Transportation device and processing equipment

Abstract

The utility model provides a transportation device and processing equipment, relates to the field of semiconductor or photovoltaic material processing, and solves the technical problem of low process quality of sheet materials caused by deformation of a support plate. The conveying device comprises a carrier plate assembly, at least two transmission wheel assemblies, at least one driving source and an extrusion assembly. Due to the fact that the extrusion assembly can exert downward pressure on the carrier plate assembly, the deformation quantity of the carrier plate assembly is changed, the production and processing standard of the sheet-shaped materials can be formulated according to the fixed preset deformation quantity, the situation that the process quality of the sheet-shaped materials is reduced due to deformation of the carrier plate assembly is avoided, and the process quality is improved; moreover, under the condition that the deformation quantities of the plurality of carrier plate assemblies are the same, due to the fact that the deformation degrees of the plurality of carrier plate assemblies are the same, the situation that the processing quality of the flaky materials on the plurality of carrier plate assemblies is different due to the different deformation degrees of the plurality of carrier plate assemblies is avoided, and the process stability is improved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor or photovoltaic material processing, and in particular to a transportation device and processing equipment. Background Art

[0002] When transporting sheet materials such as semiconductor materials or photovoltaic materials, a carrier is usually placed on two sets of symmetrically arranged transmission wheels. The carrier carries the sheet materials and moves under the drive of the transmission wheels. However, since the two sets of transmission wheels usually carry both ends of the carrier, the carrier will deform due to its own gravity and high temperature environment conditions, causing the height of the sheet material to change. This will affect the processing effect of the sheet material when processing the sheet material, and the process quality and process stability are low. Utility Model Content

[0003] In order to solve the above technical problems, the present application is proposed. The embodiment of the present application provides a transport device and a processing device.

[0004] In the first aspect, an embodiment of the present application provides a transport device, which is applied to a reactor, wherein the reactor has a process chamber, and the transport device is configured to transport sheet materials, and the transport device includes: a carrier assembly, which is configured to carry sheet materials; at least two groups of transmission wheel assemblies, which are located below the carrier assembly, each group of transmission wheel assemblies includes multiple transmission wheels, and the multiple transmission wheels in each group of transmission wheel assemblies are arranged along a first direction, and at least two groups of transmission wheel assemblies are configured to carry two sides of the carrier assembly, respectively, and drive the carrier assembly to move along the first direction; at least one driving source is configured to drive the transmission wheel assembly to rotate; an extrusion assembly, which is arranged above the carrier assembly and abuts against the carrier assembly, and is configured to apply downward pressure to the carrier assembly.

[0005] In some embodiments, the extrusion assembly has a groove extending along a first direction, and the carrier assembly includes: a carrier, which is arranged above the transmission wheel assembly, configured to carry the sheet material, and moves along the first direction driven by the transmission wheel assembly; a guide assembly, which is connected to the upper surface of the carrier and extends into the groove so that the guide assembly can slide along the groove, and the extrusion assembly is configured to apply downward pressure on the guide assembly.

[0006] In some embodiments, the cross-section of the groove includes an arc shape, wherein the guide assembly includes: a guide column, at least part of the side surface of the guide column is located in the groove; and a connecting member connecting the guide column and the carrier plate.

[0007] In some embodiments, there is line contact between the guide post and the sidewall of the groove.

[0008] In some embodiments, the extrusion assembly includes: a support member disposed above the carrier assembly and relatively movable in a direction away from or close to the carrier assembly in the process chamber; and a roller rotatably connected to the support member.

[0009] In some embodiments, the transport device further includes: an adjustment component connected to the support member and configured to adjust the height position of the support member.

[0010] In some embodiments, the support member has a through hole, and the adjustment assembly includes: a mounting plate, which is arranged above the support member; a connecting rod, which is connected to the mounting plate and passes through the through hole of the support member; a locking member, which is connected to the connecting rod and arranged below the support member; an elastic member, which is sleeved on the connecting rod and arranged between the support member and the mounting plate, and is configured to provide a downward compression force to the support member to adjust the deformation of the carrier assembly to a preset deformation.

