Loading material support

By designing an adjustable material-torque structure, including a rotating baffle and removable side support block, the problem that existing material-torque is difficult to adapt to silicon wafers of different sizes is solved, and the stable placement and efficient processing of silicon wafers are achieved.

CN222555716UActive Publication Date: 2025-03-04WUXI RONG NENG SEMICON MATERIALS CO LTD
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Patent Information

Application Number
CN202421415398.0
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-06-20
Publication Date
2025-03-04
Estimated Expiration
2034-06-20

AI Technical Summary

Technical Problem

It is difficult to adjust existing materials for silicon wafers of different sizes, resulting in inadequate inclination during handling, affecting the stability and processing efficiency of silicon wafers.

Method used

A loading drag is designed, including a base plate, side plate and baffle. The side plate is equipped with adjustment holes and adjustment screws. The baffle can rotate and adjust the inclination angle, and a removable side support block is used to adapt to silicon wafers of different sizes.

Benefits of technology

By adjusting the position of the baffle and side support blocks, the placement angle of the silicon wafer can be flexibly adjusted, adapting to different usage scenarios, and improving the stability and processing efficiency of the silicon wafer.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to a charging support which comprises a bottom plate, a side plate and a baffle, and the bottom plate is horizontally arranged; the two side plates are arranged on two opposite sides of the bottom plate in parallel, and at least two adjusting holes are formed in each side plate; the baffle plate is arranged above the bottom plate between the two side plates, the lower part of the baffle plate is rotatably connected with the side plates or the bottom plate, the baffle plate is also provided with an adjusting screw, and the adjusting screw penetrates through the adjusting hole. According to the utility model, placed silicon wafers are supported by the bottom plate, the two side plates and the baffle plate. The baffles are rotationally connected with the side plates or the bottom plate and connected with the side plates through adjusting screws. When the silicon wafer size changes and the silicon wafer placement angle needs to be changed, the adjusting screws penetrate through different adjusting holes and then are connected with the baffle plate, so that the inclination angle of the baffle plate and the inclination angle of the silicon wafer supported by the baffle plate are changed to adapt to different use scenes.
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Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer processing, in particular to a loading material drag. Background Art

[0002] As the main base material for transistors and other devices, silicon wafers are widely used in microelectronics, semiconductors, photovoltaics and other industries. Silicon wafers are generally divided into single-crystal silicon wafers and multi-crystal silicon wafers. Their processing technology mainly includes squaring, slicing, chamfering, grinding, etching, cleaning, etc. Therefore, the silicon wafer processing process usually includes multiple steps.

[0003] Silicon wafers are transported using a material trolley. Vertically stacked silicon wafers are stacked in the material trolley, and the silicon wafers are transported by moving the material trolley. When the material trolley arrives at the loading tank of the device that performs the next process, the material trolley and the silicon wafers are directly placed in the loading tank, and then the wafer separation device in the loading tank loads the wafers one by one. However, when transporting silicon wafers of different sizes, the requirements for the inclination of silicon wafers of different sizes during transportation are different. Different wafer separation devices also have different requirements for the inclination of silicon wafer placement. The common material trolley structure is simple in principle, and it is difficult to make targeted adjustments when facing different situations. Utility Model Content

[0004] In view of the above-mentioned shortcomings of the prior art, the purpose of the present invention is to provide a loading and unloading trolley, which can specifically adjust the placement of silicon wafers in accordance with different usage scenarios.

[0005] The technical solution of the utility model is as follows:

[0006] A loading material drag comprises a bottom plate, a side plate and a baffle, wherein the bottom plate is arranged horizontally; two side plates are arranged in parallel on two opposite sides of the bottom plate, and at least two adjustment holes are opened on the side plates; the baffle is arranged above the bottom plate between the two side plates, and the lower part of the baffle is rotatably connected to the side plate or the bottom plate, and the baffle is also provided with an adjustment screw, which passes through the adjustment hole.

[0007] The beneficial technical effects of the utility model are as follows:

[0008] (1) The loading trolley in the utility model supports the placed silicon wafers through a bottom plate, two side plates and a baffle plate. One side surface and the top surface of the silicon wafer are not blocked, so it is convenient to put the silicon wafer into and take it out of the trolley. The baffle plate of the baffle plate is rotatably connected to the side plate or the bottom plate, and is connected to the side plate by an adjustment screw. When the silicon wafer size changes and the placement angle of the silicon wafer needs to be changed, the adjustment screw is passed through different adjustment holes and connected to the baffle plate, thereby changing the inclination angle of the baffle plate and the inclination angle of the silicon wafer supported by the baffle plate to adapt to different usage scenarios.

