Inclination adjusting device for lifting equipment of manipulator

Abstract

The utility model provides an inclination adjusting device for lifting equipment of a manipulator, which is used for adjusting the inclination of the lifting equipment on a supporting plate, and the lifting equipment is fixedly arranged on a fixing plate. The supporting piece is fixed to the supporting plate, connected with the bottom of the fixing plate and used for providing supporting and height adjusting when the fixing plate rotates; and the at least one deflection part is fixedly arranged on the supporting plate and is used for adjusting the inclination of the fixing plate and fixing the fixing plate. The fixing device mainly has the advantages that the bottom end of the fixing plate is supported through the supporting piece, the fixing plate is adjusted to rotate by a small angle under the action of the deflection part, and after the inclined position of the fixing plate is adjusted, the position of the fixing plate is fixed.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor equipment, and in particular to a tilt adjustment device for a lifting device of a robot. Background Art

[0002] Wafer refers to the silicon chip used to make silicon semiconductor circuits. Its raw material is silicon. As the feature size of semiconductors becomes smaller and smaller, its processing technology becomes more and more complicated, and the processing and measurement equipment becomes more and more advanced, the precision requirements for wafer processing are becoming more and more stringent.

[0003] The grasping of wafers requires special robotic equipment. Current robots need to be raised and lowered to clamp the wafers. However, when the equipment is installed after production, the fixed angle of the robot will inevitably produce a small angle deviation, which in turn affects the precise clamping of the wafer. Utility Model Content

[0004] The utility model aims to provide a tilt adjustment device for a lifting device of a manipulator, so as to adjust the tilt angle of the lifting device used for lifting the manipulator at a small angle.

[0005] An embodiment of the utility model provides a tilt adjustment device for a lifting device of a robot arm, which is used for adjusting the tilt of the lifting device on a support plate, and the lifting device is fixed on the fixed plate; it also includes a support member fixed on the support plate and connected to the bottom of the fixed plate, which is used for providing support and height adjustment when the fixed plate rotates; at least one deflection part is fixed on the support plate, which is used for tilt adjustment and fixation of the fixed plate.

[0006] In summary, the utility model mainly has the following beneficial effects: the bottom end of the fixed plate is supported by the support member, the fixed plate is adjusted to rotate at a small angle through the action of the deflection part, and after the inclination angle of the fixed plate is adjusted, the position of the fixed plate is fixed.

[0007] Preferably, the support member includes a contact plate for contacting the bottom of the fixing plate; a lifting hole provided on the contact plate; and a first fixing bolt passing through the lifting hole and being threadedly fixed to the support plate.

[0008] Preferably, the deflection part includes a fixed block, which is fixed to the support plate by a second fixing bolt; an adjusting screw, which passes through the fixed block through threaded cooperation and can abut against the fixed plate; and a limiting screw, which passes through the fixed block with a gap and one end of which is inserted into one side of the fixed plate through threaded cooperation.

[0009] Preferably, the bottom of the fixing plate is provided with a limiting groove arranged on the outside of the abutment plate.

[0010] Preferably, the top of the contact plate is an arc-shaped structure, the top of the limiting groove is an arc-shaped structure that matches the top of the contact plate, and the size of the contact plate is smaller than the size of the limiting groove body, and there is a gap between the two sides of the contact plate and the two inner walls of the limiting groove, so that the top of the contact plate can rotate at the top of the limiting groove.

[0011] Preferably, the lifting hole is strip-shaped, and a lifting slot is provided on one side of the lifting hole on one side of the abutment plate, and a diameter of the first screw head on the first fixing bolt is wider than a width of the lifting hole and smaller than a width of the lifting slot.

[0012] Preferably, the second fixing bolts are provided in plurality and respectively penetrate through both ends of the fixing block and are threadedly fixed to the support plate. The fixing block is provided with countersunk holes matched with the second fixing bolts.