[0011] In some embodiments, at least two sets of transmission wheel assemblies are symmetrically arranged relative to the carrier assembly, the extrusion assembly extends along the first direction, and the vertical distances between the extrusion assembly and the transmission wheel assemblies located on both sides of the carrier assembly are equal.

[0012] In some embodiments, the preset deformation amount ranges from 3 mm to 6 mm.

[0013] In a second aspect, an embodiment of the present application provides a processing device, comprising: a reaction furnace having a process chamber, configured to process sheet materials; any transportation device of the above-mentioned first aspect, configured to: transport sheet materials to the process chamber; and / or, transport sheet materials out of the process chamber; and / or, transport sheet materials within the process chamber.

[0014] The transport device and processing equipment proposed in the embodiments of the present application, since the extrusion component can apply downward pressure to the carrier assembly, thereby changing the deformation of the carrier assembly, can formulate production and processing standards for sheet materials based on a fixed preset deformation amount, so that the carrier assembly will not cause the process quality of the sheet material to be reduced due to deformation, thereby improving the process quality; and, when the deformation amounts of multiple carrier assemblies are the same, the deformation degrees of the multiple carrier assemblies are the same, and the processing qualities of the sheet materials on the multiple carrier assemblies will not be different due to the different deformation degrees of the multiple carrier assemblies, thereby improving the process stability. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] By describing the embodiments of the present application in more detail in conjunction with the accompanying drawings, the above and other purposes, features and advantages of the present application will become more apparent. The accompanying drawings are used to provide a further understanding of the embodiments of the present application and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the present application and do not constitute a limitation of the present application. In the accompanying drawings, the same reference numerals generally represent the same components or steps.

[0016] Figure 1 Shown is a front view of a transport device provided by an exemplary embodiment of the present application.

[0017] Figure 2 Shown is a front view of a transport device provided by another exemplary embodiment of the present application.

[0018] Figure 3 An exemplary embodiment of the present application is shown. Figure 2 A partial enlarged view of area A in the middle.

[0019] Figure 4 Shown is a schematic structural diagram of a processing device provided by an exemplary embodiment of the present application.

[0020] Reference numerals:

[0021] 100, transport device; 110, carrier assembly; 111, carrier; 112, guide assembly; 1121, guide column; 1122, connector; 120, transmission wheel assembly; 130, extrusion assembly; 131, groove; 132, support member; 133, roller; 134, fixing member; 140, adjustment assembly; 141, mounting plate; 142, connecting rod; 143, locking member; 144, elastic member; 150, driving source; 200, processing equipment; 210, reactor. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0023] Application Overview

[0024] When transporting sheet materials such as semiconductor materials or photovoltaic materials (such as battery cells, silicon wafers, glass substrates, etc.), the carrier is usually placed on two sets of symmetrically arranged transmission wheels, and the carrier carries the sheet materials and moves under the drive of the transmission wheels. However, since the two sets of transmission wheels usually carry both ends of the carrier, the carrier will deform due to its own gravity and in high temperature conditions, causing the height of the sheet materials to change. This will affect the processing effect of the sheet materials when processing the sheet materials, and the process quality is low. In addition, if the sizes, materials, and loads of multiple carriers are different, the deformation degrees of the multiple carriers are different, which will cause different processing effects of the sheet materials on the multiple carriers, and the process stability is low.

[0025] In view of this, the present application proposes a transport device and a processing equipment, wherein the transport device is applied to a reactor, the reactor has a process chamber, the transport device is configured to transport sheet materials, and the transport device includes: a carrier assembly, configured to carry sheet materials; at least two groups of transmission wheel assemblies, located below the carrier assembly, each group of transmission wheel assemblies includes multiple transmission wheels, and the multiple transmission wheels in each group of transmission wheel assemblies are arranged along a first direction, at least two groups of transmission wheel assemblies are configured to carry the two sides of the carrier assembly respectively, and drive the carrier assembly to move along the first direction; at least one driving source is configured to drive the transmission wheel assembly to rotate; an extrusion assembly is arranged above the carrier assembly and abuts against the carrier assembly, and is configured to apply downward pressure to the carrier assembly.

