, the second mounting plate 3 is provided with a threaded hole or a threaded groove that is threadably matched with the top end of the tightening screw 42 .

[0030] Specifically, through the threaded hole or the threaded groove, the top end of the tightening screw 42 is inserted into the threaded hole or the threaded groove by thread fitting and fixed.

[0031] Please combine Figure 2 As shown, a locking nut 5 is provided on the outer side of the threaded adjustment member 41 through a threaded sleeve.

[0032] Specifically, after the second mounting plate 3 is leveled on the first mounting plate 2 by means of the adjustment part 4, the locking nut 5 is rotated and raised in cooperation with the outer thread of the threaded adjustment member 41 until it is squeezed and tightened with the second mounting plate 3, thereby effectively enhancing the fixing effect of the threaded adjustment member 41 relative to the second mounting plate 3 and preventing the threaded adjustment member 41 from rotating during use, thereby causing the second mounting plate 3 to tilt.

[0033] As a further specific embodiment, the number of the adjusting parts 4 is three, and the three adjusting parts 4 are distributed in a triangular shape on the first mounting plate 2 .

[0034] Specifically, the inclination of the second mounting plate 3 is adjusted at three positions through three adjustment parts 4. On the one hand, the stability of the triangular support is strong, and it is convenient to adjust the level of the second mounting plate 3 at multiple angles.

[0035] As a further specific embodiment, the locking nut 5 is a full metal locking nut with a stronger locking force.

[0036] Although the embodiments of the present invention are described in detail above, it is obvious to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations are within the scope and spirit of the present invention as described in the claims. Moreover, the present invention described herein may have other embodiments and may be implemented or realized in a variety of ways.

Claims

1. A level adjustment device for a manipulator actuator, characterized in that: For leveling a robot actuator (6), comprising A first mounting plate (2); An installation cover (1) is installed on a first installation plate (2); A second mounting plate (3), arranged on one side of the first mounting plate (2), and used for placing a manipulator actuator (6); A plurality of adjustment parts (4) are mounted on the first mounting plate (2) and are respectively in contact with a plurality of matching parts of the second mounting plate (3); the adjustment parts (4) can drive the matching parts to move in a direction away from and towards the first mounting plate (2).

2. A level adjustment device for a robot actuator according to claim 1, characterized in that: The adjustment unit (4) comprises The threaded adjustment member (41) penetrates the first mounting plate (2) by means of threaded engagement, and one end of the threaded adjustment member (41) abuts against the second mounting plate (3).

3. A level adjustment device for a robot actuator according to claim 2, characterized in that: The adjustment portion (4) also includes a locking member, which can lock the second mounting plate (3) on the end of the threaded adjustment member (41).

4. The level adjustment device for a robot actuator according to claim 3, characterized in that: The locking member comprises a tightening screw (42), the threaded rod of the tightening screw (42) passes through the threaded adjusting member (41) with a gap along the axial direction of the threaded adjusting member (41) and is threadably matched with the second mounting plate (3), and the nut of the tightening screw (42) abuts against the other end of the threaded adjusting member (41).

5. The level adjustment device for a robot actuator according to claim 2, characterized in that: The threaded adjustment member (41) comprises an outer hexagonal portion (411) arranged at one end of the threaded adjustment member (41).

6. The level adjustment device for a robot actuator according to claim 3, characterized in that: The second mounting plate (3) is provided with a threaded hole or a threaded groove which matches the thread of the top end of the tightening screw (42).

7. The level adjustment device for a robot actuator according to claim 2, characterized in that: A locking nut (5) is provided on the outer side of the threaded adjustment member (41) via a threaded sleeve.

8. The level adjustment device for a robot actuator according to claim 1, characterized in that: The number of the adjustment parts (4) is three, and the three adjustment parts (4) are distributed in a triangular shape on the first mounting plate (2).

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