[0013] Preferably, the fixing block is provided with a screw column hole and a screw head hole which are arranged on the outside of the limit screw.

[0014] Preferably, the screw column diameter of the limit screw is smaller than the width of the screw column hole, and the second screw head diameter of the limit screw is larger than the width of the screw column hole and smaller than the width of the screw head hole. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a schematic diagram of the structure of the lifting equipment of the utility model;

[0016] Figure 2 This is a schematic diagram of the structure of the contact plate of the utility model;

[0017] Figure 3 This is a schematic diagram of the three-dimensional structure of the fixing block of the utility model;

[0018] Reference numerals:

[0019] 1. Lifting device; 2. Support plate; 3. Fixing plate; 4. Support member; 41. Resistance plate; 42. Lifting hole; 43. First fixing bolt; 44. Limiting groove; 45. Lifting groove; 5. Deflection part; 51. Fixing block; 52. Adjusting screw; 53. Limiting screw; 531. Second screw head; 532. Screw column; 54. Second fixing bolt; 55. Screw column hole; 56. Screw head hole. DETAILED DESCRIPTION

[0020] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model. Unless otherwise defined, the technical terms or scientific terms used herein should be understood by people with general skills in the field to which the utility model belongs. "Including" and similar words used in this article mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

[0021] Please combine Figure 1 , a tilt adjustment device for a lifting device of a manipulator, used for adjusting the inclination of a lifting device 1 on a support plate 2, wherein the lifting device 1 is fixedly arranged on a fixed plate 3; it also includes a support member 4, which is fixed on the support plate 2 and abuts against the bottom of the fixed plate 3, and is used for providing support and height adjustment when the fixed plate 3 rotates; at least one deflection part 5, which is fixedly arranged on the support plate 2, and is used for tilt adjustment and fixation of the fixed plate 3.

[0022] Specifically, the bottom end of the fixed plate 3 is supported by the support member 4, and the fixed plate 3 is adjusted to rotate at a small angle by the deflection portion 5. After the inclined position of the fixed plate 3 is adjusted, the position of the fixed plate 3 is fixed.

[0023] Please combine Figure 1 and Figure 2 The support member 4 includes a contact plate 41 for contacting the bottom of the fixing plate 3; a lifting hole 42 provided on the contact plate 41; and a first fixing bolt 43 passing through the lifting hole 42 and being threadedly fixed to the support plate 2.

[0024] Please combine Figure 1 and Figure 3 The deflection part 5 includes a fixing block 51, which is fixed to the support plate 2 by a second fixing bolt 54; an adjusting screw 52, ​​which penetrates the fixing block 51 through threaded fitting and can abut against the fixing plate 3; a limiting screw 53, which penetrates the fixing block 51 with a gap, and one end of which is inserted into one side of the fixing plate 3 through threaded fitting.

[0025] Specifically, when the adjusting screw 52 rotates, it slides relative to the fixing block 51, thereby limiting the movement of the fixing plate 3, so that the fixing plate 3 is slightly tilted. Figure 1 and Figure 3When the fixing plate 3 is rotated clockwise, the fixing plate 3 is limited. Since the limiting screw 53 penetrates the fixing block 51 with a gap, the limiting screw 53 is driven to rotate slightly on the vertical plane in the gap when the fixing plate 3 is rotated. When the fixing plate 3 is rotated and tilted to a desired angle and the fixing plate 3 is limited in the clockwise direction by the adjusting screw 52, ​​the limiting screw 53 is rotated and rotated and moves toward the fixing plate 3 until it is pressed and fixed with the fixing block 51, and then the fixing plate 3 is limited during the tilt adjustment by the adjusting screw 52. The fixing block 51 is further fixed by rotating the limiting screw 53. When the fixing plate 3 rotates away from the fixing block 51 beyond a preset angle, the adjusting screw 52 is loosened so that the adjusting screw 52 does not contact the fixing plate 3. The fixing plate 3 is pulled by rotating the limiting screw 53 to rotate the fixing plate 3 to a predetermined position. Then, the adjusting screw 52 is rotated again to abut against the fixing plate 3 to fix the fixing block 51.