[0026] Since the extrusion assembly can apply downward pressure to the carrier assembly, thereby changing the deformation of the carrier assembly, the production and processing standards of the sheet material can be formulated according to the fixed preset deformation, so that the process quality of the sheet material will not be reduced due to the deformation of the carrier assembly, thereby improving the process quality; and, when the deformation amounts of multiple carrier assemblies are the same, since the deformation degrees of the multiple carrier assemblies are the same, the processing qualities of the sheet materials on the multiple carrier assemblies will not be different due to the different deformation degrees of the multiple carrier assemblies, thereby improving the process stability.

[0027] Exemplary Devices

[0028] Figure 1 FIG. 1 is a front view of a transport device provided by an exemplary embodiment of the present application. Figure 2 FIG. 1 is a front view of a transport device provided by another exemplary embodiment of the present application. The present application provides a transport device 100, which is applied to a reaction furnace. The reaction furnace has a process chamber. The transport device 100 is configured to transport sheet materials, such as Figure 1 and Figure 2As shown, the transport device 100 includes: a carrier assembly 110, which is configured to carry sheet materials; at least two groups of transmission wheel assemblies 120, which are located below the carrier assembly 110, each group of transmission wheel assemblies 120 includes a plurality of transmission wheels, and the plurality of transmission wheels in each group of transmission wheel assemblies 120 are arranged along a first direction, and at least two groups of transmission wheel assemblies 120 are configured to respectively carry the two sides of the carrier assembly 110 and drive the carrier assembly 110 to move along the first direction; at least one driving source 150, which is configured to drive the transmission wheel assembly 120 to rotate; an extrusion assembly 130, which is arranged above the carrier assembly 110 and abuts against the carrier assembly 110, and is configured to apply downward pressure to the carrier assembly 110.

[0029] Specifically, the sheet material is exemplarily a battery sheet, a silicon wafer, a glass substrate, etc. The driving source 150 can be exemplarily a cylinder or a motor, and the transmission wheel assembly 120 can also include a transmission shaft, and the transmission wheel is sleeved on the transmission shaft. The driving source 150 can drive the transmission shaft to rotate, thereby driving the transmission wheel to rotate. The pressing assembly 130 can preferably abut the central area of ​​the carrier assembly 110, so that the carrier assembly 110 can be transported more smoothly.

[0030] Since the extrusion assembly 130 can apply downward pressure to the carrier assembly 110, thereby changing the deformation of the carrier assembly 110, the production and processing standards of the sheet material can be formulated according to the fixed preset deformation, so that the carrier assembly 110 will not cause the process quality of the sheet material to be reduced due to the deformation, thereby improving the process quality; and, when the deformation amounts of multiple carrier assemblies 110 are the same, since the deformation degrees of the multiple carrier assemblies 110 are the same, the processing qualities of the sheet materials on the multiple carrier assemblies 110 will not be different due to the different deformation degrees of the multiple carrier assemblies 110, thereby improving the process stability.

[0031] In some embodiments, Figure 1 As shown, at least two groups of transmission wheel assemblies 120 are symmetrically arranged relative to the carrier assembly 110, the extrusion assembly 130 extends along the first direction, and the vertical distances between the extrusion assembly 130 and the transmission wheel assemblies 120 located on both sides of the carrier assembly 110 are equal. Through this structure, at least two groups of transmission wheel assemblies 120 can stably support the carrier assembly 110, and because the vertical distances between the extrusion assembly 130 and the transmission wheel assemblies 120 located on both sides of the carrier assembly 110 are equal, the carrier assembly 110 can be prevented from being deflected due to the extrusion force, thereby improving the movement stability of the carrier assembly 110.

[0032] Figure 3 An exemplary embodiment of the present application is shown. Figure 2 A partial enlarged view of area A in the middle.