[0009] (2) Furthermore, a detachable side support block is provided on the side plate, and the side support block is used to support the side of the silicon wafer. The side support block is detachably provided, and side support blocks of different sizes can be easily replaced to cope with changes in the size of the silicon wafer.

[0010] (3) Furthermore, a groove is provided on the lower surface of the bottom plate, and the upper surface of the side support block is higher than the side plate. When multiple material drags are stacked, the side support blocks of the lower material drag can be inserted into the groove of the upper material drag, which is convenient for stacking and transportation. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 The schematic diagram of the structure of the loading and unloading trolley of the utility model is shown.

[0012] Markings in the accompanying drawings:

[0013] 1. Bottom plate; 11. Conveyor belt; 12. Slider; 13. Slide groove; 14. Groove; 2. Side plate; 21. Adjustment hole; 22. Adjustment screw; 23. Through hole; 3. Side support block; 4. Baffle; 5. Hanging rod; 6. Load-bearing groove; 61. Hook; 62. Support rod. DETAILED DESCRIPTION

[0014] In order to make the purpose, features and advantages of the utility model more obvious and easy to understand, please refer to the attached drawings. It should be noted that the structures, proportions, sizes, etc. illustrated in the attached drawings of this specification are only used to match the contents disclosed in the specification for people familiar with this technology to understand and read, and are not used to limit the limiting conditions for the implementation of the utility model, so they have no technical substantive significance. Any modification of the structure, change of the proportion relationship or adjustment of the size, without affecting the effect and purpose that can be achieved by the utility model, should still fall within the scope of the technical content disclosed by the utility model.

[0015] In the description of the present invention, the orientations or positional relationships indicated by terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "top", "bottom", "inside", "outside", "axial", "radial", and "circumferential" are based on the orientations or positional relationships shown in the accompanying drawings and are only for the convenience of describing the present invention and simplifying the description. They do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0016] Figure 1 The schematic diagram of the structure of the loading and unloading trolley of the utility model is shown. Figure 1A loading material trolley comprises a bottom plate 1, a side plate 2 and a baffle 4, wherein the bottom plate 1 is arranged horizontally. There is no obstruction on one side and the top surface of the silicon wafer, so it is convenient to put the silicon wafer into and take it out of the trolley. The two side plates 2 are arranged in parallel on two opposite sides of the bottom plate 1, and at least two adjustment holes 21 are opened on the side plates 2. The baffle 4 is arranged above the bottom plate 1 between the two side plates 2, and the lower part of the baffle 4 is rotatably connected to the side plate 2 or the bottom plate 1. The baffle 4 is also provided with an adjustment screw 22, and the adjustment screw 22 passes through the adjustment hole 21. When the silicon wafer size changes and the silicon wafer placement angle needs to be changed, the adjustment screw 22 is passed through different adjustment holes 21 and then connected to the baffle 4, thereby changing the inclination angle of the baffle 4, and changing the inclination angle of the silicon wafer supported by the baffle 4 to adapt to different usage scenarios.

[0017] The specific structure of the side plate 2 is described below:

[0018] Please refer to Figure 1 , a parallel side support block 3 is provided on the side plate 2, and the side support block 3 is detachably connected to the side plate 2. The side support block 3 is used to support the side of the silicon wafer. When the size of the silicon wafer changes, the side support blocks 3 of different sizes can be easily replaced to adapt to the change in the size of the silicon wafer. A through hole 23 is provided on the side plate 2. The material and weight of the side plate 2 and the resistance when moving in the liquid medium are reduced.

[0019] A hanging rod 5 is also horizontally arranged between the two side panels 2, and the hanging rod 5 is arranged on the outside of the baffle 4. The hanging rod 5 hooks the hook 61 in the bearing groove 6 to limit the position of the material drag. The height of the side panel 2 is between 60mm and 100mm. Specifically, in the photovoltaic industry, the common silicon wafer size is between 100mm and 210mm, and the side panel 2 supports the side of the silicon wafer. It does not need to fully support the entire side of the silicon wafer. It only needs to support more than one-third of the height of the silicon wafer to obtain a good supporting effect. In addition, the small size of the side panel 2 can effectively reduce the volume of the material drag while reducing the material consumption, which is convenient for production and transportation.