[0026] In addition, when the fixing plate 3 is tilted and rotated, the top of the fixing plate 3 is slightly lifted and lowered with the contact plate 41 as the fulcrum of rotation. Since the limit screw 53 and the fixing plate 3 are threadedly fixed, in order to keep the threaded hole on the fixing plate 3 that matches the limit screw 53 and the limit screw 53 always corresponding, it is necessary that the top of the fixing plate 3 does not rise or fall too much. According to common sense, when the fixing plate 3 rotates, if the top does not need to rise or fall, the lower end of the fixing plate 3 needs to be slightly lifted and lowered.

[0027] For example, when the lower end of the fixing plate 3 rises, the first fixing bolt 43 is loosened to make the abutting plate 41 move upward and continue to abut against the fixing plate 3, and then the first fixing bolt 43 is tightened to achieve squeezing support for the bottom end of the fixing plate 3;

[0028] For another example, when the lower end of the fixing plate 3 descends, the first fixing bolt 43 is loosened to allow the abutting plate 41 to move downward and continue to abut against the fixing plate 3 , and then the first fixing bolt 43 is tightened to achieve squeezing support for the bottom end of the fixing plate 3 .

[0029] Please combine Figure 1 and Figure 2 The bottom of the fixing plate 3 is provided with a limiting groove 44 arranged on the outside of the contact plate 41; the top of the contact plate 41 is an arc-shaped structure, and the top of the limiting groove 44 is an arc-shaped structure matched with the top of the contact plate 41, and the size of the contact plate 41 is smaller than the size of the limiting groove 44, and there is a gap between the two sides of the contact plate 41 and the two inner walls of the limiting groove 44, so that the top of the contact plate 41 can rotate at the top of the limiting groove 44.

[0030] Specifically, the limiting groove 44 at the bottom of the fixed plate 3 is on the outside of the contact plate 41, and plays a certain degree of limiting role. When the fixed plate 3 is tilted and rotated, the top of the limiting groove 44 is an arc-shaped structure that matches the top of the contact plate 41. Since the size of the contact plate 41 is smaller than the size of the limiting groove 44, there is a gap between the two sides of the contact plate 41 and the two inner walls of the limiting groove 44, so that the bottom end of the fixed plate 3 can rotate smoothly.

[0031] Please combine Figure 1 and Figure 2 The lifting hole 42 is strip-shaped, and a lifting slot 45 is provided on one side of the lifting hole 42 on one side of the contact plate 41. The diameter of the first screw head on the first fixing bolt 43 is wider than the width of the lifting hole 42 and smaller than the width of the lifting slot 45.

[0032] Specifically, when the lifting hole 42 slides outside the first fixing bolt 43, the first screw head can be slidably placed in the lifting groove 45, and the first screw head is hidden by the lifting groove 45 to prevent the first screw head from being exposed. The first fixing bolt 43 and the inner wall of the lifting groove 45 are rotated to squeeze and then squeeze the contact plate 41 to fix it.

[0033] Please combine Figure 1 and Figure 3 The second fixing bolts 54 are provided in plurality and respectively penetrate through both ends of the fixing block 51 and are threadedly fixed to the support plate 2 . The fixing block 51 is provided with countersunk holes that cooperate with the second fixing bolts 54 .

[0034] Specifically, the fixing block 51 is stably fixed on the support plate 2 by a plurality of second fixing bolts 54 , and the countersunk holes can prevent the second fixing bolts 54 from protruding, thereby ensuring the flatness of the installation plane.

[0035] Please combine Figure 3 The fixing block 51 is provided with a screw column hole 55 and a screw head hole 56 arranged on the outside of the limit screw 53. The diameter of the screw column 532 of the limit screw 53 is smaller than the width of the screw column hole 55. The diameter of the second screw head 531 of the limit screw 53 is larger than the width of the screw column hole 55 and smaller than the width of the screw head hole 56.