[0033] In some embodiments, Figure 1 and Figure 3 As shown, the extrusion assembly 130 has a groove 131 extending along the first direction, and the carrier assembly 110 includes: a carrier 111, which is arranged above the transmission wheel assembly 120 and is configured to carry the sheet material and move along the first direction driven by the transmission wheel assembly 120; a guide assembly 112, which is connected to the upper surface of the carrier 111 and extends into the groove 131 so that the guide assembly 112 can slide along the groove 131, and the extrusion assembly 130 is configured to apply downward pressure to the guide assembly 112.

[0034] Specifically, the carrier 111 is exemplarily a flat plate structure, and the horizontal cross-section of the carrier 111 is exemplarily a rectangle, a circle, a polygon, etc. The guide assembly 112 is preferably arranged in the central area of ​​the carrier assembly 110, and the horizontal extension direction of the groove 131 is the first direction. By sliding the guide assembly 112 along the groove 131, the carrier 111 can be moved precisely along the first direction.

[0035] In some embodiments, the width of the carrier board 111 ranges from 0.5 meters to 3.5 meters, where the width refers to the length of the side in the horizontal direction perpendicular to the first direction.

[0036] In some embodiments, the material of the carrier plate 111 is stainless steel, titanium alloy, aluminum alloy or other elastic materials. The carrier plate 111 made of such material can be deformed under the extrusion of the extrusion assembly 130 and is not easy to break.

[0037] In some embodiments, Figure 3 As shown, the cross section of the groove 131 includes an arc shape, wherein the guide assembly 112 includes: a guide column 1121, at least part of the side surface of the guide column 1121 is located in the groove 131; and a connecting member 1122, connecting the guide column 1121 and the carrier 111. The guide assembly 112 may include at least one connecting member 1122, and the connecting member 1122 may be a plate-like structure arranged vertically, or may be a rod-like structure, for supporting the guide column 1121. By providing the groove 131 having an arc shape in the cross section, accurate guidance of the guide column 1121 can be achieved, and when the carrier assembly 110 is placed below the extrusion assembly 130, the guide column 1121 can be easily extended into the groove 131.

[0038] In some embodiments, the cross-section of the guide post 1121 is circular or rectangular.

[0039] In some embodiments, there is line contact between the guide post 1121 and the side wall of the groove 131. By making the guide post 1121 and the groove 131 in line contact, the friction between the guide post 1121 and the side wall of the groove 131 can be reduced.

[0040] In some embodiments, Figure 1 and Figure 3 As shown, the extrusion assembly 130 includes: a support member 132, which is disposed above the carrier assembly 110 and can be relatively moved in the process chamber in a direction away from or close to the carrier assembly 110; and a roller 133, which is rotatably connected to the support member 132. By making the roller 133 rotatably connected to the support member 132, when the carrier assembly 110 moves, the friction between the roller 133 and the carrier assembly 110 is a rolling friction force, which prevents the friction between the extrusion assembly 130 and the carrier assembly 110 from being too large, making it difficult for the carrier assembly 110 to move in the first direction.

[0041] In some embodiments, the support member 132 includes a mounting shaft; wherein the roller 133 is mounted on the mounting shaft so that the roller 133 is rotatably connected relative to the mounting shaft, so that the friction force between the roller 133 and the carrier assembly 110 is a rolling friction force, so as to reduce the friction resistance when the carrier assembly 110 moves.

[0042] In some embodiments, Figure 3 As shown, the transport device 100 further includes: an adjustment component 140, which is connected to the support member 132 and is configured to adjust the height position of the support member 132. By setting the adjustment component 140 to adjust the height position of the support member 132, the height position of the roller 133 can be adjusted, that is, the squeezing force of the squeezing component 130 on the carrier assembly 110 is adjusted, thereby adjusting the deformation of the carrier assembly 110, so that the deformation of the carrier assembly 110 reaches a preset deformation.