[0020] The specific structure of the bottom plate 1 is described below:

[0021] Please refer to Figure 1 The bottom plate 1 is provided with a slider 12 on its lower surface, the slider 12 is parallel to the side plate 2, and a slide groove 13 is provided on the bottom surface of the slider 12 to fit the support rod 62, so as to stably place the material drag in the bearing groove 6. A through hole 23 is provided on the bottom plate 1. The material, weight and resistance of the bottom plate 1 when moving in the liquid medium are reduced. A conveyor belt 11 is provided on the bottom plate 1, and the conveyor belt 11 is parallel to the side plate 2. The rolling conveyor belt 11 facilitates the delivery of the supported silicon wafers from the material drag.

[0022] The outer surface of the conveyor belt 11 is a rough surface, which increases the friction between the conveyor belt 11 and the silicon wafers to stably support and transport the silicon wafers. A groove 14 is provided on the lower surface of the bottom plate 1, and the upper surface of the side support block 3 is higher than the side plate 2. When multiple material drags are stacked, the side support block 3 of the lower material drag can be inserted into the groove 14 of the upper material drag, which is convenient for stacking and transporting the material drags.

[0023] The specific working process of the utility model is as follows:

[0024] When transporting silicon wafers, the operator removes the adjustment screw 22, rotates the baffle 4 relative to the bottom plate 1, and adjusts the baffle 4 to a suitable tilt angle. Replace the side support blocks 3 of different sizes so that the width between the two side support blocks 3 matches the width of the silicon wafer to be transported. Place the stacked silicon wafers vertically on the conveyor belt 11 with the side support blocks 3 on both sides and one side against the baffle 4. Drag the moving material into the bearing slot 6, so that the support rod 62 is stuck in the slide slot 13, and the hanging rod 5 is hung in the hook 61 to complete the transportation of the silicon wafer.

[0025] It can be seen that when the above-mentioned loading and unloading drag faces the situation where the silicon wafer size changes and the silicon wafer placement angle needs to be changed, the adjusting screw 22 is passed through different adjustment holes 21 and then connected to the baffle 4, thereby changing the inclination angle of the baffle 4 and the inclination angle of the silicon wafer supported by the baffle 4 to adapt to different usage scenarios.

[0026] The technical features of the above embodiments may be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0027] The above-mentioned embodiments only express several implementation methods of the utility model, and the description is relatively specific and detailed, but it cannot be understood as limiting the scope of the utility model patent. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the utility model, which all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent shall be based on the attached claims.

Claims

1. A loading trolley, characterized in that: Including bottom plate, side plate and baffle, The bottom plate is arranged horizontally; The two side panels are arranged in parallel on two opposite sides of the bottom panel, and at least two adjustment holes are opened on the side panels; The baffle is arranged above the bottom plate between the two side plates, the lower part of the baffle is rotatably connected to the side plate or the bottom plate, and an adjusting screw is also arranged on the baffle, and the adjusting screw passes through the adjusting hole.

2. The loading trolley according to claim 1, characterized in that: The side plates are provided with parallel side support blocks.

3. The loading trolley as claimed in claim 2, characterized in that: The side support blocks are detachably connected to the side panels.

4. The loading trolley as claimed in claim 2, characterized in that: A groove is formed on the lower surface of the bottom plate, and an upper surface of the side support block is higher than the side plate.

5. The loading trolley according to claim 1, characterized in that: A sliding block is disposed on the lower surface of the bottom plate, and the sliding block is parallel to the side plate.

6. The loading trolley according to claim 1, characterized in that: The bottom plate and the side plate are provided with through holes.

7. The loading trolley according to claim 1, characterized in that: A conveyor belt is arranged on the bottom plate, and the conveyor belt is parallel to the side plate.

8. The loading trolley according to claim 7, characterized in that: The outer surface of the conveyor belt is a rough surface.

9. The loading trolley according to claim 1, characterized in that: A hanging rod is also horizontally arranged between the two side plates, and the hanging rod is arranged on the outer side of the baffle.

10. The loading trolley according to claim 1, characterized in that: The height of the side plate is between 60 mm and 100 mm.