[0036] When the fixing plate 3 is tilted, the fixing plate 3 is rotated to move in a certain direction, and the fixing plate 3 is rotated to move in a certain direction.

[0037] Although the embodiments of the present invention are described in detail above, it is obvious to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations are within the scope and spirit of the present invention as described in the claims. Moreover, the present invention described herein may have other embodiments and may be implemented or realized in a variety of ways.

Claims

1. A tilt adjustment device for a lifting device of a robot, characterized in that: Used for adjusting the inclination of a lifting device (1) on a support plate (2), wherein the lifting device (1) is fixed on a fixing plate (3); and further comprising A support member (4) is fixed on the support plate (2) and abuts against the bottom of the fixed plate (3), and is used to provide support and height adjustment when the fixed plate (3) rotates; At least one deflection portion (5) is fixedly arranged on the support plate (2) and is used for adjusting the inclination and fixing the fixed plate (3).

2. The tilt adjustment device for a manipulator lifting device according to claim 1, characterized in that: The support member (4) comprises A contact plate (41) for contacting the bottom of the fixing plate (3); A lifting hole (42) is provided on the contact plate (41); The first fixing bolt (43) passes through the lifting hole (42) and is threadedly fixed to the support plate (2).

3. The tilt adjustment device for a manipulator lifting device according to claim 2, characterized in that: The deflection unit (5) comprises A fixing block (51) fixed to the support plate (2) via a second fixing bolt (54); The adjusting screw (52) penetrates the fixing block (51) through threaded engagement and can abut against the fixing plate (3); The limiting screw (53) passes through the fixing block (51) with a gap, and one end of the limiting screw (53) is inserted into one side of the fixing plate (3) through threaded engagement.

4. The tilt adjustment device for a manipulator lifting device according to claim 2, characterized in that: The bottom of the fixing plate (3) is provided with a limiting groove (44) arranged outside the abutment plate (41).

5. The tilt adjustment device for a manipulator lifting device according to claim 4, characterized in that: The top end of the abutment plate (41) is an arc-shaped structure, and the top end of the limiting groove (44) is an arc-shaped structure that matches the top end of the abutment plate (41).

6. The tilt adjustment device for a manipulator lifting device according to claim 5, characterized in that: The size of the abutment plate (41) is smaller than the size of the limiting groove (44), and there is a gap between the two sides of the abutment plate (41) and the two inner walls of the limiting groove (44), so that the top end of the abutment plate (41) can rotate at the top end of the limiting groove (44).

7. The tilt adjustment device for a manipulator lifting device according to claim 2, characterized in that: The lifting hole (42) is strip-shaped, and a lifting groove (45) arranged on one side of the lifting hole (42) is provided on one side of the contact plate (41), and the diameter of the first screw head on the first fixing bolt (43) is wider than the width of the lifting hole (42) and smaller than the width of the lifting groove (45).

8. The tilt adjustment device for a manipulator lifting device according to claim 3, characterized in that: The second fixing bolts (54) are provided in plurality and respectively penetrate through both ends of the fixing block (51) and are threadedly fixed to the support plate (2); the fixing block (51) is provided with countersunk holes that match the second fixing bolts (54).

9. The tilt adjustment device for a manipulator lifting device according to claim 3, characterized in that: The fixing block (51) is provided with a screw column hole (55) and a screw head hole (56) which are arranged outside the limiting screw (53).

10. The tilt adjustment device for a manipulator lifting device according to claim 9, characterized in that: The diameter of the screw column (532) of the limiting screw (53) is smaller than the width of the screw column hole (55), and the diameter of the second screw head (531) of the limiting screw (53) is larger than the width of the screw column hole (55) and smaller than the width of the screw head hole (56).

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