[0043] In some embodiments, Figure 3 As shown, the support member 132 has a through hole, and the adjustment assembly 140 includes: a mounting plate 141, which is arranged above the support member 132; a connecting rod 142, which is connected to the mounting plate 141 and passes through the through hole of the support member 132; a locking member 143, which is connected to the connecting rod 142 and is arranged below the support member 132; an elastic member 144, which is sleeved on the connecting rod 142 and is arranged between the support member 132 and the mounting plate 141, and is configured to provide a downward compression force to the support member 132 to adjust the deformation of the carrier assembly 110 to a preset deformation.

[0044] The preset deformation amount can be obtained by simulation based on the actual size and material of the carrier assembly 110. Specifically, the connecting rod 142 is exemplarily a screw, the locking member 143 is exemplarily a nut, the nut can be screwed with the screw, and the elastic member 144 is exemplarily a spring. Through this structure, by adjusting the position of the locking member 143 on the connecting rod 142, the height position of the support member 132 can be adjusted, and the support member 132 can be squeezed by the compression force of the elastic member 144, so that the support member 132 can be prevented from shaking up and down, thereby improving stability.

[0045] In some embodiments, the preset deformation value ranges from 3 mm to 6 mm. The deformation of the carrier assembly 110 is between 3 mm and 6 mm, and there is no need to apply excessive pressure to the extrusion assembly 130, and the deformation degree of the carrier assembly 110 is not too small, which is easy to measure and adjust the adjustment assembly 140 accordingly.

[0046] In some embodiments, Figure 1 As shown, the extrusion assembly 130 further includes: a fixing member 134, the support member 132 is connected to the fixing member 134, and the fixing member 134 may exemplarily include a bracket, a mounting plate, a bearing seat, etc. The fixing member 134 is arranged on the inner wall of the process chamber of the reaction furnace 210. When the adjustment assembly 140 adjusts the height position of the supporting member 132, the fixing member 134 is fixed on the inner wall of the process chamber of the reaction furnace 210, and the supporting member 132 can move up and down relative to the fixing member 134; or, the supporting member 132 together with the fixing member 134 moves up and down in the process chamber of the reaction furnace 210.

[0047] In a second aspect, an embodiment of the present application provides a processing device 200, Figure 4 FIG. 1 is a schematic diagram of a processing device provided by an exemplary embodiment of the present application. Figure 4 As shown, the processing equipment 200 includes: a reaction furnace 210, having a process chamber, configured to process sheet materials; a transportation device 100 of any of the above embodiments, configured to: transport sheet materials to the process chamber; and / or, transport sheet materials out of the process chamber; and / or, transport sheet materials in the process chamber.

[0048] In some embodiments, a part of the structure (ie, the driving wheel) of the driving wheel assembly 120 in the transport device 100 is located in the process chamber of the reaction furnace 210 , and the extrusion assembly 130 in the transport device 100 is located in the process chamber of the reaction furnace 210 .

[0049] In one application scenario, the parameters of each component in the process chamber (such as the height of the gas nozzle) are set based on the carrier assembly 110 whose deformation is a preset deformation variable. When the transportation device 100 transports sheet materials in the process chamber, the deformation of the carrier assembly 110 will be squeezed to the preset deformation variable by the extrusion assembly 130, so the process quality of the sheet material will not be reduced due to the deformation of the carrier assembly 110.

[0050] In one application scenario, if a variety of carrier assemblies 110 of different materials and sizes are used, the various carrier assemblies 110 can be extruded to the same preset deformation amount by pre-adjusted extrusion assemblies 130 of different heights, thereby preventing different process effects of the sheet materials on the various carrier assemblies 110 due to the different deformation amounts of the carrier assemblies 110 of different materials and sizes, thereby improving process stability.

[0051] The basic principles of the present application are described above in conjunction with specific embodiments. However, it should be noted that the advantages, strengths, effects, etc. mentioned in the present application are only examples and not limitations, and it cannot be considered that these advantages, strengths, effects, etc. are required by each embodiment of the present application. In addition, the specific details disclosed above are only for the purpose of illustration and ease of understanding, not for limitation, and the above details do not limit the present application to being implemented by adopting the above specific details.

[0052] The block diagrams of the devices, apparatuses, equipment, and systems involved in this application are only illustrative examples and are not intended to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagram. As will be appreciated by those skilled in the art, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any manner. Words such as "including", "comprising", "having", etc. are open words, referring to "including but not limited to", and can be used interchangeably with them. The words "or" and "and" used here refer to the words "and / or" and can be used interchangeably with them, unless the context clearly indicates otherwise. The words "such as" used here refer to the phrase "such as but not limited to", and can be used interchangeably with them.

[0053] It should also be noted that in the apparatus, device and method of the present application, each component or each step can be decomposed and / or recombined. Such decomposition and / or recombination should be regarded as equivalent solutions of the present application.

[0054] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of the present application. Therefore, the present application is not intended to be limited to the aspects shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

[0055] The above description has been given for the purpose of illustration and description. In addition, this description is not intended to limit the embodiments of the present application to the forms disclosed herein. Although multiple example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, changes, additions and sub-combinations thereof.

Claims

1. A transport device, characterized in that: Applied to a reaction furnace, the reaction furnace has a process chamber, the transport device is configured to transport sheet materials, and the transport device includes: a carrier assembly configured to carry the sheet material; At least two groups of transmission wheel assemblies are located below the carrier assembly, each group of the transmission wheel assemblies includes a plurality of transmission wheels, and the plurality of transmission wheels in each group of the transmission wheel assemblies are arranged along a first direction, and at least two groups of the transmission wheel assemblies are configured to respectively carry two sides of the carrier assembly and drive the carrier assembly to move along the first direction; at least one driving source, configured to drive the transmission wheel assembly to rotate; The pressing assembly is disposed above the carrier assembly and abuts against the carrier assembly, and is configured to apply downward pressure to the carrier assembly.

2. The transport device according to claim 1, characterized in that: The extrusion assembly has a groove extending along the first direction, and the carrier assembly includes: A carrier plate, disposed above the transmission wheel assembly, configured to carry the sheet material and move along the first direction driven by the transmission wheel assembly; The guide assembly is connected to the upper surface of the carrier plate and extends into the groove so that the guide assembly can slide along the groove. The pressing assembly is configured to apply downward pressure to the guide assembly.

3. The transport device according to claim 2, characterized in that: The cross section of the groove comprises an arc shape, wherein the guide assembly comprises: a guide post, at least part of the side surface of the guide post being located in the groove; A connecting piece connects the guide column and the carrier plate.

4. The transport device according to claim 3, characterized in that: The guide column is in line contact with the side wall of the groove.

5. The transport device according to claim 1 or 2, characterized in that: The extrusion assembly comprises: A support member is disposed above the carrier assembly, and the support member can be relatively moved in the process chamber in a direction away from or close to the carrier assembly; The roller is rotatably connected to the support member.

6. The transport device according to claim 5, characterized in that Also includes: The adjusting assembly is connected to the supporting member and is configured to adjust the height position of the supporting member.

7. The transport device according to claim 6, characterized in that The support member has a through hole, and the adjustment assembly includes: A mounting plate, disposed above the support member; A connecting rod connected to the mounting plate and passing through the through hole of the supporting member; A locking member connected to the connecting rod and disposed below the supporting member; The elastic member is sleeved on the connecting rod and disposed between the supporting member and the mounting plate, and is configured to provide a downward compression force to the supporting member to adjust the deformation of the carrier assembly to a preset deformation.

8. The transport device according to claim 1 or 2, characterized in that: At least two groups of the transmission wheel assemblies are symmetrically arranged relative to the carrier assembly, the extrusion assembly extends along the first direction, and the vertical distances between the extrusion assembly and the transmission wheel assemblies located on both sides of the carrier assembly are equal.

9. The transport device according to claim 7, characterized in that: The preset deformation amount has a numerical range of 3 mm to 6 mm.

10. A processing equipment, characterized in that: include: A reaction furnace having a process chamber configured to process a sheet material; The transport device according to any one of claims 1 to 9 is configured as follows: conveying the sheet material to the process chamber; and / or, conveying the sheet material out of the process chamber; and / or, The sheet material is transported within the process chamber.

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